公开(公告)号：US09581176B2

公开(公告)日：2017-02-28

申请号：US13979436

申请日：2012-01-19

申请人： Shiho Izumi ,  Manabu Edamura ,  Kouichi Shibata ,  Manabu Sugiura ,  Takatoshi Ooki

发明人： Shiho Izumi ,  Manabu Edamura ,  Kouichi Shibata ,  Manabu Sugiura ,  Takatoshi Ooki

IPC分类号： F15B15/18 ,  B60T8/00 ,  B60L1/00 ,  E02F9/12 ,  E02F9/20 ,  B60K6/28 ,  B60K6/485

CPC分类号： F15B15/18 ,  B60K6/28 ,  B60K6/485 ,  B60Y2400/114 ,  E02F9/123 ,  E02F9/2091 ,  E02F9/2095 ,  Y02T10/6226

摘要： Both a hydraulic motor and an electric motor are provided for driving an upper swing structure. When the amount of electricity stored in a capacitor is appropriate, the upper swing structure is driven by both the hydraulic motor and the electric motor. When the amount of electricity stored in the capacitor exceeds an appropriate value, the mode is changed over to a mode in which the upper swing structure is driven only by the hydraulic motor, and an assist electric generation motor is assist-driven or engine-driven to thereby rapidly return the amount of electricity stored in the capacitor to an appropriate range. The capacity of the capacitor can be reduced, and the amount of electricity stored in the capacitor can be managed without losing the operability of swing motion.

摘要翻译： 提供液压马达和电动马达用于驱动上部摆动结构。 当存储在电容器中的电量适当时，上部摆动结构由液压马达和电动马达驱动。 当存储在电容器中的电量超过适当的值时，该模式转换到仅由液压马达驱动上部摆动结构的模式，并且辅助发电马达是辅助驱动的或发动机驱动的 从而将存储在电容器中的电量迅速返回到适当的范围。 可以降低电容器的容量，并且可以在不损失摆动运动的可操作性的情况下管理存储在电容器中的电量。

公开(公告)号：US09065361B2

公开(公告)日：2015-06-23

申请号：US13879429

申请日：2011-10-12

申请人： Shinji Ishihara ,  Shinya Imura ,  Seiji Ishida ,  Masatoshi Hoshino ,  Manabu Edamura ,  Mitsuo Sonoda ,  Takatoshi Ooki ,  Takako Satake

发明人： Shinji Ishihara ,  Shinya Imura ,  Seiji Ishida ,  Masatoshi Hoshino ,  Hidetoshi Satake ,  Manabu Edamura ,  Mitsuo Sonoda ,  Takatoshi Ooki

IPC分类号： H02P1/00 ,  H02P7/00 ,  B60W10/06 ,  B60W10/08 ,  B60W10/26 ,  B60W20/00 ,  E02F9/20 ,  B60W10/30 ,  B60K25/00 ,  B60K25/02

CPC分类号： B60W20/13 ,  B60C23/0471 ,  B60C23/061 ,  B60K2025/005 ,  B60K2025/024 ,  B60W10/06 ,  B60W10/08 ,  B60W10/26 ,  B60W10/30 ,  B60W20/00 ,  B60W2510/0638 ,  B60W2510/244 ,  B60W2710/0644 ,  B60W2710/083 ,  B60W2710/244 ,  B60Y2200/412 ,  E02F9/2075 ,  H02P7/00 ,  Y02T10/6286

摘要： In a hybrid construction machine, there is provided a drive control device which realizes in, as a simple a structure as possible, control means of a motor generator, which is capable of preventing rapid decreases in the state of charge. The control means, which calculates a motor torque command value to be output to the motor generator, is characterized by calculating the motor torque command value, based on a difference between an actual state-of-charge and a prescribed target state-of-charge and a torque margin obtained by a difference between a maximum torque of an engine determined based on an actual rotational speed of the engine and an actual torque of the engine.

