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    Positive radiation-sensitive mixture, and radiation-sensitive recording material produced therefrom for high-energy radiation
    2.
    发明授权
    Positive radiation-sensitive mixture, and radiation-sensitive recording material produced therefrom for high-energy radiation 失效
    积极的辐射敏感性混合物和用于高能量辐射的辐射敏感记录材料

    公开(公告)号：US5217843A

    公开(公告)日：1993-06-08

    申请号：US491817

    申请日：1990-03-12

    申请人： Ralph Dammel ,  Juergen Lingnau ,  Georg Pawlowski ,  Juergen Theis

    发明人： Ralph Dammel ,  Juergen Lingnau ,  Georg Pawlowski ,  Juergen Theis

    IPC分类号： G03F7/039 ,  G03F7/004 ,  H01L21/027

    CPC分类号： G03F7/0045

    摘要： A positive radiation-sensitive mixture is disclosed which contains a compound which forms an acid under the action of high-energy radiation, and an acid-cleavable compound, wherein the compound which forms an acid contains aliphatically bound halogen (chlorine or bromine) and has a pK.sub.a value of less than about 12 or is a derivative of a compound having such a pK.sub.a value which can be converted into the free compound by acid catalysis. A positive recording material and a process for recording high-energy radiation using the material are also disclosed. The mixture, and in particular the recording material produced therefrom, has relatively high sensitivity and improved resolution and, in addition, does not exhibit image fogging after development.

    摘要翻译： 公开了一种阳离子敏感性混合物，其包含在高能量辐射的作用下形成酸的化合物和酸可分解的化合物，其中形成酸的化合物含有脂族结合的卤素（氯或溴）并具有 pKa值小于约12，或者是具有这样的pKa值的化合物的衍生物，其可以通过酸催化转化成游离化合物。 还公开了正记录材料和使用该材料记录高能辐射的方法。 混合物，特别是由其制备的记录材料具有相对高的灵敏度和改进的分辨率，此外，显影后不会发生图像起雾。