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公开(公告)号：US4922308A
公开(公告)日：1990-05-01
申请号：US67136
申请日：1987-06-29
IPC分类号： G01N21/94
CPC分类号： G01N21/94 , G01N2021/4792
摘要： A method of and an apparatus for detecting a fine foreign substance in which the surface of a specimen is illuminated with linearly-polarized laser beam to detect light scattered from the surface and having passed through a polarization filter, the back side of the specimen is illuminated with light from a light source such as a mercury lamp to obtain the light and darkness information or phase information on the specimen surface by transmitted light from the specimen, and fine massive and filmy foreign substances on the specimen surface are detected on the basis of information given by the scattered light and transmitted light.
摘要翻译： 一种检测细微异物的方法和装置，其中用线性偏振激光束照射试样的表面，以检测从表面散射并穿过偏振滤光器的光，使样本的背面被照亮 来自诸如汞灯的光源的光从样品透射光获得样品表面上的光和黑信息或相位信息，并且根据信息检测样品表面上的细小块状和薄膜异物 由散射光和透射光给出。
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公开(公告)号：US4460273A
公开(公告)日：1984-07-17
申请号：US309485
申请日：1981-10-07
IPC分类号： G01N21/88 , G01N21/89 , G01N21/94 , G01N21/956 , G01N21/958
摘要： A test apparatus for detecting defects on a plate is disclosed. An illumination light is focused to one surface of the plate and another illumination light is focused to the other surface of the plate, and scattered light from the defects on the surfaces are detected to separately detect the defects on the front and rear surfaces of the plate.
摘要翻译： 公开了一种用于检测板上的缺陷的测试装置。 照明光聚焦到板的一个表面，另一个照明光聚焦到板的另一个表面，并且检测来自表面上的缺陷的散射光以分别检测板的前表面和后表面上的缺陷 。
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3.发明授权Focusing position detecting device in optical magnifying and observing apparatus 失效聚焦位置检测装置在光学放大和观察装置中
公开(公告)号：US4433235A
公开(公告)日：1984-02-21
申请号：US310240
申请日：1981-10-09
CPC分类号： G02B21/245
摘要： A focusing position detecting device in which a laser beam is directed through an objective lens toward the surface of an object to form a minute spot on the surface of the object, and the beam reflected from the surface of the object is led through the objective lens again toward a concentrating point, so as to detect the focusing position of the objective lens by measuring the position of the concentrating point. In the device, a photoelectric element is provided to detect the intensity of the reflected beam, and the intensity of the laser beam is so controlled that the output of the photoelectric element is maintained constant.
摘要翻译： 一种聚焦位置检测装置，其中激光束被引导通过物镜朝向物体的表面，以在物体的表面上形成微小的点，并且从物体的表面反射的光束被引导通过物镜 再次朝向集中点，以便通过测量集中点的位置来检测物镜的聚焦位置。 在该装置中，设置光电元件以检测反射光束的强度，并且控制激光束的强度使得光电元件的输出保持恒定。
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公开(公告)号：US5225886A
公开(公告)日：1993-07-06
申请号：US584120
申请日：1990-09-18
IPC分类号： G01N21/94
CPC分类号： G01N21/94
摘要： Disclosed herein are method of and apparatus for detecting a foreign substance on an object by illuminating said object, detecting via an optical system light reflected from said object and detecting said foreign substance in distinction from a background. The object is exposed to first illumination such that light reflected from said background is suppressed but light reflected from said foreign substance is highlighted relative to the light reflected from said background. The light reflected from said object as a result of said first illumination is detected, thereby obtaining a first detection signal. The object is exposed to second illumination such that light reflected from said background is free from suppression relative to the light reflected from said substance as a result of said second illumination. The light reflected from said object as a result of said second illumination is detected, thereby obtaining a second detection signal. Foreign-substance-highlighting processing is performed on said first detection signal by using said second detection signal, whereby said substance is detected.
