公开(公告)号：US07126174B2

公开(公告)日：2006-10-24

申请号：US10995283

申请日：2004-11-24

申请人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

发明人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

IPC分类号： H01L29/76

CPC分类号： H01L29/6659 ,  H01L21/76224 ,  H01L29/665 ,  H01L2924/0002 ,  H01L2924/00

摘要： An isolation which is higher in a stepwise manner than an active area of a silicon substrate is formed. On the active area, an FET including a gate oxide film, a gate electrode, a gate protection film, sidewalls and the like is formed. An insulating film is deposited on the entire top surface of the substrate, and a resist film for exposing an area stretching over the active area, a part of the isolation and the gate protection film is formed on the insulating film. There is no need to provide an alignment margin for avoiding interference with the isolation and the like to a region where a connection hole is formed. Since the isolation is higher in a stepwise manner than the active area, the isolation is prevented from being removed by over-etch in the formation of a connection hole to come in contact with a portion where an impurity concentration is low in the active area. In this manner, the integration of a semiconductor device can be improved and an area occupied by the semiconductor device can be decreased without causing degradation of junction voltage resistance and increase of a junction leakage current in the semiconductor device.

摘要翻译： 形成了比硅衬底的有源区域更高级的隔离。 在有源区域上，形成包括栅极氧化膜，栅电极，栅极保护膜，侧壁等的FET。 绝缘膜沉积在基板的整个顶表面上，并且在绝缘膜上形成用于暴露在有源区上延伸的区域，一部分隔离栅极保护膜的抗蚀剂膜。 不需要提供用于避免与形成连接孔的区域的隔离等的干涉的取向余量。 由于隔离比有源区域以逐步方式更高，所以通过在形成连接孔中的过度蚀刻来防止隔离物与有源区域中杂质浓度低的部分接触。 以这种方式，可以改善半导体器件的集成，并且可以降低半导体器件占据的面积，而不会导致半导体器件中的结电阻的劣化和结漏电流的增加。

公开(公告)号：US20050093089A1

公开(公告)日：2005-05-05

申请号：US10995283

申请日：2004-11-24

申请人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

发明人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

IPC分类号： H01L21/336 ,  H01L21/762 ,  H01L21/8242 ,  H01L29/00

CPC分类号： H01L29/6659 ,  H01L21/76224 ,  H01L29/665 ,  H01L2924/0002 ,  H01L2924/00

摘要： An isolation which is higher in a stepwise manner than an active area of a silicon substrate is formed. On the active area, an FET including a gate oxide film, a gate electrode, a gate protection film, sidewalls and the like is formed. An insulating film is deposited on the entire top surface of the substrate, and a resist film for exposing an area stretching over the active area, a part of the isolation and the gate protection film is formed on the insulating film. There is no need to provide an alignment margin for avoiding interference with the isolation and the like to a region where a connection hole is formed. Since the isolation is higher in a stepwise manner than the active area, the isolation is prevented from being removed by over-etch in the formation of a connection hole to come in contact with a portion where an impurity concentration is low in the active area. In this manner, the integration of a semiconductor device can be improved and an area occupied by the semiconductor device can be decreased without causing degradation of junction voltage resistance and increase of a junction leakage current in the semiconductor device.

摘要翻译： 形成了比硅衬底的有源区域更高级的隔离。 在有源区域上，形成包括栅极氧化膜，栅电极，栅极保护膜，侧壁等的FET。 绝缘膜沉积在基板的整个顶表面上，并且在绝缘膜上形成用于暴露在有源区上延伸的区域，一部分隔离栅极保护膜的抗蚀剂膜。 不需要提供用于避免与形成连接孔的区域的隔离等的干涉的取向余量。 由于隔离比有源区域以逐步方式更高，所以通过在形成连接孔中的过度蚀刻来防止隔离物与有源区域中杂质浓度低的部分接触。 以这种方式，可以改善半导体器件的集成，并且可以降低半导体器件占据的面积，而不会导致半导体器件中的结电阻的劣化和结漏电流的增加。

公开(公告)号：US6124160A

公开(公告)日：2000-09-26

申请号：US192536

申请日：1998-11-17

申请人： Mizuki Segawa ,  Toshiki Yabu ,  Takashi Uehara ,  Takashi Nakabayashi ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada

发明人： Mizuki Segawa ,  Toshiki Yabu ,  Takashi Uehara ,  Takashi Nakabayashi ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada

IPC分类号： H01L29/43 ,  H01L21/02 ,  H01L21/336 ,  H01L21/822 ,  H01L21/8234 ,  H01L21/8247 ,  H01L27/04 ,  H01L27/06 ,  H01L27/105 ,  H01L27/115 ,  H01L29/423 ,  H01L29/49 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  H01L21/8242

