公开(公告)号：US20230038004A1

公开(公告)日：2023-02-09

申请号：US17793025

申请日：2021-01-29

申请人： Robert Bosch GmbH

发明人： Reinhard Neul ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg

IPC分类号： G01C19/5712 ,  G01C19/5747

摘要： A micromechanical rate-of-rotation sensor set-up, including a first rate-of-rotation sensor device capable of being driven rotationally by a driving device via a drive frame device, so as to oscillate about a first axis, and is for measuring a first outer rate of rotation about a second axis and a second outer rate of rotation about a third axis; and a second rate-of-rotation sensor device capable of being driven by the driving device via the drive frame device, so as to oscillate linearly along the second axis, and is for measuring a third outer rate of rotation about the first axis. The first rate-of-rotation sensor device is connected to the second rate-of-rotation sensor device by the drive frame device. The drive frame device includes a first and second drive frame, which may be driven by the driving device in phase opposition, along the third axis, in an oscillatory manner.

公开(公告)号：US11421991B2

公开(公告)日：2022-08-23

申请号：US16761598

申请日：2018-10-25

申请人： Robert Bosch GmbH

发明人： Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC分类号： G01C19/5712 ,  G01C19/5747 ,  G01C19/5733

摘要： A yaw-rate sensor with a substrate having a main extension plane. The yaw-rate sensor includes a rotation-element assembly, the rotation-element assembly being designed for detecting yaw rates prevailing in a first main extension axis of the substrate and yaw rates prevailing in a second main extension axis of the substrate perpendicular to the first main extension axis. The yaw-rate sensor has a sensor assembly, the sensor assembly being designed for detecting a yaw rate prevailing perpendicular to the main extension plane of the substrate, both the sensor assembly and the rotation-element assembly being drivable with the aid of a drive assembly, the drive assembly being designed for driving movement along the first main extension axis.

公开(公告)号：US11099013B2

公开(公告)日：2021-08-24

申请号：US16636532

申请日：2018-07-30

申请人： Robert Bosch GmbH

发明人： Peter Degenfeld-Schonburg ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Niels Bode ,  Nils Felix Kuhlmann ,  Reinhard Neul

IPC分类号： G01C19/5762 ,  G01C19/5712 ,  G01C19/5747 ,  G01C19/574

摘要： A sensor includes a substrate having a first electrode arrangement; a first mass oscillator having (a) a first mass, (b) a first mass centroid, and (c) a second electrode arrangement including a first area centroid coinciding with the first mass centroid; and a second mass oscillator having (a) a second mass equal to the first mass, (b) a second mass centroid coinciding with the first mass centroid, and (c) a third electrode arrangement including a second area centroid coinciding with the first area centroid. Areas of the second and third electrode arrangements are equal. The sensor detects respective rotation rates around axes parallel to and perpendicular to a substrate extension. The oscillators are oscillatorily connected to each other and to the substrate, are deflectable, and experience respective forces in the directions of extension of the axes upon respective rotations around the other of the axes.

公开(公告)号：US10753743B2

公开(公告)日：2020-08-25

申请号：US15775321

申请日：2016-11-10

申请人： Robert Bosch GmbH

发明人： Reinhard Neul ,  Torsten Ohms ,  Robert Maul ,  Mirko Hattass ,  Christian Hoeppner ,  Odd-Axel Pruetz ,  Benjamin Schmidt ,  Rolf Scheben ,  Friedjof Heuck

IPC分类号： G01C19/5747 ,  G01C19/5712

摘要： A micromechanical yaw rate sensor includes a substrate and a rotationally oscillating mass having a rotationally oscillating mass bearing. The rotationally oscillating mass bearing includes a rocker bar, a rocker spring rod which resiliently connects the rocker bar to the substrate, and two support spring rods which resiliently connect, on opposite sides of the rocker spring rod, the rocker bar to the rotationally oscillating mass.