摘要翻译： 在混合动力施工机械中，提供了一种驱动控制装置，其实现了尽可能简单的结构，其能够防止充电状态的快速降低，电动发电机的控制装置。 计算要输出到电动发电机的电动机转矩指令值的控制装置的特征在于，基于实际充电状态与规定的目标充电状态之间的差来计算电动机转矩指令值 以及通过基于发动机的实际转速确定的发动机的最大扭矩与发动机的实际转矩之间的差异获得的转矩余量。

公开(公告)号：US20140199148A1

公开(公告)日：2014-07-17

申请号：US13982563

申请日：2012-01-05

申请人： Manabu Edamura ,  Takatoshi Ooki ,  Takako Satake ,  Koiji Ishikawa ,  Shinya Imura ,  Shinji Nishikawa

发明人： Shinya Imura ,  Kouji Ishikawa ,  Hidetoshi Satake ,  Takatoshi Ooki ,  Shinji Nishikawa ,  Manabu Edamura

IPC分类号： E02F9/12

CPC分类号： E02F9/123 ,  E02F9/2037 ,  E02F9/2095 ,  Y10S903/903 ,  Y10S903/93

摘要： In hybrid construction machine employing a hydraulic motor and an electric motor for the driving of the swing structure, satisfactory operability of a combined operation of the swing structure and other actuators is secured irrespective of the operating status of the electric motor.A control device of the hybrid construction machine executes control selected from: hydraulic/electric complex swing control for driving the swing structure by total torque of the electric motor and the hydraulic motor when a swing operating lever device is operated; and hydraulic solo swing control for driving the swing structure by the torque of the hydraulic motor alone when the swing operating lever device is operated. The control device controls drive torque or driving force of each of the electric motor, the hydraulic motor and a second hydraulic actuator so that the relationship between the position or the speed of the second hydraulic actuator and the swing angle or the swing speed of the swing structure in the combined operation when the swing operating lever device and a second operating lever device are operated at the same time during the hydraulic/electric complex swing control is substantially identical with the relationship in the combined operation during the hydraulic solo swing control.

摘要翻译： 在使用液压马达和用于驱动摆动结构的电动机的混合动力施工机械中，无论电动机的运行状态如何，均可确保摆动结构和其它致动器的组合操作的可操作性。 混合动力施工机械的控制装置执行选择的控制装置：当操作摆动操作杆装置时，通过电动机和液压马达的总转矩来驱动摆动结构的液压/电动复合摇摆控制; 以及当操作摆动操作杆装置时单独通过液压马达的扭矩驱动摆动结构的液压独奏摆动控制。 控制装置控制电动机，液压马达和第二液压致动器中的每一个的驱动扭矩或驱动力，使得第二液压致动器的位置或速度与摆动角度或摆动摆动速度之间的关系 在液压/电气复合体摆动控制期间当摆动操作杆装置和第二操作杆装置同时操作时的组合操作中的结构与液压独奏摇摆控制期间的组合操作的关系基本相同。

公开(公告)号：US20140103874A1

公开(公告)日：2014-04-17

申请号：US13879444

申请日：2011-10-12

申请人： Shiho Izumi ,  Manabu Edamura ,  Takako Satake ,  Yusuke Kajita ,  Masataka Sasaki ,  Seiji Ishida ,  Kazuo Fujishima

发明人： Seiji Ishida ,  Masataka Sasaki ,  Yusuke Kajita ,  Hidetoshi Satake ,  Manabu Edamura ,  Kazuo Fujishima ,  Shiho Izumi

IPC分类号： B60L11/18

CPC分类号： B60L11/1809 ,  B60L1/003 ,  B60L11/14 ,  B60L11/1816 ,  B60L11/1862 ,  B60L2200/40 ,  B60L2240/423 ,  B60L2240/427 ,  B60L2240/547 ,  B60L2240/80 ,  E02F9/2075 ,  E02F9/2091 ,  F02D29/02 ,  Y02T10/642 ,  Y02T10/70 ,  Y02T10/7005 ,  Y02T10/7044 ,  Y02T10/705 ,  Y02T10/7072 ,  Y02T10/7077 ,  Y02T90/14

摘要： Construction machine capable of incorporating an engine and using an external power source. The construction machine includes an electrical storage device performing a charge with the external power source, uses the electrical storage device to provide assist when the power of the engine is insufficient, uses an electrical charge in the electrical storage device systematically in accordance with work time, and efficiently uses the electrical storage device by controlling its discharge amount in accordance with load status. The construction machine includes the engine, accessory loads connected to the engine, an assist electric motor driven by the engine, electrical power converters for converting an AC current, which is the output current of the assist electric motor, to a DC current, and the electrical storage device connected to the DC side of each electrical power converter. The electrical storage device becomes charged through a charging device from the external power source.

