Waveguide shuttle MEMS variable optical attenuator
    1.
    发明授权
    Waveguide shuttle MEMS variable optical attenuator 失效
    波导梭MEMS可变光衰减器

    公开(公告)号:US07298954B2

    公开(公告)日:2007-11-20

    申请号:US11154019

    申请日:2005-06-16

    IPC分类号: G02B6/26

    摘要: An improved waveguide shuttle optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a waveguide shuttle platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alternative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

    摘要翻译: 提供了可变光衰减器(VOA)的功能的改进的波导穿梭光开关设计。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准,可以实现单个设备,其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准波导穿梭平台的热驱动致动器相关联的闭锁机构。 开关功能和VOA功能的集成减少光损耗,否则当必须采用单独的开关和单独的VOA的不可避免的替代方案时,光损失是不可避免的。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

    Actuator and latching systems and methods
    2.
    发明授权
    Actuator and latching systems and methods 失效
    执行器和锁定系统和方法

    公开(公告)号:US07224883B2

    公开(公告)日:2007-05-29

    申请号:US11094408

    申请日:2005-03-31

    IPC分类号: G02B6/00

    摘要: An optical switch for routing signals includes a latch receiver connected to a waveguide that routes the signals and an actuator that includes an upper plate, a lower plate and a latch connected to the lower plate, the lower plate of the actuator moving vertically when power is applied to the lower plate, causing the latch to move vertically and engage the latch receiver. A latching system includes a switch that includes a latch formed to include an extension on one end of the latch, the latch being driven by power, a latch receiver that is formed to receive the latch and a controller that controls the extension of the latch to engage the latch receiver when the power is applied to the latch, and controls the extension of the latch to lock in place against the latch receiver when the power is removed from the latch.

    摘要翻译: 用于路由信号的光学开关包括连接到路由信号的波导的闩锁接收器和包括连接到下板的上板,下板和闩锁的致动器,致动器的下板在功率为 施加到下板,使得闩锁垂直移动并接合闩锁接收器。 闭锁系统包括开关,其包括形成为在闩锁的一端包括延伸部的闩锁,闩锁由电力驱动,形成为接收闩锁的闩锁接收器和控制闩锁延伸到 当电源被施加到闩锁时,将闩锁接收器接合,并且当电源从闩锁移除时,控制闩锁的延伸以锁定到锁定接收器上。

    MEMS waveguide shuttle optical latching switch
    3.
    发明授权
    MEMS waveguide shuttle optical latching switch 失效
    MEMS波导穿梭光闭锁开关

    公开(公告)号:US06968100B2

    公开(公告)日:2005-11-22

    申请号:US10712200

    申请日:2003-11-12

    摘要: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M×N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS switch utilizes a latching mechanism in association with a thermal drive actuator for aligning the waveguide shuttle. In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

    摘要翻译: 公开了一种光学微机电系统(MEMS)开关。 在优选实施例中,光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在梭子上的多个光波导,用于切换光学状态,其中光学开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS开关利用与用于对准波导穿梭机的热驱动致动器相关联的闭锁机构。 在使用中,光学MEMS开关可以与其他光学部件集成以形成平面光电路(PLC)。 当开关和PLC集成在硅芯片上时,可以制造紧凑的更高功能的器件,例如可重配置光插座多路复用器(ROADM)。

    MEMS optical latching switch
    4.
    发明授权
    MEMS optical latching switch 失效
    MEMS光锁定开关

    公开(公告)号:US06947624B2

    公开(公告)日:2005-09-20

    申请号:US10712203

    申请日:2003-11-12

    摘要: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M×N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a cantilever beam platform for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning the cantilever beam platform. In use the optical MEMS device may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

    摘要翻译: 公开了一种光学微机电系统(MEMS)开关。 在优选实施例中,光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在悬臂梁平台上的多个光波导,用于切换光学状态,其中光开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 在使用中,光学MEMS器件可以与其他光学部件集成以形成平面光电路(PLC)。 当开关和PLC集成在硅芯片上时,可以制造紧凑的更高功能的器件,例如可重配置光插座多路复用器(ROADM)。

    Cantilever beam MEMS variable optical attenuator
    5.
    发明授权
    Cantilever beam MEMS variable optical attenuator 失效
    悬臂梁MEMS可变光衰减器

    公开(公告)号:US07242825B2

    公开(公告)日:2007-07-10

    申请号:US11010769

    申请日:2004-12-13

    IPC分类号: G02B6/35

    摘要: An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

    摘要翻译: 改进的悬臂光束开关设计,提供可变光衰减器(VOA)的功能。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准,可以实现单个设备,其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 开关功能和VOA功能的集成减少了当必须采用单独的开关和单独的VOA的不可避免的替代时否则不可避免的光损耗。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

