公开(公告)号：US08387958B2

公开(公告)日：2013-03-05

申请号：US12330192

申请日：2008-12-08

申请人： Peter Heiland

发明人： Peter Heiland

IPC分类号： F16F9/02

CPC分类号： F16F9/04 ,  F16F2230/30

摘要： The invention relates to a vibration isolator for use in a vacuum in which mechanical and electrical modules are arranged within a fluid-tight chamber.

公开(公告)号：US08352086B2

公开(公告)日：2013-01-08

申请号：US12707860

申请日：2010-02-18

申请人： Peter Heiland

发明人： Peter Heiland

IPC分类号： G01M1/38 ,  G05B13/00 ,  G05B15/00 ,  G05D23/00 ,  G05B13/02 ,  H03F1/26 ,  H04B15/00

CPC分类号： G03F7/709 ,  F16F15/002 ,  G03F7/7085

摘要： The present invention relates to a method for controlling a vibration isolation system, and an active vibration isolation system for vibration-isolated support of lithographic devices, wafer handling systems, and/or scanning microscopes. For this purpose the following are provided: a number of vibration transducers for supplying sensor signals which are representative of vibrations; a number of actuators for vibration compensation which may be controlled by supplying actuator control signals; a control device which is designed for processing the supplied sensor signals to form the actuator control signals, wherein the vibration transducers have at least one geophone sensor as a first acceleration sensor for detecting vibrations in a first frequency range, and at least one second acceleration sensor, which is different from the first acceleration sensor, for detecting vibrations in a second frequency range which extends the first frequency range.

摘要翻译： 本发明涉及一种用于控制隔振系统的方法，以及用于光刻设备，晶片处理系统和/或扫描显微镜的振动隔离支撑的主动隔振系统。 为此，提供以下几种：用于提供表示振动的传感器信号的振动传感器; 可以通过提供致动器控制信号来控制多个用于振动补偿的致动器; 控制装置，其被设计用于处理所提供的传感器信号以形成致动器控制信号，其中所述振动换能器具有至少一个地震检波器传感器作为用于检测第一频率范围内的振动的第一加速度传感器，以及至少一个第二加速度传感器 ，其与第一加速度传感器不同，用于检测延伸第一频率范围的第二频率范围内的振动。

公开(公告)号：US20110062306A1

公开(公告)日：2011-03-17

申请号：US12879472

申请日：2010-09-10

申请人： Peter Heiland

发明人： Peter Heiland

IPC分类号： F16F15/16

CPC分类号： F16F15/027

摘要： The present invention relates to a method for regulating an active vibration isolation system and to an active vibration isolation system, in particular for a vibration isolated positioning of lithography-devices, wafer-handling-systems and/or microscopes, as for instance scanning microscopes. The active vibration isolation system comprises the following components: a support body for bearing a load which is to be isolated; pneumatic vibration isolators with controllable valves for carrying the support body with respect to the ground; position sensors for providing vertical position signals of the support body; a first regulating system for vibration compensation in at least one degree of freedom in translation (Xt,Yt,Zt) and in at least one degree of freedom in rotation (Xr,Yr,Zr) and a second pneumatic regulating system for vibration compensation in at least one degree of freedom selected from three degrees of freedom (Zt,Xr,Yr) which are effective in vertical direction.

摘要翻译： 本发明涉及一种用于调节主动隔振系统和主动隔振系统的方法，特别是用于光刻设备，晶片处理系统和/或显微镜的振动隔离定位，例如扫描显微镜。 主动隔振系统包括以下部件：用于承受要被隔离的负载的支撑体; 具有可控阀的气动隔振器，用于相对于地面承载支撑体; 位置传感器，用于提供支撑体的垂直位置信号; 在至少一个自由度（Xt，Yt，Zt）和至少一个旋转自由度（Xr，Yr，Zr）中的振动补偿的第一调节系统和用于振动补偿的第二气动调节系统 选自在垂直方向上有效的三个自由度（Zt，Xr，Yr）的至少一个自由度。

公开(公告)号：US20100211225A1

公开(公告)日：2010-08-19

申请号：US12707860

申请日：2010-02-18

申请人： Peter Heiland

发明人： Peter Heiland

IPC分类号： G05D17/02

CPC分类号： G03F7/709 ,  F16F15/002 ,  G03F7/7085

摘要： The present invention relates to a method for controlling a vibration isolation system, and an active vibration isolation system for vibration-isolated support of lithographic devices, wafer handling systems, and/or scanning microscopes. For this purpose the following are provided: a number of vibration transducers for supplying sensor signals which are representative of vibrations; a number of actuators for vibration compensation which may be controlled by supplying actuator control signals; a control device which is designed for processing the supplied sensor signals to form the actuator control signals, wherein the vibration transducers have at least one geophone sensor as a first acceleration sensor for detecting vibrations in a first frequency range, and at least one second acceleration sensor, which is different from the first acceleration sensor, for detecting vibrations in a second frequency range which extends the first frequency range.

