公开(公告)号：US09341792B2

公开(公告)日：2016-05-17

申请号：US13154699

申请日：2011-06-07

申请人： Mary Nadeau ,  John Fangman ,  Duane Stackhouse ,  Craig Young ,  David Piede ,  Vipulkumar Patel

发明人： Mary Nadeau ,  John Fangman ,  Duane Stackhouse ,  Craig Young ,  David Piede ,  Vipulkumar Patel

IPC分类号： G02B6/12 ,  G02B6/42 ,  H01S5/022 ,  H01S5/0683

CPC分类号： G02B6/4256 ,  H01L2224/48111 ,  H01L2224/48227 ,  H01L2924/16152 ,  H01L2924/16195 ,  H01S5/0222 ,  H01S5/02248 ,  H01S5/02288 ,  H01S5/0683

摘要： An silicon-on-insulator (SOI)-based photonics platform is formed to including a venting structure for encapsulating the active and passive optical components formed on the SOI-based photonics platform. The venting structure is used to allow for the encapsulated components to “breathe” such that water vapor and gasses will pass through the package and not condensate on any of the encapsulated optical surfaces. The venting structure is configured to also to prevent dust, liquids and other particulate material from entering the package.

摘要翻译： 形成基于绝缘体上硅（SOI）的光子平台，以包括用于封装形成在基于SOI的光子平台上的有源和无源光学部件的排气结构。 通气结构用于允许封装的部件“呼吸”，使得水蒸气和气体将通过包装而不是任何封装的光学表面上的冷凝物。 排气结构还用于防止灰尘，液体和其它颗粒物质进入包装。

公开(公告)号：US20110317958A1

公开(公告)日：2011-12-29

申请号：US13154699

申请日：2011-06-07

申请人： Mary Nadeau ,  John Fangman ,  Duane Stackhouse ,  Craig Young ,  David Piede ,  Vipulkumar Patel

发明人： Mary Nadeau ,  John Fangman ,  Duane Stackhouse ,  Craig Young ,  David Piede ,  Vipulkumar Patel

IPC分类号： G02B6/12

CPC分类号： G02B6/4256 ,  H01L2224/48111 ,  H01L2224/48227 ,  H01L2924/16152 ,  H01L2924/16195 ,  H01S5/0222 ,  H01S5/02248 ,  H01S5/02288 ,  H01S5/0683

摘要： An silicon-on-insulator (SOI)-based photonics platform is formed to including a venting structure for encapsulating the active and passive optical components formed on the SOI-based photonics platform. The venting structure is used to allow for the encapsulated components to “breathe” such that water vapor and gasses will pass through the package and not condensate on any of the encapsulated optical surfaces. The venting structure is configured to also to prevent dust, liquids and other particulate material from entering the package.

摘要翻译： 形成基于绝缘体上硅（SOI）的光子平台，以包括用于封装形成在基于SOI的光子平台上的有源和无源光学部件的排气结构。 通气结构用于允许封装的部件“呼吸”，使得水蒸气和气体将通过包装而不是任何封装的光学表面上的冷凝物。 排气结构还用于防止灰尘，液体和其它颗粒物质进入包装。

公开(公告)号：US07327911B2

公开(公告)日：2008-02-05

申请号：US11253456

申请日：2005-10-19

申请人： David Piede ,  Kalpendu Shastri ,  Robert Keith Montgomery ,  Prakash Gothoskar ,  Vipulkumar Patel ,  Mary Nadeau

发明人： David Piede ,  Kalpendu Shastri ,  Robert Keith Montgomery ,  Prakash Gothoskar ,  Vipulkumar Patel ,  Mary Nadeau

IPC分类号： G02B6/12 ,  G02B6/10

CPC分类号： G02F1/025 ,  G02B6/3586 ,  G02B6/3588 ,  G02B6/3594 ,  G02F1/0123 ,  G02F2201/58 ,  G02F2203/21

摘要： An improvement in the reliability and lifetime of SOI-based opto-electronic systems is provided through the use of a monolithic opto-electronic feedback arrangement that monitors one or more optical signals within the opto-electronic system and provides an electrical feedback signal to adjust the operation parameters of selected optical devices. For example, input signal coupling orientation may be controlled. Alternatively, the operation of an optical modulator, switch, filter, or attenuator may be under closed-loop feedback control by virtue of the inventive monolithic feedback arrangement. The feedback arrangement may also include a calibration/look-up table, coupled to the control electronics, to provide the baseline signals used to analyze the system's performance.

