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    Etching agent, etching method and liquid for preparing etching agent
    2.
    发明授权
    Etching agent, etching method and liquid for preparing etching agent 有权
    蚀刻剂，蚀刻方法和制备蚀刻剂的液体

    公开(公告)号：US08513139B2

    公开(公告)日：2013-08-20

    申请号：US12808903

    申请日：2008-12-19

    申请人： Osamu Matsuda ,  Nobuyuki Kikuchi ,  Ichiro Hayashida ,  Satoshi Shirahata

    发明人： Osamu Matsuda ,  Nobuyuki Kikuchi ,  Ichiro Hayashida ,  Satoshi Shirahata

    IPC分类号： H01L21/302 ,  H01L21/461

    CPC分类号： H01L21/30604 ,  C23F1/38 ,  C23F1/44 ,  H01L21/32134

    摘要： The present invention is directed to provide an etching agent for a semiconductor substrate, which is capable of etching a titanium (Ti)-based metal film or a tungsten (W)-based metal film on a semiconductor substrate and an etching method using relevant etching agent, and relates to a liquid for preparing the etching agent for a semiconductor substrate composed of a solution comprising (A) hydrogen peroxide, (B) a phosphonic acid chelating agent having a hydroxyl group, (C) a basic compound, and (D-1) a copper anticorrosive and/or (D-2) 0.01 to 3% by weight of two or more kinds of anion species other than phosphonic acid chelating agents having a hydroxyl group, in which anion species have no oxidizing power, an etching method characterized by etching a titanium (Ti)-based metal film or a tungsten (W)-based metal film on a semiconductor substrate using relevant etching agent for a semiconductor substrate, further, a solution comprising (B) a phosphonic acid chelating agent having a hydroxyl group, (C) a basic compound, and (D-1) a copper anticorrosive and/or (D-2) anion species other than phosphonic acid chelating agents having a hydroxyl group, in which anion species have no oxidizing power.

    摘要翻译： 本发明旨在提供一种能够在半导体衬底上蚀刻基于钛（Ti）的金属膜或基于钨（W）的金属膜的半导体衬底的蚀刻剂和使用相关蚀刻的蚀刻方法 并且涉及一种用于制备半导体衬底蚀刻剂的液体，该半导体衬底由包含（A）过氧化氢，（B）具有羟基的膦酸螯合剂，（C）碱性化合物和（D） -1）铜防腐剂和/或（D-2）0.01〜3重量％的除了具有羟基的膦酸螯合剂以外的两种或更多种阴离子物质，其中阴离子种类不具有氧化能力，蚀刻 其特征在于，使用相关的半导体衬底蚀刻剂在半导体衬底上蚀刻基于钛（Ti）的金属膜或基于钨（W））的金属膜，此外，还包括（B）膦酸螯合剂的溶液，所述膦酸螯合剂具有 一个 羟基，（C）碱性化合物和（D-1）除了具有羟基的膦酸螯合剂以外的铜防腐和/或（D-2）阴离子物质，其中阴离子种类不具有氧化能力。

    Integrated confocal optical pick-up head with a hologram and a polarizer mounted on each side of a transparent heat sink
    4.
    发明授权
    Integrated confocal optical pick-up head with a hologram and a polarizer mounted on each side of a transparent heat sink 失效
    具有全息图的集成共焦光学拾取头和安装在透明散热器两侧的偏振器

    公开(公告)号：US5703861A

    公开(公告)日：1997-12-30

    申请号：US605842

    申请日：1996-02-26

    申请人： Osamu Matsuda

    发明人： Osamu Matsuda

    IPC分类号： G11B11/10 ,  G11B7/09 ,  G11B7/12 ,  G11B7/13 ,  G11B7/135 ,  G11B11/105 ,  H01L31/10 ,  H01S3/06 ,  H01S3/1055 ,  H01S5/00 ,  H01S3/18

