公开(公告)号：US20100078690A1

公开(公告)日：2010-04-01

申请号：US12558498

申请日：2009-09-12

申请人： Masao SUGIYAMA ,  Yoshiyuki KANEKO ,  Yoshinori KONDO ,  Masayoshi HIRASAWA

发明人： Masao SUGIYAMA ,  Yoshiyuki KANEKO ,  Yoshinori KONDO ,  Masayoshi HIRASAWA

IPC分类号： H01L29/78 ,  H01L21/336 ,  H01L21/768 ,  H01L23/48

CPC分类号： H01L21/28518 ,  H01L21/02164 ,  H01L21/02271 ,  H01L21/02274 ,  H01L21/31053 ,  H01L21/31055 ,  H01L21/31612 ,  H01L21/76801 ,  H01L21/76819 ,  H01L23/485 ,  H01L23/53257 ,  H01L2924/0002 ,  H01L2924/00

摘要： As a method for constituting a pre-metal interlayer insulating film, such method is considered as forming a CVD silicon oxide-based insulating film having good filling properties of a silicon oxide film by ozone TEOS, reflowing the film at high temperatures to planarize it, then stacking a silicon oxide film having good CMP scratch resistance by plasma TEOS, and, further, planarizing it by CMP. However, it was made clear that, in a process for forming a contact hole, crack in the pre-metal interlayer insulating film is exposed in the contact hole, into which barrier metal intrudes to cause short-circuit defects.In the present invention, in the pre-metal process, after forming the ozone TEOS film over an etch stop film, the ozone TEOS film is once etched back so as to expose the etch stop film over a gate structure, and, after that, a plasma TEOS film is formed over the remaining ozone TEOS film, and then the plasma TEOS film is planarized by CMP.

摘要翻译： 作为构成前金属层间绝缘膜的方法，认为通过臭氧TEOS形成氧化硅膜的填充性良好的CVD硅氧化物类绝缘膜，在高温下回流以使其平坦化， 然后通过等离子体TEOS层叠具有良好CMP耐刮擦性的氧化硅膜，并且进一步通过CMP对其进行平坦化。 但是，在形成接触孔的工序中，在金属间绝缘膜的裂纹暴露在接触孔内，阻挡金属侵入其中而引起短路缺陷。 在本发明中，在预金属工艺中，在蚀刻停止膜上形成臭氧TEOS膜之后，臭氧TEOS膜被一次回蚀刻，以便在栅极结构上暴露蚀刻停止膜，之后， 在剩余的臭氧TEOS膜上形成等离子体TEOS膜，然后通过CMP平坦化等离子体TEOS膜。

公开(公告)号：US20110156208A1

公开(公告)日：2011-06-30

申请号：US12975406

申请日：2010-12-22

申请人： Yoshiyuki KANEKO ,  Hiroyasu Noso ,  Katsuhiko Hotta ,  Shinichi Ishida ,  Hidenori Suzuki ,  Sadayoshi Tateishi

发明人： Yoshiyuki KANEKO ,  Hiroyasu Noso ,  Katsuhiko Hotta ,  Shinichi Ishida ,  Hidenori Suzuki ,  Sadayoshi Tateishi

IPC分类号： H01L29/92

CPC分类号： H01L21/7684 ,  H01L21/76804 ,  H01L23/5223 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides a technology capable of providing a semiconductor device having an MIM structure capacitor with improved reliability. The capacitor has a lower electrode, a capacitor insulating film, and an upper electrode. The lower electrode is comprised of a metal film embedded in an electrode groove formed in an insulating film over the main surface of a semiconductor substrate; and the upper electrode is comprised of a film stack of a TiN film (lower metal film) and a Ti film (cap metal film) formed over the TiN film (lower metal film).

摘要翻译： 本发明提供了能够提供具有提高的可靠性的具有MIM结构电容器的半导体器件的技术。 电容器具有下电极，电容器绝缘膜和上电极。 下部电极由在半导体衬底的主表面上形成绝缘膜的电极槽中嵌入的金属膜构成; 上电极由TiN膜（下金属膜）和形成在TiN膜（下金属膜）上的Ti膜（帽金属膜）的膜叠层构成。

