公开(公告)号：US20090168637A1

公开(公告)日：2009-07-02

申请号：US11964580

申请日：2007-12-26

申请人： Quan Anh Tran ,  Byong M. Kim ,  Robert N. Stark ,  Nathan R. Franklin ,  Qing Ma ,  Valluri Rao ,  Donald E. Adams ,  Li-Peng Wang ,  Yevgeny V. Anoikin

发明人： Quan Anh Tran ,  Byong M. Kim ,  Robert N. Stark ,  Nathan R. Franklin ,  Qing Ma ,  Valluri Rao ,  Donald E. Adams ,  Li-Peng Wang ,  Yevgeny V. Anoikin

IPC分类号： G11B3/00

CPC分类号： G11B9/02 ,  B82Y10/00 ,  G11B9/1409

摘要： An arrangement, a method and a system to read information stored in a layer of ferroelectric media. The arrangement includes a layer including a ferroelectric media having one or more ferroelectric domains holding bit charges, a domain corresponding to information; a probe having a tip, wherein the media and the tip are adapted to move relative to one another such that the tip scans the ferroelectric domains of the media while applying a contact force to the domains to generate a direct piezoelectric effect within the domains; and circuitry coupled to the tip and adapted to generate a signal in response to an electrical coupling between the tip and the domains while scanning the tip in contact with the domains, the signal corresponding to a readout signal for ferroelectric bit charges stored in the media

摘要翻译： 读取存储在铁电介质层中的信息的布置，方法和系统。 该布置包括具有一个或多个保持位电荷的铁电畴的铁电介质的层，对应于信息的畴; 具有尖端的探针，其中介质和尖端适于相对于彼此移动，使得尖端扫描介质的铁电畴，同时向畴施加接触力以在畴内产生直接压电效应; 以及耦合到所述尖端并且适于响应于所述尖端和所述域之间的电耦合而产生信号的电路，同时扫描与所述区域接触的尖端，所述信号对应于存储在所述介质中的铁电位电荷的读出信号

公开(公告)号：US08264941B2

公开(公告)日：2012-09-11

申请号：US11964580

申请日：2007-12-26

申请人： Quan Anh Tran ,  Byong M. Kim ,  Robert N. Stark ,  Nathan R. Franklin ,  Qing Ma ,  Valluri Rao ,  Donald E. Adams ,  Li-Peng Wang ,  Yevgeny V. Anoikin

发明人： Quan Anh Tran ,  Byong M. Kim ,  Robert N. Stark ,  Nathan R. Franklin ,  Qing Ma ,  Valluri Rao ,  Donald E. Adams ,  Li-Peng Wang ,  Yevgeny V. Anoikin

IPC分类号： G11B9/02

CPC分类号： G11B9/02 ,  B82Y10/00 ,  G11B9/1409

摘要： An arrangement, a method and a system to read information stored in a layer of ferroelectric media. The arrangement includes a layer including a ferroelectric media having one or more ferroelectric domains holding bit charges, a domain corresponding to information; a probe having a tip, wherein the media and the tip are adapted to move relative to one another such that the tip scans the ferroelectric domains of the media while applying a contact force to the domains to generate a direct piezoelectric effect within the domains; and circuitry coupled to the tip and adapted to generate a signal in response to an electrical coupling between the tip and the domains while scanning the tip in contact with the domains, the signal corresponding to a readout signal for ferroelectric bit charges stored in the media.

