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    DENSITY MULTIPLICATION AND IMPROVED LITHOGRAPHY BY DIRECTED BLOCK COPOLYMER ASSEMBLY
    2.
    发明申请
    DENSITY MULTIPLICATION AND IMPROVED LITHOGRAPHY BY DIRECTED BLOCK COPOLYMER ASSEMBLY 有权
    通过方向块式共聚物组件的密度乘法和改进的光刻

    公开(公告)号：US20090196488A1

    公开(公告)日：2009-08-06

    申请号：US12329484

    申请日：2008-12-05

    申请人： Paul Franklin NEALEY ,  Huiman Kang ,  Francois Detcheverry ,  Juan J. De Pablo ,  Ricardo Ruiz ,  Thomas Albrecht

    发明人： Paul Franklin NEALEY ,  Huiman Kang ,  Francois Detcheverry ,  Juan J. De Pablo ,  Ricardo Ruiz ,  Thomas Albrecht

    IPC分类号： G06K9/00

    CPC分类号： G11B5/84 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  G03F7/0002 ,  G11B5/743 ,  G11B5/746 ,  G11B5/82 ,  G11B5/855

    摘要： Methods to pattern substrates with dense periodic nanostructures that combine top-down lithographic tools and self-assembling block copolymer materials are provided. According to various embodiments, the methods involve chemically patterning a substrate, depositing a block copolymer film on the chemically patterned imaging layer, and allowing the block copolymer to self-assemble in the presence of the chemically patterned substrate, thereby producing a pattern in the block copolymer film that is improved over the substrate pattern in terms feature size, shape, and uniformity, as well as regular spacing between arrays of features and between the features within each array compared to the substrate pattern. In certain embodiments, the density and total number of pattern features in the block copolymer film is also increased. High density and quality nanoimprint templates and other nanopatterned structures are also provided.

    摘要翻译： 提供了结合自上而下的平版印刷工具和自组装嵌段共聚物材料的致密的周期性纳米结构的衬底图案化方法。 根据各种实施方案，所述方法包括对基材进行化学图案化，在化学图案化的成像层上沉积嵌段共聚物膜，并且允许嵌段共聚物在化学图案化的基底存在下自组装，从而在嵌段中产生图案 共聚物膜的特征尺寸，形状和均匀性以及特征阵列之间的规则间隔以及与衬底图案相比的每个阵列之间的特征之间的衬底图案的改进。 在某些实施方案中，嵌段共聚物膜中的图案特征的密度和总数也增加。 还提供了高密度和高质量的纳米压印模板和其他纳米图案结构。

    Method using block copolymers for making a master mold for nanoimprinting patterned magnetic recording disks with chevron servo patterns
    3.
    发明授权
    Method using block copolymers for making a master mold for nanoimprinting patterned magnetic recording disks with chevron servo patterns 有权
    使用嵌段共聚物制造用于纳米压印具有人字形伺服图案的图案化磁记录盘的母模的方法

    公开(公告)号：US08815105B2

    公开(公告)日：2014-08-26

    申请号：US13036346

    申请日：2011-02-28

    申请人： Elizabeth Ann Dobisz ,  Ricardo Ruiz ,  Guoliang Liu ,  Paul Franklin Nealey

    发明人： Elizabeth Ann Dobisz ,  Ricardo Ruiz ,  Guoliang Liu ,  Paul Franklin Nealey

    IPC分类号： B28B7/38 ,  B05D3/10 ,  B05D5/00 ,  G03F7/00 ,  G11B5/855 ,  B81C1/00

    CPC分类号： G03F7/0002 ,  B81C1/0046 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/855

    摘要： A method for making a master mold used to nanoimprint patterned magnetic recording disks that have chevron servo patterns with minimal defects uses directed self-assembly of block copolymers. A pattern of chemically modified polymer brush material is formed on the master mold substrate. The pattern includes sets of slanted stripes and interface strips between the sets of slanted stripes. A block copolymer material is deposited on the pattern, which results in directed self-assembly of the block copolymer as lamellae perpendicular to the substrate that are formed into alternating slanted stripes of alternating first and second components of the block copolymer. This component also forms on the interface strips, but as a lamella parallel to the substrate. One of the components is then removed, leaving the remaining component as a grid that acts as a mask for etching the substrate to form the master mold. The disks nanoimprinted by the master mold have reduced defective areas in the transition regions of the chevron servo patterns.

