公开(公告)号：US20070122079A1

公开(公告)日：2007-05-31

申请号：US11580628

申请日：2006-10-12

申请人： Pawel Drabarek ,  Jochen Straehle ,  Stefan Franz ,  Matthias Fleischer ,  Ralf Kochendoerfer ,  David Rychtarik ,  Jan Fischer

发明人： Pawel Drabarek ,  Jochen Straehle ,  Stefan Franz ,  Matthias Fleischer ,  Ralf Kochendoerfer ,  David Rychtarik ,  Jan Fischer

IPC分类号： G02B6/26 ,  G02B6/42

CPC分类号： G02B6/32 ,  G02B6/3886

摘要： A device for coupling beam guides of optical systems for unidirectional or bidirectional transmission of beams via a beam transition between the optical systems is provided, the device having a connecting device and mechanical centering means. The connecting device provides a magnetic coupling for implementing a coupling connection in a coupling area. The centering means are situated opposite one another on the optical systems and coupled in such a way to cause the beam guides to self-center due to the attraction caused by the magnetic forces.

摘要翻译： 提供了一种用于耦合用于通过光学系统之间的光束过渡来单向或双向传输光束的光学系统的装置，该装置具有连接装置和机械定心装置。 连接装置提供用于在耦合区域中实现耦合连接的磁耦合。 定心装置在光学系统上彼此相对设置并且以这样的方式耦合，以使得光束引导件由于由磁力引起的吸引力而自对中心。

公开(公告)号：US20100284023A1

公开(公告)日：2010-11-11

申请号：US12451491

申请日：2008-04-09

申请人： Matthias Fleischer ,  Pawel Drabarek ,  Ralf Kochendoerfer

发明人： Matthias Fleischer ,  Pawel Drabarek ,  Ralf Kochendoerfer

IPC分类号： G01B11/24

CPC分类号： G01B11/2441 ,  G01B11/303

摘要： A device for measuring the shape of freeform surfaces of objects includes a point-measuring optical and or interferometric scanning arm which is displaceable along a predefined path line, which device generates a measurement beam focused on the freeform surface to be measured. With reference to the scanning point, the scanning arm is able to rotate in at least one plane, in such a way that the measuring beam impinges upon the freeform surface to be measured in a perpendicular manner or within an acceptance angle of the scanning arm.

摘要翻译： 用于测量物体的自由曲面形状的装置包括可沿着预定路径线移位的点测量光学和/或干涉扫描臂，该装置产生聚焦在要测量的自由曲面上的测量光束。 参考扫描点，扫描臂能够在至少一个平面中旋转，使得测量光束以垂直方式或在扫描臂的接受角度内照射在待测量的自由曲面上。

公开(公告)号：US07522793B2

公开(公告)日：2009-04-21

申请号：US11580628

申请日：2006-10-12

申请人： Pawel Drabarek ,  Jochen Straehle ,  Stefan Franz ,  Matthias Fleischer ,  Ralf Kochendoerfer ,  David Rychtarik ,  Jan Fischer

发明人： Pawel Drabarek ,  Jochen Straehle ,  Stefan Franz ,  Matthias Fleischer ,  Ralf Kochendoerfer ,  David Rychtarik ,  Jan Fischer

IPC分类号： G02B6/26 ,  G02B6/38

CPC分类号： G02B6/32 ,  G02B6/3886

摘要： A device for coupling beam guides of optical systems for unidirectional or bidirectional transmission of beams via a beam transition between the optical systems is provided, the device having a connecting device and mechanical centering means. The connecting device provides a magnetic coupling for implementing a coupling connection in a coupling area. The centering means are situated opposite one another on the optical systems and coupled in such a way to cause the beam guides to self-center due to the attraction caused by the magnetic forces.