摘要翻译： 读取存储在铁电介质层中的信息的布置，方法和系统。 该布置包括具有一个或多个保持位电荷的铁电畴的铁电介质的层，对应于信息的畴; 具有尖端的探针，其中介质和尖端适于相对于彼此移动，使得尖端扫描介质的铁电畴，同时向畴施加接触力以在畴内产生直接压电效应; 以及耦合到所述尖端并且适于响应于所述尖端和所述域之间的电耦合而产生信号的电路，同时扫描与所述区域接触的尖端，所述信号对应于存储在所述介质中的铁电位电荷的读出信号。

公开(公告)号：US20130003521A1

公开(公告)日：2013-01-03

申请号：US13608878

申请日：2012-09-10

申请人： Quan Anh Tran ,  Byong M. Kim ,  Robert N. Stark ,  Nathan R. Franklin ,  Qing Ma ,  Valluri Rao ,  Donald E. Adams ,  Li-Peng Wang ,  Yevgeny V. Anoikin

发明人： Quan Anh Tran ,  Byong M. Kim ,  Robert N. Stark ,  Nathan R. Franklin ,  Qing Ma ,  Valluri Rao ,  Donald E. Adams ,  Li-Peng Wang ,  Yevgeny V. Anoikin

IPC分类号： G11B9/02

CPC分类号： G11B9/02 ,  B82Y10/00 ,  G11B9/1409

摘要： An arrangement, a method and a system to read information stored in a layer of ferroelectric media. The arrangement includes a layer including a ferroelectric media having one or more ferroelectric domains holding bit charges, a domain corresponding to information; a probe having a tip, wherein the media and the tip are adapted to move relative to one another such that the tip scans the ferroelectric domains of the media while applying a contact force to the domains to generate a direct piezoelectric effect within the domains; and circuitry coupled to the tip and adapted to generate a signal in response to an electrical coupling between the tip and the domains while scanning the tip in contact with the domains, the signal corresponding to a readout signal for ferroelectric bit charges stored in the media

摘要翻译： 读取存储在铁电介质层中的信息的布置，方法和系统。 该布置包括具有一个或多个保持位电荷的铁电畴的铁电介质的层，对应于信息的畴; 具有尖端的探针，其中介质和尖端适于相对于彼此移动，使得尖端扫描介质的铁电畴，同时向畴施加接触力以在畴内产生直接压电效应; 以及耦合到所述尖端并且适于响应于所述尖端和所述域之间的电耦合而产生信号的电路，同时扫描与所述区域接触的尖端，所述信号对应于存储在所述介质中的铁电位电荷的读出信号

公开(公告)号：US20090168635A1

公开(公告)日：2009-07-02

申请号：US11964608

申请日：2007-12-26

申请人： QUAN ANH TRAN ,  Nathan R. Franklin ,  Qing Ma ,  Valluri Rao

发明人： QUAN ANH TRAN ,  Nathan R. Franklin ,  Qing Ma ,  Valluri Rao

IPC分类号： G11B9/00 ,  B05D5/12

CPC分类号： G11B9/02

摘要： A memory media and a method to provide same. The memory media includes: a media layer comprising a ferroelectric layer having a bottom surface and a top surface; a plurality of adjacent charge domains defined in the ferroelectric layer, the domains including alternating up domains and down domains each extending between the bottom surface and the top surface; and a trapped charge region adjacent a top surface of the media layer, the trapped charge region including charges in addition to the charges present in the charge domains at regions thereof other than regions adjacent the top surface of the media layer.

摘要翻译： 一种记忆媒体和一种提供相同的方法。 存储介质包括：介质层，其包括具有底表面和顶表面的铁电层; 限定在铁电体层中的多个相邻的电荷域，所述畴包括各自在底表面和顶表面之间延伸的交替域和下畴; 以及与介质层的顶表面相邻的捕获的电荷区域，除了存在于电荷区域中的电荷之外，捕获的电荷区域还包括除了与介质层的顶表面相邻的区域之外的区域中的电荷。

公开(公告)号：US20120196384A1

公开(公告)日：2012-08-02

申请号：US13444045

申请日：2012-04-11

申请人： Yuegang Zhang ,  Andrew A. Berlin ,  Qing Ma ,  Li-Peng Wang ,  Valluri Rao ,  Mineo Yamakawa

发明人： Yuegang Zhang ,  Andrew A. Berlin ,  Qing Ma ,  Li-Peng Wang ,  Valluri Rao ,  Mineo Yamakawa