摘要翻译： 通过使用单片光电反馈装置来提供基​​于SOI的光电系统的可靠性和寿命的改进，该装置监测光电系统内的一个或多个光信号，并提供电反馈信号以调整 所选光器件的运行参数。 例如，可以控制输入信号耦合取向。 或者，光学调制器，开关，滤波器或衰减器的操作可以通过本发明的单片反馈装置进行闭环反馈控制。 反馈布置还可以包括耦合到控制电子器件的校准/查找表，以提供用于分析系统性能的基线信号。

公开(公告)号：US08836100B2

公开(公告)日：2014-09-16

申请号：US12955011

申请日：2010-11-29

申请人： Mary Nadeau ,  Vipulkumar Patel ,  Prakash Gothoskar ,  John Fangman ,  John Matthew Fangman ,  Mark Webster

发明人： Mary Nadeau ,  Vipulkumar Patel ,  Prakash Gothoskar ,  John Fangman ,  John Matthew Fangman ,  Mark Webster

IPC分类号： H01L23/06 ,  G02B6/38

CPC分类号： G02B7/025 ,  G02B6/4228 ,  G02B6/4239 ,  G02B7/003 ,  H01L23/345 ,  H01L23/544 ,  H01L24/29 ,  H01L24/32 ,  H01L24/83 ,  H01L2223/54426 ,  H01L2224/26175 ,  H01L2224/2919 ,  H01L2224/32225 ,  H01L2224/83121 ,  H01L2224/83143 ,  H01L2224/83192 ,  H01L2224/83234 ,  H01L2224/83385 ,  H01L2224/83862 ,  H01L2924/14 ,  Y10T428/24479 ,  H01L2924/0665 ,  H01L2924/00014 ,  H01L2924/00

摘要： An arrangement for improving adhesive attachment of micro-components in an assembly utilizes a plurality of parallel-disposed slots formed in the top surface of the substrate used to support the micro-components. The slots are used to control the flow and “shape” of an adhesive “dot” so as to quickly and accurately attach a micro-component to the surface of a substrate. The slots are formed (preferably, etched) in the surface of the substrate in a manner that lends itself to reproducible accuracy from one substrate to another. Other slots (“channels”) may be formed in conjunction with the bonding slots so that extraneous adhesive material will flow into these channels and not spread into unwanted areas.

摘要翻译： 用于改善组件中微组件的粘合附着的装置利用形成在用于支撑微组件的衬底顶表面中的多个平行布置的槽。 这些槽用于控制粘合剂“点”的流动和“形状”，以便将微组件快速且精确地附着在基板的表面上。 在衬底的表面中形成（优选地，蚀刻）狭槽，使其自身具有从一个衬底到另一个衬底的可再现精度。 其它槽（“通道”）可以与结合槽结合形成，使得外来粘合剂材料将流入这些通道并且不会扩散到不需要的区域。

公开(公告)号：US08121450B2

公开(公告)日：2012-02-21

申请号：US12316540

申请日：2008-12-11

申请人： Mark Webster ,  Vipulkumar Patel ,  Mary Nadeau ,  Prakash Gothoskar ,  David Piede

发明人： Mark Webster ,  Vipulkumar Patel ,  Mary Nadeau ,  Prakash Gothoskar ,  David Piede

IPC分类号： G02B6/32 ,  G02B6/26 ,  G02B6/42

CPC分类号： G02B6/32 ,  G02B6/305 ,  G02B6/327

摘要： A plasma-based etching process is used to specifically shape the endface of an optical substrate supporting an optical waveguide into a contoured facet which will improve coupling efficiency between the waveguide and a free space optical signal. The ability to use standard photolithographic techniques to pattern and etch the optical endface facet allows for virtually any desired facet geometry to be formed—and replicated across the surface of a wafer for the entire group of assemblies being fabricated. A lens may be etched into the endface using a properly-defined photolithographic mask, with the focal point of the lens selected with respect to the parameters of the optical waveguide and the propagating free space signal. Alternatively, an angled facet may be formed along the endface, with the angle sufficient to re-direct reflected/scattered signals away from the optical axis.

