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公开(公告)号：US20060077395A1
公开(公告)日：2006-04-13
申请号：US11246394
申请日：2005-10-11
申请人： Kinpui Chan , Masahiro Akiba , Yasufumi Fukuma , Hiroyuki Otsuka , Hisashi Tsukada , Kazuhiko Yumikake
发明人： Kinpui Chan , Masahiro Akiba , Yasufumi Fukuma , Hiroyuki Otsuka , Hisashi Tsukada , Kazuhiko Yumikake
IPC分类号： G01B11/02
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02014 , G01B9/02027 , G01B9/02044 , G01B9/02069 , G01B9/02091 , G01B11/2441 , G01B2290/45 , G01B2290/65 , G01B2290/70
摘要： Provided is an optical image measuring apparatus forming a three-dimensional image based on tomographic images of an object, acquired at various depths even when the object moves during measurement. Including a half mirror (6) for dividing a light beam signal light (S) and reference light (R), a frequency shifter (8), a reference mirror (9) and a piezoelectric element (9A) used to change an optical path length of the reference light (R), CCDs (21, 22) for receiving interference light beams (L) resulting from interference light produced by superimposing the signal light (S) and the reference light (R) on each other by the half mirror (6) and outputting detection signals, an image forming portion for forming tomographic images based on the detection signals, a measurement depth calculating means (53), and an image processing portion (57). Forming a three-dimensional image or the like based on the arranged tomographic images.
摘要翻译： 提供一种光学图像测量装置，其即使在测量期间物体移动时，也可以基于在各种深度获取的物体的断层图像形成三维图像。 包括用于分割光束信号光（S）和参考光（R）的半反射镜（6），用于改变光学器件的变频器（8），参考反射镜（9）和压电元件（9A） 参考光（R）的路径长度，用于接收由将信号光（S）和参考光（R）叠加在一起而产生的干涉光所产生的干涉光（L）的CCD（21,22） 反射镜（6）并输出检测信号，基于检测信号形成断层图像的图像形成部分，测量深度计算装置（53）和图像处理部分（57）。 基于排列的断层图像形成三维图像等。
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公开(公告)号：US07492466B2
公开(公告)日：2009-02-17
申请号：US11246394
申请日：2005-10-11
申请人： Kinpui Chan , Masahiro Akiba , Yasufumi Fukuma , Hiroyuki Otsuka , Hisashi Tsukada , Kazuhiko Yumikake
发明人： Kinpui Chan , Masahiro Akiba , Yasufumi Fukuma , Hiroyuki Otsuka , Hisashi Tsukada , Kazuhiko Yumikake
IPC分类号： G01B11/02
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02014 , G01B9/02027 , G01B9/02044 , G01B9/02069 , G01B9/02091 , G01B11/2441 , G01B2290/45 , G01B2290/65 , G01B2290/70
摘要： Provided is an optical image measuring apparatus forming a three-dimensional image based on tomographic images of an object, acquired at various depths even when the object moves during measurement. Including a half mirror (6) for dividing a light beam signal light (S) and reference light (R), a frequency shifter (8), a reference mirror (9) and a piezoelectric element (9A) used to change an optical path length of the reference light (R), CCDs (21, 22) for receiving interference light beams (L) resulting from interference light produced by superimposing the signal light (S) and the reference light (R) on each other by the half mirror (6) and outputting detection signals, an image forming portion for forming tomographic images based on the detection signals, a measurement depth calculating means (53), and an image processing portion (57). Forming a three-dimensional image or the like based on the arranged tomographic images.