IPC分类号： G01N33/53

CPC分类号： G01N33/54373 ,  B82Y15/00 ,  B82Y30/00 ,  G01N27/126 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2437 ,  G01N29/348 ,  G01N33/0031 ,  G01N2291/02466 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426 ,  Y10T436/11 ,  Y10T436/143333 ,  Y10T436/144444 ,  Y10T436/25375

摘要： Systems and methods for detecting the presence of biomolecules in a sample using biosensors that incorporate resonators which have functionalized surfaces for reacting with target biomolecules. In one embodiment, a device includes a piezoelectric resonator having a functionalized surface configured to react with target molecules, thereby changing the mass and/or charge of the resonator which consequently changes the frequency response of the resonator. The resonator's frequency response after exposure to a sample is compared to a reference, such as the frequency response before exposure to the sample, a stored baseline frequency response or a control resonator's frequency response.

摘要翻译： 使用包含具有功能化表面以与靶生物分子反应的共振器的生物传感器来检测样品中存在生物分子的系统和方法。 在一个实施例中，器件包括压电谐振器，其具有被配置为与靶分子反应的官能化表面，从而改变谐振器的质量和/或电荷，从而改变谐振器的频率响应。 将曝光后的谐振器频率响应与参考值进行比较，例如在暴露于采样之前的频率响应，存储的基准频率响应或控制谐振器的频率响应。

公开(公告)号：US07914740B2

公开(公告)日：2011-03-29

申请号：US11317405

申请日：2005-12-22

申请人： Yuegang Zhang ,  Andrew A. Berlin ,  Qing Ma ,  Li-Peng Wang ,  Valluri Rao ,  Mineo Yamakawa

发明人： Yuegang Zhang ,  Andrew A. Berlin ,  Qing Ma ,  Li-Peng Wang ,  Valluri Rao ,  Mineo Yamakawa

IPC分类号： G01N33/50

CPC分类号： G01N33/54373 ,  B82Y15/00 ,  B82Y30/00 ,  G01N27/126 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2437 ,  G01N29/348 ,  G01N33/0031 ,  G01N2291/02466 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426 ,  Y10T436/11 ,  Y10T436/143333 ,  Y10T436/144444 ,  Y10T436/25375

摘要： Systems and methods for detecting the presence of biomolecules in a sample using biosensors that incorporate resonators which have functionalized surfaces for reacting with target biomolecules. In one embodiment, a device includes a piezoelectric resonator having a functionalized surface configured to react with target molecules, thereby changing the mass and/or charge of the resonator which consequently changes the frequency response of the resonator. The resonator's frequency response after exposure to a sample is compared to a reference, such as the frequency response before exposure to the sample, a stored baseline frequency response or a control resonator's frequency response.

公开(公告)号：US07867786B2

公开(公告)日：2011-01-11

申请号：US11958826

申请日：2007-12-18

申请人： Qing Ma ,  Li-Peng Wang ,  Valluri Rao

发明人： Qing Ma ,  Li-Peng Wang ,  Valluri Rao

IPC分类号： H01L21/00 ,  H01L21/02

CPC分类号： G11B9/02 ,  C30B23/02 ,  C30B25/02 ,  C30B29/32 ,  H01L21/28291

摘要： The present invention describes a method including: providing a substrate; forming an underlying layer over the substrate; heating the substrate; forming a ferroelectric layer over the underlying layer, the ferroelectric layer having a thickness below a critical thickness, the underlying layer having a smaller lattice constant than the ferroelectric layer; cooling the substrate to room temperature; and inducing a compressive strain in the ferroelectric layer.

