公开(公告)号：US07459708B2

公开(公告)日：2008-12-02

申请号：US11337539

申请日：2006-01-24

申请人： Masaki Inoue ,  Hironobu Yabuta ,  Taku Sumitomo ,  Kyohei Seki ,  Masaki Yoshioka

发明人： Masaki Inoue ,  Hironobu Yabuta ,  Taku Sumitomo ,  Kyohei Seki ,  Masaki Yoshioka

IPC分类号： H01J7/24 ,  G03F7/20

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70916

摘要： To suppress the adherence of debris as a result of a radiating fuel, such as tin or the like, within a vessel for forming high density and high temperature plasma of an extreme UV radiation source device, and to eliminate deposited tin and/or tin compounds with high efficiency, hydrogen radical producing parts are provided in the vessel; and hydrogen radicals are produced in the vessel so that deposition of tin and/or a tin compound is suppressed in the area with a low temperature of the device, such as a focusing mirror or the like, and the deposited tin and/or tin compound is eliminated.

摘要翻译： 为了抑制由用于形成极紫外辐射源装置的高密度和高温等离子体的容器内的辐射燃料（例如锡等）导致的碎片的附着，并且消除沉积的锡和/或锡化合物 在高效率的情况下，在该容器中提供氢根产生部件; 并且在容器中产生氢自由基，使得在诸如聚焦镜等的装置的低温区域和锡沉积的锡和/或锡化合物的区域中，锡和/或锡化合物的沉积被抑制 被淘汰。

公开(公告)号：US20060163500A1

公开(公告)日：2006-07-27

申请号：US11337539

申请日：2006-01-24

申请人： Masaki Inoue ,  Hironobu Yabuta ,  Taku Sumitomo ,  Kyohei Seki ,  Masaki Yoshioka

发明人： Masaki Inoue ,  Hironobu Yabuta ,  Taku Sumitomo ,  Kyohei Seki ,  Masaki Yoshioka

IPC分类号： H05G2/00 ,  G21G4/00 ,  H01J35/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70916

摘要： To suppress the adherence of debris as a result of a radiating fuel, such as tin or the like, within a vessel for forming high density and high temperature plasma of an extreme UV radiation source device, and to eliminate deposited tin and/or tin compounds with high efficiency, hydrogen radical producing parts are provided in the vessel; and hydrogen radicals are produced in the vessel so that deposition of tin and/or a tin compound is suppressed in the area with a low temperature of the device, such as a focusing mirror or the like, and the deposited tin and/or tin compound is eliminated.

摘要翻译： 为了抑制由用于形成极紫外辐射源装置的高密度和高温等离子体的容器内的辐射燃料（例如锡等）导致的碎片的附着，并且消除沉积的锡和/或锡化合物 在高效率的情况下，在该容器中提供氢根产生部件; 并且在容器中产生氢自由基，使得在诸如聚焦镜等的装置的低温区域和锡沉积的锡和/或锡化合物的区域中，锡和/或锡化合物的沉积被抑制 被淘汰。

公开(公告)号：US07656079B2

公开(公告)日：2010-02-02

申请号：US11362788

申请日：2006-02-28

申请人： Yoichi Mizukawa ,  Keita Kanazu ,  Masaki Yoshioka ,  Shinji Suzuki ,  Kyohei Seki

发明人： Yoichi Mizukawa ,  Keita Kanazu ,  Masaki Yoshioka ,  Shinji Suzuki ,  Kyohei Seki

IPC分类号： H01K9/00

CPC分类号： H01K7/00 ,  H01K9/08 ,  H01L21/67115 ,  H05B3/0033 ,  H05B2203/032

摘要： A heating device in which uniform heating of an article to be processed is possible even in the case a temperature change which leads to a loss of the uniformity of the temperature distribution in a narrowly delineated area, and in which a reduction in the size of the device is possible. The heating device has a plurality of heaters, each heater having a single bulb of transparent material in which there is a filament that is divided in the axial direction into several filament parts and the respective filament parts are supplied with power independently of each other.