摘要翻译： 能够结合发动机并使用外部电源的施工机械。 施工机械包括与外部电源进行充电的蓄电装置，当发动机的功率不足时，使用蓄电装置提供辅助，根据工作时间系统地使用蓄电装置中的电荷， 并且通过根据负载状态控制其排出量来有效地使用蓄电装置。 施工机械包括发动机，与发动机连接的附件负载，由发动机驱动的辅助电动机，将作为辅助电动机的输出电流的交流电转换成直流电的电力转换器， 电气存储装置连接到每个电力转换器的直流侧。 蓄电装置通过充电装置从外部电源充电。

公开(公告)号：US20130311052A1

公开(公告)日：2013-11-21

申请号：US13981659

申请日：2012-03-13

申请人： Manabu Sugiura ,  Toshihiko Watanabe ,  Takenori Hiroki ,  Manabu Edamura ,  Takako Satake ,  Kouji Ishikawa

发明人： Manabu Edamura ,  Kouji Ishikawa ,  Manabu Sugiura ,  Takenori Hiroki ,  Toshihiko Watanabe ,  Hidetoshi Satake

IPC分类号： E02F9/20

CPC分类号： E02F9/2025 ,  B60L1/003 ,  B60L1/20 ,  B60L3/0046 ,  B60L3/0061 ,  B60L3/0069 ,  B60L11/005 ,  B60L11/123 ,  B60L15/2009 ,  B60L2200/40 ,  B60L2210/40 ,  B60L2220/14 ,  B60L2240/36 ,  B60L2240/421 ,  B60L2240/423 ,  B60L2240/425 ,  B60L2240/441 ,  B60L2240/443 ,  B60L2240/545 ,  B60L2240/547 ,  B60L2240/549 ,  B60L2250/10 ,  B60L2250/24 ,  E02F9/123 ,  E02F9/2091 ,  E02F9/2095 ,  E02F9/2228 ,  E02F9/2235 ,  E02F9/2282 ,  E02F9/2285 ,  E02F9/2296 ,  E02F9/267 ,  Y02T10/6217 ,  Y02T10/645 ,  Y02T10/7005 ,  Y02T10/7022 ,  Y02T10/7077 ,  Y02T10/7241 ,  Y02T10/7275

摘要： Disclosed is a hybrid construction machine that includes a control device and an auxiliary control device. The control device switches between a hydraulic/electric complex swing mode in which both the electric motor and the hydraulic motor are driven to drive the swing structure by using the sum of the torque of the electric motor and the torque of the hydraulic motor; and a hydraulic-only swing mode in which only the hydraulic motor is driven to drive the swing structure by using only the torque of the hydraulic motor. The auxiliary control device includes a monitoring controller that is connected to the control device and to the electric motor to monitor the temperature or electrical leakage in the electric motor as a substitute controller for the power control unit or the electrical storage device when the power control unit or the electrical storage device is removed due to a fault.

摘要翻译： 公开了一种混合式施工机械，其包括控制装置和辅助控制装置。 控制装置在通过使用电动机的转矩和液压马达的转矩的总和来驱动电动机和液压马达两者来驱动摆动结构的液压/电动复合摇摆模式之间切换; 仅液压马达被驱动以仅使用液压马达的转矩来驱动摆动结构的仅液压摆动模式。 辅助控制装置包括监视控制器，其连接到控制装置和电动机，以监视作为电力控制单元或蓄电装置的替代控制器的电动机中的温度或漏电，当电力控制单元 或由于故障而将电存储装置移除。

公开(公告)号：US20130205454A1

公开(公告)日：2013-08-08

申请号：US13726764

申请日：2012-12-26

申请人： Shuichi BABA ,  Masahiro WATANABE ,  Toshihiko NAKATA ,  Yukio KEMBO ,  Toru KURENUMA ,  Takafumi MORIMOTO ,  Manabu EDAMURA ,  Satoshi SEKINO

发明人： Shuichi BABA ,  Masahiro WATANABE ,  Toshihiko NAKATA ,  Yukio KEMBO ,  Toru KURENUMA ,  Takafumi MORIMOTO ,  Manabu EDAMURA ,  Satoshi SEKINO

IPC分类号： G01Q10/00

CPC分类号： G01Q10/00 ,  B82Y35/00 ,  G01Q60/28 ,  G01Q60/34

摘要： In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.

