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公开(公告)号:US20160160345A1
公开(公告)日:2016-06-09
申请号:US14908855
申请日:2015-05-15
Applicant: NITTO DENKO CORPORATION
Inventor: Kodai MIYAMOTO , Kazuaki SASA , Hironobu MACHINAGA , Eri UEDA , Manami KUROSE , Tomotake NASHIKI
CPC classification number: C23C14/58 , B32B7/02 , B32B9/00 , C23C14/08 , C23C14/086 , C23C14/35 , C23C14/5806 , H01B1/02 , H01B3/426 , H01B3/427 , H01L31/022466
Abstract: Provided is a transparent conductive film that can drastically improving an electrical characteristic of a transparent conductive layer after crystallizing process with resped to the transparent conductive layer before the crystallizing process and can achieve a lower resistivity.The transparent conductive film (1) is provided with a film substrate (2) and a crystalline transparent conductive layer (3) formed on one of the main surfaces (2a) of the said substrate. The amorphous transparent conductive layer before the crystallizing process has a carrier density na×1019 of (10 to 60)×1019/cm3 and Hall mobility μa of 10 to 25 cm2/V·s, the crystalline transparent conductive layer after the crystallizing process has a carrier density nc×1019 of (80 to 150)×1019/cm3 and Hall mobility t of 20 to 40 cm2/V·s, and the length of motion L defined by {(nc−na)2+(μc−μa)2}1/2 is 50 to 150.
Abstract translation: 提供一种透明导电膜,其可以在结晶处理之前,在透明导电层之后,在结晶处理之后,可以显着地改善透明导电层的电特性,并可以实现较低的电阻率。 透明导电膜(1)设置有形成在所述基板的一个主表面(2a)上的薄膜基板(2)和结晶透明导电层(3)。 结晶处理前的非晶透明导电层的(10〜60)×1019 / cm 3的载流子密度na×1019,10〜25cm2 / V·s的霍尔迁移率μa,结晶化后的结晶透明导电层具有 (80〜150)×1019 / cm 3的载流子密度nc×1019,20〜40cm2 / V·s的霍尔迁移率t和由{(nc-na)2+(μc-μa) )2} 1/2为50〜150。
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公开(公告)号:US20190310394A1
公开(公告)日:2019-10-10
申请号:US16309256
申请日:2017-06-16
Applicant: NITTO DENKO CORPORATION
Inventor: Kodai MIYAMOTO , Minoru KANATANI , Tomotake NASHIKI
IPC: G02B1/115 , B32B27/08 , B32B27/30 , B32B7/023 , C23C14/08 , C23C14/00 , C23C14/35 , G02B1/14 , G02B1/18
Abstract: The anti-reflection film includes an anti-reflection layer composed of multilayer thin-films having different refractive indexes on one principal surface of a transparent film substrate. The moisture permeability of the anti-reflection film is 15 to 1000 g/m2·24 h. The surface of the anti-reflection layer has an indentation elastic modulus of 20 to 100 GPa, and an arithmetic mean roughness Ra of 3 nm or less. The arithmetic mean roughness Ra of the surface of the anti-reflection layer is preferably 1.5 nm or less. The thin-films constituting the anti-reflection layer can be deposited by, for example, a sputtering method.
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