摘要翻译： 提供了一种用于耦合用于通过光学系统之间的光束过渡来单向或双向传输光束的光学系统的装置，该装置具有连接装置和机械定心装置。 连接装置提供用于在耦合区域中实现耦合连接的磁耦合。 定心装置在光学系统上彼此相对设置并且以这样的方式耦合，以使得光束引导件由于由磁力引起的吸引力而自对中心。

公开(公告)号：US20070229840A1

公开(公告)日：2007-10-04

申请号：US11731052

申请日：2007-03-30

申请人： Pawel Drabarek ,  Stefan Franz ,  Matthias Fleischer

发明人： Pawel Drabarek ,  Stefan Franz ,  Matthias Fleischer

IPC分类号： G01B9/02

CPC分类号： G01B9/0209 ,  G01B9/02065 ,  G01B2290/20

摘要： An interferometric measuring device includes a short-coherent radiation source and a system composed of a modulation interferometer having a first and a second modulation interferometer beam path and a downstream reference interferometer, the radiation being split in the reference interferometer into a first beam path and a second beam path. If a dispersive optical component is situated in at least one beam path of the reference interferometer, a different optical path length becomes effective for radiation of a different wavelength in the beam path having the dispersive optical component. Therefore, if one measuring probe is replaced with another one having a modified optical path length, the modulation interferometer may be adjusted and the reference interferometer may remain unchanged. The reference interferometer may thus be used over an extended adjustment path of the modulation interferometer without optical components having to be replaced for adjusting the different path difference of measuring probes in the reference interferometer.

摘要翻译： 干涉测量装置包括短相干辐射源和由具有第一和第二调制干涉仪光束路径和下游参考干涉仪的调制干涉仪组成的系统，所述辐射在参考干涉仪中分裂为第一光束路径和 第二光束路径。 如果色散光学部件位于参考干涉仪的至少一个光束路径中，则具有分散光学部件的光束路径中不同光程长度对于不同波长的辐射是有效的。 因此，如果一个测量探针被具有修改的光程长度的另一个测量探头所替代，则可以调整调制干涉仪并且参考干涉仪可以保持不变。 因此，参考干涉仪可以在调制干涉仪的扩展调整路径上使用，而不需要替换光学组件来调整参考干涉仪中的测量探针的不同路径差。

公开(公告)号：US08913249B2

公开(公告)日：2014-12-16

申请号：US12736658

申请日：2009-04-16

申请人： Matthias Fleischer ,  Pawel Drabarek

发明人： Matthias Fleischer ,  Pawel Drabarek

IPC分类号： G01B11/02 ,  G01B9/02

CPC分类号： G01B9/02021 ,  G01B9/02007 ,  G01B9/02028 ,  G01B9/0209

摘要： An interferometric system for measuring surfaces of a measured object using an optical system. The optical system has a beam splitter, which directs measuring beams in a first beam path and measuring beams in a second beam path onto the surfaces of the measured object with the aid of two mirrors. The beam paths which are formed by the light beams which are reflected on the surfaces at least partially overlap in an area having identical beam direction. In this manner, measured surfaces of the measured object are at least partially imaged on an identically irradiated surface of a detector, such as an image recorder.

摘要翻译： 一种用于使用光学系统测量被测物体的表面的干涉测量系统。 光学系统具有分束器，其将第一光束路径中的测量光束引导并且借助于两个反射镜将第二光束路径中的光束测量到被测物体的表面上。 由表面反射的光束形成的光束路径在具有相同光束方向的区域中至少部分重叠。 以这种方式，所测量的物体的测量表面至少部分地成像在诸如图像记录器的检测器的相同照射的表面上。

公开(公告)号：US20110122414A1

公开(公告)日：2011-05-26

申请号：US12736658

申请日：2009-04-16

申请人： Matthias Fleischer ,  Pawel Drabarek

发明人： Matthias Fleischer ,  Pawel Drabarek

IPC分类号： G01B9/02

CPC分类号： G01B9/02021 ,  G01B9/02007 ,  G01B9/02028 ,  G01B9/0209

摘要： An interferometric system for measuring surfaces of a measured object using an optical system. The optical system has a beam splitter, which directs measuring beams in a first beam path and measuring beams in a second beam path onto the surfaces of the measured object with the aid of two mirrors. The beam paths which are formed by the light beams which are reflected on the surfaces at least partially overlap in an area having identical beam direction. In this manner, measured surfaces of the measured object are at least partially imaged on an identically irradiated surface of a detector, such as an image recorder.