    Method of projecting image with tunable individually-addressable fabry-perot filters
    6.
    发明授权
    Method of projecting image with tunable individually-addressable fabry-perot filters 有权
    使用可调谐的单独寻址的法布里 - 珀罗滤镜投影图像的方法

    公开(公告)号:US08210690B2

    公开(公告)日:2012-07-03

    申请号:US12568074

    申请日:2009-09-28

    摘要: A projection system includes a display apparatus comprising a plurality of tunable Fabry-Perot filters, each of the filters being configured for shifting between a state in which the filter transmits radiation in a bandwidth in the visible range of the electromagnetic spectrum and a state in which the filter transmits radiation in a bandwidth outside the visible range of the electromagnetic spectrum. An illuminator provides light to the plurality of Fabry-Perot filters. A control system receives image data and controls the display apparatus to project an image onto an associated display surface. The control system includes a modulator which provides wavelength modulation signals to the plurality of Fabry-Perot filters to modulate a color of pixels in the image and causes selected ones of the Fabry-Perot filters to shift into the bandwidth outside the visible range to modulate the brightness of pixels in the image.

    摘要翻译: 投影系统包括:显示装置,包括多个可调的法布里 - 珀罗滤光器,每个滤光器被配置为在滤光器在电磁光谱的可见光范围内的带宽中透射辐射的状态和 滤波器在电磁光谱的可见范围之外的带宽内传输辐射。 照明器向多个法布里 - 珀罗滤光器提供光。 控制系统接收图像数据并控制显示装置将图像投影到相关联的显示表面上。 该控制系统包括调制器,该调制器向多个法布里 - 珀罗滤波器提供波长调制信号,以调制图像中的像素的颜色,并使选定的法布里 - 珀罗滤波器转移到可见光范围之外的带宽中,以调制 图像中像素的亮度。

    System and methods of device independent display using tunable individually-addressable fabry-perot membranes
    7.
    发明授权
    System and methods of device independent display using tunable individually-addressable fabry-perot membranes 失效
    使用可调谐单独寻址的fabry-perot膜进行设备独立显示的系统和方法

    公开(公告)号:US07561133B2

    公开(公告)日:2009-07-14

    申请号:US11319395

    申请日:2005-12-29

    IPC分类号: G09G3/36

    CPC分类号: G02B26/001 G03B21/005

    摘要: An apparatus may include an illuminator, a controller, a display panel, a modulator, and a plurality of Fabry-Perot cavities. The plurality of Fabry-Perot cavities generated an image from light provided by the illuminator, each pixel of the image corresponding to a respective one of the plurality of Fabry-Perot cavities. The controller controls the modulator to provide image modulation data to the plurality of Fabry-Perot cavities for generating the image, the modulator providing color information to a first cavity of the plurality of Fabry-Perot cavities for setting a size of the first cavity to correspond to a color of a first pixel of the image, the modulator providing gray level information to the first cavity for time-division multiplexing to correspond to a gray level of the first pixel. The display panel display pixels of the generated image based on colors and gray levels of each pixel of the generated image.

    摘要翻译: 装置可以包括照明器,控制器,显示面板,调制器和多个法布里 - 珀罗腔。 多个法布里 - 珀罗腔由照明器提供的光产生图像,图像的每个像素对应于多个法布里 - 珀罗腔中的相应一个。 所述控制器控制所述调制器以向所述多个法布里 - 珀罗腔提供图像调制数据以产生图像,所述调制器向所述多个法布里 - 珀罗腔中的第一空腔提供颜色信息,用于将所述第一腔的尺寸设定为对应 对于图像的第一像素的颜色,调制器向第一腔提供灰度信息用于时分复用以对应于第一像素的灰度级。 显示面板基于生成图像的每个像素的颜色和灰度等级来显示生成的图像的像素。

    METHOD OF PROJECTING IMAGE WITH TUNABLE INDIVIDUALLY-ADDRESSABLE FABRY-PEROT FILTERS
    8.
    发明申请
    METHOD OF PROJECTING IMAGE WITH TUNABLE INDIVIDUALLY-ADDRESSABLE FABRY-PEROT FILTERS 有权
    投影图像的方法可以使用可调式个性化的FABRY-PEROT过滤器

    公开(公告)号:US20100007939A1

    公开(公告)日:2010-01-14

    申请号:US12568074

    申请日:2009-09-28

    IPC分类号: G02B26/00 G03B21/00

    摘要: A projection system includes a display apparatus comprising a plurality of tunable Fabry-Perot filters, each of the filters being configured for shifting between a state in which the filter transmits radiation in a bandwidth in the visible range of the electromagnetic spectrum and a state in which the filter transmits radiation in a bandwidth outside the visible range of the electromagnetic spectrum. An illuminator provides light to the plurality of Fabry-Perot filters. A control system receives image data and controls the display apparatus to project an image onto an associated display surface. The control system includes a modulator which provides wavelength modulation signals to the plurality of Fabry-Perot filters to modulate a color of pixels in the image and causes selected ones of the Fabry-Perot filters to shift into the bandwidth outside the visible range to modulate the brightness of pixels in the image.

