公开(公告)号：US4469950A

公开(公告)日：1984-09-04

申请号：US354822

申请日：1982-03-04

申请人： Norman J. Taylor ,  Paul F. Petric

发明人： Norman J. Taylor ,  Paul F. Petric

IPC分类号： G03F7/20 ,  H01J37/09 ,  H01J37/317 ,  H01L21/027 ,  H01J37/00

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/09 ,  H01J37/3174 ,  H01J2237/31776

摘要： A charged particle beam exposure system for selectively irradiating the surface of a workpiece to be patterned. The beam has a cross-section at the surface of the workpiece comprising a projected line on variable length, of controlled width and one of two orthogonal orientations. An image of an L-shaped aperture is focussed on a shaping aperture with two adjacent orthogonal edges and is deflected relative to the shaping aperture to provide an intermediate line of desired length, width and orientation. The intermediate line is defined by the portion of the image of the L-shaped aperture which is superimposed on the shaping aperture. An image of the intermediate line is projected onto the workpiece to form the projected line which is scanned over the surface of the workpiece. Radial beam spreading is reduced and pattern line resolution is improved in the disclosed system.

摘要翻译： 一种用于选择性地照射要被图案化的工件的表面的带电粒子束曝光系统。 梁在工件的表面具有横截面，其包括可变长度，受控宽度和两个正交取向之一的投影线。 L形孔的图像聚焦在具有两个相邻正交边缘的成形孔上，并且相对于成形孔偏转以提供所需长度，宽度和取向的中间线。 中间线由叠置在成形孔上的L形孔的图像的部分限定。 将中间线的图像投影到工件上以形成在工件的表面上扫描的投影线。 在所公开的系统中，径向光束扩展减小，图案线分辨率得到改善。

公开(公告)号：US4224518A

公开(公告)日：1980-09-23

申请号：US972192

申请日：1978-12-21

申请人： Norman J. Taylor

发明人： Norman J. Taylor

IPC分类号： G01Q30/02 ,  G01Q30/06 ,  H01J49/06 ,  H01J49/48 ,  H01J39/00

CPC分类号： H01J49/06 ,  H01J49/482

摘要： A multi-stage cylindrical mirror analyzer incorporates a primary radiation source, such as an electron gun, disposed internally and along the axis of the multi-stage analyzer. The gun includes all of the optical elements for producing a well defined beam, correcting aberration thereof and scanning the beam on a sample. The components of the gun are distributed along the axial length of the analyzer. Aberration of the scanned beam due to traversal of a subsequent lense is minimized by placing the pivot point of the deflected beam trajectory substantially at the center of the lense. The greater dispersion of the multi-stage analyzer and the unit magnification thereof permit proportionately greater exit aperture dimensions, whereby a wider field of view may be realized.

摘要翻译： 多级柱面镜分析仪包含一个主辐射源，例如电子枪，内置并沿着多级分析仪的轴线。 枪包括用于产生明确定义的光束的所有光学元件，校正其像差并扫描样品上的光束。 枪的组件沿分析仪的轴向长度分布。 通过将偏转的光束轨迹的枢转点基本上位于透镜的中心，由于穿过随后的透镜而使扫描光束的偏移最小化。 多级分析仪的分散度越大，单元放大倍率越大，出口孔尺寸越大，可以实现更宽的视野。

公开(公告)号：US10743718B2

公开(公告)日：2020-08-18

申请号：US15911066

申请日：2018-03-02

申请人： Norman J. Taylor

发明人： Norman J. Taylor

IPC分类号： A47K3/164 ,  A47K3/024 ,  A47K3/034

摘要： A baby bath system including a bathing station assembly having a tub including an inner-volume, a plurality of side walls, an open top end, and a base, a shower head, a plurality of height adjustable legs each having a length, a first-end, and a second-end, a dispenser, a hose, and a drain. The plurality of height adjustable legs may be adjusted to allow a user to access the tub at a desired height without back strain. The device provides parents and guardians with a fully adjustable tub making it easier to bathe an infant.