CPC分类号： H01L27/11526 ,  H01L21/82345 ,  H01L27/0629 ,  H01L27/105 ,  H01L27/11543 ,  H01L28/40 ,  Y10S438/957

摘要： A MOS transistor includes a gate oxide film, and a gate electrode which is formed by a lamination of first and second conductor films. A capacitive element includes a lower capacitive electrode formed of the first conductor film, a capacitive film made of an insulating film which is different from the gate oxide film, an upper capacitive electrode formed of the second conductor film on the capacitive film, and a leading electrode of the lower capacitive electrode formed of the second conductor film. At the same number of steps as in the case where the gate oxide film is used as the capacitive film, a semiconductor device can be manufactured with the capacitive film provided, the capacitive film being made of a nitride film or the like that is different from the gate oxide film. Consequently, a capacitive film having a great capacitance value per unit area is used so that the occupied area can be reduced and an increase in manufacturing cost can be controlled. In the semiconductor device in which a transistor, a capacitive element, a resistive film and the like are provided, the occupied area can be reduced and the manufacturing cost can be cut down.

摘要翻译： MOS晶体管包括栅极氧化膜和通过第一和第二导体膜的叠层形成的栅电极。 电容元件包括由第一导体膜形成的下部电容电极，由与栅极氧化膜不同的绝缘膜制成的电容膜，由电容膜上的第二导体膜形成的上部电容电极，以及引线 电极由第二导电膜形成。 以与使用栅极氧化膜作为电容膜的情况相同的步骤，可以制造具有设置的电容膜的半导体器件，电容膜由与氮化物膜不同的氮化物膜等构成 栅氧化膜。 因此，使用具有每单位面积的大的电容值的电容膜，从而可以减小占用面积并且可以控制制造成本的增加。 在其中提供晶体管，电容元件，电阻膜等的半导体器件中，可以减小占用面积并且可以减少制造成本。

公开(公告)号：US20050156220A1

公开(公告)日：2005-07-21

申请号：US11081679

申请日：2005-03-17

申请人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

发明人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

IPC分类号： H01L21/336 ,  H01L21/762 ,  H01L27/108 ,  H01L21/8242

CPC分类号： H01L29/6659 ,  H01L21/76224 ,  H01L29/665 ,  H01L2924/0002 ,  H01L2924/00

摘要： An isolation which is higher in a stepwise manner than an active area of a silicon substrate is formed. On the active area, an FET including a gate oxide film, a gate electrode, a gate protection film, sidewalls and the like is formed. An insulating film is deposited on the entire top surface of the substrate, and a resist film for exposing an area stretching over the active area, a part of the isolation and the gate protection film is formed on the insulating film. There is no need to provide an alignment margin for avoiding interference with the isolation and the like to a region where a connection hole is formed. Since the isolation is higher in a stepwise manner than the active area, the isolation is prevented from being removed by over-etch in the formation of a connection hole to come in contact with a portion where an impurity concentration is low in the active area. In this manner, the integration of a semiconductor device can be improved and an area occupied by the semiconductor device can be decreased without causing degradation of junction voltage resistance and increase of a junction leakage current in the semiconductor device.

公开(公告)号：US06847119B2

公开(公告)日：2005-01-25

申请号：US10454682

申请日：2003-06-05

申请人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

发明人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

摘要： An isolation which is higher in a stepwise manner than an active area of a silicon substrate is formed. On the active area, an FET including a gate oxide film, a gate electrode, a gate protection film, sidewalls and the like is formed. An insulating film is deposited on the entire top surface of the substrate, and a resist film for exposing an area stretching over the active area, a part of the isolation and the gate protection film is formed on the insulating film. There is no need to provide an alignment margin for avoiding interference with the isolation and the like to a region where a connection hole is formed. Since the isolation is higher in a stepwise manner than the active area, the isolation is prevented from being removed by over-etch in the formation of a connection hole to come in contact with a portion where an impurity concentration is low in the active area. In this manner, the integration of a semiconductor device can be improved and an area occupied by the semiconductor device can be decreased without causing degradation of junction voltage resistance and increase of a junction leakage current in the semiconductor device.