摘要翻译： 在测量具有陡峭侧壁的图案的情况下，当接近图案侧壁时，探针通过作用在探针和侧壁之间的范德华力附着在侧壁上，并且在测量的轮廓中发生错误 侧壁部分。 当测量具有几乎等于探针直径的槽宽度的图案时，探针粘附到两个侧壁，探针不能到达凹槽底部，并且不能测量凹槽深度。 当使用细长的探针测量微观高纵横比图案时探头粘附到图案侧壁上时，通过检测探针与图案侧壁的粘附力使探针到达侧壁底部，并暂时增加 探针和样品之间的接触力。 此外，通过利用图案的形状数据获得悬臂的扭转量的数据，通过获得的扭转量的数据来校正侧壁部分的粘附的轮廓误差。

公开(公告)号：US20130058750A1

公开(公告)日：2013-03-07

申请号：US13640378

申请日：2011-05-16

申请人： Takenori Hiroki ,  Manabu Edamura ,  Toshihiko Ishida ,  Manabu Sugiura ,  Hidetoshi Satake ,  Kouji Ishikawa ,  Takatoshi Ooki ,  Shinji Nishikawa

发明人： Takenori Hiroki ,  Manabu Edamura ,  Toshihiko Ishida ,  Manabu Sugiura ,  Hidetoshi Satake ,  Kouji Ishikawa ,  Takatoshi Ooki ,  Shinji Nishikawa

IPC分类号： E02F9/20

CPC分类号： E02F9/123 ,  B60L1/003 ,  B60L3/003 ,  B60L3/0046 ,  B60L3/0061 ,  B60L7/14 ,  B60L11/005 ,  B60L11/123 ,  B60L11/14 ,  B60L2200/40 ,  B60L2240/423 ,  B60L2240/427 ,  B60L2240/429 ,  B60L2240/527 ,  B60L2240/529 ,  B60L2240/547 ,  B60L2240/549 ,  B60L2260/26 ,  E02F9/207 ,  E02F9/2075 ,  E02F9/2091 ,  E02F9/2095 ,  E02F9/226 ,  E02F9/2296 ,  Y02T10/6217 ,  Y02T10/642 ,  Y02T10/7022 ,  Y02T10/7077

摘要： A hybrid construction machine is capable of performing satisfactory operations even when trouble occurs that disables the electric motor from outputting torque. The hybrid construction has both a hydraulic motor and an electric motor driving the swing structure and a controller for switching between a hydraulic/electric hybrid swing mode (using both the hydraulic motor and the electric motor) and a hydraulic-alone swing mode (using only the hydraulic motor). The switching is executed while achieving satisfactory operability and performance in each mode. Normally, an energy saving operation is performed in the hydraulic/electric hybrid swing mode. When the electric amount of an electricity storage device has gone out of a prescribed range or an abnormality has occurred in an electric system (e.g., failure of an inverter), the swing mode is switched to the hydraulic-alone swing mode so that driving with normal braking torque is possible by the hydraulic motor alone.

摘要翻译： 即使发生故障而使电动机输出转矩的混合式施工机械也能够进行令人满意的操作。 混合动力结构具有驱动摆动结构的液压马达和电动马达以及用于在液压/电动混合摆动模式（使用液压马达和电动马达）两者之间进行切换的控制器和仅液压单独摆动模式 液压马达）。 在每种模式下实现令人满意的可操作性和性能的同时执行切换。 通常，在液压/电动混合摆动模式中进行节能运转。 当蓄电装置的电量在电气系统中（例如，逆变器的故障）已经超出规定范围或发生异常时，摆动模式切换到单独的液压摆动模式，以便与 通过单独的液压马达可以实现正常的制动转矩。

公开(公告)号：US20100263796A1

公开(公告)日：2010-10-21

申请号：US12783686

申请日：2010-05-20

申请人： Manabu Edamura ,  Go Miya ,  Ken Yoshioka

发明人： Manabu Edamura ,  Go Miya ,  Ken Yoshioka

IPC分类号： H01L21/465 ,  C23F1/08 ,  C23C16/00

CPC分类号： H01J37/321

摘要： A plasma processing apparatus includes a processing chamber, a sample stage for mounting an object to be processed, a power supply, and at least one induction coil connected to the power supply. The induction coil is formed by connecting at least two identical coil elements in a parallel circuit-like arrangement so that current flows in each of the plurality of identical coil elements in a same direction when viewed from the sample stage. The induction coil is positioned so that a center thereof corresponds to a center of the object, and input ends of the coil elements are displaced circumferentially at equal angular intervals calculated by dividing 360° by the number of identical coil elements.

