公开(公告)号：US20100074820A1

公开(公告)日：2010-03-25

申请号：US12516723

申请日：2007-11-30

申请人： Masahiro Kimoto ,  Terumasa Koura ,  Yukio Fukuda ,  Masaki Narazaki ,  Taiji Hashimoto ,  Toru Sakai ,  Kazuo Yokogi

发明人： Masahiro Kimoto ,  Terumasa Koura ,  Yukio Fukuda ,  Masaki Narazaki ,  Taiji Hashimoto ,  Toru Sakai ,  Kazuo Yokogi

IPC分类号： C01B23/00 ,  B01D53/02

CPC分类号： B01D53/02 ,  B01D2253/108 ,  B01D2256/18 ,  B01D2257/11 ,  C01B23/0042 ,  C01B23/0052 ,  C01B23/0084 ,  C01B2210/0037 ,  C01B2210/0068 ,  F25J3/028 ,  F25J2205/20 ,  F25J2205/40 ,  F25J2205/60 ,  F25J2215/36

摘要： To provide a simple highly-pure Xe retrieval method and device with high retrieval efficiency by functionally removing such elements as water, CO2 and FCs from waste gases from semiconductor production processes, such as the plasma etching, that contain low-concentration Xe. For samples containing xenon and fluorocarbon, this invention is characterized by having at least first adsorption means (A1) filled with synthetic zeolite with pore size of 4A or smaller and aluminum oxide, arranged serially, gas separation means (A2) composed of silicone or polyethylene hollow fiber gas separation membrane modules 4, second adsorption means (A3) filled with either activated carbon, synthetic zeolite with pore size of 5A or larger, molecular sieving carbon with pore size of 5A or larger, or a combination of these, and reaction means (A4) filled with calcium compounds as reactant.

摘要翻译： 通过从包含低浓度Xe的半导体生产工艺（例如等离子体蚀刻）的废气中功能去除水，CO2和FC等元素，提供具有高回收效率的简单的高纯度Xe回收方法和装置。 对于含有氙气和碳氟化合物的样品，本发明的特征在于至少具有填充有4A或更小孔径的合成沸石的第一吸附装置（A1）和串联排列的氧化铝，由硅氧烷或聚乙烯组成的气体分离装置（A2） 中空纤维气体分离膜组件4，填充有活性碳的第二吸附装置（A3），孔径为5A以上的合成沸石，孔径为5A以上的分子筛碳，或它们的组合，以及反应装置 （A4）填充有钙化合物作为反应物。

公开(公告)号：US08153091B2

公开(公告)日：2012-04-10

申请号：US12516723

申请日：2007-11-30

申请人： Masahiro Kimoto ,  Terumasa Koura ,  Yukio Fukuda ,  Masaki Narazaki ,  Taiji Hashimoto ,  Toru Sakai ,  Kazuo Yokogi

发明人： Masahiro Kimoto ,  Terumasa Koura ,  Yukio Fukuda ,  Masaki Narazaki ,  Taiji Hashimoto ,  Toru Sakai ,  Kazuo Yokogi

IPC分类号： B01D53/04

CPC分类号： B01D53/02 ,  B01D2253/108 ,  B01D2256/18 ,  B01D2257/11 ,  C01B23/0042 ,  C01B23/0052 ,  C01B23/0084 ,  C01B2210/0037 ,  C01B2210/0068 ,  F25J3/028 ,  F25J2205/20 ,  F25J2205/40 ,  F25J2205/60 ,  F25J2215/36

摘要： To provide a simple highly-pure Xe retrieval method and device with high retrieval efficiency by functionally removing such elements as water, CO2 and FCs from waste gases from semiconductor production processes, such as the plasma etching, that contain low-concentration Xe. For samples containing xenon and fluorocarbon, this invention is characterized by having at least first adsorption means (A1) filled with synthetic zeolite with pore size of 4A or smaller and aluminum oxide, arranged serially, gas separation means (A2) composed of silicone or polyethylene hollow fiber gas separation membrane modules 4, second adsorption means (A3) filled with either activated carbon, synthetic zeolite with pore size of 5A or larger, molecular sieving carbon with pore size of 5A or larger, or a combination of these, and reaction means (A4) filled with calcium compounds as reactant.

