摘要:
Provided are a novel system and method for delivery of a vapor phase product to a point of use, as well as a novel on-site chemical distribution system and method. The system for delivery of a vapor phase product includes a storage vessel containing a liquid chemical under its own vapor pressure, a column connected to receive the chemical in liquified state from the storage vessel, wherein the chemical is fractionated into a contaminated liquid heavy fraction and a purified light vapor fraction and a conduit connected to the column for removing the purified light vapor fraction therefrom. The system is connected to the point of use for introducing the purified vapor fraction thereto. Particular applicability is found in semiconductor manufacturing in the delivery of electronic specialty gases to one or more semiconductor processing tools.
摘要:
Provided are a novel system and method for delivery of a vapor phase product to a point of use, as well as a novel on-site chemical distribution system and method. The system for delivery of a vapor phase product includes a storage vessel containing a liquid chemical under its own vapor pressure, a column connected to receive the chemical in liquified state from the storage vessel, wherein the chemical is fractionated into a contaminated liquid heavy fraction and a purified light vapor fraction and a conduit connected to the column for removing the purified light vapor fraction therefrom. The system is connected to the point of use for introducing the purified vapor fraction thereto. Particular applicability is found in semiconductor manufacturing in the delivery of electronics specialty gases to one or more semiconductor processing tools.
摘要:
Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; b) providing at least one glassy polymer membrane having a feed side and a permeate side; c) contacting the feed side of the at least one membrane with the gas mixture; d) withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and e) withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.
摘要:
The invention relates to a process for the recovery and recycling of ethylene oxide (EO) after use in a sterilization process. The process involves the steps of introducing a mixed gas stream containing EO, nitrogen, oxygen, CO2, water, and a few other trace elements. The system includes integrated EO concentration sensors to determine the concentration of the EO in the gas stream. The system includes a series of compressors to pressurize the gas stream, and chillers or condensers to cool the gas stream to condense the EO out of the gas stream. The system includes temperature and pressure sensors to determine the conditions in the gas stream, and a control system that evaluates the temperature and pressure data and controls the compressors and chillers to achieve the properties to maximize the condensation of EO out of the gas stream.
摘要:
The invention relates to a process for the recovery and recycling of ethylene oxide (EO) after use in a sterilization process. The process involves the steps of introducing a mixed gas stream containing EO, nitrogen, oxygen, CO2, water, and a few other trace elements. The system includes integrated EO concentration sensors to determine the concentration of the EO in the gas stream. The system includes a series of compressors to pressurize the gas stream, and chillers or condensers to cool the gas stream to condense the EO out of the gas stream. The system includes temperature and pressure sensors to determine the conditions in the gas stream, and a control system that evaluates the temperature and pressure data and controls the compressors and chillers to achieve the properties to maximize the condensation of EO out of the gas stream.
摘要:
In the commercial processes of using ethylene oxides for sterilization and fumigation over 99% of the ethylene oxide used is the process goes unreacted and is discharged from the sterilization/fumigation chamber. This process allows for the capture of ethylene oxide by using temperature, pressure, and both temperature and pressure to condense, separate and recycle the liquefied ethylene oxide from the non-condensable gases. The invention allows the user to recover then recycle the bulk of the exhausted ethylene oxide significantly increasing its utilization thus reducing the quantity of ethylene oxide required to be on-site. As secondary benefits, both feed stock and mitigation costs are significantly reduced.
摘要:
A cryogenic freezing method uses a mixture of liquid nitrogen and liquid oxygen in amounts approximating the composition of atmospheric air to freeze food products. The mixture preferably includes 18% to 25% oxygen and the balance nitrogen, with small amounts of residuals which are commonly found in air. The present invention involves replacing a liquid carbon dioxide or liquid nitrogen cooling medium which is used in known cryogenic freezers with a liquid nitrogen and liquid oxygen mixture. The liquid nitrogen and oxygen mixture can be used according the present invention in many of the known freezers using liquid carbon dioxide or liquid nitrogen as a cooling medium, including tunnel freezers, spiral freezers, and immersion freezers. The use of a liquid nitrogen and liquid oxygen mixture improves the efficiency of a freezer because the cold vapors are not exhausted from the freezer. In addition, the leakage of vapors from the freezer into the room air will not create unsafe conditions for workers.
摘要:
The invention relates to a process for the recovery and recycling of ethylene oxide (EO) after use in a sterilization process. The process involves the steps of introducing a mixed gas stream containing EO, nitrogen, oxygen, CO2, water, and a few other trace elements. The system includes integrated EO concentration sensors to determine the concentration of the EO in the gas stream. The system includes a series of compressors to pressurize the gas stream, and chillers or condensers to cool the gas stream to condense the EO out of the gas stream. The system includes temperature and pressure sensors to determine the conditions in the gas stream, and a control system that evaluates the temperature and pressure data and controls the compressors and chillers to achieve the properties to maximize the condensation of EO out of the gas stream.
摘要:
A system for producing a syngas from a biomass material. The system compacts a loose biomass material to form a compacted biomass material at an entrance of a reactor tube, and then heats the compacted biomass material within the tube to form ash and a fuel gas mixture. The fuel gas mixture is withdrawn from the tube and the ash is removed from the tube through an exit thereof. Ingress of air into the tube is inhibited by forming a plug of the biomass material at the entrance of the tube and a plug of ash at the exit of the tube. A neutral atmospheric pressure is maintained in the reactor tube relative to pressure outside the reactor tube by monitoring and adjusting a volumetric rate of the fuel gas mixture withdrawn from the reactor tube based on pressures at the entrance and the exit of the reactor tube
摘要:
A system and process capable of promoting the energy content of a syngas produced from a biomass material. The system and process entail compacting a loose biomass material and simultaneously introducing the compacted biomass material into an entrance of a reactor tube, and then heating the compacted biomass material within the tube to a temperature at which organic molecules within the biomass material break down to form ash and a fuel gas mixture. The fuel gas mixture is withdrawn from the tube and the ash is removed from the tube through an exit thereof. The entrance and exit of the tube, the compaction step, and the removal step cooperate to inhibit ingress of air into the tube by forming a plug of the biomass material at the entrance of the tube and a plug of ash at the exit of the tube.