摘要翻译： 提供一种光学图像测量装置，其即使在测量期间物体移动时，也可以基于在各种深度获取的物体的断层图像形成三维图像。 包括用于分割光束信号光（S）和参考光（R）的半反射镜（6），用于改变光路的变频器（8），参考反射镜（9）和压电元件（9A） 参考光（R）的长度，用于接收由半反射镜将信号光（S）和参考光（R）彼此叠加而产生的干涉光所产生的干涉光束（L）的CCD（21,22） （6）并输出检测信号，基于检测信号形成断层图像的图像形成部分，测量深度计算装置（53）和图像处理部分（57）。 基于排列的断层图像形成三维图像等。
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公开(公告)号：US07372578B2
公开(公告)日：2008-05-13
申请号：US11223928
申请日：2005-09-13
申请人： Masahiro Akiba , Kinpui Chan , Yasufumi Fukuma , Hiroyuki Otsuka , Hisashi Tsukada , Kazuhiko Yumikake
发明人： Masahiro Akiba , Kinpui Chan , Yasufumi Fukuma , Hiroyuki Otsuka , Hisashi Tsukada , Kazuhiko Yumikake
IPC分类号： G02B9/02
CPC分类号： G01B9/02014 , G01B9/02003 , G01B9/02027 , G01B9/02069 , G01B9/02091 , G01B11/2441 , G01B2290/45 , G01B2290/70
摘要： Provided is an optical image measuring apparatus capable of effectively receiving interference light, particularly an alternating current component thereof using a smaller number of photo sensors. The optical image measuring apparatus includes a polarizing plate for converting a light beam from a broad-band light source to linearly polarized light, a half mirror for dividing the light beam into signal light and reference light, a piezoelectric element for vibrating a reference mirror, a wavelength plate for converting the reference light to circularly polarized light, a polarization beam splitter for extracting two different polarized light components from interference light produced from the signal light and the reference light which are superimposed on each other by the half mirror, CCDs for detecting the two different polarized light components, and a signal processing portion for producing an image of an object to be measured based on the detected polarized light components. A frequency for intensity modulation of the light beam is synchronized with a beat frequency of the interference light. A frequency of vibration of the reference mirror is synchronized with the beat frequency of the interference light and an amplitude of vibration thereof is set to be equal to or smaller than a wavelength of the interference light.
摘要翻译： 提供一种光学图像测量装置，其能够使用较少数量的光传感器有效地接收干涉光，特别是其交流分量。 该光学图像测量装置包括用于将来自宽带光源的光束转换为线偏振光的偏振片，用于将光束分成信号光的半反射镜和参考光，用于振动参考反射镜的压电元件， 用于将参考光转换成圆偏振光的波长板，用于从由半反射镜彼此叠加的信号光和参考光产生的干涉光中提取两种不同的偏振光分量的偏振分束器，用于检测的CCD 两个不同的偏振光分量，以及用于基于检测到的偏振光分量产生待测物体的图像的信号处理部分。 光束的强度调制频率与干涉光的拍频同步。 参考反射镜的振动频率与干涉光的拍频同步，其振动振幅被设定为等于或小于干涉光的波长。
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公开(公告)号：US20060055939A1
公开(公告)日：2006-03-16
申请号：US11223928
申请日：2005-09-13
申请人： Masahiro Akiba , Kinpui Chan , Yasufumi Fukuma , Hiroyuki Otsuka , Hisashi Tsukada , Kazuhiko Yumikake
发明人： Masahiro Akiba , Kinpui Chan , Yasufumi Fukuma , Hiroyuki Otsuka , Hisashi Tsukada , Kazuhiko Yumikake
IPC分类号： G01B11/02
CPC分类号： G01B9/02014 , G01B9/02003 , G01B9/02027 , G01B9/02069 , G01B9/02091 , G01B11/2441 , G01B2290/45 , G01B2290/70
摘要： Provided is an optical image measuring apparatus capable of effectively receiving interference light, particularly an alternating current component thereof using a smaller number of photo sensors. The optical image measuring apparatus includes a polarizing plate for converting a light beam from a broad-band light source to linearly polarized light, a half mirror for dividing the light beam into signal light and reference light, a piezoelectric element for vibrating a reference mirror, a wavelength plate for converting the reference light to circularly polarized light, a polarization beam splitter for extracting two different polarized light components from interference light produced from the signal light and the reference light which are superimposed on each other by the half mirror, CCDs for detecting the two different polarized light components, and a signal processing portion for producing an image of an object to be measured based on the detected polarized light components. A frequency for intensity modulation of the light beam is synchronized with a beat frequency of the interference light. A frequency of vibration of the reference mirror is synchronized with the beat frequency of the interference light and an amplitude of vibration thereof is set to be equal to or smaller than a wavelength of the interference light.
