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    SCANNING PROBE MICROSCOPE
    1.
    发明申请
    SCANNING PROBE MICROSCOPE 有权
    扫描探针显微镜

    公开(公告)号：US20130205454A1

    公开(公告)日：2013-08-08

    申请号：US13726764

    申请日：2012-12-26

    申请人： Shuichi BABA ,  Masahiro WATANABE ,  Toshihiko NAKATA ,  Yukio KEMBO ,  Toru KURENUMA ,  Takafumi MORIMOTO ,  Manabu EDAMURA ,  Satoshi SEKINO

    发明人： Shuichi BABA ,  Masahiro WATANABE ,  Toshihiko NAKATA ,  Yukio KEMBO ,  Toru KURENUMA ,  Takafumi MORIMOTO ,  Manabu EDAMURA ,  Satoshi SEKINO

    IPC分类号： G01Q10/00

    CPC分类号： G01Q10/00 ,  B82Y35/00 ,  G01Q60/28 ,  G01Q60/34

    摘要： In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.

    摘要翻译： 在测量具有陡峭侧壁的图案的情况下，当接近图案侧壁时，探针通过作用在探针和侧壁之间的范德华力附着在侧壁上，并且在测量的轮廓中发生错误 侧壁部分。 当测量具有几乎等于探针直径的槽宽度的图案时，探针粘附到两个侧壁，探针不能到达凹槽底部，并且不能测量凹槽深度。 当使用细长的探针测量微观高纵横比图案时探头粘附到图案侧壁上时，通过检测探针与图案侧壁的粘附力使探针到达侧壁底部，并暂时增加 探针和样品之间的接触力。 此外，通过利用图案的形状数据获得悬臂的扭转量的数据，通过获得的扭转量的数据来校正侧壁部分的粘附的轮廓误差。

    PROBE CONTROL METHOD FOR SCANNING PROBE MICROSCOPE
    2.
    发明申请
    PROBE CONTROL METHOD FOR SCANNING PROBE MICROSCOPE 审中-公开
    用于扫描探针显微镜的探测控制方法

    公开(公告)号：US20080087820A1

    公开(公告)日：2008-04-17

    申请号：US11867476

    申请日：2007-10-04

    申请人： Toru KURENUMA ,  Hiroaki Yanagimoto ,  Yukio Kembo ,  Yuichi Kunitomo ,  Takafumi Morimoto ,  Satoshi Sekino

    发明人： Toru KURENUMA ,  Hiroaki Yanagimoto ,  Yukio Kembo ,  Yuichi Kunitomo ,  Takafumi Morimoto ,  Satoshi Sekino

    IPC分类号： G01N23/00

    CPC分类号： G01Q10/06 ,  G01Q30/06

    摘要： This probe control method is applied to the scanning probe microscope having a probe section with a probe pointed at a sample, a detection section for detecting physical quantity between the sample and the probe, a measurement section for measuring the surface of the sample to obtain the surface information on the basis of the physical quantity when scanning the sample surface by the probe, and a movement mechanism with at least two degree of freedom. The probe control method has steps of moving the probe in a scanning direction different from the contact direction while making the probe come into contact with the sample surface, detecting the torsional state of the probe during the movement of the probe, and adjusting either or both of the rate in the scanning direction and the force in the contact direction on the basis of the detected value obtained by the detection step.

    摘要翻译： 将该探针控制方法应用于具有探针指向样品的探针部的扫描探针显微镜，用于检测样品与探针之间的物理量的检测部，测定样品表面的测定部， 基于通过探针扫描样品表面时的物理量的表面信息，以及具有至少两个自由度的移动机构。 探针控制方法具有使探针沿着与接触方向不同的扫描方向移动的步骤，同时使探针与样品表面接触，检测探针移动期间探针的扭转状态，并且调节任一或两者 基于通过检测步骤获得的检测值，扫描方向上的速率和接触方向上的力。

    Scanning probe microscope and method of measurement
    4.
    发明授权
    Scanning probe microscope and method of measurement 失效
    扫描探针显微镜及测量方法

