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1.发明授权公开(公告)号：US07769482B2
公开(公告)日：2010-08-03
申请号：US11877228
申请日：2007-10-23
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
摘要翻译： 用于控制异构半导体制造环境中的处理的软件可以包括以晶圆为中心的数据库，使用神经网络的实时调度器和显示系统的模拟操作的图形用户界面。 这些特征可以单独使用或组合使用以提供用于半导体制造过程的实时控制和监视的改进的可用性和计算效率。 更一般来说，这些技术可以有用地用于各种实时控制系统中，特别是需要复杂调度决策的系统或由许多独立供应商的硬件构成的异构系统。
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公开(公告)号：US20080167890A1
公开(公告)日：2008-07-10
申请号：US11877279
申请日：2007-10-23
IPC分类号： G06Q10/00
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06F15/00 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
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公开(公告)号：US20080134075A1
公开(公告)日：2008-06-05
申请号：US11877153
申请日：2007-10-23
IPC分类号： G06F3/048
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06F15/00 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
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4.发明授权公开(公告)号：US07899562B2
公开(公告)日：2011-03-01
申请号：US11877242
申请日：2007-10-23
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
摘要翻译： 用于控制异构半导体制造环境中的处理的软件可以包括以晶圆为中心的数据库，使用神经网络的实时调度器和显示系统的模拟操作的图形用户界面。 这些特征可以单独使用或组合使用以提供用于半导体制造过程的实时控制和监视的改进的可用性和计算效率。 更一般来说，这些技术可以有用地用于各种实时控制系统中，特别是需要复杂调度决策的系统或由许多独立供应商的硬件构成的异构系统。
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公开(公告)号：US20080155446A1
公开(公告)日：2008-06-26
申请号：US11877203
申请日：2007-10-23
IPC分类号： G06F3/048
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
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公开(公告)号：US20080155444A1
公开(公告)日：2008-06-26
申请号：US11877170
申请日：2007-10-23
IPC分类号： G06F3/048
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06F15/00 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
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公开(公告)号：US10444749B2
公开(公告)日：2019-10-15
申请号：US11877058
申请日：2007-10-23
IPC分类号： G06F15/00 , G05B99/00 , G05B15/02 , G05B19/418 , G05B23/02 , G06T7/00 , H01L21/67 , H01L21/677
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
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公开(公告)号：US20080163096A1
公开(公告)日：2008-07-03
申请号：US11877264
申请日：2007-10-23
IPC分类号： G06F3/048
CPC分类号： G06F17/5009 , G05B19/4069 , G05B2219/32339 , G05B2219/35488 , G05B2219/36025 , G05B2219/45031 , H01L21/67751 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
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公开(公告)号：US20080163095A1
公开(公告)日：2008-07-03
申请号：US11877180
申请日：2007-10-23
IPC分类号： G06F3/048
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
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公开(公告)号：US20080155445A1
公开(公告)日：2008-06-26
申请号：US11877191
申请日：2007-10-23
IPC分类号： G06F3/048
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
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