公开(公告)号：US20110164095A1

公开(公告)日：2011-07-07

申请号：US12983833

申请日：2011-01-03

申请人： Masahisa Nawano ,  Takayuki Yonemura ,  Tomokazu Kobayashi

发明人： Masahisa Nawano ,  Takayuki Yonemura ,  Tomokazu Kobayashi

IPC分类号： B41J2/045 ,  H01L41/047 ,  H01L41/18 ,  H01L41/22 ,  B23P17/00

CPC分类号： B41J2/161 ,  B41J2/1629 ,  B41J2/1631 ,  H01L41/0973 ,  H01L41/1878 ,  H01L41/317

摘要： A method for manufacturing a piezoelectric element comprising forming a titanium film containing titanium; forming a platinum film containing platinum on the titanium film; forming a piezoelectric precursor film containing bismuth, lanthanum, iron and manganese on the platinum film; crystallizing the piezoelectric precursor film to form a piezoelectric layer by firing the piezoelectric precursor film in an atmosphere of an inert gas; and forming an electrode on the piezoelectric layer.

摘要翻译： 一种制造压电元件的方法，包括：形成含有钛的钛膜; 在钛膜上形成含有铂的铂膜; 在铂膜上形成含有铋，镧，铁和锰的压电前体膜; 通过在惰性气体的气氛中烧制压电前体膜，使压电前体膜结晶以形成压电层; 并在压电层上形成电极。

公开(公告)号：US08573754B2

公开(公告)日：2013-11-05

申请号：US12983833

申请日：2011-01-03

申请人： Masahisa Nawano ,  Takayuki Yonemura ,  Tomokazu Kobayashi

发明人： Masahisa Nawano ,  Takayuki Yonemura ,  Tomokazu Kobayashi

IPC分类号： B41J2/045 ,  H01L41/047

CPC分类号： B41J2/161 ,  B41J2/1629 ,  B41J2/1631 ,  H01L41/0973 ,  H01L41/1878 ,  H01L41/317

摘要： A method for manufacturing a piezoelectric element comprising forming a titanium film containing titanium; forming a platinum film containing platinum on the titanium film; forming a piezoelectric precursor film containing bismuth, lanthanum, iron and manganese on the platinum film; crystallizing the piezoelectric precursor film to form a piezoelectric layer by firing the piezoelectric precursor film in an atmosphere of an inert gas; and forming an electrode on the piezoelectric layer.

摘要翻译： 一种制造压电元件的方法，包括：形成含有钛的钛膜; 在钛膜上形成含有铂的铂膜; 在铂膜上形成含有铋，镧，铁和锰的压电前体膜; 通过在惰性气体的气氛中烧制压电前体膜，使压电前体膜结晶以形成压电层; 并在压电层上形成电极。

公开(公告)号：US08608290B2

公开(公告)日：2013-12-17

申请号：US13046658

申请日：2011-03-11

申请人： Takayuki Yonemura ,  Masahisa Nawano

发明人： Takayuki Yonemura ,  Masahisa Nawano

IPC分类号： B41J2/045

CPC分类号： H01L41/0533 ,  B41J2/045 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  H01L41/0815 ,  H01L41/0973 ,  H01L41/1878 ,  H01L41/318

摘要： A liquid ejecting head includes a plate which is composed of a material containing silicon, a titanium oxide layer which is disposed above the plate, a bismuth-containing layer which is disposed above the titanium oxide layer and contains bismuth, a first electrode which is disposed above the bismuth-containing layer and composed of platinum, a piezoelectric layer which is disposed above the first electrode and composed of a piezoelectric material containing at least bismuth, and a second electrode which is disposed above the piezoelectric layer.