摘要翻译： 提供一种光学图像测量装置，其能够使用较少数量的光传感器有效地接收干涉光，特别是其交流分量。 该光学图像测量装置包括用于将来自宽带光源的光束转换为线偏振光的偏振片，用于将光束分成信号光的半反射镜和参考光，用于振动参考反射镜的压电元件， 用于将参考光转换成圆偏振光的波长板，用于从由半反射镜彼此叠加的信号光和参考光产生的干涉光中提取两种不同的偏振光分量的偏振分束器，用于检测的CCD 两个不同的偏振光分量，以及用于基于检测到的偏振光分量产生待测物体的图像的信号处理部分。 光束的强度调制频率与干涉光的拍频同步。 参考反射镜的振动频率与干涉光的拍频同步，其振动振幅被设定为等于或小于干涉光的波长。
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5.发明授权Optical image measuring apparatus for forming an image of an object to be measured based on interference light 有权用于基于干涉光形成待测物体的图像的光学图像测量装置公开(公告)号：US07268885B2
公开(公告)日：2007-09-11
申请号：US11073712
申请日：2005-03-08
IPC分类号： G01B9/02
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02041 , G01B9/02069 , G01B2290/45 , G01J2009/0234
摘要： An optical image measuring apparatus capable of effectively obtaining a direct current component of a heterodyne signal which is composed of background light of interference light is provided. The optical image measuring apparatus includes: an optical interference system in which a light beam from a light source is divided into signal light and reference light by a beam splitter, a frequency of the reference light is shifted by a frequency shifter, and the signal light propagating through an object to be measured and the reference light reflected on a mirror are superimposed on each other by the beam splitter to produce interference light; beam splitters for dividing the interference light into interference light beams; shutters serving as an intensity modulating unit for modulating intensities of the respective interference light beams at predetermined intervals; CCDs for receiving the respective interference light beams whose intensities are modulated and outputting electrical signals; and a signal processing portion serving as a calculating unit for calculating an intensity of the direct current component corresponding to the background light of the interference light based on the outputted electrical signals.
摘要翻译： 提供一种能够有效地获得由干涉光的背景光组成的外差信号的直流分量的光学图像测量装置。 光学图像测量装置包括：光学干涉系统，其中来自光源的光束被分束器分成信号光和参考光，参考光的频率被移频器偏移，并且信号光 通过被测量物体传播并且通过分束器将反射在反射镜上的参考光彼此叠加以产生干涉光; 分束器，用于将干涉光分成干涉光束; 用作强度调制单元的快门，用于以预定间隔调制各个干涉光束的强度; 用于接收其强度被调制并输出电信号的各个干涉光束的CCD; 以及信号处理部分，用作计算单元，用于基于输出的电信号计算与干涉光的背景光相对应的直流分量的强度。
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公开(公告)号：US20050219545A1
公开(公告)日：2005-10-06
申请号：US11091653
申请日：2005-03-29
CPC分类号： G01N21/49 , A61B3/102 , A61B5/0066 , A61B5/0073 , G01B9/02003 , G01B9/02012 , G01B9/02091 , G01B2290/45 , G01N2021/1782
摘要： Provided is an optical image measuring apparatus capable of easily changing a scanning interval of an object to be measured in a depth direction with high precision. The apparatus includes an interference optical system for superimposing signal light propagating through the object to be measured on reference light subjected to frequency shift to produce interference light, a reference mirror driving unit for driving a mirror to scan the object to be measured in the depth direction, shutters for sampling interference light beams, CCDs for storing charges for only a predetermined storage time and outputting electrical signals, a control unit for changing the storage time of the CCDs, a signal processing portion for calculating intensities and phases of interference light beams corresponding to each depth of the object to be measured which are successively detected by the CCDs during scanning based on the electrical signals successively outputted from the CCDs every changed storage time, and a setting operation unit for setting the storage time of the CCDs by an operator.