摘要翻译： 通过从包含低浓度Xe的半导体生产工艺（例如等离子体蚀刻）的废气中功能去除水，CO2和FC等元素，提供具有高回收效率的简单的高纯度Xe回收方法和装置。 对于含有氙气和碳氟化合物的样品，本发明的特征在于至少具有填充有4A或更小孔径的合成沸石的第一吸附装置（A1）和串联排列的氧化铝，由硅氧烷或聚乙烯组成的气体分离装置（A2） 中空纤维气体分离膜组件4，填充有活性碳的第二吸附装置（A3），孔径为5A以上的合成沸石，孔径为5A以上的分子筛碳，或它们的组合，以及反应装置 （A4）填充有钙化合物作为反应物。

公开(公告)号：US5677480A

公开(公告)日：1997-10-14

申请号：US393684

申请日：1995-02-24

申请人： A. Nimal Liyanage ,  Eiichi Ozawa ,  Kazuo Yokogi ,  Jean-Marie Friedt

发明人： A. Nimal Liyanage ,  Eiichi Ozawa ,  Kazuo Yokogi ,  Jean-Marie Friedt

IPC分类号： F17D5/00 ,  B01J3/02 ,  G01M3/28 ,  H01L21/02 ,  G01M3/04

CPC分类号： G01M3/2876

摘要： A method of detecting a malfunction or failure of a pressure regulator in a corrosive or reactive gas distribution system while in use involves continuously measuring or monitoring the output pressure of the pressure regulator, both in the presence and the absence of gas flow. The onset of a malfunction of the pressure regulator can be predicted when the differential output pressure between flowing and non-flowing gas fluctuates highly and increases gradually. Failure of the pressure regulator or of the total system is detected when the differential output pressure in the presence and absence of flowing gas exceeds some experimentally determined value.

摘要翻译： 在使用中检测腐蚀性或反应性气体分配系统中的压力调节器的故障或故障的方法包括在存在和不存在气体流动的情况下连续测量或监测压力调节器的输出压力。 当流动和不流动的气体之间的差分输出压力高度波动并逐渐增加时，可以预测压力调节器故障的开始。 当存在和不存在流动气体时的差压输出压力超过一定的实验值时，可以检测到压力调节器或整个系统的故障。

公开(公告)号：US6122931A

公开(公告)日：2000-09-26

申请号：US285101

申请日：1999-04-02

申请人： Joseph E. Paganessi ,  Benjamin J. Jurcik ,  Richard Udischas ,  Hwa-Chi Wang ,  Kazuo Yokogi ,  Shinji Tomita

发明人： Joseph E. Paganessi ,  Benjamin J. Jurcik ,  Richard Udischas ,  Hwa-Chi Wang ,  Kazuo Yokogi ,  Shinji Tomita

IPC分类号： F25J3/00 ,  B01J4/00 ,  F17C7/04 ,  F25J3/08 ,  F25J1/00

CPC分类号： C01B17/453 ,  C01B21/22 ,  C01B7/01 ,  C01B7/093 ,  C01B7/191 ,  C01B7/24 ,  C01C1/003 ,  C01C1/006 ,  F17C7/04 ,  F25J3/08 ,  F25J2200/02 ,  F25J2200/04 ,  F25J2200/74 ,  F25J2215/80 ,  F25J2280/02 ,  F25J2290/60 ,  F25J2290/62 ,  Y10S62/924

摘要： Provided are a novel system and method for delivery of a vapor phase product to a point of use, as well as a novel on-site chemical distribution system and method. The system for delivery of a vapor phase product includes a storage vessel containing a liquid chemical under its own vapor pressure, a column connected to receive the chemical in liquified state from the storage vessel, wherein the chemical is fractionated into a contaminated liquid heavy fraction and a purified light vapor fraction and a conduit connected to the column for removing the purified light vapor fraction therefrom. The system is connected to the point of use for introducing the purified vapor fraction thereto. Particular applicability is found in semiconductor manufacturing in the delivery of electronic specialty gases to one or more semiconductor processing tools.

