Method for machining seed rods for use in a chemical vapor deposition polysilicon reactor
    2.
    发明授权
    Method for machining seed rods for use in a chemical vapor deposition polysilicon reactor 有权
    用于化学气相沉积多晶硅反应器的种子棒的加工方法

    公开(公告)号:US09102035B2

    公开(公告)日:2015-08-11

    申请号:US13417792

    申请日:2012-03-12

    CPC分类号: B24B49/12 B24B7/16 B24B19/009

    摘要: A method for machining a profile into a silicon seed rod using a machine. The silicon seed rod is capable of being used in a chemical vapor deposition polysilicon reactor. The machine includes a plurality of grinding wheels. The method includes grinding a v-shaped profile into a first end of the silicon seed rod with one of the plurality of grinding wheels and grinding a conical profile in a second end of the silicon seed rod with another of the plurality of grinding wheels.

    摘要翻译: 一种使用机器将轮廓加工成硅种棒的方法。 硅种子棒能够用于化学气相沉积多晶硅反应器中。 该机器包括多个磨轮。 该方法包括使用多个砂轮中的一个将V型轮廓研磨成硅籽晶杆的第一端,并且在多个研磨轮中的另一个磨粒的硅籽晶杆的第二端中研磨锥形轮廓。

    System For Machining Seed Rods For Use In A Chemical Vapor Deposition Polysilicon Reactor
    4.
    发明申请
    System For Machining Seed Rods For Use In A Chemical Vapor Deposition Polysilicon Reactor 有权
    用于加工种子棒的系统用于化学气相沉积多晶硅反应器

    公开(公告)号:US20130237126A1

    公开(公告)日:2013-09-12

    申请号:US13417792

    申请日:2012-03-12

    IPC分类号: B24B49/12 B24B41/06 B24B1/00

    CPC分类号: B24B49/12 B24B7/16 B24B19/009

    摘要: A method for machining a profile into a silicon seed rod using a machine. The silicon seed rod is capable of being used in a chemical vapor deposition polysilicon reactor. The machine includes a plurality of grinding wheels. The method includes grinding a v-shaped profile into a first end of the silicon seed rod with one of the plurality of grinding wheels and grinding a conical profile in a second end of the silicon seed rod with another of the plurality of grinding wheels.

    摘要翻译: 一种使用机器将轮廓加工成硅种棒的方法。 硅种子棒能够用于化学气相沉积多晶硅反应器中。 该机器包括多个磨轮。 该方法包括使用多个砂轮中的一个将V型轮廓研磨成硅籽晶杆的第一端,并且在多个研磨轮中的另一个磨粒的硅籽晶杆的第二端中研磨锥形轮廓。

    Saw For Cutting Silicon Into Seed Rods For Use In A Chemical Vapor Deposition Polysilicon Reactor
    5.
    发明申请
    Saw For Cutting Silicon Into Seed Rods For Use In A Chemical Vapor Deposition Polysilicon Reactor 审中-公开
    用于将硅切割成用于化学气相沉积多晶硅反应器的种子棒的锯

    公开(公告)号:US20130014738A1

    公开(公告)日:2013-01-17

    申请号:US13545093

    申请日:2012-07-10

    IPC分类号: B28D1/04

    CPC分类号: B28D5/023 B28D5/024 B28D5/029

    摘要: Systems and methods are provided for cutting silicon into seed rods for use in a chemical vapor deposition polysilicon reactor. A method includes cutting the silicon ingot with saw blades into silicon slabs, rotating the silicon slabs, and cutting the silicon slabs into smaller-sized silicon seed rods for use in the chemical vapor deposition polysilicon reactor.

    摘要翻译: 提供了将硅切割成用于化学气相沉积多晶硅反应器的种子棒的系统和方法。 一种方法包括将具有锯片的硅锭切割成硅板,旋转硅片,以及将硅片切割成用于化学气相沉积多晶硅反应器的较小尺寸的硅种子棒。