公开(公告)号：US20180310777A1

公开(公告)日：2018-11-01

申请号：US15911066

申请日：2018-03-02

申请人： Norman J. Taylor

发明人： Norman J. Taylor

IPC分类号： A47K3/164 ,  A47K3/024 ,  A47K3/034 ,  A47K5/12 ,  E03C1/04 ,  A47K1/14 ,  E03C1/02 ,  E03C1/22

CPC分类号： A47K3/164 ,  A47K1/14 ,  A47K3/024 ,  A47K3/034 ,  A47K5/12 ,  E03C1/025 ,  E03C1/0409 ,  E03C1/22

摘要： A baby bath system including a bathing station assembly having a tub including an inner-volume, a plurality of side walls, an open top end, and a base, a shower head, a plurality of height adjustable legs each having a length, a first-end, and a second-end, a dispenser, a hose, and a drain. The plurality of height adjustable legs may be adjusted to allow a user to access the tub at a desired height without back strain. The device provides parents and guardians with a fully adjustable tub making it easier to bathe an infant.

公开(公告)号：US3932749A

公开(公告)日：1976-01-13

申请号：US454038

申请日：1974-03-22

申请人： Norman J. Taylor

发明人： Norman J. Taylor

IPC分类号： H01J3/02 ,  H01J37/06 ,  H01J37/147 ,  H01J37/153 ,  G01N23/00

CPC分类号： H01J3/029

摘要： Electron gun having a source of electrons, means for forming the electrons into a beam directed along an axis, and an output electrode comprising a plurality of semi-cylindrical plates disposed coaxially of the axis of the beam. This electrode is part of the final lens of the gun, and voltages for deflecting the beam and correcting astigmatism are superposed on the plates of this electrode.

摘要翻译： 具有电子源的电子枪，用于将电子形成为沿着轴指向的光束的装置，以及包括与光束的轴线同轴设置的多个半圆柱形板的输出电极。 该电极是枪的最终透镜的一部分，并且用于偏转光束和校正像散的电压叠加在该电极的板上。

公开(公告)号：US4544847A

公开(公告)日：1985-10-01

申请号：US518167

申请日：1983-07-28

申请人： Norman J. Taylor

发明人： Norman J. Taylor

IPC分类号： H01J37/141 ,  H01J37/305 ,  H01L21/027 ,  H01J3/22

CPC分类号： H01J37/141

摘要： A magnetic lens for imaging and rotation of a charged particle beam includes a pair of focus elements axially spaced along a lens bore through which the beam passes and a rotation element positioned axially between the focus elements. Each of the lens elements includes a polepiece having opposing portions surrounding the lens bore and axially spaced apart to define a circumferential gap, and a winding for energizing the polepiece and the gap. The focus elements are energized by equal and opposite magnetic fields which focus the electron beam without substantial beam rotation. The beam can be rotated, without substantial change in focus or magnification, by varying the magnetic field of the rotation element. The lens is particularly suited for use in a shaped electron beam lithography system.

摘要翻译： 用于成像和旋转带电粒子束的磁性透镜包括沿着透镜孔轴向间隔开的一对焦点元件，光束通过该透镜孔以及轴向位于聚焦元件之间的旋转元件。 每个透镜元件包括具有围绕透镜孔并且轴向间隔开以限定圆周间隙的相对部分的极靴，以及用于激励极靴和间隙的绕组。 聚焦元件由相等和相反的磁场激励，这些磁场聚焦电子束而没有实质的光束旋转。 可以通过改变旋转元件的磁场来旋转光束而不会使焦点或放大率实质上改变。 透镜特别适用于成形电子束光刻系统。

公开(公告)号：US4460846A

公开(公告)日：1984-07-17

申请号：US510465

申请日：1983-07-01

申请人： Norman J. Taylor

发明人： Norman J. Taylor

IPC分类号： H01J23/027 ,  H01J23/02

CPC分类号： H01J23/027

摘要： In a microwave electron tube such as a gyrotron, a hollow beam of electrons passes thru the interaction cavity into an output waveguide carrying the generated energy in a mode with circular electric fields. According to the invention, the beam is caused to expand, passing thru a gap in the waveguide to be collected on a larger, surrounding collector. The collector energy is thus reduced. The wave energy jumps the gap and continues down the waveguide. Wave energy leaking into the collector may be absorbed by lossy material therein or be carried off by waveguides to external loads.

摘要翻译： 在诸如陀螺仪的微波电子管中，空心电子束通过相互作用空腔通过带有圆形电场的模式中的产生能量的输出波导。 根据本发明，使光束膨胀，通过波导中的间隙以收集在较大的周围收集器上。 收集器能量因此减少。 波浪能量跳过间隙并沿着波导继续下去。 能够泄漏到集电器中的波能可能被其中的有害材料所吸收，或被波导带到外部负载。