摘要翻译： 提供了一种用于将气相产物输送到使用点的新型系统和方法，以及新颖的现场化学分配系统和方法。 用于输送气相产物的系统包括在其自身蒸气压下容纳液体化学品的储存容器，连接成从储存容器接收液化状态的化学品的柱，其中化学品被分馏成污染的液体重质馏分， 纯化的轻蒸气馏分和连接到塔的导管，用于从其中除去纯化的轻蒸气馏分。 该系统连接到用于将纯化的蒸汽馏分引入其的使用点。 在向一个或多个半导体加工工具传送电子专用气体的半导体制造中发现了特定的适用性。

公开(公告)号：US5468937A

公开(公告)日：1995-11-21

申请号：US222924

申请日：1994-04-05

申请人： Kazuo Yokogi

发明人： Kazuo Yokogi

IPC分类号： B08B9/02 ,  F17D5/00 ,  H01L21/02 ,  H05B6/10

CPC分类号： H05B6/101 ,  H01J37/3244

摘要： A pipe impurity removing apparatus and process is provided, in which moisture adhered on the inner peripheral surface of a supply line can be surely removed, regardless of the pre- or post-completion of a piping execution, and the reduction of its working time can be aimed at. The inner peripheral surface of a pipe 30 which constitutes a supply line 3 for a semiconductor manufacturing unit, is coated or surface-modified with chromium oxide 6 which is a dielectric. A purge gas is caused to flow through the pipe 30 from the upperstream side to the downstream side, and an impurity remover 7 is engaged with the pipe 30 and high-frequency induction heating is applied thereto to heat the chromium oxide 6, whereby moisture adsorbed on the chromium oxide 6 is exhausted and removed together with the purge gas indicated by an arrowmark from the inside of the pipe 30 to the atmosphere.

摘要翻译： 提供了一种管道杂质去除装置和方法，其中可以可靠地去除附着在供应管线的内周面上的水分，而不管管道执行的完成之前或之后，并且其工作时间的减少可以 瞄准。 构成半导体制造单元的供给管线3的管30的内周面用作为电介质的氧化铬6进行表面改性。 使吹扫气体从上游侧向下游侧流过管30，并且将杂质去除器7与管30接合，并施加高频感应加热以加热氧化铬6，由此吸附水分 在氧化铬6上排出并与由管30的内部指示的吹扫气体一起移除到大气中。

公开(公告)号：US5447285A

公开(公告)日：1995-09-05

申请号：US210944

申请日：1994-03-21

申请人： Kazuo Yokogi

发明人： Kazuo Yokogi

IPC分类号： F15B15/12 ,  F15B20/00 ,  F16K31/12

CPC分类号： F15B15/12 ,  F15B20/004

摘要： The invention relates to safety device for a cylinder valve automatic switching unit, wherein said valve is automatically closed when some abnormality such as down of an air pressure takes place. A first air-operated selector valve 8 is installed which causes air flowing out of a reservoir tank 10 to flow into a second supply line 3 when air pressure is reduced, whereby a cylinder valve automatic switching unit 1 in the opening situation is caused to make a closing motion for closing a cylinder valve in the opened situation. And, a second air-operated selector valve 9 is further installed which discharges air flowing out of a first supply line 2 to the atmosphere when the air pressure is reduced.

