公开(公告)号：US06891615B2

公开(公告)日：2005-05-10

申请号：US10191993

申请日：2002-07-10

申请人： Masato Koike ,  Kazuo Sano ,  Yoshihisa Harada

发明人： Masato Koike ,  Kazuo Sano ,  Yoshihisa Harada

IPC分类号： G01J3/18 ,  G02B5/18

CPC分类号： G02B5/1861 ,  G01J3/18 ,  G01J3/1833 ,  G01J3/189

摘要： A conical diffraction grazing incidence spectroscope for performing wavelength scanning by rotating a diffraction grating about an axis set parallel to groves in a grazing surface of the grating.

摘要翻译： 圆锥衍射掠入射光谱仪，用于通过在光栅的掠过表面中围绕平行于凹槽设置的轴旋转衍射光栅来执行波长扫描。

公开(公告)号：US06844973B1

公开(公告)日：2005-01-18

申请号：US09642883

申请日：2000-08-22

申请人： Masato Koike ,  Kazuo Sano ,  Yoshihisa Harada

发明人： Masato Koike ,  Kazuo Sano ,  Yoshihisa Harada

IPC分类号： G01J3/06 ,  G01J3/18 ,  G02B5/18

CPC分类号： G01J3/1804 ,  G01J3/06 ,  G01J3/189 ,  G02B5/1828

摘要： A plane diffraction grating based on surface normal rotation according to the present invention is designed so that the profile of the grooves at a radial area is determined depending on a rotational position of the area about a rotational center defined as a foot of the rotational axis on the surface of the plane diffraction grating. An optical system such as a spectrometer or a monochromator according to the present invention uses such a plane diffraction grating, and requires a special arrangement. The optical system includes: a plane diffraction grating as described above; a mechanism for rotating the plane diffraction grating about the rotational axis; an incidence optical system for casting a converging beam of light on a point of the surface of the plane diffraction grating, where the point is set apart from the rotational center. As the diffraction grating is rotated about the rotational center, the point on which the incident converging beam of light is cast rotates about the rotation center, where the diffracting condition is optimized anywhere around the rotational center or for any scanning wavelength. The surface of the plane diffraction grating can be covered with a multiple-layer coating to improve diffraction efficiency. When such a multiple-layer is coated, the unit thickness of the multiple-layer coating at an area is also determined depending on the rotational position of the area about the rotational center.

摘要翻译： 根据本发明的基于表面正转的平面衍射光栅被设计成使得在径向区域处的凹槽的轮廓根据围绕旋转中心的旋转中心的旋转中心的旋转位置来确定 平面衍射光栅的表面。 根据本发明的诸如光谱仪或单色仪的光学系统使用这种平面衍射光栅，并且需要特殊的布置。 光学系统包括：如上所述的平面衍射光栅; 用于使平面衍射光栅围绕旋转轴线旋转的机构; 用于在平面衍射光栅的表面的点上投射会聚光束的入射光学系统，其中点与旋转中心分开。 当衍射光栅围绕旋转中心旋转时，入射的会聚光束投射的点围绕旋转中心旋转，其中衍射条件在旋转中心附近或任何扫描波长的任何地方被优化。 平面衍射光栅的表面可以用多层涂层覆盖，以提高衍射效率。 当这种多层被涂覆时，一个区域的多层涂层的单位厚度也取决于围绕旋转中心的区域的旋转位置来确定。

公开(公告)号：US06323937B1

公开(公告)日：2001-11-27

申请号：US09406204

申请日：1999-09-28

申请人： Kazuo Sano

发明人： Kazuo Sano

IPC分类号： G03B2772

CPC分类号： G03F7/70066 ,  G03F7/701 ,  G03F7/70108 ,  G03F7/70358

摘要： A projection exposure apparatus for transferring, by projection exposure, a pattern of a first object onto a second object while scanning the first and second objects in synchronism with each other, includes an illumination optical system having a secondary light source forming system for forming a secondary light source and a slit disposed with a space from the first object or a plane conjugate thereto, the illumination optical system being operable to illuminate the first object with light supplied from a light source of a pulse light emission type aid having a slit-like irradiation region defined through the slit on a light path of the illumination optical system, a projection optical system for projecting the pattern of the first object onto the second object, and a control system for controlling an exposure parameter so that an integrated exposure intensity upon the first object and in the scan direction in accordance with a change in size of the secondary light source.