摘要翻译： 一种用于使用光学系统测量被测物体的表面的干涉测量系统。 光学系统具有分束器，其将第一光束路径中的测量光束引导并且借助于两个反射镜将第二光束路径中的光束测量到被测物体的表面上。 由表面反射的光束形成的光束路径在具有相同光束方向的区域中至少部分重叠。 以这种方式，所测量的物体的测量表面至少部分地成像在诸如图像记录器的检测器的相同照射的表面上。

公开(公告)号：US07518729B2

公开(公告)日：2009-04-14

申请号：US11731052

申请日：2007-03-30

申请人： Pawel Drabarek ,  Stefan Franz ,  Matthias Fleischer

发明人： Pawel Drabarek ,  Stefan Franz ,  Matthias Fleischer

IPC分类号： G01B9/02

CPC分类号： G01B9/0209 ,  G01B9/02065 ,  G01B2290/20

摘要： An interferometric measuring device includes a short-coherent radiation source and a system composed of a modulation interferometer having a first and a second modulation interferometer beam path and a downstream reference interferometer, the radiation being split in the reference interferometer into a first beam path and a second beam path. If a dispersive optical component is situated in at least one beam path of the reference interferometer, a different optical path length becomes effective for radiation of a different wavelength in the beam path having the dispersive optical component. Therefore, if one measuring probe is replaced with another one having a modified optical path length, the modulation interferometer may be adjusted and the reference interferometer may remain unchanged. The reference interferometer may thus be used over an extended adjustment path of the modulation interferometer without optical components having to be replaced for adjusting the different path difference of measuring probes in the reference interferometer.

摘要翻译： 干涉测量装置包括短相干辐射源和由具有第一和第二调制干涉仪光束路径和下游参考干涉仪的调制干涉仪组成的系统，所述辐射在参考干涉仪中分裂为第一光束路径和 第二光束路径。 如果色散光学部件位于参考干涉仪的至少一个光束路径中，则具有分散光学部件的光束路径中不同光程长度对于不同波长的辐射是有效的。 因此，如果一个测量探针被具有修改的光程长度的另一个测量探头所替代，则可以调整调制干涉仪并且参考干涉仪可以保持不变。 因此，参考干涉仪可以在调制干涉仪的扩展调整路径上使用，而不需要替换光学组件来调整参考干涉仪中的测量探针的不同路径差。

公开(公告)号：US07339679B2

公开(公告)日：2008-03-04

申请号：US10529424

申请日：2003-03-28

申请人： Pawel Drabarek ,  Dominique Breider ,  Marc-Henri Duvoisin ,  Dominique Marchal

发明人： Pawel Drabarek ,  Dominique Breider ,  Marc-Henri Duvoisin ,  Dominique Marchal

IPC分类号： G01B9/02

CPC分类号： G01B11/2441 ,  G01B9/02002 ,  G01B9/0205 ,  G01B9/02057 ,  G01B9/02064 ,  G01B9/0209 ,  G01B2290/45

摘要： An interferometric measuring device for recording shape, roughness or separation distance of the surface of a measuring object, having a modulating interferometer, to which is supplied short coherent radiation by a radiation source, having a measuring probe that is spatially separated from the modulating interferometer and is coupled to it via a light-conducting fiber set-up, in which combined beam components are split in a common arm in a partially transmitting region into measuring and reference beams, and having receiver and evaluating devices for converting the supplied radiation into electrical signals and for evaluating the signals based on phase difference. A construction for reliable measurements even in tight hollow spaces provides that the partially transmitting region is formed by a slanting exit face of a probe fiber at an exit angle as to the optical probe axis and a likewise slanting entrance face, of a fiber section following on the object side, as to the optical probe axis at an entrance angle, a wedge-shaped gap being formed between the exit and entrance surfaces.

