公开(公告)号：US20080223122A1

公开(公告)日：2008-09-18

申请号：US12023158

申请日：2008-01-31

申请人： Masahiro Watanabe ,  Toru KURENUMA ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Shuichi Baba ,  Toshihiko Nakata ,  Manabu Edamura ,  Yukio Kembo

发明人： Masahiro Watanabe ,  Toru KURENUMA ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Shuichi Baba ,  Toshihiko Nakata ,  Manabu Edamura ,  Yukio Kembo

IPC分类号： G01B5/28

CPC分类号： G01Q70/04 ,  G01Q10/06

摘要： A scanning probe microscope, capable of performing shape measurement not affected by electrostatic charge distribution of a sample, which: monitors an electrostatic charge state by detecting a change in a flexure or vibrating state of a cantilever due to electrostatic charges in synchronization with scanning during measurement with relative scanning between the probe and the sample, and makes potential adjustment so as to cancel an influence of electrostatic charge distribution, thus preventing damage of the probe or the sample due to discharge and achieving reduction in measurement errors due to electrostatic charge distribution.

摘要翻译： 扫描探针显微镜，其能够执行不受样品静电荷分布影响的形状测量，其通过检测与测量同步的静电荷引起的静电荷的悬臂的挠曲或振动状态的变化来监测静电荷状态 通过探针和样品之间的相对扫描，进行电位调整，以消除静电电荷分布的影响，从而防止由于放电而引起的探针或样品的损伤，并实现由静电电荷分布引起的测量误差的降低。

公开(公告)号：US20130205454A1

公开(公告)日：2013-08-08

申请号：US13726764

申请日：2012-12-26

申请人： Shuichi BABA ,  Masahiro WATANABE ,  Toshihiko NAKATA ,  Yukio KEMBO ,  Toru KURENUMA ,  Takafumi MORIMOTO ,  Manabu EDAMURA ,  Satoshi SEKINO

发明人： Shuichi BABA ,  Masahiro WATANABE ,  Toshihiko NAKATA ,  Yukio KEMBO ,  Toru KURENUMA ,  Takafumi MORIMOTO ,  Manabu EDAMURA ,  Satoshi SEKINO

IPC分类号： G01Q10/00

CPC分类号： G01Q10/00 ,  B82Y35/00 ,  G01Q60/28 ,  G01Q60/34

摘要： In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.

摘要翻译： 在测量具有陡峭侧壁的图案的情况下，当接近图案侧壁时，探针通过作用在探针和侧壁之间的范德华力附着在侧壁上，并且在测量的轮廓中发生错误 侧壁部分。 当测量具有几乎等于探针直径的槽宽度的图案时，探针粘附到两个侧壁，探针不能到达凹槽底部，并且不能测量凹槽深度。 当使用细长的探针测量微观高纵横比图案时探头粘附到图案侧壁上时，通过检测探针与图案侧壁的粘附力使探针到达侧壁底部，并暂时增加 探针和样品之间的接触力。 此外，通过利用图案的形状数据获得悬臂的扭转量的数据，通过获得的扭转量的数据来校正侧壁部分的粘附的轮廓误差。

公开(公告)号：US20080087820A1

公开(公告)日：2008-04-17

申请号：US11867476

申请日：2007-10-04

申请人： Toru KURENUMA ,  Hiroaki Yanagimoto ,  Yukio Kembo ,  Yuichi Kunitomo ,  Takafumi Morimoto ,  Satoshi Sekino

发明人： Toru KURENUMA ,  Hiroaki Yanagimoto ,  Yukio Kembo ,  Yuichi Kunitomo ,  Takafumi Morimoto ,  Satoshi Sekino

IPC分类号： G01N23/00

CPC分类号： G01Q10/06 ,  G01Q30/06

摘要： This probe control method is applied to the scanning probe microscope having a probe section with a probe pointed at a sample, a detection section for detecting physical quantity between the sample and the probe, a measurement section for measuring the surface of the sample to obtain the surface information on the basis of the physical quantity when scanning the sample surface by the probe, and a movement mechanism with at least two degree of freedom. The probe control method has steps of moving the probe in a scanning direction different from the contact direction while making the probe come into contact with the sample surface, detecting the torsional state of the probe during the movement of the probe, and adjusting either or both of the rate in the scanning direction and the force in the contact direction on the basis of the detected value obtained by the detection step.

摘要翻译： 将该探针控制方法应用于具有探针指向样品的探针部的扫描探针显微镜，用于检测样品与探针之间的物理量的检测部，测定样品表面的测定部， 基于通过探针扫描样品表面时的物理量的表面信息，以及具有至少两个自由度的移动机构。 探针控制方法具有使探针沿着与接触方向不同的扫描方向移动的步骤，同时使探针与样品表面接触，检测探针移动期间探针的扭转状态，并且调节任一或两者 基于通过检测步骤获得的检测值，扫描方向上的速率和接触方向上的力。