    公开(公告)号：US06881954B1

    公开(公告)日：2005-04-19

    申请号：US09626106

    申请日：2000-07-26

    申请人： Takafumi Morimoto ,  Hiroshi Kuroda

    发明人： Takafumi Morimoto ,  Hiroshi Kuroda

    IPC分类号： G01N23/00 ,  G01Q20/04 ,  G01Q60/00 ,  H01J37/26

    CPC分类号： G01Q10/06 ,  G01Q30/06 ,  Y10S977/851

    摘要： A scanning probe microscope has an XY scanner for making a probe scan a sample surface, an approach and separate drive element for making the probe approach to the sample surface at a sampling position and separate the probe from the sample surface during movement between the sampling positions, and a servo controller for holding the distance between the probe and the sample surface at a reference distance during measurement at the sampling position. A plurality of scattered measurement locations are set away from each other as sampling positions. The approach and separation movements are performed at each sampling position. When measuring the surface by the probe at a sampling position and while making the probe move between sampling positions, servo control by the servo controller is continued. This makes it possible to quickly measure the surface by a simple controller and possible to measure a wide area or measure a high aspect ratio. When making the probe approach to the sample surface for measurement at the sampling position, it is also possible to cause a scan motion for tandem movement at an equal speed and in the same direction as the scan motion by the XY scanner.

    摘要翻译： 扫描探针显微镜具有用于使探针扫描样品表面的XY扫描器，用于使探针在取样位置处接近样品表面的方法和分离的驱动元件，并且在采样位置之间移动期间将探针与样品表面分离 以及伺服控制器，用于在采样位置的测量期间将探头和样品表面之间的距离保持在参考距离处。 将多个分散的测量位置彼此设置为采样位置。 在每个采样位置执行进场和分离运动。 当在采样位置通过探头测量表面时，并且当探头在采样位置之间移动时，伺服控制器进行伺服控制。 这使得可以通过简单的控制器快速测量表面，并且可以测量宽的面积或测量高的纵横比。 当在采样位置使探针接近样品表面进行测量时，也可以以与XY扫描仪的扫描运动相同的速度和相同的方向进行串联移动的扫描运动。

    Scanning probe microscope
    5.
    发明授权
    Scanning probe microscope 失效
    扫描探针显微镜

    公开(公告)号：US07631548B2

    公开(公告)日：2009-12-15

    申请号：US11737779

    申请日：2007-04-20

    申请人： Shuichi Baba ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Toru Kurenuma ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Yukio Kembo ,  Manabu Edamura

    发明人： Shuichi Baba ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Toru Kurenuma ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Yukio Kembo ,  Manabu Edamura

    IPC分类号： G01B5/28

    CPC分类号： G01Q60/28 ,  G01Q10/06 ,  G01Q30/04

    摘要： With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed. Further, a calibration sample is used in a given environment (given temperature and humidity) to acquire a force curve for at least one point. Information obtained from the force curve is used to correct measurements to display the distribution of the sample property.

    摘要翻译： 使用扫描探针显微镜，如果使用允许探针进入和退出样本的扫描方案测量多个样品特性，则需要在最小所需测量时间内精确可靠地检测样品性质。 此外，探针和样品之间的作用力根据探针的类型和探针尖端的磨损情况而变化。 因此，不利的是，使用不同探针获得的特性值不能相互比较，除非消除了测量探针的人为影响。 根据本发明，利用扫描探针显微镜，使探针与样品间歇接触，同时驱动装置反复允许探针以可变的幅度从样品接近和退出。 因此，以高速度获取样品特性。 此外，在给定的环境（给定的温度和湿度）中使用校准样品以获得至少一个点的力曲线。 从力曲线获得的信息用于校正测量值以显示样品属性的分布。

    Scanning probe microscope and measurement method using the same
    7.
    发明授权
    Scanning probe microscope and measurement method using the same 失效
    扫描探针显微镜和测量方法使用相同

    公开(公告)号：US07333191B2

    公开(公告)日：2008-02-19

    申请号：US10893364

    申请日：2004-07-19

    申请人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

    发明人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

    IPC分类号： G01B1/00

    CPC分类号： G01Q20/02 ,  G01Q30/06 ,  G01Q70/04

    摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.