摘要翻译： 即使在温度变化导致狭窄划定区域中的温度分布均匀性降低的情况下，也能够对待处理物品进行均匀加热的加热装置，其中， 设备是可能的。 加热装置具有多个加热器，每个加热器具有单个透明材料灯泡，其中存在沿轴向分成多个细丝部分的细丝，并且相应的灯丝部分彼此独立地供应电力。

公开(公告)号：US20060197454A1

公开(公告)日：2006-09-07

申请号：US11362788

申请日：2006-02-28

申请人： Yoichi Mizukawa ,  Keita Kanazu ,  Masaki Yoshioka ,  Shinji Suzuki ,  Kyohei Seki

发明人： Yoichi Mizukawa ,  Keita Kanazu ,  Masaki Yoshioka ,  Shinji Suzuki ,  Kyohei Seki

IPC分类号： H01J13/46

CPC分类号： H01K7/00 ,  H01K9/08 ,  H01L21/67115 ,  H05B3/0033 ,  H05B2203/032

摘要： A heating device in which uniform heating of an article to be processed is possible even in the case a temperature change which leads to a loss of the uniformity of the temperature distribution in a narrowly delineated area, and in which a reduction in the size of the device is possible. The heating device has a plurality of heaters, each heater having a single bulb of transparent material in which there is a filament that is divided in the axial direction into several filament parts and the respective filament parts are supplied with power independently of each other.

摘要翻译： 即使在温度变化导致狭窄划定区域中的温度分布均匀性降低的情况下，也能够对待处理物品进行均匀加热的加热装置，其中， 设备是可能的。 加热装置具有多个加热器，每个加热器具有单个透明材料灯泡，其中存在沿轴向分成多个细丝部分的细丝，并且相应的灯丝部分彼此独立地供应电力。

公开(公告)号：US5977722A

公开(公告)日：1999-11-02

申请号：US913111

申请日：1997-11-17

申请人： Yoshihisa Yokokawa ,  Tatuhiro Hiraoka ,  Masaki Inoue ,  Masaki Yoshioka ,  Tatushi Igarashi

发明人： Yoshihisa Yokokawa ,  Tatuhiro Hiraoka ,  Masaki Inoue ,  Masaki Yoshioka ,  Tatushi Igarashi

IPC分类号： H05B41/24 ,  H05B41/28 ,  H05B41/14

CPC分类号： H05B41/2806 ,  H05B41/24 ,  Y02B20/22

摘要： The invention relates to a device for operating a fluorescent discharge lamp of the outer electrode type. As claimed in the invention a switching device is turned on and off by driver signals with a stipulated frequency, by which on the secondary side of a transformer the periodic voltage waveform shown at A in FIG. 1 is produced. This voltage waveform is applied to the fluorescent discharge lamp of the outer electrode type, and thus operation is effected. For the above described periodic voltage waveform, with respect to repetition period t 2 Wo

摘要翻译： PCT No.PCT / JP97 / 00044 Sec。 371日期：1997年11月17日 102（e）日期1997年11月17日PCT 1997年1月13日PCT公布。 公开号WO97 / 26779 日期1997年7月24日本发明涉及一种用于操作外部电极类型的荧光放电灯的装置。 如本发明所述，通过具有规定频率的驱动器信号来接通和断开开关装置，在变压器的次级侧，图3中的A所示的周期性电压波形。 1。 该电压波形被施加到外部电极类型的荧光放电灯，从而进行操作。 对于上述周期性电压波形，对于重复周期t 2 Wo