摘要翻译： 提供一种能够高精度地容易地在深度方向上变更被测定物的扫描间隔的光学图像测定装置。 该装置包括：干涉光学系统，用于将经过频移的参考光上传播的信号光叠加以产生干涉光;参考镜驱动单元，用于驱动反射镜以沿深度方向扫描被测量物体 用于采集干涉光的百叶窗，仅用于存储预定的存储时间的电荷的CCD和输出电信号;用于改变CCD的存储时间的控制单元，用于计算对应于...的干涉光束的强度和相位的信号处理部分 基于从每个改变的存储时间从CCD连续输出的电信号在扫描期间由CCD连续检测的待测量对象的每个深度，以及设置操作单元，用于设置操作者的CCD的存储时间。
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公开(公告)号：US07548320B2
公开(公告)日：2009-06-16
申请号：US11091478
申请日：2005-03-29
IPC分类号： G01B11/02
CPC分类号： A61B3/1225 , A61B3/102 , A61B5/0066 , A61B5/0073 , G01B9/02003 , G01B9/02007 , G01B9/02012 , G01B9/02028 , G01B9/02091 , G01B2290/45
摘要： An optical image measuring apparatus including: a beam splitter (4) for dividing a light beam into signal light (S) and reference light (R); beam splitters for dividing the reference light (R) into plural reference light beams frequency shifters for shifting frequencies of the reference light beams by different amounts; and reflector plates arranged at different distances from an object to be measured (O). The reference light beams and the signal light (S) reflected by the object to be measured in depth regions are superimposed on each other to thereby produce interference light. CCD cameras receive the interference light component and convert the interference light component into electrical signals to output the signals. A computer forms images in depth regions corresponding to the interference light components based on the electrical signals.
摘要翻译： 一种光学图像测量装置，包括：用于将光束分成信号光（S）和参考光（R）的分束器（4）; 分光器，用于将参考光（R）分成多个参考光束移频器，用于移动参考光束的频率不同的量; 以及布置在距离被测量物体（O）不同距离处的反射板。 将参考光束和由深度区域中被测量物体反射的信号光（S）彼此叠加，从而产生干涉光。 CCD摄像机接收干扰光分量，并将干扰光分量转换为电信号以输出信号。 计算机基于电信号在与干涉光分量对应的深度区域中形成图像。
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8.发明授权Optical image transmitting system, optical image transmitting apparatus, optical image receiving apparatus, and optical image transmitting method 有权光学图像传输系统，光学图像发送装置，光学图像接收装置和光学图像发送方法公开(公告)号：US07241982B2
公开(公告)日：2007-07-10
申请号：US11092709
申请日：2005-03-30
IPC分类号： H01L27/00
摘要： Provided is an optical image transmitting system capable of producing signal light including plural image information and emitting the signal light, and in addition, receiving the signal light and selectively extracting target image information. An optical image transmitting system of the present invention includes an optical image transmitting apparatus (100) for producing plural optical image information beams (S1 to Sn) representing plural optical image information and including light beams of different frequencies, superimposing the plural optical image information beams (S1 to Sn) into signal light (S) and emitting the signal light (S) through free space or an optical waveguide such as an image fiber, and an optical image receiving apparatus (200) for receiving the emitted signal light (S) and selectively detecting the optical image information beams (S1 to Sn) based on the frequency difference.
