-
公开(公告)号:US09977229B2
公开(公告)日:2018-05-22
申请号:US14859208
申请日:2015-09-18
Inventor: Hirotoshi Oikaze , Yasuhiro Kabetani , Yohei Takechi , Tomotaka Furuta
CPC classification number: G02B21/002 , G01B9/02002 , G01B9/02007 , G01B9/02009 , G01B9/02048 , G01B9/02057 , G01B9/0209 , G01B9/04 , G02B21/0016 , G02B21/14 , G02B21/26 , G02B26/007
Abstract: In an inner layer measurement method, first irradiation light and second irradiation light having a peak wavelength longer than that of the first irradiation light are formed by changing at least one of a position where light emitted from a lamp is transmitted through a short pass filter and a position where light emitted from a lamp is transmitted through a long pass filter. Then, a first XY sectional surface of a semitransparent body is measured by irradiating the first XY sectional surface with the first irradiation light. A second XY sectional surface positioned on a layer deeper than the first XY sectional surface is measured by irradiating the second XY sectional surface with the second irradiation light. Each of the short pass filter and the long pass filter can transmit the light and has properties of changing a cutoff wavelength according to the position where the light is transmitted.
-
2.
公开(公告)号:US09500861B2
公开(公告)日:2016-11-22
申请号:US14889136
申请日:2015-04-07
Inventor: Yohei Takechi , Hirotoshi Oikaze , Yasuhiro Kabetani , Tomotaka Furuta
Abstract: A protective member protects an objective lens. The protective member includes an insertion opening through which an objective lens is configured to be inserted and a main body configured to cover the inserted objective lens. The main body includes a side wall portion connected to the insertion opening and a bottom portion connected to the side wall portion as well as facing the insertion opening, and covers the inserted objective lens with the side wall portion and the bottom portion. The protective member further includes a liquid disposed inside the main body, a sealing film body for sealing the insertion opening and a window arranged in the bottom portion of the main body, through which light transmits. The protective member can simplify the work.
Abstract translation: 保护构件保护物镜。 保护构件包括插入孔,物镜构成为插入孔,主体构造成覆盖插入的物镜。 主体包括连接到插入口的侧壁部分和连接到侧壁部分的底部以及面向插入开口,并且用侧壁部分和底部部分覆盖插入的物镜。 保护构件还包括设置在主体内部的液体,用于密封插入口的密封膜体和布置在主体的底部中的窗口,光通过该窗口透射。 保护构件可以简化工作。
-