公开(公告)号：US20150276408A1

公开(公告)日：2015-10-01

申请号：US14737971

申请日：2015-06-12

申请人： ROBERT BOSCH GMBH

发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC分类号： G01C19/5747

CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US11953323B2

公开(公告)日：2024-04-09

申请号：US17793025

申请日：2021-01-29

申请人： Robert Bosch GmbH

发明人： Reinhard Neul ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg

IPC分类号： G01C19/5747 ,  G01C19/5712

CPC分类号： G01C19/5712 ,  G01C19/5747

摘要： A micromechanical rate-of-rotation sensor set-up, including a first rate-of-rotation sensor device capable of being driven rotationally by a driving device via a drive frame device, so as to oscillate about a first axis, and is for measuring a first outer rate of rotation about a second axis and a second outer rate of rotation about a third axis; and a second rate-of-rotation sensor device capable of being driven by the driving device via the drive frame device, so as to oscillate linearly along the second axis, and is for measuring a third outer rate of rotation about the first axis. The first rate-of-rotation sensor device is connected to the second rate-of-rotation sensor device by the drive frame device. The drive frame device includes a first and second drive frame, which may be driven by the driving device in phase opposition, along the third axis, in an oscillatory manner.

公开(公告)号：US20210172737A1

公开(公告)日：2021-06-10

申请号：US16761598

申请日：2018-10-25

申请人： Robert Bosch GmbH

发明人： Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC分类号： G01C19/5712 ,  G01C19/5733

摘要： A yaw-rate sensor with a substrate having a main extension plane. The yaw-rate sensor includes a rotation-element assembly, the rotation-element assembly being designed for detecting yaw rates prevailing in a first main extension axis of the substrate and yaw rates prevailing in a second main extension axis of the substrate perpendicular to the first main extension axis. The yaw-rate sensor has a sensor assembly, the sensor assembly being designed for detecting a yaw rate prevailing perpendicular to the main extension plane of the substrate, both the sensor assembly and the rotation-element assembly being drivable with the aid of a drive assembly, the drive assembly being designed for driving movement along the first main extension axis.

公开(公告)号：US20190078887A1

公开(公告)日：2019-03-14

申请号：US16127791

申请日：2018-09-11

申请人： Robert Bosch GmbH

发明人： Niels Bode ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC分类号： G01C19/5762 ,  G01C19/5712

摘要： A micromechanical rotational rate sensor system includes a first rotational rate sensor device that can be driven rotationally about a first axis in oscillating fashion for acquiring a first external rate of rotation about a second axis and a second external rate of rotation about a third axis, the first, second, and third axes being perpendicular to one another; and a second rotational rate sensor device, capable of being driven in linearly oscillating fashion along the second axis, for acquiring a third external rate of rotation about the first axis. The first rotational rate sensor device is connected to the second rotational rate sensor device via a drive frame device. The drive frame device has a first drive frame and a second drive frame that are capable of being driven in oscillating fashion by the drive device with opposite phase along the third axis.

公开(公告)号：US20190056226A1

公开(公告)日：2019-02-21

申请号：US15767271

申请日：2016-11-09

申请人： Robert Bosch GmbH

发明人： Reinhard Neul ,  Torsten Ohms ,  Robert Maul ,  Mirko Hattass ,  Christian Hoeppner ,  Odd-Axel Pruetz ,  Benjamin Schmidt ,  Rolf Scheben ,  Friedjof Heuck

IPC分类号： G01C19/5747

摘要： A micromechanical rate-of-rotation sensor includes a first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive beam arranged along the first Coriolis element. The first drive beam is coupled via a first spring to the first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive electrode carrier extending from the first drive beam in a direction opposite to the first Coriolis element. The first drive electrode carrier is configured to carry a multiplicity of first drive electrodes extending parallel to the first drive beam.

公开(公告)号：US20180321039A1

公开(公告)日：2018-11-08

申请号：US15775321

申请日：2016-11-10

申请人： Robert Bosch GmbH

发明人： Reinhard Neul ,  Torsten Ohms ,  Robert Maul ,  Mirko Hattass ,  Christian Hoeppner ,  Odd-Axel Pruetz ,  Benjamin Schmidt ,  Rolf Scheben ,  Friedjof Heuck

IPC分类号： G01C19/5747 ,  G01C19/5712

摘要： A micromechanical yaw rate sensor includes a substrate and a rotationally oscillating mass having a rotationally oscillating mass bearing. The rotationally oscillating mass bearing includes a rocker bar, a rocker spring rod which resiliently connects the rocker bar to the substrate, and two support spring rods which resiliently connect, on opposite sides of the rocker spring rod, the rocker bar to the rotationally oscillating mass.