摘要翻译： 一种干涉测量装置，用于记录具有调制干涉仪的测量对象表面的形状，粗糙度或间隔距离，所述调制干涉仪由辐射源提供短的相干辐射，其具有与调制干涉仪在空间上分离的测量探针;以及 通过导光光纤装置耦合到其上，其中组合的光束分量在部分透射区域中的共同臂中分成测量和参考光束，并且具有接收器和评估装置，用于将所提供的辐射转换成电信号 并用于基于相位差来评估信号。 即使在紧密的中空空间中也能进行可靠测量的结构，可以确定部分透射区域由探针光纤的倾斜出口面以光纤轴线的出射角和相同的倾斜入口面形成， 物体侧，对于入射角的光学探针轴，在出射表面和入射表面之间形成楔形间隙。

公开(公告)号：US20070291274A1

公开(公告)日：2007-12-20

申请号：US10591502

申请日：2005-01-07

申请人： Pawel Drabarek

发明人： Pawel Drabarek

IPC分类号： G01B9/02

CPC分类号： G01B9/02065 ,  G01B9/02007 ,  G01B9/02027 ,  G01B9/0209 ,  G01B11/2441 ,  G01D5/35383

摘要： The present invention relates to an interferometric measuring system for measuring, for example, shape deviation, position, surface properties, vibrations, of an object, the measuring system including a transmitting element having a modulation interferometer and a radiation source for short-coherent radiation, as well as a measuring probe system connected thereto for supplying the radiation via a common optical path, and further including a receiving element for analyzing the measuring radiation returning from the measuring probe system, said receiving element being combined with the transmitting element in a transmitter/receiver unit. A reduction in complexity and cost combined with enhanced application possibilities is achieved in that the measuring probe system includes a plurality of measuring probes coupled to the common optical path via respective optical paths, and in that a switching device is disposed at a coupling point between the common optical path and the respective optical paths to the measuring probes, said switching device allowing the different measuring probes to be individually brought into a bidirectionally transmitting connection with the transmitter/receiver unit for the radiation supplied by the modulation interferometer, on the one hand, and the measuring radiation, on the other hand.

摘要翻译： 本发明涉及一种用于测量物体的形状偏差，位置，表面特性，振动的干涉测量系统，该测量系统包括具有调制干涉仪的发射元件和用于短相干辐射的辐射源， 以及与其连接的测量探针系统，用于经由公共光路提供辐射，并且还包括用于分析从测量探针系统返回的测量辐射的接收元件，所述接收元件与发射元件组合在发射器/ 接收单元。 实现复杂性和成本的降低以及增强的应用可能性的实现，其中测量探针系统包括经由相应的光路耦合到公共光路的多个测量探针，并且开关装置设置在耦合点 公共光路和到测量探针的各个光路，所述开关装置一方面允许不同的测量探针与调制干涉仪提供的辐射的发射器/接收器单元分别进行双向传输连接， 另一方面测量辐射。

公开(公告)号：US06297884B1

公开(公告)日：2001-10-02

申请号：US09083312

申请日：1998-05-22

申请人： Pawel Drabarek

发明人： Pawel Drabarek

IPC分类号： G01B902

CPC分类号： G01B9/02028 ,  G01B9/02002 ,  G01B9/02044 ,  G01B9/0209 ,  G01B11/303

摘要： An interferometric instrument that includes a radiation generating unit for emitting briefly coherent radiation is used for sensing the surfaces of a test object by determining an interference maximum. Precise determination of the interference maximum, and therefore precise sensing of the test object, are achieved by providing, in the optical path of the first beam component and/or in the optical path of the second beam component, an arrangement which produces a frequency shift between the two interfering beam components and by providing a beam splitting arrangement, located in front of the photodetector arrangement in the optical path of the interfered radiation upstream from the photodetector device, which can be used to split the beams into at least two spectral components and supply them to the photodetector arrangement either directly or via additional elements on the photodetectors assigned to the components.

摘要翻译： 包括用于发射短暂相干辐射的辐射发生单元的干涉仪被用于通过确定干扰最大值来感测测试对象的表面。 通过在第一光束分量的光路和/或第二光束分量的光路中提供产生频移的装置来实现干扰最大值的精确确定，并因此确定测试对象的精确感测 在两个干扰光束分量之间并且通过提供一个分束装置，该光束分离装置位于光电检测器装置上游的干涉辐射的光路中的光电检测器装置的前面，该光路可用于将光束分成至少两个光谱分量， 直接或通过分配给组件的光电检测器上的附加元件将它们提供给光电检测器装置。