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18 条记录 (耗时 0.02 秒)

    Yaw-rate sensor
    1.
    发明授权
    Yaw-rate sensor 有权
    偏光率传感器

    公开(公告)号：US09593948B2

    公开(公告)日：2017-03-14

    申请号：US14334407

    申请日：2014-07-17

    申请人： ROBERT BOSCH GMBH

    发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    IPC分类号： G01C19/56 ,  G01C19/574 ,  F16F1/02 ,  G01P3/44 ,  G01C19/5747

    CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

    摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

    摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

    Micromechanical inertial sensor and method for manufacturing same
    2.
    发明授权
    Micromechanical inertial sensor and method for manufacturing same 有权
    微机械惯性传感器及其制造方法

    公开(公告)号：US09434606B2

    公开(公告)日：2016-09-06

    申请号：US13890752

    申请日：2013-05-09

    申请人： Robert Bosch GmbH

    发明人： Johannes Classen ,  Mirko Hattass ,  Daniel Christoph Meisel

    IPC分类号： B81C1/00 ,  B81B3/00 ,  G01P15/00 ,  G01P15/08

    CPC分类号： B81C1/00134 ,  B81B3/0018 ,  B81B2201/025 ,  B81C1/00246 ,  B81C1/00333 ,  G01P15/0802

    摘要： A micromechanical inertial sensor includes an ASIC element having a processed front side, an MEMS element having a micromechanical sensor structure, and a cap wafer mounted above the micromechanical sensor structure, which sensor structure includes a seismic mass and extends over the entire thickness of the MEMS substrate. The MEMS element is mounted on the processed front side of the ASIC element above a standoff structure and is electrically connected to the ASIC element via through-contacts in the MEMS substrate and in adjacent supports of the standoff structure. A blind hole is formed in the MEMS substrate in the area of the seismic mass, which blind hole is filled with the same electrically conductive material as the through-contacts, the conductive material having a greater density than the MEMS substrate.

    摘要翻译： 微机械惯性传感器包括具有经处理的前侧的ASIC元件，具有微机械传感器结构的MEMS元件和安装在微机械传感器结构上方的盖晶片，该传感器结构包括地震块并在MEMS的整个厚度上延伸 基质。 MEMS元件安装在ASIC元件的经处理的前侧，位于支架结构之上，并通过MEMS基板中的通孔和隔离结构的相邻支撑件电连接到ASIC元件。 在地震质量区域中的MEMS衬底中形成盲孔，该盲孔填充有与穿透接触件相同的导电材料，导电材料具有比MEMS衬底更大的密度。

    Micromechanical structure, in particular sensor arrangement, and corresponding operating method
    4.
    发明授权
    Micromechanical structure, in particular sensor arrangement, and corresponding operating method 有权
    微机械结构，特别是传感器布置，以及相应的操作方法

    公开(公告)号：US08901679B2

    公开(公告)日：2014-12-02

    申请号：US13942744

    申请日：2013-07-16

    申请人： Robert Bosch GmbH

    发明人： Johannes Classen ,  Mirko Hattass ,  Lars Tebje ,  Daniel Christoph Meisel

    IPC分类号： H01L21/48 ,  B81B7/00 ,  B81C1/00 ,  G01P15/08

    CPC分类号： B81B7/008 ,  B81B2201/0235 ,  B81C1/00246 ,  B81C2203/0735 ,  B81C2203/0771 ,  B81C2203/0792 ,  G01P2015/0877

    摘要： A micromechanical structure, in particular a sensor arrangement, includes at least one micromechanical functional layer, a CMOS substrate region arranged below the at least one micromechanical functional layer, and an arrangement of one or more contact elements. The CMOS substrate region has at least one configurable circuit arrangement. The arrangement of one or more contact elements is arranged between the at least one micromechanical functional layer and the CMOS substrate region and is electrically connected to the micromechanical functional layer and the circuit arrangement. The configurable circuit arrangement is designed in such a way that the one or more contact elements are configured to be selectively connected to electrical connection lines in the CMOS substrate region.

    摘要翻译： 微机械结构，特别是传感器装置，包括至少一个微机械功能层，布置在至少一个微机械功能层下方的CMOS衬底区域以及一个或多个接触元件的布置。 CMOS衬底区域具有至少一个可配置电路布置。 一个或多个接触元件的布置被布置在至少一个微机械功能层和CMOS衬底区域之间，并且电连接到微机械功能层和电路装置。 可配置电路布置被设计成使得一个或多个接触元件被配置为选择性地连接到CMOS衬底区域中的电连接线。

    YAW-RATE SENSOR
    9.
    发明申请
    YAW-RATE SENSOR 审中-公开
    YAW-RATE传感器

    公开(公告)号：US20150276408A1

    公开(公告)日：2015-10-01

    申请号：US14737971

    申请日：2015-06-12

    申请人： ROBERT BOSCH GMBH

    发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    IPC分类号： G01C19/5747

    CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

    摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

    摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。