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公开(公告)号：US12275634B2
公开(公告)日：2025-04-15
申请号：US17976208
申请日：2022-10-28
Inventor： Kunihiko Nakamura
Abstract: A temperature sensor is a temperature sensor using a MEMS resonator, and includes: a MEMS resonator; a sweeper that sweeps a frequency of an excitation signal for a vibrator of the MEMS resonator in a predetermined sweep direction, and outputs the excitation signal swept to the MEMS resonator; a discontinuity point detector that obtains a vibration state information signal, which is a characteristic quantity expressing a vibration state of the vibrator based on the excitation signal, from the MEMS resonator, and detects a detection value that is (i) a frequency of the excitation signal when the vibration state information signal obtained changes discontinuously or (ii) a time corresponding to the frequency; and a converter that determines a physical quantity acting on the MEMS resonator based on the detection value detected.
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公开(公告)号：US12167691B2
公开(公告)日：2024-12-10
申请号：US17702035
申请日：2022-03-23
Inventor： Masaki Fujikane , Kouhei Takahashi , Naoki Tambo , Kunihiko Nakamura , Yasuyuki Naito
Abstract: A thermoelectric conversion device includes: a first thermoelectric conversion module, a first insulating layer, and a second thermoelectric conversion module. The first (second) thermoelectric conversion module includes one or two or more thermoelectric conversion elements, a first (third) connection electrode, and a second (fourth) connection electrode. The thermoelectric conversion elements of the first (second) thermoelectric conversion module are electrically connected to the first (third) connection electrode and the second (fourth) connection electrode and located on an electric path connecting these connection electrodes. Each of the thermoelectric conversion elements includes a thermoelectric converter. The thermoelectric converter of at least one of the thermoelectric conversion elements has a phononic crystal layer having a phononic crystal structure including a plurality of regularly arranged through holes. A through direction of the plurality of through holes in this crystal structure is substantially parallel to a stacking direction of the first thermoelectric conversion module, the first insulating layer, and the second thermoelectric conversion module.
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公开(公告)号：US12156471B2
公开(公告)日：2024-11-26
申请号：US17349730
申请日：2021-06-16
Inventor： Masaki Fujikane , Naoki Tambo , Kunihiko Nakamura , Kouhei Takahashi , Yasuyuki Naito
IPC: H01L35/26 , H01L35/32 , H10N10/17 , H10N10/857 , B82Y20/00
Abstract: The present disclosure provides a novel multilayer body. The multilayer body of the present disclosure includes a first phononic crystal layer and a second phononic crystal layer disposed on or above the first phononic crystal layer. The first phononic crystal layer has a first phononic crystal structure including a plurality of regularly arranged first through holes. The second phononic crystal layer has a second phononic crystal structure including a plurality of regularly arranged second through holes. The through direction of the plurality of first through holes in the first phononic crystal layer is substantially parallel to the through direction of the plurality of second through holes in the second phononic crystal layer.
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公开(公告)号：US12061184B2
公开(公告)日：2024-08-13
申请号：US17006756
申请日：2020-08-28
Inventor： Kunihiko Nakamura
CPC classification number: G01N33/497 , G01F1/36 , G01N1/24 , G01N1/28 , G01N27/02 , G01N2001/2244
Abstract: A gas constituent measuring apparatus includes a cell that draws in a first gas to be measured, gas sensors that respond to one or more types of constituent gases in the cell, a regulator that controls humidity in the cell, a pump, a humidity sensor that detects the humidity in the cell, and an integrated circuit. The integrated circuit controls the regulator and pump on the basis of a detection result of the humidity sensor so that the humidity is within a predetermined range before the first gas is drawn into the cell or after the first gas is discharged from the cell, acquires first response values from the gas sensors with humidity being controlled, acquires second response values from the gas sensors with the first gas being in the cell, and determines concentrations of the one or more types of constituent gases from the first and second response values.
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公开(公告)号：US12007283B2
公开(公告)日：2024-06-11
申请号：US17347467
申请日：2021-06-14
Inventor： Kouhei Takahashi , Naoki Tambo , Kunihiko Nakamura , Masaki Fujikane , Yasuyuki Naito
CPC classification number: G01J5/22 , H10N19/00 , G01J2005/206
Abstract: Each of first and second beams has a connection portion connected to a base substrate and a separated portion away from the base substrate, and is physically joined to an infrared receiver at the separated portion. The infrared receiver is supported by the first and second beams, and includes lower electrode, upper electrode, and a resistance change film. The resistance change film is sandwiched by the lower electrode and upper electrode in a thickness direction, each of the lower and upper electrodes is electrically connected to the resistance change film, the lower and upper electrodes are electrically connected to first wiring and second wiring, respectively, at least one electrode selected from the lower electrode and the upper electrode has a line-and-space structure, and an infrared reflection film is provided at a position on a surface of the base substrate facing the infrared receiver.