摘要翻译： 本文公开了通过照射所述物体来检测物体上的异物的方法和装置，通过光学系统检测从所述物体反射的光并检测所述异物与背景的区别。 对象被暴露于第一照明，使得从所述背景反射的光被抑制，而从所述异物反射的光相对于从所述背景反射的光被突出显示。 检测由于所述第一照明而从所述物体反射的光，从而获得第一检测信号。 物体暴露于第二照明，使得从所述背景反射的光相对于作为所述第二照明的结果从所述物质反射的光没有抑制。 检测作为所述第二照明的结果从所述物体反射的光，从而获得第二检测信号。 通过使用所述第二检测信号对所述第一检测信号进行异物突出处理，从而检测所述物质。
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5.发明授权Detection of surface particles by dual semiconductor lasers having stable illumination intensities 失效通过具有稳定照明强度的双重半导体激光器检测表面颗粒
公开(公告)号：US4814596A
公开(公告)日：1989-03-21
申请号：US74858
申请日：1987-07-17
CPC分类号： G01N21/94
摘要： Disclosed is an apparatus for detecting particles comprising semiconductor laser drive means for performing feedback control of semiconductor lasers, each thereof incorporating a sensor therewith for monitoring laser-output thereof, by using the output of the sensor, means for holding the feedback voltage, illuminating means including a plurality of optical means disposed to oppose each other so that the laser-outputs from the semiconductor lasers are obliquely applied onto a specimen, and detection means for detecting the light scattered from the particles present on the specimen.
摘要翻译： 公开了一种用于检测粒子的装置，包括用于执行半导体激光器的反馈控制的半导体激光器驱动装置，每个半导体激光器结合有传感器，用于监视其激光输出，通过使用传感器的输出，用于保持反馈电压的装置，照明装置 包括设置成彼此相对的多个光学装置，使得来自半导体激光器的激光输出倾斜地施加到样本上;以及检测装置，用于检测从存在于样本上的颗粒散射的光。
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公开(公告)号：US4740079A
公开(公告)日：1988-04-26
申请号：US792320
申请日：1985-10-28
CPC分类号： G01N21/94 , G01N2021/4721 , G01N21/21 , G01N21/9501
摘要： The present invention provides a method for detecting foreign substances which detects a foreign substance with a first photoelectric conversion element by emphasizing the foreign substance and detects a background on the object with a second photoelectric conversion element by emphasizing the background and detects a foreign substance detection signal obtained from the first photoelectric conversion element by emphasizing the signal with a detection signal obtained from the second photoelectric conversion element.
摘要翻译： 本发明提供了一种通过强调异物检测第一光电转换元件的异物检测异物的方法，并且通过强调背景来检测物体上的背景，并检测异物检测信号 通过用从第二光电转换元件获得的检测信号强调信号从第一光电转换元件获得。
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7.发明申请EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DISPLAY PANEL SUBSTRATE 审中-公开曝光装置，曝光方法和制造显示面板基板的方法公开(公告)号：US20100103397A1
公开(公告)日：2010-04-29
申请号：US12540879
申请日：2009-08-13
CPC分类号： G03B27/32 , G03F7/70275
摘要： A position of a chuck 10 is detected. The movements of the stages 5 and 7 are controlled according to a result of detecting the position of the chuck 10, so as to position the chuck 10. Further, a light receiving means 51 is disposed on the chuck 10 for receiving a light beam irradiated from a head 20a of a light beam irradiation device 20. The misalignment of the head 20a of the light beam irradiation device 20 is detected based on the received light beam. According to a result of detecting the misalignment, a coordinate of drawing data supplied to a DMD driving circuit 27 of each light beam irradiation device 20 is modified. Moreover, the drawing data with the modified coordinate is supplied to the DMD driving circuit 27 of each light beam irradiation device 20.
摘要翻译： 检测卡盘10的位置。 根据检测卡盘10的位置的结果来控制级5和7的运动，以便定位卡盘10.此外，光盘接收装置51设置在卡盘10上以接收照射的光束 来自光束照射装置20的头部20a。基于所接收的光束来检测光束照射装置20的头部20a的未对准。 根据检测到未对准的结果，修改提供给每个光束照射装置20的DMD驱动电路27的绘图数据的坐标。 此外，具有改变的坐标的绘制数据被提供给每个光束照射装置20的DMD驱动电路27。
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8.发明申请EXPOSURE APPARATUS, EXPOSURE METHOD AND METHOD OF MANUFACTURING DISPLAY PANEL SUBSTRATE 审中-公开曝光装置，曝光方法和制造显示板基板的方法公开(公告)号：US20100040964A1
公开(公告)日：2010-02-18
申请号：US12540858
申请日：2009-08-13
CPC分类号： G03F7/70791 , G03F7/70291 , G03F7/70425 , G03F7/70475 , G03F7/70508
摘要： A range of a coordinate of drawing data supplied to a digital micromirror device (DMD) driving circuit 27 of a light beam irradiation device 20 is determined to configure a bandwidth of a light beam irradiated from an irradiation optical system of the light beam irradiation device 20. The drawing data having the determined range of the coordinate is supplied to the DMD driving circuit 27 of the light beam irradiation device 20. Movement of a stage 7 is controlled to move a chuck 10 for only a distance less than the bandwidth of the light beam irradiated from the irradiation optical system of the light beam irradiation device 20 towards a direction perpendicular to a scanning direction of the substrate by the light beam of the light beam irradiation device 20, at each scanning, and a same region of the substrate is scanned multiple times.
