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    Acoustic resonator devices and methods providing patterned functionalization areas
    1.
    发明授权
    Acoustic resonator devices and methods providing patterned functionalization areas 有权

    公开(公告)号：US10352904B2

    公开(公告)日：2019-07-16

    申请号：US15334511

    申请日：2016-10-26

    Applicant: Qorvo US, Inc.

    Inventor： Rio Rivas ,  John Belsick ,  Matthew Ryder

    IPC: G01N29/036 ,  H03H9/17 ,  H03H3/02

    Abstract: A micro-electrical-mechanical system (MEMS) resonator device includes a top side electrode overlaid with an interface layer including a material having a surface (e.g., gold or other noble metal, or a hydroxylated oxide) that may be functionalized with a functionalization (e.g., specific binding or non-specific binding) material. The interface layer and/or an overlying blocking material layer are precisely patterned to control locations of the interface layer available to receive a self-assembled monolayer (SAM), thereby addressing issues of misalignment and oversizing of a functionalization zone that would arise by relying solely on microarray spotting. Atomic layer deposition may be used for deposition of the interface layer and/or an optional hermeticity layer. Sensors and microfluidic devices incorporating MEMS resonator devices are also provided.

    Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization
    2.
    发明授权
    Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization 有权

    公开(公告)号：US10302595B2

    公开(公告)日：2019-05-28

    申请号：US15334528

    申请日：2016-10-26

    Applicant: Qorvo US, Inc.

    Inventor： John Belsick ,  Rick Morton ,  Matthew Ryder

    IPC: H03H9/02 ,  G01N29/02 ,  G01N29/22 ,  G01N29/24 ,  H03H9/17

    Abstract: A micro-electrical-mechanical system (MEMS) resonator device includes a top side electrode overlaid with a low water permeability hermeticity layer and an interface layer including a material (e.g., gold or a hydroxylated oxide surface) suitable for receiving a self-assembled monolayer (SAM) that may be functionalized with a functionalization (e.g., specific binding) material, with the foregoing layers being designed to have insubstantial impact on sensor performance. Atomic layer deposition may be used for deposition of the hermeticity and/or interface layers. The hermeticity layer protects the electrode material from attack in corrosive liquid environments, and the interface layer facilitates proper chemical binding of the SAM. Sensors and microfluidic devices incorporating MEMS resonator devices are also provided.

    Acoustic resonator devices and methods with noble metal layer for functionalization
    3.
    发明授权
    Acoustic resonator devices and methods with noble metal layer for functionalization 有权

    公开(公告)号：US10267770B2

    公开(公告)日：2019-04-23

    申请号：US15334482

    申请日：2016-10-26

    Applicant: Qorvo US, Inc.

    Inventor： Matthew Ryder ,  Rio Rivas

    IPC: H03H3/02 ,  H03H9/13 ,  H03H9/17 ,  G01N29/22 ,  G01N29/24 ,  G01N29/036

    Abstract: A micro-electrical-mechanical system (MEMS) resonator device includes a top side electrode overlaid with an interface layer including a material having a surface (e.g., gold or a hydroxylated oxide) that may be functionalized with a functionalization (e.g., specific binding) material. The interface layer and/or an overlying blocking layer are precisely patterned to control locations of the interface layer available to receive a self-assembled monolayer (SAM), thereby addressing issues of misalignment and oversizing of a functionalization zone that would arise by relying solely on microarray spotting. Atomic layer deposition may be used for deposition of the interface layer and/or an optional hermeticity layer. Sensors and microfluidic devices incorporating MEMS resonator devices are also provided.

    Cartridges for integrated BAW biosensors and methods for using the same
    8.
    发明授权
    Cartridges for integrated BAW biosensors and methods for using the same 有权

    公开(公告)号：US11209394B2

    公开(公告)日：2021-12-28

    申请号：US16319410

    申请日：2017-07-26

    Applicant: QORVO US, INC.

    Inventor： Thayne L. Edwards ,  Florian Bell ,  Matthew Ryder ,  Bruce Murdock

    IPC: G01N29/02 ,  G01N29/036 ,  G01N29/22 ,  G01N29/24 ,  G01N29/32 ,  B01L3/00 ,  H03H9/17

    Abstract: A cartridge for sample handling and sensing includes (i) a sample port; (ii) a first fluid port connected to the sample reservoir in the distal region via a first fluid channel; and (iii) a second fluid port connected to the sample reservoir via a second fluid channel. The cartridge includes (i) a sensor platform comprising a bulk acoustic wave (BAW) resonator and a fluid flow path comprising a sensing region extending across a sensing surface of the BAW resonator; and (ii) a fluid valve between the sample reservoir and the sensing region. A sample may be applied to the sample port; first volume of fluid may be injected through the first fluid port; and then a second volume of fluid may be injected through the second fluid port to drive the sample into the sensing region of the fluid flow path.

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