Metal compound, material for chemical vapor phase growth, and process for forming metal-containing thin film
    1.
    发明授权
    Metal compound, material for chemical vapor phase growth, and process for forming metal-containing thin film 有权
    金属化合物,用于化学气相生长的材料,以及用于形成含金属薄膜的工艺

    公开(公告)号:US08357815B2

    公开(公告)日:2013-01-22

    申请号:US12740188

    申请日:2008-10-22

    IPC分类号: C07F7/00 C23C16/00

    摘要: A novel metal compound of general formula (1), a material for chemical vapor phase growth containing the compound, and a process for forming a metal-containing thin film by chemical vapor phase growth using the material. Among the compounds of formula (1), those wherein X is a chlorine atom are preferred because of inexpensiveness and high volatility. When M is titanium, those wherein m is 1 are preferred as having a greater difference between a volatilization temperature (vapor temperature) and a deposition temperature (reaction temperature), which provides a broader process margin. In formula (1), M is titanium, zirconium, or hafnium; X is a halogen atom; and m is 1 or 2.

    摘要翻译: 通式(1)的新型金属化合物,含有化合物的化学气相生长材料,以及使用该材料通过化学气相生长形成含金属薄膜的方法。 在式(1)的化合物中,由于成本低,挥发性高,因此优选X为氯原子的化合物。 当M是钛时,其中m为1的那些是优选的,在挥发温度(蒸气温度)和沉积温度(反应温度)之间具有更大的差异,这提供了更宽的加工余量。 在式(1)中,M是钛,锆或铪; X是卤原子; m为1或2。

    METAL COMPOUND, MATERIAL FOR CHEMICAL VAPOR PHASE GROWTH, AND PROCESS FOR FORMING METAL-CONTAINING THIN FILM
    2.
    发明申请
    METAL COMPOUND, MATERIAL FOR CHEMICAL VAPOR PHASE GROWTH, AND PROCESS FOR FORMING METAL-CONTAINING THIN FILM 有权
    金属化合物,化学气相生长材料和形成含金属薄膜的方法

    公开(公告)号:US20100247765A1

    公开(公告)日:2010-09-30

    申请号:US12740188

    申请日:2008-10-22

    摘要: A novel metal compound of general formula (1), a material for chemical vapor phase growth containing the compound, and a process for forming a metal-containing thin film by chemical vapor phase growth using the material. Among the compounds of formula (1), those wherein X is a chlorine atom are preferred because of inexpensiveness and high volatility. When M is titanium, those wherein m is 1 are preferred as having a greater difference between a volatilization temperature (vapor temperature) and a deposition temperature (reaction temperature), which provides a broader process margin. In formula (1), M is titanium, zirconium, or hafnium; X is a halogen atom; and m is 1 or 2.

    摘要翻译: 通式(1)的新型金属化合物,含有化合物的化学气相生长材料,以及使用该材料通过化学气相生长形成含金属薄膜的方法。 在式(1)的化合物中,由于成本低,挥发性高,因此优选X为氯原子的化合物。 当M是钛时,其中m为1的那些是优选的,在挥发温度(蒸气温度)和沉积温度(反应温度)之间具有更大的差异,这提供了更宽的加工余量。 在式(1)中,M是钛,锆或铪; X是卤原子; m为1或2。

    Process of forming thin film and precursor for chemical vapor deposition
    3.
    发明授权
    Process of forming thin film and precursor for chemical vapor deposition 失效
    用于化学气相沉积的薄膜和前体的形成工艺

    公开(公告)号:US06743933B2

    公开(公告)日:2004-06-01

    申请号:US10286906

    申请日:2002-11-04

    IPC分类号: C07F728

    CPC分类号: C23C16/409 C07F7/003

    摘要: A process of producing a strontium titanate, barium titanate or barium strontium titanate thin film by chemical vapor deposition which comprises using a titanium compound represented by formula (I): wherein R1 represents a hydrogen atom or a methyl group; and R2 and R3 each represent a methyl group or an ethyl group, or R2 and R3 are connected together to form a methylene group, a methylmethylene group or a dimethylmethylene group.

    摘要翻译: 一种通过化学气相沉积法生产钛酸锶钛酸钡或钛酸钡钡薄膜的方法,该方法包括使用由式(I)表示的钛化合物:其中R 1表示氢原子或甲基; R 2和R 3各自表示甲基或乙基,或R 2和R 3连接在一起形成亚甲基,甲基亚甲基或二甲基亚甲基。

    Image processing apparatus and image processing method for generating a combined image
    6.
    发明授权
    Image processing apparatus and image processing method for generating a combined image 有权
    用于产生组合图像的图像处理装置和图像处理方法

    公开(公告)号:US08941758B2

    公开(公告)日:2015-01-27

    申请号:US13215940

    申请日:2011-08-23

    申请人: Naoki Yamada

    发明人: Naoki Yamada

    摘要: An image processing apparatus is configured to generate a combined image by combining a plurality of photographed images. The image processing apparatus includes an acquisition unit configured to acquire the plurality of photographed images from a photographing unit, and a setting unit configured to designate, if misshooting or reshooting of a first photographed image of the plurality of photographed images is designated, misshooting or reshooting of a second photographed image of the plurality of photographed images.

    摘要翻译: 图像处理装置被配置为通过组合多个拍摄图像来生成组合图像。 该图像处理装置包括获取单元,被配置为从拍摄单元获取多个拍摄的图像;以及设置单元,被配置为指定如果指定了多个拍摄图像的第一拍摄图像的检波或重新拍摄,则进行识别或重新拍摄 的多个拍摄图像的第二拍摄图像。