公开(公告)号：US20130235024A1

公开(公告)日：2013-09-12

申请号：US13874135

申请日：2013-04-30

申请人： Toshihiro SATO ,  Yoshiyuki KANEKO

发明人： Toshihiro SATO ,  Yoshiyuki KANEKO

IPC分类号： G09G3/32

CPC分类号： G09G3/3233 ,  G09G3/2003 ,  G09G3/32 ,  G09G3/3225 ,  G09G3/3266 ,  G09G3/3275 ,  G09G2300/04 ,  G09G2300/0426 ,  G09G2300/0842 ,  G09G2310/0262 ,  G09G2310/0272 ,  G09G2310/0275 ,  G09G2310/0286 ,  G09G2310/0289 ,  G09G2330/04 ,  H01L27/124 ,  H01L27/1255 ,  H01L27/3248 ,  H01L27/3262 ,  H01L27/3265 ,  H01L27/3276 ,  H01L51/5228 ,  H01L51/524 ,  H01L51/5246

摘要： A display module including a substrate having a plurality of pixels, a data line that supplies a data signal to a pixel, a current supply line that supplies electric current to the pixel, a data driving circuit that supplies a data signal to the data line, and a gate driving circuit thereon. The plurality of pixels are arranged in a display area of the substrate, and each of the plurality of pixels include a light emitting device, a first thin film transistor connected to the data line that supplies the data signal, a second thin film transistor connected to the current supply line, and a capacitor. The light emitting device includes a first electrode layer connected to the second thin film transistor, an organic layer formed on the first electrode layer, and a second electrode layer formed on the organic layer.

摘要翻译： 一种显示模块，包括具有多个像素的基板，向像素提供数据信号的数据线，向该像素提供电流的电流供给线，向数据线提供数据信号的数据驱动电路， 和栅极驱动电路。 多个像素被布置在基板的显示区域中，并且多个像素中的每个像素包括发光器件，连接到提供数据信号的数据线的第一薄膜晶体管，连接到 电流供应线路和电容器。 发光器件包括连接到第二薄膜晶体管的第一电极层，形成在第一电极层上的有机层和形成在有机层上的第二电极层。

公开(公告)号：US20120180715A1

公开(公告)日：2012-07-19

申请号：US13070641

申请日：2011-03-24

申请人： Kenichi OTSUKA ,  Yoshiyuki KANEKO

发明人： Kenichi OTSUKA ,  Yoshiyuki KANEKO

IPC分类号： B63B17/00 ,  B63B35/73

CPC分类号： B63B35/731 ,  B63B29/04 ,  B63B2029/043

摘要： A sectional shape of a seat provided on a personal watercraft includes first to third seat portions, first to third hip support portions, and first and second rearward inclined portions. The first hip support portion extends rearward to a height higher than the second seat portion from the first seat portion. The second hip support portion extends rearward to a height higher than the third seat portion and higher than the first hip support portion from the second seat portion. The third hip support portion extends rearward to a height higher than the second hip support portion from the third seat portion. The second rearward inclined portion is inclined at an inclination angle larger than an inclination angle of the first rearward inclined portion with respect to a horizontal plane.

摘要翻译： 设置在个人船上的座椅的截面形状包括第一至第三座椅部分，第一至第三臀部支撑部分以及第一和第二后部倾斜部分。 第一臀部支撑部从第一座部向后延伸到高于第二座部的高度。 第二臀部支撑部分向后延伸到高于第三座椅部分的高度，并且比第二臀部支撑部分高。 第三臀部支撑部分从第三座部分向后延伸到高于第二臀部支撑部分的高度。 第二后倾部以比第一后方倾斜部相对于水平面的倾斜角大的倾斜角度倾斜。

公开(公告)号：US20120180710A1

公开(公告)日：2012-07-19

申请号：US13070642

申请日：2011-03-24

申请人： Kenichi OTSUKA ,  Yoshiyuki KANEKO ,  Sumihiro TAKASHIMA

发明人： Kenichi OTSUKA ,  Yoshiyuki KANEKO ,  Sumihiro TAKASHIMA

IPC分类号： B63B35/73

CPC分类号： B63B49/00 ,  B63B25/002 ,  B63B35/731 ,  B63B2241/24

摘要： A personal watercraft includes a hull, a deck, a steering handle, a steering shaft, a seat, and a display device. The deck is disposed above the hull. The steering handle is disposed above the deck. The steering shaft is arranged to extend downward from the steering handle. The display device includes a display portion and a switch. The display portion is disposed forward relative to the steering shaft. The switch is arranged to operate the display portion. The switch is disposed on a surface of the deck rearward relative to the steering shaft and forward relative to a central front end of the seat.

摘要翻译： 个人船舶包括船体，甲板，转向手柄，转向轴，座椅和显示装置。 甲板位于船体的上方。 转向手柄设置在甲板上方。 转向轴设置成从转向手柄向下延伸。 显示装置包括显示部和开关。 显示部分相对于转向轴向前设置。 开关被布置成操作显示部分。 该开关相对于转向轴向后设置在甲板的表面上，并相对于座椅的中央前端向前。