摘要翻译： 一种投影曝光装置，用于通过投影曝光将第一物体的图案在彼此同步地扫描第一和第二物体的同时将第一物体的图案转印到第二物体上，包括具有二次光源形成系统的照明光学系统，用于形成二次 光源和从第一物体或与其共同的平面设置的狭缝的狭缝，该照明光学系统可操作以用从具有狭缝状照射的脉冲发光型助剂的光源提供的光照射第一物体 通过照明光学系统的光路上的狭缝限定的区域，用于将第一物体的图案投影到第二物体上的投影光学系统，以及用于控制曝光参数的控制系统，使得在第一物体上的积分曝光强度 物体和扫描方向，根据二次光源的尺寸变化。

公开(公告)号：US5740079A

公开(公告)日：1998-04-14

申请号：US614467

申请日：1996-03-12

申请人： Yoshihiro Shigemori ,  Kazuo Sano ,  Tomio Saito ,  Fumiyoshi Saito ,  Tomiko Yoshida

发明人： Yoshihiro Shigemori ,  Kazuo Sano ,  Tomio Saito ,  Fumiyoshi Saito ,  Tomiko Yoshida

IPC分类号： G01J3/46

CPC分类号： G01J3/46 ,  G01J3/462 ,  G01J2003/466

摘要： The colorimetric value at a specified temperature is determined by measuring the colorimetric value of a colored material sample at an arbitrary temperature using a color meter such as a spectrophotometer, colorimeter, or densitometer, and by correcting the measured colorimetric value on the basis of the change in colorimetric value with temperature, which change in colorimetric value is computed from the difference in colorimetric values observed for a single colored material sample at a minimum of two different temperatures. When a spectrophotometer is applied, the spectral reflectance or the spectral transmittance of the colored material sample is measured. On the other hand, spectral reflectance or spectral transmittance is measured in advance for a dye or pigment at a minimum of two different temperatures. The difference (.DELTA.K) of absorption coefficient (K), the difference (.DELTA.S) in the scattering coefficient (S), and the difference (.DELTA.D) in absorbance (D) at each wavelength are computed from the preliminarily observed spectral reflectance or spectral transmittance. The spectral transmittance or spectral reflectance observed at an arbitrary temperature is corrected to define the colorimetric value at a specified temperature using the obtained values of K, S, and D.

摘要翻译： 通过使用诸如分光光度计，色度计或密度计的色计测量任意温度下的着色材料样品的比色值，并且基于变化来校正测量的比色值来确定在指定温度下的比色值 在具有温度的比色值中，根据在至少两个不同温度下对单一着色材料样品观察到的比色值的差异来计算比色值的变化。 当使用分光光度计时，测量着色材料样品的光谱反射率或光谱透射率。 另一方面，对于染料或颜料，在至少两个不同温度下预先测量光谱反射率或光谱透射率。 从预先观察到的光谱反射率计算吸收系数（K）的差（ΔTA），散射系数（S）中的差（ΔTA）和每个波长的吸光度（D））的差（DELTA D） 或光谱透射率。 校正在任意温度下观察到的光谱透射率或光谱反射率，以使用所获得的K，S和D值来定义特定温度下的比色值。

公开(公告)号：US5363238A

公开(公告)日：1994-11-08

申请号：US64912

申请日：1993-05-24

申请人： Yasuhiro Akune ,  Kichiya Tanino ,  Masaru Koeda ,  Tetsuya Nagano ,  Kazuo Sano ,  Eiji Ishiguro

发明人： Yasuhiro Akune ,  Kichiya Tanino ,  Masaru Koeda ,  Tetsuya Nagano ,  Kazuo Sano ,  Eiji Ishiguro