摘要翻译： 使用基于等离子体的蚀刻工艺来将支撑光波导的光学基板的端面特别地成形为轮廓刻面，这将提高波导与自由空间光信号之间的耦合效率。 使用标准光刻技术对光学端面小平面进行图案化和刻蚀的能力允许形成任何所需的刻面几何形状，并跨越制造的整组组件在晶片的表面上复制。 可以使用适当限定的光刻掩模将透镜蚀刻到端面中，相对于光波导的参数和传播的自由空间信号选择透镜的焦点。 或者，可以沿着端面形成成角度的小面，其角度足以将反射/散射信号重新引导远离光轴。

公开(公告)号：US20110127633A1

公开(公告)日：2011-06-02

申请号：US12955011

申请日：2010-11-29

申请人： Mary Nadeau ,  Vipulkumar Patel ,  Prakash Gothoskar ,  John Fangman ,  John Matthew Fangman ,  Mark Webster

发明人： Mary Nadeau ,  Vipulkumar Patel ,  Prakash Gothoskar ,  John Fangman ,  John Matthew Fangman ,  Mark Webster

IPC分类号： H01L27/12 ,  B32B3/30 ,  H01L27/04

CPC分类号： G02B7/025 ,  G02B6/4228 ,  G02B6/4239 ,  G02B7/003 ,  H01L23/345 ,  H01L23/544 ,  H01L24/29 ,  H01L24/32 ,  H01L24/83 ,  H01L2223/54426 ,  H01L2224/26175 ,  H01L2224/2919 ,  H01L2224/32225 ,  H01L2224/83121 ,  H01L2224/83143 ,  H01L2224/83192 ,  H01L2224/83234 ,  H01L2224/83385 ,  H01L2224/83862 ,  H01L2924/14 ,  Y10T428/24479 ,  H01L2924/0665 ,  H01L2924/00014 ,  H01L2924/00

摘要： An arrangement for improving adhesive attachment of micro-components in an assembly utilizes a plurality of parallel-disposed slots formed in the top surface of the substrate used to support the micro-components. The slots are used to control the flow and “shape” of an adhesive “dot” so as to quickly and accurately attach a micro-component to the surface of a substrate. The slots are formed (preferably, etched) in the surface of the substrate in a manner that lends itself to reproducible accuracy from one substrate to another. Other slots (“channels”) may be formed in conjunction with the bonding slots so that extraneous adhesive material will flow into these channels and not spread into unwanted areas.

摘要翻译： 用于改善组件中微组件的粘合附着的装置利用形成在用于支撑微组件的衬底顶表面中的多个平行布置的槽。 这些槽用于控制粘合剂“点”的流动和“形状”，以便将微组件快速且精确地附着在基板的表面上。 在衬底的表面中形成（优选地，蚀刻）狭槽，使其自身具有从一个衬底到另一个衬底的可再现精度。 其它槽（“通道”）可以与结合槽结合形成，使得外来粘合剂材料将流入这些通道并且不会扩散到不需要的区域。

公开(公告)号：US20090162013A1

公开(公告)日：2009-06-25

申请号：US12316540

申请日：2008-12-11

申请人： Mark Webster ,  Vipulkumar Patel ,  Mary Nadeau ,  Prakash Gothoskar ,  David Piede

发明人： Mark Webster ,  Vipulkumar Patel ,  Mary Nadeau ,  Prakash Gothoskar ,  David Piede

IPC分类号： G02B6/42

CPC分类号： G02B6/32 ,  G02B6/305 ,  G02B6/327

摘要： A plasma-based etching process is used to specifically shape the endface of an optical substrate supporting an optical waveguide into a contoured facet which will improve coupling efficiency between the waveguide and a free space optical signal. The ability to use standard photolithographic techniques to pattern and etch the optical endface facet allows for virtually any desired facet geometry to be formed—and replicated across the surface of a wafer for the entire group of assemblies being fabricated. A lens may be etched into the endface using a properly-defined photolithographic mask, with the focal point of the lens selected with respect to the parameters of the optical waveguide and the propagating free space signal. Alternatively, an angled facet may be formed along the endface, with the angle sufficient to re-direct reflected/scattered signals away from the optical axis.

摘要翻译： 使用基于等离子体的蚀刻工艺来将支撑光波导的光学基板的端面特别地成形为轮廓刻面，这将提高波导与自由空间光信号之间的耦合效率。 使用标准光刻技术对光学端面小平面进行图案化和刻蚀的能力允许形成任何所需的刻面几何形状，并跨越制造的整组组件在晶片的表面上复制。 可以使用适当限定的光刻掩模将透镜蚀刻到端面中，相对于光波导的参数和传播的自由空间信号选择透镜的焦点。 或者，可以沿着端面形成成角度的小面，其角度足以将反射/散射信号重新引导远离光轴。

