METHOD AND APPARATUS FOR MANUFACTURING MAGNETIC RECORDING MEDIA
    3.
    发明申请
    METHOD AND APPARATUS FOR MANUFACTURING MAGNETIC RECORDING MEDIA 失效
    制造磁记录介质的方法和装置

    公开(公告)号:US20100264019A1

    公开(公告)日:2010-10-21

    申请号:US12829450

    申请日:2010-07-02

    IPC分类号: C23C14/46

    摘要: According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.

    摘要翻译: 根据一个实施例,一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上,形成平坦化膜,其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上,并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面,并且基于变化确定平坦化蚀刻的终点 在通过以与角度为角度安装的离子计数器的入射颗粒的总数中; 相对于基板的垂直方向,根据平坦化膜的材料。

    Method and apparatus for manufacturing magnetic recording media
    5.
    发明授权
    Method and apparatus for manufacturing magnetic recording media 失效
    制造磁记录介质的方法和装置

    公开(公告)号:US08221637B2

    公开(公告)日:2012-07-17

    申请号:US12829450

    申请日:2010-07-02

    IPC分类号: C23C14/46

    摘要: According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.

    摘要翻译: 根据一个实施例,一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上,形成平坦化膜,其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上,并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面,并且基于变化确定平坦化蚀刻的终点 在通过以与角度为角度安装的离子计数器的入射颗粒的总数中; 相对于基板的垂直方向,根据平坦化膜的材料。

    Method and apparatus for manufacturing magnetic recording media
    6.
    发明授权
    Method and apparatus for manufacturing magnetic recording media 失效
    制造磁记录介质的方法和装置

    公开(公告)号:US07771602B2

    公开(公告)日:2010-08-10

    申请号:US11475873

    申请日:2006-06-28

    摘要: According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.

    摘要翻译: 根据一个实施例,一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上,形成平坦化膜,其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上,并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面,并且基于变化确定平坦化蚀刻的终点 在通过以与角度为角度安装的离子计数器的入射颗粒的总数中; 相对于基板的垂直方向,根据平坦化膜的材料。

    Method for manufacturing substrate for discrete track recording media and method for manufacturing discrete track recording media
    7.
    发明授权
    Method for manufacturing substrate for discrete track recording media and method for manufacturing discrete track recording media 失效
    用于制造用于离散轨道记录介质的基板的方法和用于制造离散轨道记录介质的方法

    公开(公告)号:US07314833B2

    公开(公告)日:2008-01-01

    申请号:US11476038

    申请日:2006-06-28

    IPC分类号: H01L21/302

    摘要: According to one embodiment, a method for manufacturing a substrate for a discrete track recording media, the method includes forming an imprint resist layer on a substrate, imprinting, on the imprint resist layer, a stamper formed with patterns of protrusions and recesses corresponding to recording track zones and servo zones to transfer the patterns of protrusions and recesses to the imprint resist layer, removing the stamper from the imprint resist layer, and diffusing liquefied CO2 in a process chamber set at a pressure of 2 to 5 atm, diffusing liquefied H2O in the process chamber set at a pressure of 0.01 to 1 atm, or diffusing a reactive gas selected from a group consisting of liquefied CF4, CHF3, SF6, and C2F6 in the process chamber set at an arbitrary pressure, to jet spray the liquefied gas onto a surface of the substrate.

    摘要翻译: 根据一个实施例,一种用于制造用于离散轨道记录介质的基板的方法,所述方法包括在基板上形成压印抗蚀剂层,在压印抗蚀剂层上压印形成有对应于记录的突起和凹部的图案的压模 轨道区域和伺服区域,以将突起和凹陷的图案转印到抗蚀剂层,从压印抗蚀剂层移除压模,并将液化CO 2扩散到设置在压力为2的处理室中 至5atm,在处理室中扩散液化H 2 O 2,压力为0.01至1atm,或扩散选自液化CF 4 >,CHF 3 3,SF 6 6和C 2 F 6 6在设置在任意压力下的处理室中 将液化气喷射到基板的表面上。

    Method and apparatus for manufacturing magnetic recording media
    8.
    发明申请
    Method and apparatus for manufacturing magnetic recording media 失效
    制造磁记录介质的方法和装置

    公开(公告)号:US20070000861A1

    公开(公告)日:2007-01-04

    申请号:US11475873

    申请日:2006-06-28

    摘要: According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.

    摘要翻译: 根据一个实施例,一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上,形成平坦化膜,其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上,并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面,并且基于变化确定平坦化蚀刻的终点 在通过离子计数器安装的入射颗粒的总数中,根据平坦化膜的材料相对于垂直于衬底的方向成角度θ。