摘要翻译： 本发明涉及一种用于汽缸阀自动切换装置的安全装置，其中当气压下降等一些异常情况时，所述阀自动关闭。 安装第一气动切换阀8，当空气压力降低时，使从空间流出的空气流入第二供应管线3，从而使开启状态下的气缸阀自动切换单元1 在打开状态下关闭气缸阀的关闭运动。 此外，还设置有第二气动切换阀9，当空气压力降低时，将从第一供应管线2流出的空气排出到大气中。

公开(公告)号：US06189369B1

公开(公告)日：2001-02-20

申请号：US09201766

申请日：1998-12-01

申请人： Kazuo Yokogi

发明人： Kazuo Yokogi

IPC分类号： G01M322

CPC分类号： G01M3/229

摘要： The present invention provides a gas leakage detecting apparatus capable of detecting a gas leak in a cylinder cabinet with accuracy. The gas leakage detecting apparatus comprises a first air take-out pipe for taking out air from the inside of an exhaust duct of a cylinder cabinet and leading the same air to a gas sensor; a second air take-out pipe for taking out air at a given position in said cylinder cabinet and leading the same air to said gas sensor; a first shut-off valve and a second shut-off valve respectively provided on the respective air take-out pipes so that air from these air take-out pipes is selectively led to said gas sensor; and a control means for controlling the opening and closing operation of these shut-off valves. Owing to this construction, one is able to monitor the location of the gas leak upon taking out air from the cylinder cabinet through the second air take-out pipe.

摘要翻译： 本发明提供一种气体泄漏检测装置，其能够准确地检测气缸柜内的气体泄漏。 气体泄漏检测装置包括：第一空气取出管，用于从气缸室的排气管道的内部取出空气，并将相同的空气引导到气体传感器; 第二空气取出管，用于在所述气缸柜中的给定位置取出空气，并将相同的空气引导到所述气体传感器; 分别设置在各个空气取出管上的第一截止阀和第二截止阀，使得来自这些空气取出管的空气被选择性地引导到所述气体传感器; 以及用于控制这些截止阀的打开和关闭操作的控制装置。 由于这种结构，能够通过第二空气取出管从气缸柜取出空气时监测气体泄漏的位置。

公开(公告)号：US6129335A

公开(公告)日：2000-10-10

申请号：US201767

申请日：1998-12-01

申请人： Kazuo Yokogi

发明人： Kazuo Yokogi

IPC分类号： F17C13/12 ,  F16K1/16 ,  F16K31/44

CPC分类号： F16K1/165 ,  G05D7/0635

摘要： The present invention provides a flow rate regulation apparatus capable of accurately measuring the flow velocity of air flowing through an exhaust duct and carrying out a flow rate regulation with high precision, though said exhaust duct may be short in length. The flow rate regulation apparatus according to the present invention comprises a means for regulating the sectional area of a passage in an exhaust duct, where the passage is formed at the center of said exhaust duct and said passage is shaped to be symmetrical with respect to the center axis AX of said exhaust duct as a basis. Since the passage formed in the exhaust duct by the passage sectional area regulation means is shaped so as to be symmetrical, no turbulence takes place in an air current flowing along the center axis AX of the exhaust duct. Flow velocity can be accurately determined and maintained by using air velocity measurements along the center axis.

摘要翻译： 本发明提供了一种流量调节装置，其能够精确地测量流过排气管道的空气的流速，并以高精度进行流量调节，尽管所述排气管道的长度可能较短。 根据本发明的流量调节装置包括用于调节排气管道中的通道的截面面积的装置，其中通道形成在所述排气管道的中心，并且所述通道成形为相对于 所述排气管的中心轴AX为基准。 由于通过通道截面积调节装置在排气管道中形成的通道成形为对称，所以在沿着排气管的中心轴线AX流动的气流中不会发生湍流。 可以通过沿着中心轴的空气速度测量来精确地确定和维持流速。

公开(公告)号：US6029741A

公开(公告)日：2000-02-29

申请号：US201768

申请日：1998-12-01

申请人： Kazuo Yokogi ,  Yoshihiro Sano

发明人： Kazuo Yokogi ,  Yoshihiro Sano

IPC分类号： F17C7/00 ,  F17C9/02 ,  F17C13/00 ,  F28F9/22

CPC分类号： F17C13/002 ,  F17C9/02 ,  F17C2201/0109 ,  F17C2201/0114 ,  F17C2201/032 ,  F17C2201/058 ,  F17C2205/0107 ,  F17C2205/0173 ,  F17C2205/0176 ,  F17C2223/0153 ,  F17C2223/033 ,  F17C2227/0313 ,  F17C2270/0518