    CPC分类号： G11B7/1353 ,  G11B11/10543 ,  G11B7/123 ,  G11B7/133 ,  G11B7/0901 ,  G11B7/0912

    摘要： Light is emitted from a light-emitting element toward an irradiated medium, and returning light reflected by the irradiated medium is diffracted by a hologram device. A polarizer polarizes the light diffracted by the hologram device to produce first polarized light that has passed through the polarizer and second polarized light that has been reflected by the polarizer. The first polarized light is detected by a first light-detecting element, and the second polarized light is detected by a second light-detecting element. A magnetooptical signal is generated as the difference between the intensities of the first and second polarized lights which are detected respectively by the first and second light-detecting elements.

    摘要翻译： 从发光元件向照射介质发射光，并且由被照射介质反射的返回光被全息元件衍射。 偏振器使由全息装置衍射的光偏振，产生已经通过偏振器的第一偏振光和被偏振器反射的第二偏振光。 第一偏振光由第一光检测元件检测，第二偏振光由第二光检测元件检测。 产生磁光信号作为分别由第一和第二光检测元件检测的第一和第二偏振光的强度之差。

    High voltage incandescent lamp with low-pressure Kr/N.sub.2 gas fill
    5.
    发明授权
    High voltage incandescent lamp with low-pressure Kr/N.sub.2 gas fill 失效
    高压白炽灯采用低压Kr / N2气体填充

    公开(公告)号：US5537008A

    公开(公告)日：1996-07-16

    申请号：US266598

    申请日：1994-06-28

    申请人： Osamu Matsuda ,  Takahiro Yaguchi

    发明人： Osamu Matsuda ,  Takahiro Yaguchi

    IPC分类号： H01K1/32 ,  H01K1/50 ,  H05B37/00

    CPC分类号： H01K1/50

    摘要： An incandescent lamp which is operable at about 200-275 V is obtainable by enclosing a filling composition consisting of about 80-95% by volume of krypton gas and about 5-20% by volume of nitrogen gas in a glass envelope bearing a tungsten filament and an inner volume of about 0.2-1.2 ml/operating wattage in an amount of about 0.7-0.9 ml/ml of the inner volume. The incandescent lamp exhibits satisfactory luminous characteristics and an extended life expectancy without causing arc discharge even when operated at a voltage of about 200-275 V. Thus a lighting device which comprises such an incandescent lamp as the luminous source and a power source capable of energizing it at a voltage of about 200-275 V is very useful in general and special illumination.

    摘要翻译： 可在约200-275V下操作的白炽灯可以通过将包含约80-95体积％的氪气和约5-20体积％氮气的填充组合物包含在具有钨丝的玻璃封套中来获得 内容积为约0.2-1.2ml /操作功率，其量为内容积的约0.7-0.9ml / ml。 白炽灯即使在约200-275V的电压下操作，也能够发出令人满意的发光特性和延长的使用寿命，而不产生电弧放电。因此，一种照明装置，其包括作为发光源的白炽灯和能够发光的电源 它在约200-275V的电压下是非常有用的一般和特殊的照明。

    Radiation Curable Composition and Curing Product Thereof, and Laminate Including the Same
    9.
    发明申请
    Radiation Curable Composition and Curing Product Thereof, and Laminate Including the Same 审中-公开
    辐射固化组合物及其固化产品及其包括的层压材料

    公开(公告)号：US20080102262A1

    公开(公告)日：2008-05-01

    申请号：US11718835

    申请日：2005-11-08

    申请人： Akira Esaki ,  Osamu Matsuda

    发明人： Akira Esaki ,  Osamu Matsuda

    IPC分类号： B32B27/00 ,  C08F2/46

    CPC分类号： B32B27/36 ,  C08G18/44 ,  C08G18/4854 ,  C08G18/672 ,  C09D175/16 ,  G11B7/24056 ,  G11B7/2433 ,  G11B7/2531 ,  G11B7/2533 ,  G11B7/2534 ,  G11B7/2542 ,  G11B7/2545 ,  G11B7/2585 ,  C08G18/6692 ,  C08G18/0823 ,  C08G18/6659