    摘要翻译： 扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面 样品。 上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中， 通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配 测量姿势。

    Scanning Probe Microscope
    8.
    发明申请
    Scanning Probe Microscope 失效
    扫描探头显微镜

    公开(公告)号：US20070266780A1

    公开(公告)日：2007-11-22

    申请号：US11737779

    申请日：2007-04-20

    申请人： SHUICHI BABA ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Toru Kurenuma ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Yukio Kembo ,  Manabu Edamura

    发明人： SHUICHI BABA ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Toru Kurenuma ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Yukio Kembo ,  Manabu Edamura

    IPC分类号： G01N13/10

    CPC分类号： G01Q60/28 ,  G01Q10/06 ,  G01Q30/04

    摘要： With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed. Further, a calibration sample is used in a given environment (given temperature and humidity) to acquire a force curve for at least one point. Information obtained from the force curve is used to correct measurements to display the distribution of the sample property.

    摘要翻译： 使用扫描探针显微镜，如果使用允许探针进入和退出样本的扫描方案测量多个样品特性，则需要在最小所需测量时间内精确可靠地检测样品性质。 此外，探针和样品之间的作用力根据探针的类型和探针尖端的磨损情况而变化。 因此，不利的是，使用不同探针获得的特性值不能相互比较，除非消除了测量探针的人为影响。 根据本发明，利用扫描探针显微镜，使探针与样品间歇接触，同时驱动装置反复允许探针以可变的幅度从样品接近和退出。 因此，以高速度获取样品特性。 此外，在给定的环境（给定的温度和湿度）中使用校准样品以获得至少一个点的力曲线。 从力曲线获得的信息用于校正测量值以显示样品属性的分布。

    Probe replacement method for scanning probe microscope
    9.
    发明申请
    Probe replacement method for scanning probe microscope 审中-公开
    用于扫描探针显微镜的探头更换方法

    公开(公告)号：US20070180889A1

    公开(公告)日：2007-08-09

    申请号：US10565509

    申请日：2004-03-22

    申请人： Ken Murayama ,  Yokio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Takashi Furutani

    发明人： Ken Murayama ,  Yokio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Takashi Furutani

    IPC分类号： G12B21/00 ,  G01N13/10

    CPC分类号： G01Q10/06 ,  G01Q30/06 ,  G01Q70/02

    摘要： A probe replacement method for a scanning probe microscope for measuring the surface of a sample, having a cantilever (21) having a probe (20), and a measurement unit for measuring a physical quantity between the probe and sample. The scanning probe microscope is provided with a cantilever mount (22), a cantilever cassette (30), an XY stage (14) and Z stage (15) for moving the cantilever cassette, and an optical microscope (18). In a first step, a cantilever is selected from the cantilever cassette and is mounted on the cantilever mount. In a second step, an optical microscope is moved and the mounted cantilever is set in a prescribed position in the field of view after the cantilever is mounted in the scanning probe microscope. In the second step, a step is provided for moving the optical microscope side or the cantilever side and performing positional adjustment.

    摘要翻译： 一种用于测量具有具有探针（20）的悬臂（21）的样品表面的扫描探针显微镜的探针替换方法和用于测量探针和样品之间的物理量的测量单元。 扫描探针显微镜具有用于移动悬臂盒的悬臂安装座（22），悬臂盒（30），XY台（14）和Z台（15）以及光学显微镜（18）。 在第一步中，从悬臂盒中选择悬臂，并安装在悬臂安装座上。 在第二步骤中，移动光学显微镜，并且在将悬臂安装在扫描探针显微镜中之后，将安装的悬臂设置在视野中的规定位置。 在第二步骤中，提供移动光学显微镜侧或悬臂侧并执行位置调整的步骤。