    摘要翻译: 投影系统包括:显示装置,包括多个可调的法布里 - 珀罗滤光器,每个滤光器被配置为在滤光器在电磁光谱的可见光范围内的带宽中透射辐射的状态和 滤波器在电磁光谱的可见范围之外的带宽内传输辐射。 照明器向多个法布里 - 珀罗滤光器提供光。 控制系统接收图像数据并控制显示装置将图像投影到相关联的显示表面上。 该控制系统包括调制器,该调制器向多个法布里 - 珀罗滤波器提供波长调制信号,以调制图像中的像素的颜色,并使选定的法布里 - 珀罗滤波器转移到可见光范围之外的带宽中,以调制 图像中像素的亮度。

    Projector based on tunable individually-addressable Fabry-Perot filters
    9.
    发明授权
    Projector based on tunable individually-addressable Fabry-Perot filters 失效
    基于可调谐单独寻址的法布里 - 珀罗滤镜的投影机

    公开(公告)号:US07628493B2

    公开(公告)日:2009-12-08

    申请号:US11405941

    申请日:2006-04-18

    摘要: A projection system includes a display apparatus comprising a plurality of tunable Fabry-Perot filters, each of the filters being configured for shifting between a state in which the filter transmits radiation in a bandwidth in the visible range of the electromagnetic spectrum and a state in which the filter transmits radiation in a bandwidth outside the visible range of the electromagnetic spectrum. An illuminator provides light to the plurality of Fabry-Perot filters. A control system receives image data and controls the display apparatus to project an image onto an associated display surface. The control system includes a modulator which provides wavelength modulation signals to the plurality of Fabry-Perot filters to modulate a color of pixels in the image and causes selected ones of the Fabry-Perot filters to shift into the bandwidth outside the visible range to modulate the brightness of pixels in the image.

    摘要翻译: 投影系统包括:显示装置,包括多个可调的法布里 - 珀罗滤光器,每个滤光器被配置为在滤光器在电磁光谱的可见光范围内的带宽中透射辐射的状态和 滤波器在电磁光谱的可见范围之外的带宽内传输辐射。 照明器向多个法布里 - 珀罗滤光器提供光。 控制系统接收图像数据并控制显示装置将图像投影到相关联的显示表面上。 该控制系统包括调制器,该调制器向多个法布里 - 珀罗滤波器提供波长调制信号,以调制图像中的像素的颜色,并使所选择的法布里 - 珀罗滤波器中的一个转换到可见光范围之外的带宽,以调制 图像中像素的亮度。

    MEMS Fabry-Perot inline color scanner for printing applications using stationary membranes
    10.
    发明授权
    MEMS Fabry-Perot inline color scanner for printing applications using stationary membranes 有权
    MEMS法布里 - 珀罗在线彩色扫描仪,用于使用固定膜打印应用

    公开(公告)号:US07623278B2

    公开(公告)日:2009-11-24

    申请号:US11535382

    申请日:2006-09-26

    摘要: A Micro-Electro-Mechanical System (MEMS) based Fabry-Perot array may be used as a spectral filter to light sensing array, such as a CCD or CMOS photodetector. Applying different voltages to the electrodes of individual Fabry-Perot cells within the array allows a gradient in the Fabry-Perot air gap across the Fabry-Perot array. In this manner the MEMS Fabry-Perot array serves as a spectral filter of light passing through the Fabry-Perot array to the photodetector array. Embodiments of the disclosed sensor, used with LEDs that emit light outside the photosensitivity range of a photoreceptor belt, may be used to measure spectral information from toned patches placed upon a photoreceptor belt within a marking system. Other embodiments of the disclosed sensor, used with LEDs that emit light of any wavelength, may be used to measure spectral information from toned patches placed by a marking system upon a non-photosensitive output substrate, such as an intermediate belt or paper.

    摘要翻译: 基于微机电系统(MEMS)的法布里 - 珀罗阵列可用作光传感阵列的光谱滤波器,例如CCD或CMOS光电探测器。 对阵列中的单个法布里 - 珀罗细胞的电极施加不同的电压允许跨法布里 - 珀罗阵列的法布里 - 珀罗气隙的梯度。 以这种方式,MEMS法布里 - 珀罗阵列用作通过法布里 - 珀罗阵列到光电检测器阵列的光的光谱滤波器。 所公开的传感器的实施例,与在感光带的光敏度范围外发出光的LED一起使用,可用于测量放置在标记系统内的感光带上的调色片的光谱信息。 与发射任何波长的光一起使用的所公开的传感器的其它实施例可用于测量由标记系统放置在非光敏输出基底(例如中间带或纸)上的调色贴片的光谱信息。