摘要翻译： 液体喷射头包括由包含硅的材料构成的板，设置在板上方的氧化钛层，设置在钛氧化物层上方并含有铋的含铋层，设置在第一电极上的第一电极 位于上述含铋层上并由铂构成的压电层，设置在第一电极上方并由至少含有铋的压电材料构成的压电层，以及位于该压电体层的上方的第二电极。

公开(公告)号：US20110220734A1

公开(公告)日：2011-09-15

申请号：US13046658

申请日：2011-03-11

申请人： Takayuki Yonemura ,  Masahisa Nawano

发明人： Takayuki Yonemura ,  Masahisa Nawano

IPC分类号： B05B1/08

CPC分类号： H01L41/0533 ,  B41J2/045 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  H01L41/0815 ,  H01L41/0973 ,  H01L41/1878 ,  H01L41/318

摘要： A liquid ejecting head includes a plate which is composed of a material containing silicon, a titanium oxide layer which is disposed above the plate, a bismuth-containing layer which is disposed above the titanium oxide layer and contains bismuth, a first electrode which is disposed above the bismuth-containing layer and composed of platinum, a piezoelectric layer which is disposed above the first electrode and composed of a piezoelectric material containing at least bismuth, and a second electrode which is disposed above the piezoelectric layer.

摘要翻译： 液体喷射头包括由包含硅的材料构成的板，设置在板上方的氧化钛层，设置在钛氧化物层上方并含有铋的含铋层，设置在第一电极上的第一电极 位于上述含铋层上并由铂构成的压电层，设置在第一电极上方并由至少含有铋的压电材料构成的压电层，以及位于该压电体层的上方的第二电极。

公开(公告)号：US20110164098A1

公开(公告)日：2011-07-07

申请号：US12983847

申请日：2011-01-03

申请人： Tomokazu Kobayashi ,  Masahisa Nawano

发明人： Tomokazu Kobayashi ,  Masahisa Nawano

IPC分类号： B41J2/045 ,  H01L41/16 ,  H01L41/22

CPC分类号： H01L41/318 ,  B41J2/055 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  H01L41/0973 ,  H01L41/187 ,  H01L41/316 ,  H01L41/319

摘要： A piezoelectric element comprising a first electrode, a piezoelectric layer containing bismuth lanthanum iron and manganese formed above the first electrode, and a second electrode formed above the piezoelectric layer. The piezoelectric layer contains crystals preferentially oriented in a (111) plane.

摘要翻译： 一种压电元件，包括第一电极，含有铋铁铋的压电层和形成在所述第一电极上的锰，以及形成在所述压电层上方的第二电极。 压电层含有在（111）面内优先取向的晶体。

公开(公告)号：US08740355B2

公开(公告)日：2014-06-03

申请号：US13316212

申请日：2011-12-09

申请人： Masahisa Nawano ,  Tomokazu Kobayashi

发明人： Masahisa Nawano ,  Tomokazu Kobayashi

IPC分类号： B41J2/045

CPC分类号： H01L41/0973 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  H01L41/0478 ,  H01L41/0805 ,  H01L41/1878 ,  H01L41/318

摘要： A liquid ejecting head includes a pressure generating chamber communicating with a nozzle aperture, and a piezoelectric element including a piezoelectric layer and electrodes that apply a voltage to the piezoelectric layer. The piezoelectric layer is made of a complex oxide having a perovskite structure. The piezoelectric layer contains bismuth, barium, iron and titanium. The piezoelectric layer has an intensity ratio of a (111) orientation intensity to a (100) orientation intensity of 3 or more.

摘要翻译： 液体喷射头包括与喷嘴孔连通的压力产生室，以及包括压电层的压电元件和向压电层施加电压的电极。 压电层由具有钙钛矿结构的复合氧化物制成。 压电层含有铋，钡，铁和钛。 压电层的（111）取向强度与（100）取向强度的强度比为3以上。

公开(公告)号：US08567926B2

公开(公告)日：2013-10-29

申请号：US12983847

申请日：2011-01-03

申请人： Tomokazu Kobayashi ,  Masahisa Nawano

发明人： Tomokazu Kobayashi ,  Masahisa Nawano

IPC分类号： B41J2/045 ,  H01L41/00 ,  H01L41/18 ,  H01L41/187 ,  H02N2/00 ,  C04B35/495 ,  C04B35/00

CPC分类号： H01L41/318 ,  B41J2/055 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  H01L41/0973 ,  H01L41/187 ,  H01L41/316 ,  H01L41/319

摘要： A piezoelectric element comprising a first electrode, a piezoelectric layer containing bismuth lanthanum iron and manganese formed above the first electrode, and a second electrode formed above the piezoelectric layer. The piezoelectric layer contains crystals preferentially oriented in a (111) plane.