IPC分类号： G02B5/18 ,  G21K1/06 ,  G02B27/44

CPC分类号： G21K1/06

摘要： The present invention discloses diffraction gratings which do not generate any thermal strain and can perform extremely high-precision and high-efficiency diffraction nearly free from scattered beams. The diffraction gratings are built by allowing the chemically deposited film of silicon carbide whose crystal planes are strongly oriented to the (220) planes in terms of Miller indices to form on the substrate comprising sintered silicon carbide, polishing the surface of the deposited film to 5 .ANG. RMS or less, and directly etched laminar-type grating grooves on that surface by using ion-beam etching.

摘要翻译： 本发明公开了不产生任何热应变的衍射光栅，能够实现几乎不受分散光束的极高精度和高效率的衍射。 衍射光栅是通过使坩埚的化学沉积膜以米勒指数方向强烈地取向（220）面的碳化硅的化学沉积膜形成在包含烧结碳化硅的衬底上，将沉积膜的表面抛光至5 ANGSTROM RMS或更小，以及通过使用离子束蚀刻在该表面上直接蚀刻的层状光栅槽。

公开(公告)号：US5293922A

公开(公告)日：1994-03-15

申请号：US979787

申请日：1992-11-20

申请人： Kiwamu Imai ,  Masami Sayama ,  Kazuyuki Higashino ,  Kazuo Sano ,  Yasunori Omori ,  Hoshiro Tani ,  Yukinori Matsushima

发明人： Kiwamu Imai ,  Masami Sayama ,  Kazuyuki Higashino ,  Kazuo Sano ,  Yasunori Omori ,  Hoshiro Tani ,  Yukinori Matsushima

IPC分类号： C25D1/02 ,  B22D19/00

CPC分类号： C25D1/02

摘要： A metal is attached on a passage-forming core by electrocasting to provide a primary metal layer. A plurality of grooves are formed on the primary metal layer and are filled with filler of low melting point. A metal is attached on the primary metal layer by electrocasting to provide a secondary metal layer. Openings are formed on the secondary metal layer adjacent to its opposite ends so as to communicate with the grooves. The filler in the grooves is melted to provide a plurality of coolant passages. The openings are filled with manifold-forming cores made of filler with low melting point. A metal is attached on the manifold-forming cores by electrocasting to provide tertiary metal layers. Through holes are formed on the tertiary metal layers. The passage-forming core is dissolved and the manifold-forming cores are melted to provide a gas passage and manifolds.

摘要翻译： 通过电铸将金属附着在通道形成芯上以提供初级金属层。 在主金属层上形成多个槽，并且填充有低熔点的填料。 通过电铸将金属附着在主金属层上以提供次级金属层。 在与其相对端相邻的次级金属层上形成开口以与沟槽连通。 槽中的填料被熔化以提供多个冷却剂通道。 开口填充有由低熔点的填料制成的歧管形成芯。 通过电铸将金属附接在歧管形成芯上，以提供第三级金属层。 在第三金属层上形成通孔。 通道形成芯被溶解并且歧管形成芯被熔化以提供气体通道和歧管。

公开(公告)号：US07027186B2

公开(公告)日：2006-04-11

申请号：US09926359

申请日：2001-02-22

申请人： Kazuo Sano ,  Fumiyoshi Saito ,  Yasaku Watanabe ,  Eiko Fujiyama

发明人： Kazuo Sano ,  Fumiyoshi Saito ,  Yasaku Watanabe ,  Eiko Fujiyama

IPC分类号： G03F3/08

CPC分类号： G01J3/46 ,  G01J3/462 ,  G01J3/463 ,  G01J2003/466

摘要： Under the conditions that there are 2 or more samples produced in a CCM toning or visual toning process by which colors are adapted to the target color and respective components such as a coloring agent defining the sample color are registered in a CCM system, the reproducibility of the samples is evaluated based on the difference ΔR−n (n denotes a sample number) between spectral reflectance RST−n obtained by actually measuring the respective samples and spectral reflectance RPR−n obtained by the CCM simulation corresponding to the coloring agent recipe for the sample color at the same n, and determination whether toning work should be continued or not is rapidly and simply performed. On the other hand, when an abnormal sample is perceived, the difference ΔR′−b of the sample obtained from the specified equations is determined and, by comparison of the difference between the target color and a color of a toning sample in the color matching process, components such as a coloring agent mixed into the abnormal sample is presumed and its mixed amount is presumed.

