-
公开(公告)号：US5786931A
公开(公告)日：1998-07-28
申请号：US629379
申请日：1996-04-08
申请人： Peter Speckbacher , Georg Flatscher , Michael Allgauer , Erich Bayer , Erwin Spanner , Andreas Franz
发明人： Peter Speckbacher , Georg Flatscher , Michael Allgauer , Erich Bayer , Erwin Spanner , Andreas Franz
CPC分类号： G03F9/70 , G02B5/1857 , G02B5/1861 , Y10S359/90
摘要： The phase grating of the present invention includes a substrate with a reflective, continuous layer disposed thereon on which a structured spacer layer 3 of dielectric material is applied. To form a phase grating that can be used as a scale in photoelectric position measuring instruments, a further thin reflective surface layer is located solely on the reflective, continuous surfaces, parallel to the layer, of the structured spacer layer.
摘要翻译： 本发明的相位光栅包括具有设置在其上的反射连续层的衬底，其上施加有介电材料的结构化隔离层3。 为了形成可用作光电位置测量仪器中的刻度的相位光栅，另外薄的反射表面层仅位于结构化间隔层的平行于层的反射连续表面上。
-
公开(公告)号：US5574560A
公开(公告)日：1996-11-12
申请号：US393700
申请日：1995-02-24
申请人： Andreas Franz , Erwin Spanner
发明人： Andreas Franz , Erwin Spanner
CPC分类号： G01J9/02 , G01B2290/30
摘要： An interferometer having a light source that generates a beam of light. The beam of light is directed to a beam splitter where it is split into a reference beam and a measuring beam. A pair of reflectors reflect the reference and measuring beams towards an interference point. A beam merging element is positioned at the interference point so that the reference and measuring beams interfere with each other at the interference point so that at least two pairs of partial beams which are phase-shifted in relation to each other and interfere with one another are generated. The two pairs of partial beams are received by a plurality of detectors which form directionally dependent measured values.
摘要翻译： 一种具有产生光束的光源的干涉仪。 光束被引导到分束器，在该分束器处，其被分成参考光束和测量光束。 一对反射镜将参考和测量光束反射到干涉点。 光束合并元件位于干涉点处，使得参考和测量光束在干涉点处彼此干涉，使得相对于彼此相互相互干涉并相互干扰的至少两对部分光束是 生成。 两对部分光束由形成方向依赖测量值的多个检测器接收。
-
公开(公告)号：US5333048A
公开(公告)日：1994-07-26
申请号：US50733
申请日：1993-04-20
申请人： Dieter Michel , Erwin Spanner
发明人： Dieter Michel , Erwin Spanner
摘要： A polarizing optical arrangement wherein a linearly polarized signal beam cluster is generated. The signal beam cluster is created from interfering partial beam clusters and is linearly polarized. The azimuth of oscillation of the linearly polarized signal beam cluster is dependent on the mutual phase relationship of the aforementioned partial beam clusters. A splitter grating splits the linearly polarized signal beam cluster into partial beam clusters that are analyzed by analyzers, detected by photoelectric transducers and phase-shifted electrically from one another.
摘要翻译： 一种偏振光学装置，其中产生线偏振信号光束簇。 信号束簇由干扰的部分束簇产生并且是线偏振的。 线性偏振信号束簇的振荡方位依赖于上述部分光束簇的相位关系。 分离器光栅将线性偏振信号束束分裂成由分析仪分析的部分束簇，由光电传感器检测并相互电移位。
-
4.发明授权Optics system for an interferometer that uses a measuring mirror, a reference mirror and a beam deflector 有权用于使用测量镜，参考镜和光束偏转器的干涉仪的光学系统公开(公告)号：US07542149B2
公开(公告)日：2009-06-02
申请号：US11244478
申请日：2005-10-06
申请人： Erwin Spanner , Herbert Huber-Lenk
发明人： Erwin Spanner , Herbert Huber-Lenk
IPC分类号： G01B11/02
CPC分类号： G01B9/02018 , G01B9/02027 , G01B9/02056 , G01B2290/70
摘要： An optical assembly of an interferometer that includes a beam splitter for dividing the beams emitted by a radiation source into at least one measuring and one reference beam and at least one measuring and one reference mirror, on which the measuring and the reference beams impinge, wherein at least one of the mirrors can be displaced along a measuring axis. The optical assembly further includes a beam deflector, as well as a retro-reflector, wherein the measuring and the reference beams reflected at the measuring and the reference mirrors via the beam deflector and the retro-reflector are guided at least a second time in the direction toward the measuring and the reference mirrors and wherein the beam deflector is embodied as a plane-parallel plate.
