Surface image transfer etching
    1.
    发明授权
    Surface image transfer etching 失效
    表面图像转印蚀刻

    公开(公告)号:US5658440A

    公开(公告)日:1997-08-19

    申请号:US553966

    申请日:1995-11-06

    CPC classification number: H01J37/32192 G03F7/40 H01J37/32678 H01L21/32137

    Abstract: A process called surface image transfer etching (SITE) is used to etch patterned photoresist so as to more completely transfer a well-defined pattern formed in the top surface (10a) of a material to the bulk of the material (12). The process uses no mask, but employs only a sputter etching process where the etching rates of surfaces not normal to the ion trajectories are greatly enhanced over the etching rates of surfaces normal to the ion trajectories.

    Abstract translation: 使用称为表面图像转移蚀刻(SITE)的工艺来蚀刻图案化的光致抗蚀剂,以便将形成在材料的顶表面(10a)中的良好限定的图案更完全地转移到材料(12)的主体上。 该方法不使用掩模,而仅使用溅射蚀刻工艺,其中不垂直于离子轨迹的表面的蚀刻速率比垂直于离子轨迹的表面的蚀刻速率大大增强。

    Electrical measurement of sidewall angle
    2.
    发明授权
    Electrical measurement of sidewall angle 失效
    侧壁角度的电气测量

    公开(公告)号:US5308740A

    公开(公告)日:1994-05-03

    申请号:US947242

    申请日:1992-09-18

    CPC classification number: G03F7/26

    Abstract: A method for measuring the sidewall angle of patterned photoresist (16), as well as wall angles of other materials, is provided. The method comprises forming two copies of the patterned photoresist feature for which the sidewall measurement is to be obtained on a conducting substrate (14). The first copy is processed via conventional techniques for linewidth measurement, which consists of a pattern transfer etch of the first copy into the underlying conductive substrate, followed by electrical measurement of the conductor linewidth to yield linewidth 1 (LW1). The second copy is processed such that there is a shape altering etch prior to the pattern transfer etch. A linewidth 2 (LW2) is obtained. The angle is then extracted from the two linewidth measurements.

    Abstract translation: 提供了用于测量图案化光致抗蚀剂(16)的侧壁角以及其它材料的壁角的方法。 该方法包括在导电衬底(14)上形成要获得侧壁测量的图案化光致抗蚀剂特征的两个拷贝。 通过用于线宽测量的常规技术来处理第一个拷贝,该技术包括将第一拷贝的图案转移蚀刻到下面的导电衬底中,随后电导体线宽的线性测量以产生线宽1(LW1)。 处理第二拷贝使得在图案转移蚀刻之前存在改变蚀刻的形状。 得到线宽2(LW2)。 然后从两个线宽测量中提取角度。

    System for treating conditions of the periodontium
    4.
    发明申请
    System for treating conditions of the periodontium 审中-公开
    治疗牙周膜病变的系统

    公开(公告)号:US20060280698A1

    公开(公告)日:2006-12-14

    申请号:US11152499

    申请日:2005-06-14

    CPC classification number: A61Q11/00 A61K8/97 A61K36/18

    Abstract: A system for treating conditions of the periodontium, such as gingivitis and periodontitis, includes an Ayurvedic medicinal solution and an applicator for delivering the solution to the periodontium. The Ayurvedic medicinal solution utilizes herbal extracts to break-down bacteria which can inflame gum tissue. In one embodiment, the solution comprises approximately 1 gram of triphala extract for every 10 ml of glycerine. In another embodiment, the solution comprises approximately 1 gram of amla extract for every 10 ml of glycerine. The applicator for delivering the solution to the periodontium may either be in the form of a cotton swab-type wand, a pipette or a spray dispenser.

    Abstract translation: 用于治疗牙周病例如牙龈炎和牙周炎的系统包括阿育吠陀药用溶液和用于将溶液递送到牙周膜的施用器。 阿育吠陀药用溶液利用草药提取物分解可以使牙龈组织发炎的细菌。 在一个实施方案中,该溶液包含每10ml甘油约1克的三菌属提取物。 在另一个实施方案中,该溶液包含每10ml甘油约1克的amla提取物。 用于将溶液递送到牙周组织的施用器可以是棉签式棒,移液管或喷雾分配器的形式。

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