    摘要翻译： 用于制造具有最小缺陷的人字形伺服图案的用于纳米压印图案化磁记录盘的母模的方法使用嵌段共聚物的定向自组装。 在母模基板上形成化学改性聚合物刷材料的图案。 该图案包括在这些倾斜条纹组之间的一组倾斜条纹和界面条。 嵌段共聚物材料沉积在图案上，这导致嵌段共聚物的定向自组装作为垂直于衬底的薄片，其形成为嵌段共聚物交替的第一和第二组分的交替倾斜条纹。 该组件也形成在界面条上，而是形成平行于基底的薄片。 然后除去其中一个部件，留下剩余的部件作为栅格，其用作蚀刻基板以形成母模的掩模。 由主模具纳米压印的盘片减少了人字形伺服模式的过渡区域中的缺陷区域。

    METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS WITH CHEVRON SERVO PATTERNS
    4.
    发明申请
    METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS WITH CHEVRON SERVO PATTERNS 有权
    使用块状共聚物制备主要模具的方法，用于对具有CHEVRON SERVO模式的图形磁记录盘进行纳米压印

    公开(公告)号：US20120217220A1

    公开(公告)日：2012-08-30

    申请号：US13036346

    申请日：2011-02-28

    申请人： Elizabeth Ann Dobisz ,  Ricardo Ruiz ,  Guoliang Liu ,  Paul Franklin Nealey

    发明人： Elizabeth Ann Dobisz ,  Ricardo Ruiz ,  Guoliang Liu ,  Paul Franklin Nealey

    IPC分类号： B28B7/38 ,  B05D3/10 ,  B05D5/00

    CPC分类号： G03F7/0002 ,  B81C1/0046 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/855

    摘要： A method for making a master mold used to nanoimprint patterned magnetic recording disks that have chevron servo patterns with minimal defects uses directed self-assembly of block copolymers. A pattern of chemically modified polymer brush material is formed on the master mold substrate. The pattern includes sets of slanted stripes and interface strips between the sets of slanted stripes. A block copolymer material is deposited on the pattern, which results in directed self-assembly of the block copolymer as lamellae perpendicular to the substrate that are formed into alternating slanted stripes of alternating first and second components of the block copolymer. This component also forms on the interface strips, but as a lamella parallel to the substrate. One of the components is then removed, leaving the remaining component as a grid that acts as a mask for etching the substrate to form the master mold. The disks nanoimprinted by the master mold have reduced defective areas in the transition regions of the chevron servo patterns.

    摘要翻译： 用于制造具有最小缺陷的人字形伺服图案的用于纳米压印图案化磁记录盘的母模的方法使用嵌段共聚物的定向自组装。 在母模基板上形成化学改性聚合物刷材料的图案。 该图案包括在这些倾斜条纹组之间的一组倾斜条纹和界面条。 嵌段共聚物材料沉积在图案上，这导致嵌段共聚物的定向自组装作为垂直于衬底的薄片，其形成为嵌段共聚物交替的第一和第二组分的交替倾斜条纹。 该组件也形成在界面条上，而是形成平行于基底的薄片。 然后除去其中一个部件，留下剩余的部件作为栅格，其用作蚀刻基板以形成母模的掩模。 由主模具纳米压印的盘片减少了人字形伺服模式的过渡区域中的缺陷区域。

    Slide cooler
    5.
    发明授权
    Slide cooler 有权

    公开(公告)号：US10696318B2

    公开(公告)日：2020-06-30

    申请号：US15730391

    申请日：2017-10-11

    申请人： Ricardo Ruiz ,  Mark Randall Pettett

    发明人： Ricardo Ruiz ,  Mark Randall Pettett

    IPC分类号： B62B13/18 ,  B62B13/06 ,  B62B1/18

    摘要： A mobile container that is designed to allows a user to easily transport the container through a variety of terrains, such as snow, sand, and pavement. The mobile container includes an insulated container, a first sled-molded runner, a second sled-molded runner, a first wheel, a second wheel, and a convex protrusion. The first sled-molded runner and the second sled-molded runner are positioned parallel and opposite to each other, across the insulated container, and are adjacently connected to a base of the insulated container. The first wheel and the second wheel are laterally and coaxially connected to the insulated container, opposite to each other. The convex protrusion modifies the flow of sand or snow about the insulated container in order to decrease drag. The convex protrusion is positioned opposite the first wheel and the second wheel. Additionally, the convex protrusion is integrated into a front surface of the insulated container.

    Slide Cooler
    6.
    发明申请
    Slide Cooler 审中-公开

    公开(公告)号：US20180099686A1

    公开(公告)日：2018-04-12

    申请号：US15730391

    申请日：2017-10-11

    申请人： Ricardo Ruiz ,  Mark Randall Pettett

    发明人： Ricardo Ruiz ,  Mark Randall Pettett

    IPC分类号： B62B13/18 ,  B62B13/06

    摘要： A mobile container that is designed to allows a user to easily transport the container through a variety of terrains, such as snow, sand, and pavement. The mobile container includes an insulated container, a first sled-molded runner, a second sled-molded runner, a first wheel, a second wheel, and a convex protrusion. The first sled-molded runner and the second sled-molded runner are positioned parallel and opposite to each other, across the insulated container, and are adjacently connected to a base of the insulated container. The first wheel and the second wheel are laterally and coaxially connected to the insulated container, opposite to each other. The convex protrusion modifies the flow of sand or snow about the insulated container in order to decrease drag. The convex protrusion is positioned opposite the first wheel and the second wheel. Additionally, the convex protrusion is integrated into a front surface of the insulated container.