公开(公告)号：US06709950B2

公开(公告)日：2004-03-23

申请号：US09902157

申请日：2001-07-11

申请人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

发明人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

IPC分类号： H01L29167

CPC分类号： H01L29/6659 ,  H01L21/76224 ,  H01L29/665 ,  H01L2924/0002 ,  H01L2924/00

摘要： An isolation which is higher in a stepwise manner than an active area of a silicon substrate is formed. On the active area, an FET including a gate oxide film, a gate electrode, a gate protection film, sidewalls and the like is formed. An insulating film is deposited on the entire top surface of the substrate, and a resist film for exposing an area stretching over the active area, a part of the isolation and the gate protection film is formed on the insulating film. There is no need to provide an alignment margin for avoiding interference with the isolation and the like to a region where a connection hole is formed. Since the isolation is higher in a stepwise manner than the active area, the isolation is prevented from being removed by over-etch in the formation of a connection hole to come in contact with a portion where an impurity concentration is low in the active area. In this manner, the integration of a semiconductor device can be improved and an area occupied by the semiconductor device can be decreased without causing degradation of junction voltage resistance and increase of a junction leakage current in the semiconductor device.

摘要翻译： 形成了比硅衬底的有源区域更高级的隔离。 在有源区域上，形成包括栅极氧化膜，栅电极，栅极保护膜，侧壁等的FET。 绝缘膜沉积在基板的整个顶表面上，并且在绝缘膜上形成用于暴露在有源区上延伸的区域，一部分隔离栅极保护膜的抗蚀剂膜。 不需要提供用于避免与形成连接孔的区域的隔离等的干涉的取向余量。 由于隔离比有源区域以逐步方式更高，所以通过在形成连接孔中的过度蚀刻来防止隔离物与有源区域中杂质浓度低的部分接触。 以这种方式，可以改善半导体器件的集成，并且可以降低半导体器件占据的面积，而不会导致半导体器件中的结电阻的劣化和结漏电流的增加。

公开(公告)号：US06492672B1

公开(公告)日：2002-12-10

申请号：US09629861

申请日：2000-08-01

申请人： Mizuki Segawa ,  Toshiki Yabu ,  Takashi Uehara ,  Takashi Nakabayashi ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada

发明人： Mizuki Segawa ,  Toshiki Yabu ,  Takashi Uehara ,  Takashi Nakabayashi ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada

IPC分类号： H01L27108

CPC分类号： H01L27/11526 ,  H01L21/82345 ,  H01L27/0629 ,  H01L27/105 ,  H01L27/11543 ,  H01L28/40 ,  Y10S438/957

摘要： A MOS transistor includes a gate oxide film, and a gate electrode which is formed by a lamination of first and second conductor films. A capacitive element includes a lower capacitive electrode formed of the first conductor film, a capacitive film made of an insulating film which is different from the gate oxide film, an upper capacitive electrode formed of the second conductor film on the capacitive film, and a leading electrode of the lower capacitive electrode formed of the second conductor film. At the same number of steps as in the case where the gate oxide film is used as the capacitive film, a semiconductor device can be manufactured with the capacitive film provided, the capacitive film being made of a nitride film or the like that is different from the gate oxide film. Consequently, a capacitive film having a great capacitance value per unit area is used so that the occupied area can be reduced and an increase in manufacturing cost can be controlled. In the semiconductor device in which a transistor, a capacitive element, a resistive film and the like are provided, the occupied area can be reduced and the manufacturing cost can be cut down.

摘要翻译： MOS晶体管包括栅极氧化膜和通过第一和第二导体膜的叠层形成的栅电极。 电容元件包括由第一导体膜形成的下部电容电极，由与栅极氧化膜不同的绝缘膜制成的电容膜，由电容膜上的第二导体膜形成的上部电容电极，以及引线 电极由第二导电膜形成。 以与使用栅极氧化膜作为电容膜的情况相同的步骤，可以制造具有设置的电容膜的半导体器件，电容膜由与氮化物膜不同的氮化物膜等构成 栅氧化膜。 因此，使用具有每单位面积的大的电容值的电容膜，从而可以减小占用面积并且可以控制制造成本的增加。 在其中提供晶体管，电容元件，电阻膜等的半导体器件中，可以减小占用面积并且可以减少制造成本。

公开(公告)号：US06281562B1

公开(公告)日：2001-08-28

申请号：US08685726

申请日：1996-07-24

申请人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

发明人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

IPC分类号： H01L29167

CPC分类号： H01L29/6659 ,  H01L21/76224 ,  H01L29/665 ,  H01L2924/0002 ,  H01L2924/00

摘要： An isolation which is higher in a stepwise manner than an active area of a silicon substrate is formed. On the active area, an FET including a gate oxide film, a gate electrode, a gate protection film, sidewalls and the like is formed. An insulating film is deposited on the entire top surface of the substrate, and a resist film for exposing an area stretching over the active area, a part of the isolation and the gate protection film is formed on the insulating film. There is no need to provide an alignment margin for avoiding interference with the isolation and the like to a region where a connection hole is formed. Since the isolation is higher in a stepwise manner than the active area, the isolation is prevented from being removed by over-etch in the formation of a connection hole to come in contact with a portion where an impurity concentration is low in the active area. In this manner, the integration of a semiconductor device can be improved and an area occupied by the semiconductor device can be decreased without causing degradation of junction voltage resistance and increase of a junction leakage current in the semiconductor device.

