摘要:
Provided is a winding apparatus that is provided with a splitter that splits radiant light from a light source unit into measurement light applied to a side face part of a first sheet and a second sheet and reference light applied to a reference surface, an interference detector that detects interference light formed by interference between the reference light reflected by the reference surface and the measurement light reflected by the side face part, a position detector that detects the position of the first sheet and the position of the second sheet on the basis of the detected interference light, and a decision processor that decides the quality of the wound body on the basis of the detected positions of the first sheet and the second sheet.
摘要:
In an inner layer measurement method, first irradiation light and second irradiation light having a peak wavelength longer than that of the first irradiation light are formed by changing at least one of a position where light emitted from a lamp is transmitted through a short pass filter and a position where light emitted from a lamp is transmitted through a long pass filter. Then, a first XY sectional surface of a semitransparent body is measured by irradiating the first XY sectional surface with the first irradiation light. A second XY sectional surface positioned on a layer deeper than the first XY sectional surface is measured by irradiating the second XY sectional surface with the second irradiation light. Each of the short pass filter and the long pass filter can transmit the light and has properties of changing a cutoff wavelength according to the position where the light is transmitted.
摘要:
A protective member protects an objective lens. The protective member includes an insertion opening through which an objective lens is configured to be inserted and a main body configured to cover the inserted objective lens. The main body includes a side wall portion connected to the insertion opening and a bottom portion connected to the side wall portion as well as facing the insertion opening, and covers the inserted objective lens with the side wall portion and the bottom portion. The protective member further includes a liquid disposed inside the main body, a sealing film body for sealing the insertion opening and a window arranged in the bottom portion of the main body, through which light transmits. The protective member can simplify the work.
摘要:
Provided is a winding apparatus that is provided with a splitter that splits radiant light from a light source unit into measurement light applied to a side face part of a first sheet and a second sheet and reference light applied to a reference surface, an interference detector that detects interference light formed by interference between the reference light reflected by the reference surface and the measurement light reflected by the side face part, a position detector that detects the position of the first sheet and the position of the second sheet on the basis of the detected interference light, and a decision processor that decides the quality of the wound body on the basis of the detected positions of the first sheet and the second sheet.