摘要翻译： 在CCM调色或视觉调色过程中产生2种以上样品的条件下，颜色适应于目标颜色，并且将定义样品颜色的各种组分如着色剂记录在CCM系统中，可再现性 基于通过实际测量各个样品获得的光谱反射率RST-n和通过CCM模拟获得的光谱反射率RPR-n之间的差值ΔR-n（n表示样品数），对应于针对 样品颜色在相同的n，并且确定调色工作是否应该持续或快速和简单地执行。 另一方面，当感知到异常样本时，确定从指定方程式获得的样本的差值ΔR'-b，并且通过比较颜色匹配中的调色样品的目标颜色和颜色之间的差异 假设混入异常样品中的着色剂等成分，推测其混合量。

公开(公告)号：US20050162628A1

公开(公告)日：2005-07-28

申请号：US11019106

申请日：2004-12-22

申请人： Kazuo Sano

发明人： Kazuo Sano

IPC分类号： G03F7/20 ,  H01L21/027 ,  G03B27/42

CPC分类号： G03F7/70083 ,  G03F7/70066 ,  G03F7/70558

摘要： Discloses is a scanning exposure apparatus which includes an illumination optical system for illuminating a pattern of an original through an opening being conjugate or approximately conjugate with the pattern of the original, and a changing mechanism for changing a width of the opening with respect to a scan direction of the original. The changing mechanism includes a light blocking plate, and a plurality of driving mechanisms for moving the light blocking plate. These driving mechanisms are provided at different positions with respect to the light blocking plate, and they are arranged to be driven by an actuator. At least one of the driving mechanisms includes a guiding mechanism for allowing a deviation between a position of an object to be driven by the actuator and a position of the light blocking plate, with respect to a direction different from a direction of displacement of the object to be driven.

摘要翻译： 公开了一种扫描曝光装置，其包括：照明光学系统，用于通过与原稿的图案共轭或近似共轭的开口照射原稿的图案;以及改变机构，用于改变相对于扫描的开口的宽度 原来的方向。 改变机构包括遮光板和用于移动遮光板的多个驱动机构。 这些驱动机构设置在相对于遮光板的不同位置，并且它们被布置成由致动器驱动。 所述驱动机构中的至少一个包括：引导机构，用于相对于与所述物体的位移方向不同的方向，允许被所述致动器驱动的物体的位置与所述遮光板的位置之间的偏差 被驱动。

公开(公告)号：US4309902A

公开(公告)日：1982-01-12

申请号：US107420

申请日：1979-12-26

申请人： Kazuo Sano ,  Katsujiro Watanabe ,  Seigo Ando

发明人： Kazuo Sano ,  Katsujiro Watanabe ,  Seigo Ando

IPC分类号： B21C51/00 ,  B21B38/02 ,  B65H26/02 ,  G01B7/00 ,  G01B7/28 ,  G01B7/34 ,  G01B21/20 ,  G01B7/14 ,  G01L5/04 ,  G01R33/12