    Method using block copolymers for making a master disk with radial nondata marks for nanoimprinting patterned magnetic recording disks
    8.
    发明授权
    Method using block copolymers for making a master disk with radial nondata marks for nanoimprinting patterned magnetic recording disks 失效
    使用嵌段共聚物制造具有用于纳米压印图案化磁记录盘的径向非标记标记的母盘的方法

    公开(公告)号：US08501022B2

    公开(公告)日：2013-08-06

    申请号：US13287761

    申请日：2011-11-02

    申请人： Thomas R. Albrecht ,  Elizabeth Ann Dobisz ,  Guoliang Liu ,  Ricardo Ruiz ,  Gabriel Zeltzer

    发明人： Thomas R. Albrecht ,  Elizabeth Ann Dobisz ,  Guoliang Liu ,  Ricardo Ruiz ,  Gabriel Zeltzer

    IPC分类号： B44C1/22

    CPC分类号： B82Y10/00 ,  G11B5/746 ,  G11B5/855 ,  G11B5/865

    摘要： A method for making a master disk for nanoimprinting patterned-media magnetic recording disks has patterns for both the data islands and the nondata regions. The method uses guided self-assembly of a block copolymer (BCP) to form patterns of generally radial lines and/or generally concentric rings as well as patterns of gap regions of one of the BCP components. The pattern of lines and/or rings have the BCP components aligned as lamellae perpendicular to the substrate, while the pattern of gap regions has the BCP components aligned as lamellae parallel to the substrate. One of the BCP components is removed, leaving the other BCP component as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.

    摘要翻译： 用于制造用于纳米压印图案化介质磁记录盘的母盘的方法具有用于数据岛和非数据区的图案。 该方法使用嵌段共聚物（BCP）的引导自组装形成大体上径向线和/或大致同心环的图案以及一种BCP组分的间隙区域的图案。 线和/或环的图案具有垂直于衬底的薄片对准的BCP组分，而间隙区域的图案将BCP组分排列成平行于衬底的薄片。 BCP组件中的一个被去除，另一个BCP组件作为蚀刻掩模来制造最终的主磁盘或两个单独的模具，然后用于制造主磁盘。

    Supporting membranes on nanometer-scale self-assembled films
    10.
    发明授权
    Supporting membranes on nanometer-scale self-assembled films 有权
    在纳米级自组装膜上支撑膜

    公开(公告)号：US08206601B2

    公开(公告)日：2012-06-26

    申请号：US12641782

    申请日：2009-12-18

    申请人： Joan K. Bosworth ,  Elizabeth A. Dobisz ,  Ricardo Ruiz ,  Franck D. Rose dit Rose

    发明人： Joan K. Bosworth ,  Elizabeth A. Dobisz ,  Ricardo Ruiz ,  Franck D. Rose dit Rose

    IPC分类号： B44C1/22

    CPC分类号： B82Y10/00 ,  B82Y25/00 ,  B82Y30/00 ,  B82Y40/00 ,  G11B5/746 ,  G11B5/82 ,  Y10T428/24355 ,  Y10T428/24504 ,  Y10T428/249953

    摘要： Block copolymer lithography has emerged as an alternative lithographic method to achieve large-area, high-density patterns at resolutions near or beyond the limit of conventional lithographic techniques for the formation of bit patterned media and discrete track media. In one embodiment, a structure comprises a plurality of nanostructures extending upwardly from a substrate and a porous membrane extending across upper ends of the plurality of nanostructures. A method, according to another embodiment, comprises forming a block copolymer layer on a substrate, inducing self assembly of the block copolymer layer, selectively degrading a block polymer from the block copolymer layer, forming a porous membrane over the block copolymer layer, and removing a portion of the block copolymer layer for defining a plurality of nanostructures extending upwardly from the substrate after forming the porous membrane over the block copolymer layer. Other systems and methods are disclosed as well.

    摘要翻译： 已经出现嵌段共聚物光刻作为替代的光刻方法，以在分辨率接近或超过用于形成位图案化介质和离散轨道介质的常规平版印刷技术的极限之下实现大面积，高密度图案。 在一个实施例中，结构包括从衬底向上延伸的多个纳米结构和延伸穿过多个纳米结构的上端的多孔膜。 根据另一个实施方案的方法包括在基材上形成嵌段共聚物层，诱导嵌段共聚物层的自组装，从嵌段共聚物层选择性降解嵌段聚合物，在嵌段共聚物层上形成多孔膜，并除去 所述嵌段共聚物层的一部分用于限定在所述嵌段共聚物层上形成所述多孔膜之后从所述基材向上延伸的多个纳米结构。 还公开了其它系统和方法。