摘要翻译： 提供了一种能够产生包括多个图像信息并发射信号光的信号光的光学图像传输系统，此外，接收信号光并选择性地提取目标图像信息。 本发明的光学图像传输系统包括：一个光学图像发送装置，用于产生多个光学图像信息光束（S 1至Sn），该光学图像信息光束表示多个光学图像信息，并包括不同频率的光束，将多个光学图像信息 光束（S 1至Sn）转换成信号光（S）并通过自由空间发射信号光（S）或诸如图像光纤的光波导，以及用于接收发射信号光的光学图像接收装置（200） S），并且基于频率差选择性地检测光学图像信息光束（S 1至Sn）。
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公开(公告)号：US07248371B2
公开(公告)日：2007-07-24
申请号：US11091653
申请日：2005-03-29
IPC分类号： G01B9/02
CPC分类号： G01N21/49 , A61B3/102 , A61B5/0066 , A61B5/0073 , G01B9/02003 , G01B9/02012 , G01B9/02091 , G01B2290/45 , G01N2021/1782
摘要： Provided is an optical image measuring apparatus capable of easily changing a scanning interval of an object to be measured in a depth direction with high precision. The apparatus includes an interference optical system for superimposing signal light propagating through the object to be measured on reference light subjected to frequency shift to produce interference light, a reference mirror driving unit for driving a mirror to scan the object to be measured in the depth direction, shutters for sampling interference light beams, CCDs for storing charges for only a predetermined storage time and outputting electrical signals, a control unit for changing the storage time of the CCDs, a signal processing portion for calculating intensities and phases of interference light beams corresponding to each depth of the object to be measured which are successively detected by the CCDs during scanning based on the electrical signals successively outputted from the CCDs every changed storage time, and a setting operation unit for setting the storage time of the CCDs by an operator.
摘要翻译： 提供一种能够高精度地容易地在深度方向上变更被测定物的扫描间隔的光学图像测定装置。 该装置包括：干涉光学系统，用于将经过频移的参考光上传播的信号光叠加以产生干涉光;参考镜驱动单元，用于驱动反射镜以沿深度方向扫描被测量物体 用于采集干涉光的百叶窗，仅用于存储预定的存储时间的电荷的CCD和输出电信号;用于改变CCD的存储时间的控制单元，用于计算对应于...的干涉光束的强度和相位的信号处理部分 基于从每个改变的存储时间从CCD连续输出的电信号在扫描期间由CCD连续检测的待测量对象的每个深度，以及设置操作单元，用于设置操作者的CCD的存储时间。
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10.发明授权Optical image measuring apparatus for obtaining a signal intensity and spatial phase distribution of interference light 有权用于获得干涉光的信号强度和空间相位分布的光学图像测量装置公开(公告)号：US07245383B2
公开(公告)日：2007-07-17
申请号：US11062592
申请日：2005-02-23
IPC分类号： G01B9/02
CPC分类号： G01J9/02 , G01B9/02003 , G01B9/02012 , G01B9/02091 , G01B11/2441 , G01B2290/45
摘要： To provide an optical image measuring apparatus capable of calculating an intensity of a direct current component composed of background light based on a result obtained by detection of interference light and obtaining a signal intensity of the interference light using the calculated intensity. The apparatus includes: an optical interference system to divide a light beam into signal light and reference light, and the signal light propagating through an object to be measured and the reference light are superimposed to produce interference light; beam splitters for dividing it into three interference light beams; shutters to perform sampling; photo detectors for detecting the sampled interference light beams and converting them into electrical signals; and a signal processing portion for calculating the signal intensity of the interference light and the spatial phase distribution thereof based on the electrical signals.
摘要翻译： 提供一种光学图像测量装置，其能够基于通过检测干涉光获得的结果来计算由背景光组成的直流分量的强度，并使用所计算的强度来获得干涉光的信号强度。 该装置包括：将光束分成信号光和参考光的光学干涉系统，并且通过被测量物体传播的信号光和参考光被叠加以产生干涉光; 光束分离器，用于将其分为三个干涉光束; 百叶窗进行抽样; 用于检测采样的干涉光束并将其转换成电信号的光电检测器; 以及信号处理部分，用于基于电信号计算干涉光的信号强度及其空间相位分布。
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