    摘要： A radiation-curable composition capable of giving a cured product which has excellent transparency, mechanical strength and an excellent balance between surface hardness and resistance to deformation by heat/humidity; the cured product; and a multilayer structure which has a layer of the cured product and is suitable for use as an optical recording medium, etc, are provided A radiation-curable composition which comprises a monomer having a radiation-curable group and gives a cured product having the following properties: (1) when the cured product has a thickness of 100±5 μm, the cured product has a light transmittance at a wavelength of 550 nm of 80% or higher; (2) a multilayer structure where a layer of the cured product having a thickness of 100±5 μm is formed on a poly(ethylene terephthalate) film having a thickness of 100±5 μm, has a surface hardness of HB or higher; and (3) when a multilayer structure where the cured product having a thickness of 100±5 μm is formed on a disk made of a polycarbonate having a diameter of 130 mm and a thickness of 1.2±0.2 mm, is placed in an environment of 80° C. and 85% RH for 100 hours, then an absolute value |a| of an amount of warpage, a (mm), on the circumference of the multilayer structure is 0.5 mm or less.

    摘要翻译： 能够提供透明性，机械强度以及表面硬度与耐热/湿度变形抗性之间优异平衡的固化物的可辐射固化组合物; 固化产品; 提供具有固化产物层并适合用作光学记录介质等的多层结构体。一种可辐射固化组合物，其包含具有可辐射固化基团的单体，并得到具有以下成分的固化产物 性质：（1）固化物的厚度为100±5μm时，固化物的波长550nm的透光率为80％以上， （2）在厚度为100±5μm的聚对苯二甲酸乙二酯膜上形成厚度为100±5μm的固化物层的多层结构体，其表面硬度为HB以上; 和（3）当在由直径为130mm，厚度为1.2±0.2mm的聚碳酸酯制成的圆盘上形成厚度为100±5μm的固化产物的多层结构体置于 80℃和85％RH下100小时，则绝对值| a | 在多层结构的圆周上的翘曲量（mm）为0.5mm以下。

    POWER STEERING APPARATUS
    10.
    发明申请
    POWER STEERING APPARATUS 失效
    动力转向装置

    公开(公告)号：US20070289806A1

    公开(公告)日：2007-12-20

    申请号：US11752432

    申请日：2007-05-23

    申请人： Osamu Matsuda

    发明人： Osamu Matsuda

    IPC分类号： B62D5/04

    CPC分类号： B62D6/10 ,  B62D3/12 ,  B62D5/0463 ,  B62D5/0472 ,  G01L5/221

    摘要： There is provided a power steering apparatus comprising a torque sensor detecting a steering torque capable of discriminating a normal input and an inverse input without a torsion bar. An intermediate gear engaging with rack teeth provided in an outer surface of a rack shaft and a pinion provided in a lower portion of a pinion shaft is interposed between both the rack tooth and the pinion. A force applied to the pinion shaft is detected by a first force sensor, a force applied to a support shaft of the intermediate gear is detected by a second force sensor, and a torque detection value capable of discriminat ing the normal input and inverse input is calculated by a torque calculating unit to which outputs of both the sensors are given.

    摘要翻译： 提供了一种动力转向装置，其包括扭矩传感器，其检测能够识别正常输入的转向扭矩和没有扭杆的反向输入。 设置在齿条轴的外表面中的齿条啮合的中间齿轮和设置在小齿轮轴的下部的小齿轮插入在齿条齿轮和小齿轮之间。 通过第一力传感器检测施加到小齿轮轴的力，通过第二力传感器检测施加到中间齿轮的支撑轴的力，以及能够区分输入正常输入和反向输入 由给出两个传感器的输出的扭矩计算单元计算。