摘要翻译： 形成了比硅衬底的有源区域更高级的隔离。 在有源区域上，形成包括栅极氧化膜，栅电极，栅极保护膜，侧壁等的FET。 绝缘膜沉积在基板的整个顶表面上，并且在绝缘膜上形成用于暴露在有源区上延伸的区域，一部分隔离栅极保护膜的抗蚀剂膜。 不需要提供用于避免与形成连接孔的区域的隔离等的干涉的取向余量。 由于隔离比有源区域以逐步方式更高，所以通过在形成连接孔中的过度蚀刻来防止隔离物与有源区域中的杂质浓度低的部分接触。 以这种方式，可以改善半导体器件的集成，并且可以降低半导体器件占据的面积，而不会导致半导体器件中的结电阻的劣化和结漏电流的增加。

公开(公告)号：US06967409B2

公开(公告)日：2005-11-22

申请号：US10454682

申请日：2003-06-05

申请人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

发明人： Mizuki Segawa ,  Isao Miyanaga ,  Toshiki Yabu ,  Takashi Nakabayashi ,  Takashi Uehara ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada ,  Michikazu Matsumoto

IPC分类号： H01L21/336 ,  H01L21/762 ,  H01L29/40

CPC分类号： H01L29/6659 ,  H01L21/76224 ,  H01L29/665 ,  H01L2924/0002 ,  H01L2924/00

摘要： An isolation which is higher in a stepwise manner than an active area of a silicon substrate is formed. On the active area, an FET including a gate oxide film, a gate electrode, a gate protection film, sidewalls and the like is formed. An insulating film is deposited on the entire top surface of the substrate, and a resist film for exposing an area stretching over the active area, a part of the isolation and the gate protection film is formed on the insulating film. There is no need to provide an alignment margin for avoiding interference with the isolation and the like to a region where a connection hole is formed. Since the isolation is higher in a stepwise manner than the active area, the isolation is prevented from being removed by over-etch in the formation of a connection hole to come in contact with a portion where an impurity concentration is low in the active area. In this manner, the integration of a semiconductor device can be improved and an area occupied by the semiconductor device can be decreased without causing degradation of junction voltage resistance and increase of a junction leakage current in the semiconductor device.

公开(公告)号：US5879983A

公开(公告)日：1999-03-09

申请号：US716571

申请日：1996-09-18

申请人： Mizuki Segawa ,  Toshiki Yabu ,  Takashi Uehara ,  Takashi Nakabayashi ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada

发明人： Mizuki Segawa ,  Toshiki Yabu ,  Takashi Uehara ,  Takashi Nakabayashi ,  Kyoji Yamashita ,  Takaaki Ukeda ,  Masatoshi Arai ,  Takayuki Yamada

IPC分类号： H01L29/43 ,  H01L21/02 ,  H01L21/336 ,  H01L21/822 ,  H01L21/8234 ,  H01L21/8247 ,  H01L27/04 ,  H01L27/06 ,  H01L27/105 ,  H01L27/115 ,  H01L29/423 ,  H01L29/49 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  H01L21/8242

CPC分类号： H01L27/11526 ,  H01L21/82345 ,  H01L27/0629 ,  H01L27/105 ,  H01L27/11543 ,  H01L28/40 ,  Y10S438/957

摘要： A MOS transistor includes a gate oxide film, and a gate electrode which is formed by a lamination of first and second conductor films. A capacitive element includes a lower capacitive electrode formed of the first conductor film, a capacitive film made of an insulating film which is different from the gate oxide film, an upper capacitive electrode formed of the second conductor film on the capacitive film, and a leading electrode of the lower capacitive electrode formed of the second conductor film. At the same number of steps as in the case where the gate oxide film is used as the capacitive film, a semiconductor device can be manufactured with the capacitive film provided, the capacitive film being made of a nitride film or the like that is different from the gate oxide film. Consequently, a capacitive film having a great capacitance value per unit area is used so that the occupied area can be reduced and an increase in manufacturing cost can be controlled. In the semiconductor device in which a transistor, a capacitive element, a resistive film and the like are provided, the occupied area can be reduced and the manufacturing cost can be cut down.