CPC分类号： B21B38/02 ,  B65H26/02 ,  G01B7/345

摘要： A method for continuously measuring the steepness of a defective flatness of a metal strip during rolling, which comprises: detecting a variation in the relative distance between a metal strip during rolling and a distance-detecting means arranged adjacent to the surface of said metal strip, during the travel thereof between two support rolls arranged at a prescribed spacing, by means of said distance-detecting means, as a vibration including a vibration corresponding to a defective flatness produced in said metal strip; calculating the natural vibration frequency of said metal strip during the travel thereof between said two support rolls, from the detected value of the tension applied to said metal strip during the travel thereof between said two support rolls, the specific weight of said metal strip, and the distance between said two support rolls; cutting off the frequency components, which are below said calculated value of the frequency of said metal strip, from said detected value of the vibration of said metal strip obtained by said distance-detecting means, to detect the vibration of said metal strip, which corresponds to only the defective flatness of said metal strip; detecting, from said detected value thus obtained of the vibration of said metal strip, which corresponds to only said defective flatness, the amplitude and the frequency of said vibration; and, continuously calculating the ratio amplitude/(travelling speed/frequency) of said vibration, i.e., the accurate steepness of the defective flatness of said metal strip, from the detected values thus obtained of the amplitude and the frequency of said vibration, and the separately determined travelling speed of said metal strip.

摘要翻译： 一种用于连续地测量轧制期间金属带的缺陷平坦度的陡度的方法，其包括：检测轧制期间的金​​属带与邻近所述金属带的表面布置的距离检测装置之间的相对距离的变化， 在通过所述距离检测装置的两个支撑辊之间的移动期间，通过所述距离检测装置作为包括对应于在所述金属带中产生的有缺陷的平坦度的振动的振动; 计算所述金属带在所述两个支撑辊之间的行进期间的固有振动频率，从在所述两个支撑辊之间的行进期间施加到所述金属带的张力的检测值，所述金属带的比重和 所述两个支撑辊之间的距离; 从由所述距离检测装置获得的所述金属带的振动的所述检测值中切断低于所述金属带的频率的所述计算值的频率分量，以检测对应于所述金属带的振动 仅限于所述金属带的有缺陷的平坦度; 从所获得的所述金属带的振动的所述检测值检测到所述振动的振幅和频率仅对应于所述有缺陷的平坦度; 并且从由此获得的所述振动的振幅和频率的检测值连续计算所述振动的振幅/（行进速度/频率），即所述金属带的有缺陷的平坦度的准确陡度，并且 分别确定所述金属带的行进速度。

公开(公告)号：US4005986A

公开(公告)日：1977-02-01

申请号：US411333

申请日：1973-10-31

申请人： Tsuneo Miyashita ,  Kazuo Sano ,  Kyoji Sasaguri ,  Kazuo Ishihara ,  Shunichi Hironaka

发明人： Tsuneo Miyashita ,  Kazuo Sano ,  Kyoji Sasaguri ,  Kazuo Ishihara ,  Shunichi Hironaka

IPC分类号： C01B3/16 ,  C01B3/38 ,  C01B3/40 ,  B01J8/02 ,  C01B2/02

CPC分类号： C01B3/38 ,  C01B3/16 ,  C01B3/40

摘要： A device for making high temperature reformed gas from coke oven gas and blast furnace gas comprises a continuous heating apparatus for preheating a coke oven gas; and a first system including (a) an intermittent heat exchanger containing therein a packing bed of the heat-accumulator type for preheating a blast furnace gas; (b) a separate cyclone-type gas mixing chamber for mixing the preheated raw gases; and (c) an intermittent reforming furnace containing therein a packing bed of the heat-accumulator type impregnated with a catalyst. A second system comprising counterpart elements (a), (b) and (c) is connected to the apparatus (a) in parallel with the first system so as to be operated alternately with said first system. Bypass valves are preferably provided to feed the blast furnace gas directly to the gas mixing chamber bypassing the intermittent heat exchanger.

摘要翻译： 用于从焦炉煤气和高炉煤气制造高温重整气体的装置包括用于预热焦炉煤气的连续加热装置; 以及第一系统，包括：（a）间歇式热交换器，其中装有用于预热高炉煤气的蓄热式填料床; （b）用于混合预热的原料气体的单独的旋风式气体混合室; （c）间歇式重整炉，其中装有浸渍有催化剂的蓄热型填料床。 包括对应元件（a），（b）和（c）的第二系统与第一系统并联连接到设备（a），以便与所述第一系统交替操作。 优选地提供旁通阀以将高炉煤气直接供给到绕过间歇热交换器的气体混合室。