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1.发明授权公开(公告)号：US08883246B2
公开(公告)日：2014-11-11
申请号：US12747338
申请日：2008-12-12
CPC分类号： H01J37/32174 , C23C14/22 , C23C14/3485 , C23C16/44 , C23C16/515 , H01J37/32091 , H01J37/32559 , H01J37/3467 , H01J2237/3321
摘要： In plasma activated chemical vapour deposition a plasma decomposition unit is used that is arranged in or connected to a vacuum vessel having a relatively low pressure or vacuum, to which an operating gas is provided. Periodically repeated voltage pulses are applied between the anode and the cathode of the plasma decomposition unit in such a manner that pulsed electric discharges are produced between the cathode and the surrounding anode of the plasma decomposition unit. The anode is arranged in a special way so that at least a portion thereof will obtain only an electrically conductive coating or substantially no coating when operating the unit. For that purpose, the anode includes a portion located in the direct vicinity of the free surface of the cathode. The portion is a flange or edge portion which is located or extends over margins of the free surface of the cathode. In that way, the anode will include a portion that is shielded for direct coating with particles from the plasma formed and that hence will obtain e.g. substantially no dielectric coating at all.
摘要翻译： 在等离子体激活的化学气相沉积中，使用等离子体分解单元，其被布置在具有相对低的压力或真空的真空容器中或与其连接，操作气体被提供给该真空容器。 在等离子体分解单元的阳极和阴极之间施加周期性重复的电压脉冲，使得在等离子体分解单元的阴极和周围阳极之间产生脉冲放电。 阳极以特殊方式布置，使得当操作该单元时，其至少一部分将仅获得导电涂层或基本上不涂层。 为此，阳极包括位于阴极自由表面附近的部分。 该部分是位于或延伸在阴极的自由表面的边缘上的凸缘或边缘部分。 以这种方式，阳极将包括屏蔽的部分，其直接涂覆有来自形成的等离子体的颗粒。 完全没有电介质涂层。
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2.发明申请公开(公告)号：US20110081477A1
公开(公告)日：2011-04-07
申请号：US12747338
申请日：2008-12-12
IPC分类号： C23C16/515 , C23C16/52 , C23C14/34
CPC分类号： H01J37/32174 , C23C14/22 , C23C14/3485 , C23C16/44 , C23C16/515 , H01J37/32091 , H01J37/32559 , H01J37/3467 , H01J2237/3321
摘要： In plasma activated chemical vapour deposition a plasma decomposition unit is used that is arranged in or connected to a vacuum vessel having a relatively low pressure or vacuum, to which an operating gas is provided. Periodically repeated voltage pulses are applied between the anode and the cathode of the plasma decomposition unit in such a manner that pulsed electric discharges are produced between the cathode and the surrounding anode of the plasma decomposition unit. The anode is arranged in a special way so that at least a portion thereof will obtain only an electrically conductive coating or substantially no coating when operating the unit. For that purpose, the anode includes a portion located in the direct vicinity of the free surface of the cathode. The portion is a flange or edge portion which is located or extends over margins of the free surface of the cathode. In that way, the anode will include a portion that is shielded for direct coating with particles from the plasma formed and that hence will obtain e.g. substantially no dielectric coating at all.
摘要翻译： 在等离子体激活的化学气相沉积中，使用等离子体分解单元，其被布置在具有相对低的压力或真空的真空容器中或与其连接，操作气体被提供到该真空容器。 在等离子体分解单元的阳极和阴极之间施加周期性重复的电压脉冲，使得在等离子体分解单元的阴极和周围阳极之间产生脉冲放电。 阳极以特殊方式布置，使得当操作该单元时，其至少一部分将仅获得导电涂层或基本上不涂层。 为此，阳极包括位于阴极自由表面附近的部分。 该部分是位于或延伸在阴极的自由表面的边缘上的凸缘或边缘部分。 以这种方式，阳极将包括屏蔽的部分，其直接涂覆有来自形成的等离子体的颗粒。 完全没有电介质涂层。
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公开(公告)号：US08460763B2
公开(公告)日：2013-06-11
申请号：US12529475
申请日：2008-02-29
申请人： Mihai Nicolescu , Olga Meza , Lars Hemmingsson , Klim Kouznetsov
IPC分类号： H05H1/24
CPC分类号： C23C14/0605 , C23C14/024 , C23C14/0688 , C23C16/30 , C23C16/308 , C23C16/36 , C23C30/00 , Y10T428/24479 , Y10T428/268
摘要： A method for composite material synthesis at the surface of a work piece, wherein it includes PECVD, PEPVD methods and plasma generation by electric discharges with closed electron drift. The composite material comprises at least one layer of substantially parallel carbon pillars extending from the bottom surface of the at least one layer up to the top surface of the at least one layer. The carbon pillars have a cross-sectional dimension in the range of 50-200 μm, and heights in the range of 50 μm-2 mm.
摘要翻译： 一种在工件表面复合材料合成的方法，其中包括PECVD，PEPVD方法和具有闭合电子漂移的放电产生的等离子体。 所述复合材料包括从所述至少一层的底表面延伸到所述至少一层的顶表面延伸的至少一层基本平行的碳柱。 碳柱的横截面尺寸在50-200μm的范围内，高度在50m2mm的范围内。
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公开(公告)号：US20110008576A1
公开(公告)日：2011-01-13
申请号：US12529475
申请日：2008-02-29
CPC分类号： C23C14/0605 , C23C14/024 , C23C14/0688 , C23C16/30 , C23C16/308 , C23C16/36 , C23C30/00 , Y10T428/24479 , Y10T428/268
摘要： A composite, carbon based material that can be used for enhancing the dynamic stiffness of objects, in the case where it for instance is applied as a coating, comprises at least one layer of substantially parallel carbon pillars. The pillars extend from the bottom surface up to the top surface of the layer, substantially perpendicularly to said surfaces, have substantially hexagonal or pentagonal cross-sections and a relatively weak conical shape, their cross-section widening from their bottom ends to their top ends. The carbon based pillars can typically have a cross-sectional dimension in the range of 50-200 μm such as about 100 μm and have heights in the range of 50 μm-2 mm. The pillars can be seen as built from macro-sized aggregates that have at least one dimension in the nano range, e.g. in the range of 10-800 run, and include carbon, oxygen and hydrogen and in most cases also nitrogen. The material can be produced using PECVD, PEPVD methods and plasma generation by electric discharges with closed electron drift.
摘要翻译： 可以用于增强物体的动态刚度的复合碳基材料，例如在作为涂层施加的情况下，包括至少一层基本平行的碳柱。 柱子从底部表面向上延伸到基本上垂直于所述表面的顶部表面，具有基本上六边形或五边形的横截面和相对较弱的圆锥形状，它们的横截面从其底端变宽到其顶端 。 基于碳的柱通常可以具有在50-200μm范围内的横截面尺寸，例如约100μm，并且具有在50μm-2mm的范围内的高度。 柱可以看作是从具有至少一个纳米范围的尺寸的大尺寸聚集体构建的。 在10-800的范围内，包括碳，氧和氢，在大多数情况下也是氮。 该材料可以使用PECVD，PEPVD方法和通过具有闭合电子漂移的放电产生的等离子体产生。
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