METHODS OF FORMING LAYERS
    3.
    发明申请
    METHODS OF FORMING LAYERS 审中-公开
    形成层的方法

    公开(公告)号:US20130164454A1

    公开(公告)日:2013-06-27

    申请号:US13440071

    申请日:2012-04-05

    IPC分类号: C23C14/48

    摘要: A method of forming a layer, the method including providing a substrate having at least one surface adapted for deposition thereon; and directing a particle beam towards the surface of the substrate, the particle beam including small molecule molecular species, wherein the small molecule molecular species break apart upon interaction with atoms at the substrate into atomic components, each of the atomic components having implant energies from about 20 eV to about 100 eV to form a layer.

    摘要翻译: 一种形成层的方法,所述方法包括提供具有适于在其上沉积的至少一个表面的基底; 并且将粒子束引导到衬底的表面,所述粒子束包括小分子分子种类,其中所述小分子分子种类在与所述衬底上的原子相互作用时分裂成原子组分,所述原子组分中的每一个具有从约 20eV至约100eV以形成层。

    Physical vapor deposition targets having crystallographic orientations
    5.
    发明授权
    Physical vapor deposition targets having crystallographic orientations 失效
    具有晶体取向的物理气相沉积靶

    公开(公告)号:US06585870B1

    公开(公告)日:2003-07-01

    申请号:US09671681

    申请日:2000-09-28

    IPC分类号: C23C1434

    摘要: A process and device for making sputtered films with a linear scanning magnetron, wherein sputtering employs directionally emitting targets and “ballistic” transport to achieve controlled angular dispersion of incident particles with respect to the normal of the substrate. Sputter films made by this process can exhibit a high degree of step coverage over sub-micron, high aspect ratio substrate features and can fill high aspect ratio substrate features, for example, channels or vias.

    摘要翻译: 用于制造具有线性扫描磁控管的溅射膜的方法和装置,其中溅射采用定向发射靶和“弹道”传输以实现入射颗粒相对于衬底法线的可控角度分散。 通过该方法制造的溅射膜可以在亚微米,高纵横比衬底特征上表现出高度的阶梯覆盖,并且可以填充高纵横比衬底特征,例如通道或通孔。

    METHODS OF FORMING LAYERS
    6.
    发明申请
    METHODS OF FORMING LAYERS 审中-公开
    形成层的方法

    公开(公告)号:US20130161505A1

    公开(公告)日:2013-06-27

    申请号:US13440073

    申请日:2012-04-05

    IPC分类号: H01J27/02 H01J49/06

    摘要: A system that includes an ion source, the ion source configured to produce ions having a first energy; an extractor to extract the ions; an accelerator configured to accelerate the ions; a focusing and steering device configured to focus and/or steer the accelerated ions; and a decelerator configured to decelerate the accelerated ions so that the ions have a second energy when they impact a substrate, wherein the second energy is less than the first energy.

    摘要翻译: 一种包括离子源的系统,所述离子源被配置为产生具有第一能量的离子; 萃取器提取离子; 被配置为加速离子的加速器; 被配置为聚焦和/或引导加速离子的聚焦和转向装置; 以及减速器,其构造成使加速的离子减速,使得当离子冲击衬底时,所述离子具有第二能量,其中所述第二能量小于所述第一能量。

    Ferroelectric polarization pattern with differing feedback signals
    7.
    发明授权
    Ferroelectric polarization pattern with differing feedback signals 有权
    具有不同反馈信号的铁电偏振模式

    公开(公告)号:US07792009B2

    公开(公告)日:2010-09-07

    申请号:US11865806

    申请日:2007-10-02

    IPC分类号: G11B7/00

    CPC分类号: G11B9/02 Y10S977/943

    摘要: A ferroelectric polarization pattern with differing feedback signals. An apparatus including a ferroelectric layer and a polarization pattern configured in the ferroelectric layer to represent position data. The polarization pattern has a first switchable polarization state domain and a second switchable polarization state domain that are both switchable by an applied signal. The first switchable polarization state domain has a first feedback signal in response to the applied signal that is different than a second feedback signal of the second switchable polarization state domain at the applied signal.

    摘要翻译: 具有不同反馈信号的铁电极化图案。 一种包括铁电层和在铁电体层中配置的表示位置数据的偏振图案的装置。 极化图案具有可由施加的信号切换的第一可切换偏振状态域和第二可切换偏振状态域。 第一可切换偏振态域具有响应于施加的信号的第一反馈信号,所施加的信号与施加的信号处的第二可切换偏振状态域的第二反馈信号不同。

    Ferroelectric Polarization Pattern With Differing Feedback Signals
    10.
    发明申请
    Ferroelectric Polarization Pattern With Differing Feedback Signals 有权
    具有不同反馈信号的铁电极化模式

    公开(公告)号:US20090086615A1

    公开(公告)日:2009-04-02

    申请号:US11865806

    申请日:2007-10-02

    IPC分类号: G11B3/70

    CPC分类号: G11B9/02 Y10S977/943

    摘要: A ferroelectric polarization pattern with differing feedback signals. An apparatus including a ferroelectric layer and a polarization pattern configured in the ferroelectric layer to represent position data. The polarization pattern has a first switchable polarization state domain and a second switchable polarization state domain that are both switchable by an applied signal. The first switchable polarization state domain has a first feedback signal in response to the applied signal that is different than a second feedback signal of the second switchable polarization state domain at the applied signal.

    摘要翻译: 具有不同反馈信号的铁电极化图案。 一种包括铁电层和在铁电体层中配置的表示位置数据的偏振图案的装置。 极化图案具有可由施加的信号切换的第一可切换偏振状态域和第二可切换偏振状态域。 第一可切换偏振态域具有响应于施加的信号的第一反馈信号,所施加的信号与施加的信号处的第二可切换偏振状态域的第二反馈信号不同。