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Patent Agency Ranking
公开(公告)号：US11619625B2
公开(公告)日：2023-04-04
申请号：US17006756
申请日：2020-08-28
Inventor： Kunihiko Nakamura
Abstract: A gas constituent measuring apparatus includes a cell that draws in a first gas to be measured, gas sensors that respond to one or more types of constituent gases in the cell, a regulator that controls humidity in the cell, a pump, a humidity sensor that detects the humidity in the cell, and an integrated circuit. The integrated circuit controls the regulator and pump on the basis of a detection result of the humidity sensor so that the humidity is within a predetermined range before the first gas is drawn into the cell or after the first gas is discharged from the cell, acquires first response values from the gas sensors with humidity being controlled, acquires second response values from the gas sensors with the first gas being in the cell, and determines concentrations of the one or more types of constituent gases from the first and second response values.
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公开(公告)号：US10890489B2
公开(公告)日：2021-01-12
申请号：US16566868
申请日：2019-09-10
Inventor： Naoki Tambo , Kouhei Takahashi , Takashi Kawasaki , Kunihiko Nakamura , Masaki Fujikane , Yasuyuki Naito
Abstract: An infrared sensor according to the present disclosure includes base substrate, infrared receiver, and beam. The beam includes connective portion connecting with the base substrate and/or a member on the base substrate, and separated portion separated from the base substrate. The infrared receiver and the beam are joined with each other at the separated portion. The infrared receiver is supported by the beam in a state where the infrared receiver is separated from the base substrate. The beam includes junction part joined to the infrared receiver, and section positioned between junction part and the connective portion, and section includes a phononic crystal structure defined by a plurality of through holes orderly arranged. The crystal structure includes a first domain and a second domain that are phononic crystal domains. The first domain includes, in a plan view, a plurality of through holes arranged orderly in a first direction, while the second domain includes, in a plan view, a plurality of through holes arranged orderly in a second direction that is different from the first direction. The infrared sensor according to the present disclosure has enhanced responsivity.
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公开(公告)号：US12167692B2
公开(公告)日：2024-12-10
申请号：US17702859
申请日：2022-03-24
Inventor： Masaki Fujikane , Kouhei Takahashi , Naoki Tambo , Kunihiko Nakamura , Yasuyuki Naito
Abstract: A thermoelectric conversion device includes: an insulating layer; and a thermoelectric conversion module disposed on the insulating layer. The thermoelectric conversion module has a first thermoelectric conversion region and a second thermoelectric conversion region. The first(second) thermoelectric conversion region includes one or two or more thermoelectric conversion elements, a first(third) connection electrode, and a second(fourth) connection electrode. The thermoelectric conversion elements of the first(second) thermoelectric conversion region are electrically connected to the first(third) connection electrode and the second(fourth) connection electrode and located on an electric path connecting these connection electrodes. Each of the thermoelectric conversion elements includes a thermoelectric converter. The thermoelectric converter of at least one of the thermoelectric conversion elements has a phononic crystal layer having a phononic crystal structure including a plurality of regularly arranged through holes. A through direction of the plurality of through holes in this crystal structure is substantially parallel to a direction perpendicular to a principal surface of the insulating layer.
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公开(公告)号：US11906363B2
公开(公告)日：2024-02-20
申请号：US17347470
申请日：2021-06-14
Inventor： Kouhei Takahashi , Naoki Tambo , Kunihiko Nakamura , Masaki Fujikane , Yasuyuki Naito
CPC classification number: G01J5/22 , H01L31/095 , H01L31/20 , G01J2005/204
Abstract: An infrared sensor includes: a base substrate; a bolometer infrared receiver; a first beam; and a second beam. Each of the first and second beams has a connection portion connected to the base substrate and/or a member on the base substrate and a separated portion away from the base substrate, and is physically joined to the infrared receiver at the separated portion. The infrared receiver is supported by the first and second beams to be away from the base substrate. The infrared receiver includes a resistance change portion including a resistance change material the electrical resistance of which changes with temperature. The resistance change portion includes an amorphous semiconductor, and the first and second beams include a crystalline semiconductor made of the same base material as the resistance change material, and is electrically connected to the resistance change portion at the separated portion.
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公开(公告)号：US12031930B2
公开(公告)日：2024-07-09
申请号：US17396653
申请日：2021-08-06
Inventor： Kunihiko Nakamura , Masaki Fujikane , Kouhei Takahashi , Naoki Tambo , Yasuyuki Naito
CPC classification number: G01N27/02 , G01N33/0027
Abstract: A gas sensor includes a substrate, a support layer, a base layer, a heater layer disposed on or above the base layer, a gas sensing layer that is disposed on or above one of the heater layer and the base layer and that has a gas concentration dependent electrical impedance, and a detection electrode that is electrically connected to the gas sensing layer and that detects the impedance of the gas sensing layer. The substrate has a cavity and an opening formed by the cavity. The support layer is disposed on the substrate so as to cover at least an entire periphery of the opening. The base layer is supported by the support layer above the cavity so as to be separated from the substrate. A portion of the support layer in contact with the cavity has a first phononic crystal structure structured by a plurality of regularly arranged through-holes.
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