摘要翻译： 本发明描述了一种方法，包括：提供衬底; 在衬底上形成下层; 加热基板; 在所述下层上形成铁电层，所述铁电层的厚度低于临界厚度，所述下层具有比所述铁电层更小的晶格常数; 将基板冷却至室温; 并在铁电层中产生压应变。

公开(公告)号：US07559242B2

公开(公告)日：2009-07-14

申请号：US11097059

申请日：2005-03-31

申请人： Li-Peng Wang ,  Qing Ma ,  Valluri Rao ,  Goutam Paul

发明人： Li-Peng Wang ,  Qing Ma ,  Valluri Rao ,  Goutam Paul

IPC分类号： G01D21/00

CPC分类号： G01H1/00

摘要： An apparatus comprising a substrate and an array of vibration sensors formed on the substrate, the array comprising two or more vibration sensors, wherein each vibration sensor in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. A process comprising forming an array of vibration sensors on a substrate, the array comprising two or more vibration sensors, wherein each of the two or more vibration sensors in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. Other embodiments are disclosed and claimed.

摘要翻译： 一种包括衬底和形成在衬底上的振动传感器阵列的装置，该阵列包括两个或更多个振动传感器，其中阵列中的每个振动传感器具有与任何其它振动传感器不同的本底噪声和不同的工作频率范围 在阵列中。 一种方法，包括在衬底上形成振动传感器阵列，所述阵列包括两个或更多个振动传感器，其中所述阵列中的所述两个或更多个振动传感器中的每一个具有不同于其他噪声的基底和不同的工作频率范围 阵列中的振动传感器。 公开和要求保护其他实施例。

公开(公告)号：US20070000305A1

公开(公告)日：2007-01-04

申请号：US11174059

申请日：2005-06-30

申请人： Qing Ma ,  Li-Peng Wang ,  Valluri Rao

发明人： Qing Ma ,  Li-Peng Wang ,  Valluri Rao

IPC分类号： G01N29/02

CPC分类号： G01N29/022 ,  G01N29/036 ,  G01N33/54373 ,  G01N2291/021 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426 ,  G01N2291/106

摘要： An FBAR device may be chemically functionalized by depositing an interactive layer so that targeted chemicals are preferentially adsorbed. Such miniaturized chemical sensors may be combined with wireless network technology. For example, a chemical sensor may be integrated in a cell phone, PDA, a watch, or a car with wireless connection and GPS. Since such devices are widely populated, a national sensor network may be established. Consequently, a national toxicity map can be generated in real time. Detailed chemical information may be obtained, such as if a chemical is released by a source fixed on ground or by a moving object, or if is spread by explosives or by wind and so on.

摘要翻译： FBAR器件可以通过沉积交互层进行化学功能化，从而优先吸附目标化学物质。 这种小型化学传感器可以与无线网络技术组合。 例如，化学传感器可以集成在具有无线连接和GPS的手机，PDA，手表或汽车中。 由于这样的设备被广泛地填充，所以可以建立国家传感器网络。 因此，可以实时生成国家毒性图。 可以获得详细的化学信息，例如化学品被固定在地面上的源或被移动的物体释放，或者如果被爆炸物或风等传播。

公开(公告)号：US06975184B2

公开(公告)日：2005-12-13

申请号：US10448915

申请日：2003-05-30

申请人： Li-Peng Wang ,  Michael Dibattista ,  Seth Fortuna ,  Qing Ma ,  Valluri Rao

发明人： Li-Peng Wang ,  Michael Dibattista ,  Seth Fortuna ,  Qing Ma ,  Valluri Rao

IPC分类号： H03H3/04 ,  H03H9/17 ,  H03H9/00

CPC分类号： H03H3/04 ,  H03H2003/0428 ,  H03H2003/0435

摘要： A material may be removed from the top electrode of a film bulk acoustic resonator to alter the mass loading effect and to adjust the frequency of one film bulk acoustic resonator on a wafer relative to other resonators on the same wafer. Similarly, the piezoelectric layer or the bottom electrode may be selectively milled with a focused ion beam to trim the resonator.

摘要翻译： 可以从膜体声波谐振器的顶部电极去除材料以改变质量负载效应并且调整晶片上相对于同一晶片上的其它谐振器的一个膜体声波谐振器的频率。 类似地，可以用聚焦离子束选择性地研磨压电层或底部电极以修整谐振器。