公开(公告)号：US5889366A

公开(公告)日：1999-03-30

申请号：US981008

申请日：1997-12-24

申请人： Yoshihisa Yokokawa ,  Motomori Tada ,  Masaki Inoue ,  Masaki Yoshioka

发明人： Yoshihisa Yokokawa ,  Motomori Tada ,  Masaki Inoue ,  Masaki Yoshioka

IPC分类号： H01J61/02 ,  H01J61/70 ,  H01J65/04 ,  H01J11/00

CPC分类号： H01J61/025 ,  H01J61/70 ,  H01J65/046

摘要： The invention relates to a fluorescent lamp of the external electrode type and an irradiation unit using this fluorescent lamp. In a fluorescent lamp of the external electrode type, a glass tube with fluorescent material applied to its inside is hermetically filled with a suitable amount of rare gas, in the axial direction of the outside surface of the glass tube there is at least one pair of electrodes, and on the side which is opposite the aperture for emission of the light to the outside there is reflector material. The electrodes are at least partially translucent, and the reflector material is located in these translucent regions. In this way the electrostatic capacity of the lamp is not significantly reduced even if the electrodes are partially provided with translucent regions. The energy input into the lamp thus has a value which would be obtained essentially even if the translucent regions were absent. Therefore the light intensity can be increased according to the arrangement of the reflector material. The translucent regions can have any shapes, as in the form of slits, openings or the like. Furthermore, in a fluorescent lamp of the external electrode type the external electrodes exhibit light transmission. When the lamp is being operated the light is emitted to the outside from the aperture, and at the same time the light is emitted from the translucent regions which are located in the external electrodes. The light emitted from the translucent regions is reflected from a reflector device and is radiated from the opening of this U-shaped reflector device. Light intensity can be increased by the measure that the external electrodes of the lamp are partially translucent and that the light passed by the translucent regions is reflected by this reflector device and is radiated onto a region to be irradiated.

公开(公告)号：US06940684B2

公开(公告)日：2005-09-06

申请号：US10370579

申请日：2003-02-24

申请人： Masaki Yoshioka ,  Kenichi Masuda ,  Yuji Hata ,  Takeshi Nakazawa ,  Takayuki Umemoto

发明人： Masaki Yoshioka ,  Kenichi Masuda ,  Yuji Hata ,  Takeshi Nakazawa ,  Takayuki Umemoto

IPC分类号： G11B21/08 ,  G11B5/00 ,  G11B5/40 ,  G11B5/55 ,  G11B27/36 ,  G11B5/596

CPC分类号： G11B27/36 ,  G11B5/40 ,  G11B5/5547 ,  G11B2005/001 ,  G11B2005/0016 ,  G11B2220/20

摘要： When a head passes over a track with a projected item in a seek operation, the CPU delays a seek start time to conduct the seek by changing a period of time from a seek start position to a position of the track with a projected item. Or, the CPU conducts seek control by changing a speed table. Or, the CPU changes a sequence of items of a tag queue to obtain a seek locus not passing the projected item. By the control operation, a seek error due to thermal asperity is prevented and the head is not damaged. This also prevents appearance of a new projected item produced by contact between the magneto-resistive head and the projected item on the recording medium.

摘要翻译： 当在搜索操作中头部经过预定项目的轨道时，CPU通过将具有预测项目的从搜索开始位置到轨道的位置的时间段改变来延迟搜索开始时间以进行搜索。 或者，CPU通过更改速度表来进行搜索控制。 或者，CPU更改标签队列的一系列项目以获得未通过投影项目的搜索轨迹。 通过控制操作，防止由于热凹凸而产生的寻道误差，并且头部不被损坏。 这也防止了通过磁阻头与记录介质上的投影物体之间的接触产生的新的投影物品的外观。

公开(公告)号：US6084360A

公开(公告)日：2000-07-04

申请号：US147051

申请日：1998-09-25

申请人： Yoshihisa Yokokawa ,  Masaki Yoshioka ,  Takafumi Mizojiri

发明人： Yoshihisa Yokokawa ,  Masaki Yoshioka ,  Takafumi Mizojiri

IPC分类号： H05B41/24 ,  H05B41/28 ,  H05B41/16

CPC分类号： H05B41/2806 ,  H05B41/24 ,  Y02B20/22

摘要： A device for operation of a discharge lamp in which a dielectric barrier discharge lamp can discharge with high efficiency. A discharge lamp of the outside electrode type, a dielectric barrier discharge excimer lamp type, or the like, is operated by applying a lamp voltage of 1 kV to 10 kV with a periodic waveform by an operation circuit. In this lamp, within bulb including a dielectric, at least one type of rare gas is hermetically enclosed in a given amount. A dielectric barrier is located between at least one electrode and the gas, and a discharge is produced in the bulb via this dielectric barrier. The rise time or fall time of a waveform which represents a main energy supply time in the periodic waveform, is fixed at greater than or equal to 0.03 .mu.s and less than or equal to 9 .mu.s. Furthermore, the distance between the waveform which represents the main energy supply and a adjacent waveform which represents an adjacent main energy supply is greater than or equal to 3.4 .mu.s.