公开(公告)号：US20060083144A1

公开(公告)日：2006-04-20

申请号：US11253456

申请日：2005-10-19

申请人： David Piede ,  Kalpendu Shastri ,  Robert Montgomery ,  Prakash Gothoskar ,  Vipulkumar Patel ,  Mary Nadeau

发明人： David Piede ,  Kalpendu Shastri ,  Robert Montgomery ,  Prakash Gothoskar ,  Vipulkumar Patel ,  Mary Nadeau

IPC分类号： G11B7/00

CPC分类号： G02F1/025 ,  G02B6/3586 ,  G02B6/3588 ,  G02B6/3594 ,  G02F1/0123 ,  G02F2201/58 ,  G02F2203/21

摘要： An improvement in the reliability and lifetime of SOI-based opto-electronic systems is provided through the use of a monolithic opto-electronic feedback arrangement that monitors one or more optical signals within the opto-electronic system and provides an electrical feedback signal to adjust the operation parameters of selected optical devices. For example, input signal coupling orientation may be controlled. Alternatively, the operation of an optical modulator, switch, filter, or attenuator may be under closed-loop feedback control by virtue of the inventive monolithic feedback arrangement. The feedback arrangement may also include a calibration/look-up table, coupled to the control electronics, to provide the baseline signals used to analyze the system's performance.

摘要翻译： 通过使用单片光电反馈装置来提供基​​于SOI的光电系统的可靠性和寿命的改进，该装置监测光电系统内的一个或多个光信号，并提供电反馈信号以调整 所选光器件的运行参数。 例如，可以控制输入信号耦合取向。 或者，光学调制器，开关，滤波器或衰减器的操作可以通过本发明的单片反馈装置进行闭环反馈控制。 反馈布置还可以包括耦合到控制电子器件的校准/查找表，以提供用于分析系统性能的基线信号。

公开(公告)号：US07415184B2

公开(公告)日：2008-08-19

申请号：US11652348

申请日：2007-01-11

申请人： Margaret Ghiron ,  Prakash Gothoskar ,  John Fangman ,  Robert Keith Montgomery ,  Mary Nadeau

发明人： Margaret Ghiron ,  Prakash Gothoskar ,  John Fangman ,  Robert Keith Montgomery ,  Mary Nadeau

IPC分类号： G02B6/10 ,  G02B6/12 ,  G02B6/32 ,  G02B6/26 ,  G02B6/30

CPC分类号： G02B6/4231

摘要： An arrangement for providing optical coupling into and out of a relatively thin silicon waveguide formed in the SOI layer of an SOI structure includes a lensing element and a defined reference surface within the SOI structure for providing optical coupling in an efficient manner. The input to the waveguide may come from an optical fiber or an optical transmitting device (laser). A similar coupling arrangement may be used between a thin silicon waveguide and an output fiber (either single mode fiber or multimode fiber).

摘要翻译： 用于在SOI结构的SOI层中形成的相对薄的硅波导提供光耦合的装置包括在SOI结构内的透镜元件和限定的参考表面，用于以有效的方式提供光耦合。 波导的输入可以来自光纤或光发射装置（激光）。 可以在薄硅波导和输出光纤（单模光纤或多模光纤）之间使用类似的耦合布置。

公开(公告)号：US07373052B2

公开(公告)日：2008-05-13

申请号：US11799577

申请日：2007-05-02

申请人： Mary Nadeau ,  John Fangman

发明人： Mary Nadeau ,  John Fangman

IPC分类号： G02B6/26 ,  G02B6/30

CPC分类号： G02B6/423

摘要： An arrangement for providing passive alignment between an optical fiber and the “tip” of a nanotaper coupling waveguide (the nanotaper formed within the SOI layer of an SOI-based optoelectronic arrangement). The arrangement includes a separate fiber carrier support element, including a longitudinal V-groove for supporting the fiber and an alignment feature formed parallel thereto. The SOI structure is formed to include an associated alignment slot, so that as the fiber carrier is positioned over and attached to the SOI structure, the alignment feature and alignment slot will mate together and provide passive alignment of the optical fiber to the nanotaper waveguide tip.

摘要翻译： 一种用于在光纤与纳米锥耦合波导（在基于SOI的光电子装置的SOI层内形成的纳米锥）的“尖端”之间提供被动对准的装置。 该装置包括单独的纤维载体支撑元件，其包括用于支撑纤维的纵向V形槽和与其平行形成的对准特征。 SOI结构被形成为包括相关联的对准槽，使得当光纤载体定位在SOI结构上并附着到SOI结构时，对准特征和对准槽将配合在一起并且提供光纤到纳米孔波导尖端的被动对准 。