摘要翻译： 一种干涉仪的光学组件，其包括用于将由辐射源发射的光束分成至少一个测量和一个参考光束的分束器和至少一个测量和参考反射镜，测量和参考光束在其上撞击，其中 至少一个反射镜可以沿测量轴移位。 光学组件还包括光束偏转器以及后向反射器，其中通过光束偏转器和反射器反射的测量和参考反射镜处的测量和参考光束至少在第二时间被引导 朝向测量方向和参考镜，并且其中光束偏转器被实施为平面平行板。
-
5.发明授权公开(公告)号：US06369951B1
公开(公告)日：2002-04-09
申请号：US09511757
申请日：2000-02-24
申请人： Erwin Spanner
发明人： Erwin Spanner
IPC分类号： G02B2714
CPC分类号： G02B27/106 , G01B9/02058 , G01B9/02061 , G01B2290/70 , G02B27/144 , G02B27/145
摘要： A beam splitter assembly and an interferometer using the beam splitter assembly are described. The beam splitter assembly splits an incoming beam of rays that impinges thereon into at least one first outgoing beam and at least one second outgoing beam parallel thereto. To accomplish this, the beam splitter assembly includes a beam splitter element and a compensating element. The beam splitter element includes a transparent plate having two parallel boundary surfaces. The compensating element is arranged with respect to the beam splitter element so that the two outgoing beams propagate parallel to one another, and have essentially traveled the same optical path lengths in the beam splitter element as in the compensating element.
摘要翻译： 描述了使用分束器组件的分束器组件和干涉仪。 分束器组件将入射到其上的射线射入至少一个第一输出光束和与其平行的至少一个第二输出光束。 为了实现这一点，分束器组件包括分束器元件和补偿元件。 分束器元件包括具有两个平行边界表面的透明板。 补偿元件相对于分束器元件布置，使得两个输出光束彼此平行地传播，并且基本上在分束器元件中与补偿元件中相同的光路长度传播。
-
6.发明授权Position measuring system and method for operating a position measuring system 失效位置测量系统和操作位置测量系统的方法公开(公告)号：US06265992B1
公开(公告)日：2001-07-24
申请号：US09609618
申请日：2000-07-05
IPC分类号： H03M122
CPC分类号： G01D5/24452 , G01D5/24404 , G01D5/24485 , G01D5/2449
摘要： A position measuring system for the determination of the relative positions of two objects which can be moved with respect to each other, as well as a process for operating the same are disclosed, which in case of a relative movement provides at least one pair of phase-shifted analog incremental signals, and which makes possible a definite variation of the signal periods (SP) by at least one signal period variation factor (n) of the analog incremental signals transmitted to an evaluation unit arranged behind it by a signal period variation unit. The signal period variation unit furthermore comprises correction means for eliminating most varied errors in the output signals (SIN′, COS′). Among these are counted errors possibly resulting during the signal period variation, as well as measurement arrangement-specific errors.
摘要翻译： 公开了一种用于确定可相对于彼此移动的两个物体的相对位置的位置测量系统，以及用于操作该位置的过程，在相对运动的情况下，提供至少一对相位 变换的模拟增量信号，并且使信号周期（SP）能够通过信号周期变化单元发送到布置在其后面的评估单元的模拟增量信号的至少一个信号周期变化因子（n）成为可能的确定变化 。 信号周期变化单元还包括用于消除输出信号（SIN'，COS'）中的大多数错误的校正装置。 其中包括可能在信号周期变化期间产生的计数误差以及测量排列特定误差。
-
7.发明授权
公开(公告)号：US5500734A
公开(公告)日：1996-03-19
申请号：US246306
申请日：1994-05-19
申请人： Erwin Spanner
发明人： Erwin Spanner
CPC分类号： G01D5/38 , G01B9/02022 , G01B9/02051 , G01B9/02081 , G01B2290/30
摘要： An integrated optical interferometer is provided having a substrate located on one object and a measuring reflector or measuring diffraction grating located on another object. A beam impinging upon the substrate is split into two partial beams by a coupling grating and is coupled into a beam waveguide and supplied to another coupling grating. A second partial beam is routed by the measuring reflector to the second coupling grating and there interferes with the first partial beam. The second coupling grating is divided into a plurality of gratings which are phase-shifted with respect to each other so that signals that are phase-shifted with respect to each other can be generated by a plurality of detectors.