摘要翻译： 确定提供给光束照射装置20的数字微镜装置（DMD）驱动电路27的绘制数据的坐标范围，以构成从光束照射装置20的照射光学系统照射的光束的带宽 具有确定的坐标范围的绘图数据被提供给光束照射装置20的DMD驱动电路27.阶段7的移动被控制以将卡盘10移动到仅小于光的带宽的距离 通过光束照射装置20的光束，在每次扫描时，从基板的照射光学系统向与基板的扫描方向正交的方向照射的光束和基板的相同区域被扫描 多次。
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公开(公告)号：US06284119B1
公开(公告)日：2001-09-04
申请号：US09385025
申请日：1999-08-30
IPC分类号： G01N2726
CPC分类号： G01N27/44721
摘要： A DNA base sequencer including a gel electrophoretic means having tracks for electrophoresing fluorophore-labelled DNA fragments, a laser diode as a light source for illuminating said tracks with exciting laser light and a CCD sensor for detecting the fluorescence emitted from the illuminated DNA fragments, the laser diode has a control unit including a Peltier device for controlling the temperature of the laser diode, a Peltier device temperature setting generating means having a processor and a memory, and a temperature control circuit that generates a drive current to the Peltier device for controlling its temperature. The CCD sensor receives part of the exciting light from the laser diode as stray light and detects its wavelength. The Peltier device temperature setting generating means is such that, in accordance with the wavelength of stray light as detected periodically with said CCD sensor according to the program stored in said memory, it calculates a corrective value that adjusts the detected wavelength of stray light to the desired wavelength of exciting light that corresponds to the desired temperature setting and that an appropriate temperature setting signal is generated on the basis of said corrective value and the desired temperature setting and sent to the Peltier device temperature control circuit.
摘要翻译： 一种DNA碱基测序仪，包括具有用于电泳荧光团标记的DNA片段的轨道的凝胶电泳装置，激光二极管作为用激发激光照射所述轨道的光源和用于检测从照射的DNA片段发出的荧光的CCD传感器， 激光二极管具有包括用于控制激光二极管的温度的珀耳帖装置的控制单元，具有处理器和存储器的珀尔帖装置温度设定发生装置，以及向珀尔帖装置产生驱动电流以控制其的存储器的温度控制电路 温度。 CCD传感器接收来自激光二极管的激光的一部分作为杂散光并检测其波长。 珀耳帖装置温度设定发生装置使得根据存储在所述存储器中的程序与所述CCD传感器周期性地检测的杂散光的波长，计算校正值，该校正值将检测到的杂散光波长调整到 对应于所需温度设定的激励光的期望波长，以及基于所述校正值和期望温度设定产生适当的温度设定信号，并发送到珀尔帖器件温度控制电路。
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公开(公告)号：US4614427A
公开(公告)日：1986-09-30
申请号：US611947
申请日：1984-05-18
IPC分类号： G01N21/88 , G01B11/30 , G01N21/21 , G01N21/94 , G01N21/956 , G03F1/84 , H01L21/027 , H01L21/66
CPC分类号： G01N21/94 , G01N21/21 , G01N21/956
摘要： An automatic contaminants detection apparatus comprises a polarized laser beam source, a polarized laser beam irradiation optical system having irradiation angle switching means for switching an irradiation angle depending on the presence or absence of a pattern on a sample surface to irradiate the polarized laser beam emitted by the polarized laser beam source to the sample surface with an angle of grazing, a detector for detecting condensed scattered or reflected lights of the laser beam from the sample surface with or without interleave of an analyzer, and analyzer switching means for inserting or removing the analyzer into or from a detection light path of the detector depending on the presence or absence of the pattern on the sample surface. The apparatus can detect contaminants on the patterned or non-patterned sample surface with a high sensitivity.
摘要翻译： 一种自动污染物检测装置，包括：偏振激光束源，具有照射角度切换装置的偏光激光束照射光学系统，用于根据样品表面上有无图案切换照射角度，照射由 将偏振激光束源以放牧角度放置到样品表面，用于检测来自样品表面的来自样品表面的聚集的散射或反射光的检测器，具有或不具有分析仪的交错;以及分析器切换装置，用于插入或移除分析器 取决于样品表面上图案的存在或不存在，进入或离开检测器的检测光路。 该装置可以以高灵敏度检测图案化或非图案化样品表面上的污染物。
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