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    Resonator and resonance device including same
    1.
    发明授权
    Resonator and resonance device including same 有权

    公开(公告)号：US12170514B2

    公开(公告)日：2024-12-17

    申请号：US17169942

    申请日：2021-02-08

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yoshihisa Inoue ,  Ryota Kawai ,  Yuichi Goto

    IPC: H03H9/24 ,  B81B7/00 ,  H03H9/05 ,  H03H9/10

    Abstract: A resonator is provided that includes a base; at least three vibrating arms that include a piezoelectric film, an upper electrode, and a lower electrode; a frame; and a holding arm. Each vibrating arm includes an arm portion and a tip portion. The holding arm includes a holding side arm that extends parallel to the outer vibrating arm. A release width between the tip portion of the outer vibrating arm and the frame is larger than a release width between the holding side arm and the frame or a release width between the arm portion of the outer vibrating arm and the holding side arm.

    RESONATOR AND RESONANCE DEVICE
    4.
    发明申请
    RESONATOR AND RESONANCE DEVICE 审中-公开

    公开(公告)号：US20190074812A1

    公开(公告)日：2019-03-07

    申请号：US16174563

    申请日：2018-10-30

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yoshihisa Inoue ,  Toshio Nishimura ,  Keisuke Takeyama ,  Ryota Kawai ,  Yuichi Goto

    IPC: H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/13 ,  H03H9/17

    Abstract: A resonator that includes a base and one or more vibration arms with fixed ends connected to a front end of the base and open ends extending therefrom. Moreover, the vibration arms include first and second electrodes and a piezoelectric film that is disposed therebetween. The resonator further includes a protective film disposed opposing an upper face of the piezoelectric film and sandwiching the first electrode and a temperature characteristics adjusting film formed of a material different from a material of the protective film and that is provided on the fixed end side relative to the center of the vibration arms such that part of the protective film is exposed to a surface.

    Resonance device
    5.
    发明授权
    Resonance device 有权

    公开(公告)号：US12267060B2

    公开(公告)日：2025-04-01

    申请号：US17493037

    申请日：2021-10-04

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yoshihisa Inoue ,  Ville Kaajakari ,  Ryota Kawai

    IPC: H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/24

    Abstract: A resonance device is provided that includes a resonator having a base, a vibrating arm extending from one end of the base along a first direction, a frame disposed around at least a part of the vibrating arm and holding the vibrating arm such that the vibrating arm is configured to vibrate, and a support arm connecting the base to the frame. Moreover, a first substrate is provided that includes a first recess forming at least a part of a vibration space for the resonator and a first limiting portion provided away from the support arm by a first distance in a thickness direction, in which the first distance is smaller than a distance between a bottom surface of the first recess and the vibrating arm in the thickness direction of the first substrate.

    RESONATOR AND RESONANCE DEVICE INCLUDING SAME
    7.
    发明申请
    RESONATOR AND RESONANCE DEVICE INCLUDING SAME 有权

    公开(公告)号：US20210203304A1

    公开(公告)日：2021-07-01

    申请号：US17181336

    申请日：2021-02-22

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yoshihisa Inoue ,  Ryota Kawai ,  Yuichi Goto

    IPC: H03H9/24 ,  H03H9/02 ,  H03H9/08 ,  H03H9/10

    Abstract: A resonator includes a base; and at least three vibrating arms having first ends connected to a front end of the base and second ends that are open ends spaced away from the front end. Each vibrating arm includes an arm portion having a part that extends from the fixed end in a direction toward the open end with a constant width and a mass-adding portion that is connected to a tip of the arm portion and has a larger width than the arm portion. An interval between the mass-adding portions is larger than an interval between the arm portions for any two vibrating arms that are adjacent to each other.

    MEMS DEVICE
    8.
    发明申请
    MEMS DEVICE 有权

    公开(公告)号：US20210083647A1

    公开(公告)日：2021-03-18

    申请号：US17108007

    申请日：2020-12-01

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yoshihisa Inoue ,  Masakazu Fukumitsu ,  Yuichi Goto

    IPC: H03H9/10 ,  H03H9/02 ,  H03H9/24 ,  B81B7/00

    Abstract: A MEMS device that includes a substrate including an element and a connection wiring electrically connected to the element, and a connection portion electrically connected to the connection wiring. The connection portion is formed of a eutectic alloy of a first metal and a second metal. A line width of the connection wiring is smaller than a width of the connection portion when a main surface of the substrate is viewed in a plan view.

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