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    Vacuum closure with linear drive unit
    1.
    发明申请
    Vacuum closure with linear drive unit 审中-公开
    带线性驱动单元的真空关闭

    公开(公告)号：US20060102863A1

    公开(公告)日：2006-05-18

    申请号：US11143822

    申请日：2005-06-02

    申请人： Stefan Bangert ,  Michael Konig ,  Ralph Lindenberg ,  Uwe Schussler ,  Tobias Stolley ,  Frank Fuchs

    发明人： Stefan Bangert ,  Michael Konig ,  Ralph Lindenberg ,  Uwe Schussler ,  Tobias Stolley ,  Frank Fuchs

    IPC分类号： F16K11/074

    CPC分类号： F16K31/04 ,  F16K51/02

    摘要： This invention relates to a vacuum treatment installation and a device therefor for the tight, especially vacuum-tight closing of an aperture, in particular a slit-like or rectangular aperture with a length that is preferably a multiple of the width of the aperture, in particular for a lock arrangement of a vacuum treatment installation, said device having a closure member (2) and for said closure member a linear drive unit (3,4,5) which, by way of a translational movement, can move the closure member from an open position into a closed position, said closure member having a sealing surface which is disposed in a plane (16) and which, in the closed position, makes sealing contact with a counter-sealing surface on the aperture side, and said plane running perpendicular to the direction of the translational movement (14) and at an oblique angle to the aperture normal (13).

    摘要翻译： 本发明涉及一种真空处理装置及其装置，用于紧密，特别地真空密封孔，特别是狭缝状或矩形孔，其长度优选为孔的宽度的倍数，在 特别是用于真空处理装置的锁定装置，所述装置具有闭合构件（2），并且对于所述闭合构件，线性驱动单元（3,4,5）通过平移运动可移动闭合构件 从打开位置到关闭位置，所述封闭构件具有设置在平面（16）中的密封表面，并且在关闭位置与密封面密封接触开口侧上的反向密封表面，并且所述平面 垂直于平移运动（14）的方向延伸并且与孔径法线（13）成倾斜的角度。

    Drive mechanism for a vacuum treatment apparatus
    2.
    发明申请
    Drive mechanism for a vacuum treatment apparatus 失效
    真空处理设备的驱动机构

    公开(公告)号：US20050263078A1

    公开(公告)日：2005-12-01

    申请号：US10898018

    申请日：2004-07-23

    申请人： Ralph Lindenberg ,  Michael Konig ,  Uwe Schussler ,  Stefan Bangert

    发明人： Ralph Lindenberg ,  Michael Konig ,  Uwe Schussler ,  Stefan Bangert

    IPC分类号： C23C14/50 ,  C23C14/56 ,  C23C16/44 ,  C23C16/54 ,  H01L21/00 ,  H01L21/677 ,  C23C16/00

    CPC分类号： C23C14/568 ,  C23C16/54 ,  H01L21/67196 ,  H01L21/67742

    摘要： The invention relates to a drive mechanism for a vacuum treatment apparatus by which substrate holders can be transported around an axis (A-A) from an entrance airlock to an exit airlock. A stationary supporting column (1) is disposed in the center and on it a rotatory drive chamber (6) is borne which has control rods (9) for a rotation and a radial displacement of the substrate holders. In the rotatory drive chamber (6), a motor (4) and rotatory displacement drives for the control rods (9) are arranged on the supporting column (1), the control rods being in active connection each with a corresponding substrate holder. To solve the problem of carrying substrates through the vacuum treatment apparatus, even substrates of great area, smoothly, at a slight angle to the vertical, not fastened to the substrate holders, it is provided that a) the motor (4) is joined to a stationary bearing carrier (5) in which a rotatory star-shaped array of cantilevers (14) is mounted, b) the cantilevers (14) are articulated at one end to bell-crank levers (16), each of which has a pivot pin (17), c) the other end of each of the bell-crank levers (16) is articulated to one of the control rods (9), and that d) the pivot pins (17) of the bell-crank levers (16) are guided in a first stationary radial cam (11) whose shape determines the radial movements of the control rods (9). A periodic, variable superposition of the radial movements is performed by variable tangential movements produced by a second stationary radial cam (12) with a bell-crank lever which is joined by a link (24) to the drive chamber (6).

    摘要翻译： 本发明涉及一种用于真空处理设备的驱动机构，通过该驱动机构，基板保持器可以从轴线（A-A）从入口气闸传送到出口气闸。 固定支撑柱（1）设置在中心，并且在其上具有旋转驱动室（6），其具有用于基板保持器的旋转和径向位移的控制杆（9）。 在旋转驱动室（6）中，在支撑柱（1）上布置有用于控制杆（9）的马达（4）和旋转位移驱动装置，控制杆主动地连接到相应的基板支架。 为了解决通过真空处理装置承载基板的问题，即使是没有紧固到基板保持器上的大面积，平滑地，与垂直方向成微小角度的基板，即使将a）马达（4）接合到 固定轴承架（5），其中安装有悬臂（14）的旋转星形阵列，b）悬臂（14）在一端铰接到钟形曲柄杆（16），每一个都具有枢轴 销（17），c）每个钟形杠杆（16）的另一端铰接到控制杆（9）中的一个，并且d）钟形曲柄杆（10）的枢轴销（17） 16）在其形状确定控制杆（9）的径向移动的第一固定径向凸轮（11）中引导。 径向运动的周期性可变叠加通过由具有连杆（24）连接到驱动室（6）的钟形曲柄杆的第二静止径向凸轮（12）产生的可变切向运动来执行。