摘要： The present invention provides a heating apparatus for effectively heating a gas container, and more particularly a liquified gas filled in the gas container. The heating apparatus comprises a mounting base having a first space and a second space, each formed in its inside, and an air fan heater for supplying heated air to the first space of said mounting base. In said mounting base, a first through hole communicating with said first space and second through holes communicating with said second space are formed inside of a mounting area, and third through holes communicating with said second space are formed outside of said mounting area. When a gas container is mounted on the mounting base, the heated air is blasted from said first space onto the bottom face of said gas container through said first through hole, whereby heat is effectively transmitted from the bottom face of the gas container to the liquified gas contents of the gas container.

摘要翻译： 本发明提供一种加热装置，用于有效地加热气体容器，特别是填充在气体容器中的液化气体。 加热装置包括：安装基座，其具有形成在其内部的第一空间和第二空间;以及风扇加热器，用于将加热的空气供给到所述安装基座的第一空间。 在所述安装基座中，在安装区域的内部形成有与所述第一空间连通的第一通孔和与所述第二空间连通的第二通孔，并且与所述第二空间连通的第三通孔形成在所述安装区域的外部。 当气体容器安装在安装基座上时，加热的空气从所述第一空间通过所述第一通孔喷射到所述气体容器的底面上，由此热量从气体容器的底面有效地传递到液化的 气体容器的气体含量。

公开(公告)号：US5899225A

公开(公告)日：1999-05-04

申请号：US998228

申请日：1997-12-24

申请人： Kazuo Yokogi

发明人： Kazuo Yokogi

IPC分类号： F17C13/02 ,  F17C13/04 ,  F01B25/26

CPC分类号： F17C13/02 ,  F17C13/04 ,  F17C2205/0326 ,  F17C2221/031 ,  F17C2227/0302 ,  F17C2227/044 ,  F17C2250/032 ,  F17C2250/043 ,  F17C2250/0443 ,  F17C2250/0478 ,  F17C2250/0636 ,  F17C2270/0518 ,  Y10T137/8158 ,  Y10T137/8359

摘要： The present invention is intended to provide an apparatus capable of detecting an air tube-detached state when said air tube has been detached from an air-actuated valve in order that the same air-actuated valve is caused to assume a closed state. The present invention relates to an air tube connection state detecting apparatus 10 for detecting whether the fore end of an air tube 56 for supplying compressed air to an air-actuated valve 16 for a gas container 12 is connected to said air-actuated valve 16 or not. The air tube connection state detecting apparatus comprises a to-be-contacted member 82, provided at a predetermined position separate from said air-actuated valve 16, to which the fore end of said air tube 56 is to be connected; and a detection means 86 for detecting that the fore end of said air tube 56 is connected to said to-be-connected member 82. If it is detected by the detection means 86 that the air tube 56 is connected to the to-be-connected member 82, in this construction, it can be recognized that the air tube 56 has been detached from the air actuated valve 16.

摘要翻译： 本发明旨在提供一种能够在空气管从空气致动阀上拆下时检测空气管分离状态的装置，以使相同的空气致动阀处于闭合状态。 本发明涉及一种气管连接状态检测装置10，用于检测用于向气体容器12的空气致动阀16供应压缩空气的空气管56的前端是否连接到所述气动阀16或 不。 空气管连接状态检测装置包括设置在与所述空气致动阀16分开的预定位置处的待接触构件82，所述空气管56的前端将要连接到该构件82。 以及用于检测所述空气管56的前端连接到所述待连接构件82的检测装置86.如果由检测装置86检测到空气管56连接到待连接构件82， 在这种结构中，连接构件82可以看出，空气管56已经从空气致动阀16拆下。