摘要翻译： 本发明涉及一种用于控制隔振系统的方法，以及用于光刻设备，晶片处理系统和/或扫描显微镜的振动隔离支撑的主动隔振系统。 为此，提供以下几种：用于提供表示振动的传感器信号的振动传感器; 可以通过提供致动器控制信号来控制多个用于振动补偿的致动器; 控制装置，其被设计用于处理所提供的传感器信号以形成致动器控制信号，其中所述振动换能器具有至少一个地震检波器传感器作为用于检测第一频率范围内的振动的第一加速度传感器，以及至少一个第二加速度传感器 ，其与第一加速度传感器不同，用于检测延伸第一频率范围的第二频率范围内的振动。

公开(公告)号：US20080294292A1

公开(公告)日：2008-11-27

申请号：US12108974

申请日：2008-04-24

申请人： Peter Heiland

发明人： Peter Heiland

IPC分类号： G05B13/00

CPC分类号： F16F15/02

摘要： To achieve improved frequency-response correction of a vibration-signal transmitter in a vibration isolation system, the invention proposes a method in which an analog sensor signal representing vibrations is generated by means of a vibration-signal transmitter, this sensor signal is amplified for correcting frequency-dependent sensitivity of the vibration-signal transmitter, an actuator control signal is generated by processing the amplified sensor signal, and an actuator is controlled with the actuator control signal for counteracting the vibrations, wherein the amplification of the sensor signal includes first amplification by means of an analog amplification stage and second amplification by means of a digital amplification stage.The invention further proposes a correction device and also a vibration isolation system for carrying out the method.

摘要翻译： 为了在振动隔离系统中实现振动信号发射机的改进的频率响应校正，本发明提出了一种方法，其中通过振动信号发射器产生表示振动的模拟传感器信号，该传感器信号被放大以用于校正 振动信号发射机的频率依赖灵敏度，通过处理放大的传感器信号产生致动器控制信号，并且用致动器控制信号控制致动器以抵消振动，其中传感器信号的放大包括第一放大 借助于数字放大级的模拟放大级和第二次放大的手段。 本发明还提出了一种校正装置以及用于执行该方法的隔振系统。

公开(公告)号：US20080197550A1

公开(公告)日：2008-08-21

申请号：US12030806

申请日：2008-02-13

申请人： Peter Heiland

发明人： Peter Heiland

IPC分类号： F16M13/00 ,  G10K11/04

CPC分类号： F16F15/02 ,  G03F7/709

摘要： The invention relates to a method for adapting a vibration isolation system as well as to an arrangement with a vibration isolation system. By constructive measures in the environment of the vibration isolation system, particularly plane-parallel surfaces areas are avoided and thereby disturbing environmental influences are reduced.

摘要翻译： 本发明涉及一种用于适应隔振系统以及具有隔振系统的装置的方法。 通过在隔振系统的环境中的建设性措施，特别是平面平行的表面区域被避免，从而减少了对环境的影响。

公开(公告)号：US20070043479A1

公开(公告)日：2007-02-22

申请号：US11462134

申请日：2006-08-03

申请人： Peter Heiland ,  Peter Kropp

发明人： Peter Heiland ,  Peter Kropp

IPC分类号： G05D19/02

CPC分类号： F16F15/002

摘要： Control of an active vibration isolation system with a digital controller, which includes an FPGA system (5) as the control unit. The FPGA system (5) is made up of freely programmable gate arrays with a sensor control matrix (51), which calculates axis signals in required degrees of freedom, with a control cascade block (53) for the axis signals containing several biquad filters (531, 532, 533, 534, 535), and with an output signal calculation block (55) for calculating digital actuator actuation signals. A digital signal processor (9) is connected in parallel with the FPGA system (5) in order to calculate controls with low phase loss requirements.

摘要翻译： 使用数字控制器控制主动隔振系统，其中包括一个FPGA系统（5）作为控制单元。 FPGA系统（5）由具有传感器控制矩阵（51）的可自由编程的门阵列组成，传感器控制矩阵（51）利用包含若干双二进制滤波器的轴信号的控制级联块（53）来计算所需自由度的轴信号 以及用于计算数字致动器致动信号的输出信号计算块（55）。 数字信号处理器（9）与FPGA系统（5）并联连接，以便计算具有低相位损耗要求的控制。

公开(公告)号：US10513846B2

公开(公告)日：2019-12-24

申请号：US11855057

申请日：2007-09-13

申请人： Peter Heiland

发明人： Peter Heiland

IPC分类号： H05K7/20 ,  E04B1/82 ,  F24F13/24

摘要： The invention relates to an environmental noise shielding apparatus in which the internal temperature can be matched to the external temperature by means of a cooling element which is arranged within the environmental noise shielding apparatus. This allows a better sound protection effect.

公开(公告)号：US20130050931A1

公开(公告)日：2013-02-28

申请号：US13516036

申请日：2010-12-14

申请人： Peter Heiland ,  Andreas Birkner

发明人： Peter Heiland ,  Andreas Birkner

IPC分类号： G06F1/20 ,  G06F1/16

CPC分类号： H05K7/20827

摘要： The invention relates to a system for cooling a computing system, wherein waste heat of the computing system is supplied as driving energy to a refrigeration machine for cooling the computing system.

摘要翻译： 本发明涉及一种用于冷却计算系统的系统，其中计算系统的废热作为驱动能量被提供给用于冷却计算系统的制冷机。

公开(公告)号：US08281911B2

公开(公告)日：2012-10-09

申请号：US11758413

申请日：2007-06-05

申请人： Peter Heiland

发明人： Peter Heiland

IPC分类号： F16F9/00

CPC分类号： G05D19/02 ,  F16F15/02

摘要： The invention relates to an active vibration isolation system in which at least one sensor is provided for detection of ground vibration, and the system has a control device which calculates compensation signals in at least two degrees of freedom, based on movements of the ground.

摘要翻译： 本发明涉及一种主动隔振系统，其中提供至少一个用于检测地面振动的传感器，并且该系统具有控制装置，其基于地面的运动以至少两个自由度计算补偿信号。