摘要翻译： PCT No.PCT / JP98 / 00451 Sec。 371日期：1998年9月25日 102（e）1998年9月25日日期PCT提交1998年2月4日PCT公布。 公开号WO98 / 35536 日期1998年8月13日一种放电灯的操作装置，其中介质阻挡放电灯可以高效率地放电。 外部电极型放电灯，电介质阻挡放电准分子灯型等通过用运算电路施加周期性波形的1kV〜10kV的灯电压进行动作。 在该灯中，在包括电介质的灯泡内，至少一种类型的稀有气体以给定的量密封。 电介质阻挡层位于至少一个电极和气体之间，并且通过该电介质阻挡层在灯泡中产生放电。 表示周期波形中的主能量供给时间的波形的上升时间或下降时间固定为大于或等于0.03μs且小于或等于9μs。 此外，代表主能源的波形与代表相邻主能源的相邻波形之间的距离大于或等于3.4μs。

公开(公告)号：US08085489B2

公开(公告)日：2011-12-27

申请号：US12538039

申请日：2009-08-07

申请人： Ryohheita Hattori ,  Masaki Yoshioka ,  Suthasun Thambirajah ,  Minoru Hashimoto ,  Kei Yasuna

发明人： Ryohheita Hattori ,  Masaki Yoshioka ,  Suthasun Thambirajah ,  Minoru Hashimoto ,  Kei Yasuna

IPC分类号： G11B21/02 ,  G11B5/596

CPC分类号： G11B5/59633 ,  G11B5/59638 ,  G11B5/59666 ,  G11B5/59688

摘要： A method for writing servo patterns onto a disk of a disk drive. The method includes providing a plurality of different drive currents for an actuator while pushing the actuator into a crash stop defining a swing range of the actuator. The method also includes performing a write operation for at least one of the plurality of different drive currents to write a plurality of servo pattern tracks including a plurality of separate servo pattern sectors. Furthermore, the method includes gradually changing a drive current of the plurality of different drive currents while pushing the actuator into the crash stop so as to gradually move a read element in searching for a servo pattern track to a radial position different from a radial position of the write element. Moreover, the method includes positioning the read element at one of the plurality of servo pattern tracks.

摘要翻译： 一种将伺服模式写入磁盘驱动器的磁盘上的方法。 该方法包括为致动器提供多个不同的驱动电流，同时将致动器推动到限定致动器的摆动范围的紧急停止。 该方法还包括对多个不同驱动电流中的至少一个进行写入操作以写入包括多个分离的伺服模式扇区的多个伺服模式轨道。 此外，该方法包括逐渐改变多个不同驱动电流的驱动电流，同时将致动器推入紧急停止状态，以便逐渐移动读取元件以搜索伺服模式轨迹到与径向位置不同的径向位置 写元素。 此外，该方法包括将读取元件定位在多个伺服模式轨迹中的一个上。

公开(公告)号：US08023220B2

公开(公告)日：2011-09-20

申请号：US12545773

申请日：2009-08-21

申请人： Masaki Yoshioka ,  Kei Yasuna ,  Makoto Takase ,  Ryohheita Hattori

发明人： Masaki Yoshioka ,  Kei Yasuna ,  Makoto Takase ,  Ryohheita Hattori

IPC分类号： G11B5/596

CPC分类号： G11B5/59633 ,  G11B5/59672

摘要： A method for writing servo sector sets that include a plurality of separate servo sectors on a disk so that servo sectors are present at same circumferential positions but different radial positions. The method includes reading a first servo sector set in a track with a read element such that the track includes first, second and third servo sector sets. The method also includes writing the third servo sector set with a write element at a different radial position from the read element with positional control and timing control using the first servo sector set while skipping the second servo sector set if all servo sectors of the first servo sector set are non-defective. Moreover, the method includes using positional control and timing control using the second servo sector set in the writing of the third servo sector set if the first servo sector set includes a defective servo sector.

摘要翻译： 一种用于在盘上写入包括多个单独的伺服扇区的伺服扇区组的方法，使得伺服扇区存在于相同的圆周位置但不同的径向位置。 该方法包括读取具有读取元件的轨道中设置的第一伺服扇区，使得轨道包括第一，第二和第三伺服扇区组。 该方法还包括：如果第一伺服系统的所有伺服扇区都是跳过第二伺服扇区组，则使用第一伺服扇区集进行位置控制和定时控制，将具有写元件的第三伺服扇区集合写入与读单元不同的径向位置 扇区集无缺陷。 此外，该方法包括如果第一伺服扇区集合包括有缺陷的伺服扇区，则使用在第三伺服扇区集合的写入中设置的第二伺服扇区的位置控制和定时控制。