摘要翻译： 提供一种集成光学干涉仪，其具有位于一个物体上的基板和位于另一物体上的测量反射体或测量衍射光栅。 撞击衬底的光束通过耦合光栅分成两个部分光束，并耦合到光束波导中并提供给另一耦合光栅。 第二部分光束由测量反射器路由到第二耦合光栅，并且干扰第一部分光束。 第二耦合光栅被分成相对于彼此相移的多个光栅，使得相对于彼此相移的信号可以由多个检测器产生。
-
公开(公告)号：US20060262315A1
公开(公告)日：2006-11-23
申请号：US11431182
申请日：2006-05-09
申请人： Erwin Spanner
发明人： Erwin Spanner
IPC分类号： G01B9/02
CPC分类号： G01D5/26 , G01B9/02007 , G01B9/02012 , G01B9/02071 , G01B9/0209 , G01B2290/15 , G01B2290/30 , G01B2290/45 , G01D5/366
摘要： A position-measuring device for determining the positions of two objects movable with respect to each other along a measuring direction includes a first radiation source for emitting an electromagnetic beam of rays, a beam splitter, which splits each beam of rays emitted by the radiation source into at least one first and one second partial beam of rays, a reference reflector arranged in the beam path of the first partial beam of rays, a measuring reflector, movable with respect to the reference reflector along the measuring direction, which is arranged in the beam path of the second partial beam of rays, a device for superposing the two partial rays of beams after their reflecting at the respective reflector, for generating a measuring signal, a second radiation source for emitting additional electromagnetic beams of rays and a combining device for combining the additional electromagnetic beams of rays into the beam path of the electromagnetic beam of rays generated by the first radiation source. In the position-measuring device, a detection device is arranged such that it receives a reference signal formed by superposition of the beams of rays emitted by the first radiation source and the additional beams of rays, and an evaluation device is assigned to the detection device, which is equipped and provided for evaluating the reference signal formed by the superposition of the beams of rays of the two radiation sources for generating a reference pulse.
-
9.发明授权Position measuring system and method for operating a position measuring system 失效位置测量系统和操作位置测量系统的方法
公开(公告)号：US6097318A
公开(公告)日：2000-08-01
申请号：US61311
申请日：1998-04-16
CPC分类号： G01D5/24452 , G01D5/24404 , G01D5/24485 , G01D5/2449
摘要： A position measuring system for the determination of the relative positions of two objects which can be moved with respect to each other, as well as a process for operating the same are disclosed, which in case of a relative movement provides at least one pair of phase-shifted analog incremental signals, and which makes possible a definite variation of the signal periods (SP) by at least one signal period variation factor (n) of the analog incremental signals transmitted to an evaluation unit arranged behind it by a signal period variation unit. The signal period variation unit furthermore comprises correction means for eliminating most varied errors in the output signals (SIN', COS'). Among these are counted errors possibly resulting during the signal period variation, as well as measurement arrangement-specific errors.
摘要翻译： 公开了一种用于确定可相对于彼此移动的两个物体的相对位置的位置测量系统，以及用于操作该位置的过程，在相对运动的情况下，提供至少一对相位 变换的模拟增量信号，并且使信号周期（SP）能够通过信号周期变化单元传输到布置在其后面的评估单元的模拟增量信号的至少一个信号周期变化因子（n）成为可能的明确变化 。 信号周期变化单元还包括用于消除输出信号（SIN'，COS'）中的大多数错误的校正装置。 其中包括可能在信号周期变化期间产生的计数误差以及测量排列特定误差。
-
公开(公告)号：US5206704A
公开(公告)日：1993-04-27
申请号：US663429
申请日：1991-03-01
申请人： Walter Huber , Erwin Spanner
发明人： Walter Huber , Erwin Spanner
CPC分类号： G01D5/38 , G01B11/026
摘要： A position measuring apparatus includes an optical instrument placed in a first plane, a first diffraction grid placed in a second plane, parallel to the first plane, a retro-reflecting element, a second diffraction grid, and an optical element, preferably placed in the first plane. The optical instrument splits a beam of light into at least two divergent partial beams which are diffracted by the first diffraction grid into parallel partial beams. The parallel partial beams are conducted through the retro-reflecting element and then impinge onto the second diffraction grid. The second diffraction grid diffracts the partial beams and causes them to interfere with each other at the optical element. A detection device measures a change (.DELTA.OPD) of path difference of the partial beams which is directly proportional to the change in distance between the first and second planes. This change (.DELTA.OPD) of the path difference can be detected by the detection device as a light-dark modulation at the optical element.
摘要翻译： 位置测量装置包括放置在第一平面中的光学仪器，放置在与第一平面平行的第二平面中的第一衍射栅格，后向反射元件，第二衍射栅格和光学元件，优选地放置在 第一架飞机 光学仪器将光束分成由第一衍射栅格衍射成平行的部分光束的至少两个发散的部分光束。 平行的部分光束通过后向反射元件传导，然后撞击到第二衍射光栅上。 第二衍射网衍射部分光束并使它们在光学元件处彼此干涉。 检测装置测量与第一和第二平面之间的距离变化成正比的部分光束的路径差的变化（DELTA OPD）。 路径差的这种变化（DELTA OPD）可以由检测装置检测为光学元件处的暗暗调制。
-
-
-
-
-
-
-
-
-
搜索结果
19 条记录 (耗时 0.026 秒)