摘要翻译： 一种压电元件，包括第一电极，含有铋铁铋的压电层和形成在所述第一电极上的锰，以及形成在所述压电层上方的第二电极。 压电层含有在（111）面内优先取向的晶体。

公开(公告)号：US20110164097A1

公开(公告)日：2011-07-07

申请号：US12983844

申请日：2011-01-03

申请人： Masahisa Nawano ,  Kazuya Kitada

发明人： Masahisa Nawano ,  Kazuya Kitada

IPC分类号： B41J2/045 ,  H01L41/18

CPC分类号： B41J2/055 ,  B41J2/14233 ,  B41J2/1629 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  H01L41/0973 ,  H01L41/1878 ,  H01L41/318

摘要： A piezoelectric element comprising a piezoelectric layer containing bismuth, lanthanum iron manganese and titanium and a electrode formed above the piezoelectric layer.

摘要翻译： 一种压电元件，包括含有铋，镧铁锰和钛的压电层和形成在压电层上的电极。

公开(公告)号：US08662644B2

公开(公告)日：2014-03-04

申请号：US12983844

申请日：2011-01-03

申请人： Masahisa Nawano ,  Kazuya Kitada

发明人： Masahisa Nawano ,  Kazuya Kitada

IPC分类号： B41J2/045 ,  H01L41/18

CPC分类号： B41J2/055 ,  B41J2/14233 ,  B41J2/1629 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  H01L41/0973 ,  H01L41/1878 ,  H01L41/318

摘要： A piezoelectric element comprising a piezoelectric layer containing bismuth, lanthanum iron manganese and titanium and a electrode formed above the piezoelectric layer.

摘要翻译： 一种压电元件，包括含有铋，镧铁锰和钛的压电层和形成在压电层上的电极。

公开(公告)号：US08345461B2

公开(公告)日：2013-01-01

申请号：US12045135

申请日：2008-03-10

申请人： Masahisa Nawano

发明人： Masahisa Nawano

IPC分类号： G11C11/22

CPC分类号： H01L21/02197 ,  H01G4/085 ,  H01G4/1218 ,  H01G4/33 ,  H01L21/022 ,  H01L21/02266 ,  H01L21/02271 ,  H01L21/02282 ,  H01L21/31691 ,  H01L27/11502 ,  H01L27/11507 ,  H01L28/57

摘要： A ferroelectric capacitor includes: a ferroelectric film, and a lower electrode and an upper electrode interposing the ferroelectric film, wherein the ferroelectric film includes a first ferroelectric layer of ferroelectric material having a perovskite type crystal structure expressed by a general formula ABO3 formed by a metal organic chemical vapor deposition method, a second ferroelectric layer of ferroelectric material in which a part of B site element in ferroelectric material having a perovskite type crystal structure expressed by a general formula ABO3 is replaced with Nb, and a third ferroelectric layer of ferroelectric material having a perovskite type crystal structure expressed by a general formula ABO3 formed by a sol-gel method, which are sequentially laminated from the side of the lower electrode.

摘要翻译： 强电介质电容器包括：强电介质膜，以及插入铁电体膜的下电极和上电极，其中，所述强电介质膜包括具有由金属形成的通式ABO3表示的钙钛矿型晶体结构的铁电体的第一铁电体层 有机化学气相沉积法，其中用Nb代替由具有由通式ABO3表示的钙钛矿型晶体结构的铁电材料中的B位元素的一部分的铁电体材料的第二铁电层和具有Nb的铁电体的第三铁电层， 由溶胶 - 凝胶法形成的通式ABO3表示的钙钛矿型晶体结构从下电极的一侧依次层叠。