摘要翻译： 等离子体处理装置包括处理室，用于安装待加工物体的样品台，电源以及连接到电源的至少一个感应线圈。 感应线圈通过以并联电路状布置连接至少两个相同的线圈元件而形成，使得当从样品台观察时，电流以相同的方向在多个相同的线圈元件中的每一个中流动。 感应线圈被定位成使得其中心对应于物体的中心，并且线圈元件的输入端部以相等的角度间隔沿圆周方向移位，其通过将360°除以相同线圈元件的数量而计算。

公开(公告)号：US20070184563A1

公开(公告)日：2007-08-09

申请号：US11735657

申请日：2007-04-16

申请人： Go Miya ,  Manabu Edamura ,  Ken Yoshioka ,  Ryoji Nishio

发明人： Go Miya ,  Manabu Edamura ,  Ken Yoshioka ,  Ryoji Nishio

IPC分类号： H01L21/00 ,  H01L21/302 ,  H01L21/306

CPC分类号： H01J37/32449 ,  H01J37/3244 ,  H01L21/67017 ,  H01L21/67069

摘要： A plasma etching method for a plasma etching apparatus including: a processing chamber for performing plasma etching on an object to be processed; a first gas supply source; a second gas supply source; a first gas inlet for introducing a processing gas into the processing chamber; a second gas inlet for introducing a processing gas into the processing chamber; a flow rate regulator for regulating the flow rate of the processing gas; and a gas shunt for dividing the first processing gas into a plurality of portions, wherein the second processing gas is merged with at least one part between the gas shunt and the first gas inlet and between the gas shunt and the second gas inlet.

摘要翻译： 一种用于等离子体蚀刻装置的等离子体蚀刻方法，包括：处理室，用于对被处理物体进行等离子体蚀刻; 第一气体供应源; 第二气体供应源; 用于将处理气体引入处理室的第一气体入口; 用于将处理气体引入所述处理室的第二气体入口; 用于调节处理气体的流量的流量调节器; 以及用于将所述第一处理气体分成多个部分的气体分流器，其中所述第二处理气体与所述气体分流器和所述第一气体入口之间以及所述气体分流器和所述第二气体入口之间的至少一部分合并。

公开(公告)号：US20050224182A1

公开(公告)日：2005-10-13

申请号：US10921341

申请日：2004-08-19

申请人： Manabu Edamura ,  Go Miya ,  Ken Yoshioka

发明人： Manabu Edamura ,  Go Miya ,  Ken Yoshioka

IPC分类号： H05H1/46 ,  C23F1/00 ,  H01J37/32 ,  H01L21/205 ,  H01L21/3065

CPC分类号： H01J37/321

摘要： The invention provides an inductively coupled plasma apparatus capable of disposing a parallel coil with a large number of total turns in a relatively small space. The present plasma processing apparatus comprises a processing chamber for subjecting an object to plasma processing, an inlet means for introducing a processing gas into the processing chamber, an evacuation means for evacuating an interior of the processing chamber, a sample stage for placing the object, a power supply means for generating plasma, and at least one induction coil connected to the power supply means, wherein the induction coil is formed by connecting a plurality of identical coil elements 101 in a parallel circuit-like arrangement, the induction coil being positioned so that its center corresponds to a center of the object, and wherein input ends 101 in of the coil elements 101 are arranged at equal angular intervals calculated by dividing 360° by the number of coil elements, the coil elements having a three-dimensional structure in a radial direction and a height direction along a surface of an annular ring with an arbitrary cross-sectional shape.

摘要翻译： 本发明提供一种电感耦合等离子体装置，其能够在相对较小的空间中设置具有大量总匝数的平行线圈。 本等离子体处理装置包括用于对物体进行等离子体处理的处理室，用于将处理气体引入处理室的入口装置，用于抽出处理室内部的抽空装置，用于放置物体的样品台， 用于产生等离子体的电源装置和连接到电源装置的至少一个感应线圈，其中感应线圈通过以并联电路状布置连接多个相同的线圈元件101而形成，感应线圈定位成 其中心对应于物体的中心，并且其中线圈元件101中的输入端101a以360度乘以线圈元件的数量计算的等角度间隔布置，线圈元件具有三维结构 沿着具有任意横截面形状的环形环的表面的径向方向和高度方向。