    Drive mechanism for a vacuum treatment apparatus
    3.
    发明授权
    Drive mechanism for a vacuum treatment apparatus 失效
    真空处理设备的驱动机构

    公开(公告)号：US07153367B2

    公开(公告)日：2006-12-26

    申请号：US10898018

    申请日：2004-07-23

    申请人： Ralph Lindenberg ,  Michael Konig ,  Uwe Schussler ,  Stefan Bangert

    发明人： Ralph Lindenberg ,  Michael Konig ,  Uwe Schussler ,  Stefan Bangert

    IPC分类号： C23C16/00 ,  C23C14/00 ,  C23F1/00 ,  H01L21/306 ,  H01L21/677

    CPC分类号： C23C14/568 ,  C23C16/54 ,  H01L21/67196 ,  H01L21/67742

    摘要： The invention relates to a drive mechanism for a vacuum treatment apparatus by which substrate holders can be transported around an axis (A—A) from an entrance airlock to an exit airlock. A stationary supporting column (1) is disposed in the center and on it a rotatory drive chamber (6) is borne which has control rods (9) for a rotation and a radial displacement of the substrate holders. In the rotatory drive chamber (6), a motor (4) and rotatory displacement drives for the control rods (9) are arranged on the supporting column (1), the control rods being in active connection each with a corresponding substrate holder. To solve the problem of carrying substrates through the vacuum treatment apparatus, even substrates of great area, smoothly, at a slight angle to the vertical, not fastened to the substrate holders, it is provided that a) the motor (4) is joined to a stationary bearing carrier (5) in which a rotatory star-shaped array of cantilevers (14) is mounted, b) the cantilevers (14) are articulated at one end to bell-crank levers (16), each of which has a pivot pin (17), c) the other end of each of the bell-crank levers (16) is articulated to one of the control rods (9), and that d) the pivot pins (17) of the bell-crank levers (16) are guided in a first stationary radial cam (11) whose shape determines the radial movements of the control rods (9). A periodic, variable superposition of the radial movements is performed by variable tangential movements produced by a second stationary radial cam (12) with a bell-crank lever which is joined by a link (24) to the drive chamber (6).

    摘要翻译： 本发明涉及一种用于真空处理设备的驱动机构，通过该驱动机构，基板保持器可以从轴线（A-A）从入口气闸传送到出口气闸。 固定支撑柱（1）设置在中心，并且在其上具有旋转驱动室（6），其具有用于基板保持器的旋转和径向位移的控制杆（9）。 在旋转驱动室（6）中，在支撑柱（1）上布置有用于控制杆（9）的马达（4）和旋转位移驱动装置，控制杆主动地连接到相应的基板支架。 为了解决通过真空处理装置承载基板的问题，即使是没有紧固到基板保持器上的大面积，平滑地，与垂直方向成微小角度的基板，即使将a）马达（4）接合到 固定轴承架（5），其中安装有悬臂（14）的旋转星形阵列，b）悬臂（14）在一端铰接到钟形曲柄杆（16），每一个都具有枢轴 销（17），c）每个钟形杠杆（16）的另一端铰接到控制杆（9）中的一个，并且d）钟形曲柄杆（10）的枢轴销（17） 16）在其形状确定控制杆（9）的径向移动的第一固定径向凸轮（11）中引导。 径向运动的周期性可变叠加通过由具有连杆（24）连接到驱动室（6）的钟形曲柄杆的第二静止径向凸轮（12）产生的可变切向运动来执行。

    Thermosetting plastic powder mixtures
    8.
    发明授权
    Thermosetting plastic powder mixtures 失效
    热固性塑料粉末混合物

    公开(公告)号：US5399606A

    公开(公告)日：1995-03-21

    申请号：US138350

    申请日：1993-10-18

    申请人： Michael Konig ,  Achim Hansen ,  Arno Gardziella ,  Josef Suren

    发明人： Michael Konig ,  Achim Hansen ,  Arno Gardziella ,  Josef Suren

    IPC分类号： B24D3/28 ,  B24D3/34 ,  C08J5/14 ,  C08K5/01 ,  C08K5/02

    CPC分类号： B24D3/28 ,  B24D3/344

    摘要： A homogenous non-tacky thermosetting plastic powder mixture formed by mixing component A comprising a solid phenol novolac resin powder and a hardener containing a small amount of an oil-like substance liquid at room temperature with component B comprising a liquid resol, fillers and optionally additives which when containing an abrasive are useful for the production of filler-containing shaped elements or resin-bonded grinding elements.

    摘要翻译： 通过将包含固体酚醛清漆树脂粉末的组分A和在室温下含有少量油状物质的液体的固化剂与包含液体甲阶酚醛树脂，填料和任选添加剂的组分B混合而形成的均匀非粘性热固性塑料粉末混合物 当含有研磨剂时，其可用于生产含填料的成形元件或树脂粘合的研磨元件。