公开(公告)号：US20210108065A1

公开(公告)日：2021-04-15

申请号：US16653690

申请日：2019-10-15

Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC

Inventor： Yang SONG ,  Jong Keun PARK ,  Emad AQAD ,  Mingqi LI ,  Colin LIU ,  James W. THACKERAY ,  Peter TREFONAS, III

IPC: C08L33/08 ,  C08L25/14 ,  G03F7/038 ,  G03F7/20

Abstract: A polymer comprising: a first repeating unit comprising a tertiary ester acid labile group; and a second repeating unit of Formula (1): wherein R1 to R5 are as provided herein; R2 and R3 together do not form a ring; each A is independently a halogen, a carboxylic acid or ester, a thiol, a straight chain or branched C1-20 alkyl, a monocyclic or polycyclic C3-20 cycloalkyl, a monocyclic or polycyclic C3-20 fluorocycloalkenyl, a monocyclic or polycyclic C3-20 heterocycloalkyl, a monocyclic or polycyclic C6-20 aryl, or a monocyclic or polycyclic C4-20 heteroaryl, each of which is substituted or unsubstituted; and m is an integer of 0 to 4.

公开(公告)号：US20200066993A1

公开(公告)日：2020-02-27

申请号：US16344111

申请日：2016-11-07

Applicant: DOW GLOBAL TECHNOLOGIES LLC ,  ROHM AND HAAS ELECTRONIC MATERIALS LLC ,  ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.

Inventor： Yang LI ,  Minrong ZHU ,  Jichang FENG ,  Shaoguang FENG ,  Chun LIU ,  Yuchen LIU ,  David Dayton DEVORE ,  Peter TREFONAS, III ,  Hong Yeop NA ,  Robert WRIGHT ,  Liam Patrick SPENCER ,  John William KRAMER ,  Anatoliy SOKOLOV ,  Emad AQAD

IPC: H01L51/00

Abstract: Polymeric charge transfer layer compositions suitable for organic layers of electronic devices that show reduced driving voltage and increased luminous efficiency.

公开(公告)号：US20140186770A1

公开(公告)日：2014-07-03

申请号：US14145551

申请日：2013-12-31

Applicant: Rohm and Haas Electronic Materials LLC

Inventor： Emad AQAD ,  Cheng-Bai XU ,  Irvinder KAUR ,  Mingqi LI ,  Jibin SUN ,  Cecily ANDES

IPC: G03C1/73 ,  G03F7/20

CPC classification number: G03F7/004 ,  C07C303/32 ,  C07C2603/26 ,  G03F7/0042 ,  G03F7/038 ,  G03F7/039 ,  G03F7/20

Abstract: Dendritic compounds are provided. The dendritic compounds include an anionic dendron that has a focal point having an anionic group and a linking group, and a photoreactive cation. The dendritic compounds find particular use as photoacid generators. Also provided are photoresist compositions that include such a dendritic compound, as well as methods of forming electronic devices with the photoresist compositions. The dendritic compounds, photoresist compositions and methods find particular applicability in the manufacture of semiconductor devices.

Abstract translation: 提供树枝状化合物。 树枝状化合物包括具有阴离子基团和连接基团的焦点的阴离子树突，以及光反应性阳离子。 树枝状化合物特别用作光致酸发生剂。 还提供了包括这种树枝状化合物的光致抗蚀剂组合物，以及用光致抗蚀剂组合物形成电子器件的方法。 树枝状化合物，光致抗蚀剂组合物和方法在半导体器件的制造中特别适用。

公开(公告)号：US20190202975A1

公开(公告)日：2019-07-04

申请号：US16311886

申请日：2016-06-28

Applicant: Dow Global Technologies LLC ,  Rohm and Haas Electronic Materials LLC

Inventor： Chun LIU ,  Robert David GRIGG ,  Sukrit MUKHOPADHYAY ,  Matthew S. REMY ,  Liam P. SPENCER ,  Minrong ZHU ,  Yang LI ,  Shaoguang FENG ,  Kenneth L. KEARNS ,  Bruce M. BELL ,  Anthony P. GIES ,  Peter TREFONAS ,  David D. DEVORE ,  Emad AQAD ,  Ashley INMAN

IPC: C08G61/02 ,  C08L25/04 ,  H01L51/00 ,  H01L51/50

CPC classification number: C08G61/02 ,  C08G2261/135 ,  C08G2261/1424 ,  C08G2261/1434 ,  C08G2261/148 ,  C08G2261/149 ,  C08G2261/41 ,  C08G2261/512 ,  C08G2261/514 ,  C08L25/04 ,  H01L51/0035 ,  H01L51/004 ,  H01L51/0043 ,  H01L51/0058 ,  H01L51/006 ,  H01L51/0072 ,  H01L51/5056 ,  H01L51/506 ,  H01L51/5072 ,  H01L51/5076

Abstract: A single liquid phase formulation useful for producing an organic charge transporting film. The formulation contains: (a) a polymer resin having Mw at least 3,000 and having arylmethoxy linkages; (b) an acid catalyst which is an organic Bronsted acid with pKa≤4; a Lewis acid comprising a positive aromatic ion and an anion which is (i) a tetraaryl borate having the formula (I) wherein R represents zero to five non-hydrogen substituents selected from D, F and CF3, (ii) BF4−, (iii) PF6−, (iv) SbF6−, (v) AsF6− or (vi) ClO4−; or a thermal acid generator.