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公开(公告)号：US06724053B1
公开(公告)日：2004-04-20
申请号：US09511395
申请日：2000-02-23
IPC分类号： H01L2976
CPC分类号： H01L21/823878 , H01L21/26506 , H01L21/2658 , H01L21/28123 , H01L21/823481 , H01L29/1033 , H01L29/1041 , H01L29/7838
摘要： P-type metal-oxide semiconductor field effect transistor (PMOSFET) devices have a characteristic property known as threshold voltage. This threshold voltage may consist of separate threshold voltages associated with the main portion of the gate region of the device and with the sidewall corner of the device. Under some conditions, the threshold behavior in the sidewall corner region of the device may dominate the performance of the device, not necessarily in the manner intended by the designer of the device. A method of controlling threshold voltage behavior is described. In particular, ion implantation of nitrogen in the gate sidewall region of the device can provide such control. Devices made by this method are also described.
摘要翻译： P型金属氧化物半导体场效应晶体管（PMOSFET）器件具有被称为阈值电压的特性。 该阈值电压可以由与器件的栅极区域的主要部分和器件的侧壁角相关联的单独的阈值电压组成。 在某些情况下，设备的侧壁角区域中的阈值行为可能主导设备的性能，而不一定是设备设计者所期望的方式。 描述了一种控制阈值电压特性的方法。 特别地，器件的栅极侧壁区域中的氮的离子注入可以提供这种控制。 还描述了通过该方法制造的装置。
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2.发明授权Method and device for array threshold voltage control by trapped charge in trench isolation 失效用于沟槽隔离中捕获电荷的阵列阈值电压控制的方法和装置公开(公告)号：US06348394B1
公开(公告)日：2002-02-19
申请号：US09573375
申请日：2000-05-18
申请人： Jack A. Mandelman , Rama Divakaruni , Herbert Ho , Giuseppe La Rosa , Yujun Li , Jochen Beintner , Radhika Srinivasan
发明人： Jack A. Mandelman , Rama Divakaruni , Herbert Ho , Giuseppe La Rosa , Yujun Li , Jochen Beintner , Radhika Srinivasan
IPC分类号： H01L2176
CPC分类号： H01L21/76229 , H01L21/76224
摘要： A semiconductor device and method of manufacturing thereof are provided. A trench is formed in a semiconductor substrate. A thin oxide liner is preferably formed on surfaces of the trench. A nitride liner is formed in the trench. Charge is trapped in the nitride liner. In a preferred embodiment, the trench is filled with an oxide by an HDP process to increase the amount of charge trapped in the nitride liner. Preferably, the oxide fill is formed directly on the nitride liner.
摘要翻译： 提供半导体器件及其制造方法。 在半导体衬底中形成沟槽。 优选在沟槽的表面上形成薄的氧化物衬垫。 氮化物衬垫形成在沟槽中。 电荷被困在氮化物衬垫中。 在优选实施例中，沟槽通过HDP工艺填充氧化物以增加在氮化物衬垫中捕获的电荷量。 优选地，氧化物填充物直接形成在氮化物衬垫上。
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3.发明申请METHOD AND APPARATUS FOR DYNAMIC CHARACTERIZATION OF RELIABILITY WEAROUT MECHANISMS 失效用于动态表征可靠性磨损机制的方法和装置公开(公告)号：US20090167336A1
公开(公告)日：2009-07-02
申请号：US11968444
申请日：2008-01-02
IPC分类号： G01R31/02
CPC分类号： G01R31/2858 , G01R31/2856
摘要： A method and apparatus for dynamic characterization of reliability wearout mechanisms is disclosed. The system comprises an integrated circuit incorporating a device under test to be measured, structure for inputting a waveform to the device under test for a first predetermined time interval, structure for disabling the inputting of the waveform to the device under test, structure for measuring one or more fundamental parameters of the device under test after a second predetermined time interval, and structure for calculating an aging estimate of the device under test without the influence of recovery effect based on the one or more measured fundamental parameters. The time between stressing and measurement is precisely controlled, providing for repeatable experiments, and serves to minimize measurement error caused by recovery effects.
摘要翻译： 公开了用于动态表征可靠性损耗机制的方法和装置。 该系统包括结合被测器件的集成电路，用于以第一预定时间间隔向待测器件输入波形的结构，用于禁止向被测器件输入波形的结构，用于测量一个 或更多的基本参数，以及在不受基于一个或多个测量的基本参数的恢复效果的影响下计算被测设备的老化估计的结构。 压力和测量之间的时间被精确控制，提供可重复的实验，并且用于最小化由恢复效果引起的测量误差。
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4.发明授权Structure and method for thermally stressing or testing a semiconductor device 有权用于热应力或测试半导体器件的结构和方法公开(公告)号：US07375371B2
公开(公告)日：2008-05-20
申请号：US11307324
申请日：2006-02-01
CPC分类号： G01R31/2856
摘要： A structure is provided which includes at least one semiconductor device and a diffusion heater in a continuous active semiconductor area of a substrate. One or more semiconductor devices are provided in a first region of the active semiconductor area and a diffusion heater is disposed adjacent thereto which consists essentially of a semiconductor material included in the active semiconductor area. Conductive isolation between the first region and the diffusion heater is achieved through use of a separating gate. The separating gate overlies an intermediate region of the active semiconductor area between the first region and the diffusion heater and the separating gate is biasable to conductively isolate the first region from the diffusion heater.
摘要翻译： 提供了一种在衬底的连续有源半导体区域中包括至少一个半导体器件和扩散加热器的结构。 一个或多个半导体器件设置在有源半导体区域的第一区域中，并且扩散加热器邻近设置，其主要由包含在有源半导体区域中的半导体材料组成。 通过使用分离栅极实现第一区域和扩散加热器之间的导电隔离。 分离栅极覆盖在第一区域和扩散加热器之间的有源半导体区域的中间区域，并且分离栅极可偏置以将第一区域与扩散加热器导电隔离。
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5.发明授权Line monitoring of negative bias temperature instabilities by hole injection methods 失效通过空穴注入法线性监测负偏压温度不稳定性公开(公告)号：US06521469B1
公开(公告)日：2003-02-18
申请号：US09668987
申请日：2000-09-25
IPC分类号： H01L2166
CPC分类号： H01L22/14
摘要： A process for in-line testing of a metal-oxide-semiconductor field effect transistor (MOSFET) device for negative bias thermal instability (NBTI), which degrades the gate oxide of the MOSFET device. The process generally comprises four steps. First, a hole injection method is selected that produces approximately the same gate oxide degradation as the NBTI under test. Second, a correlation is established between the NBTI degradation and device shifts due to the selected hole injection degradation method. Third, an in-line procedure is developed based on the hole injection method, using the second step to relate the measured shift to NBTI. Finally, a NBTI specification is defined based on the hole injection method using the second step. The MOSFET device is preferably a p-type MOSFET device and the hole injection method is preferably a channel hot-carrier stress method.
摘要翻译： 用于负偏压热不稳定性（NBTI）的金属氧化物半导体场效应晶体管（MOSFET）器件的在线测试的过程，其降低MOSFET器件的栅极氧化物。 该方法通常包括四个步骤。 首先，选择产生与测试中的NBTI大致相同的栅极氧化物降解的空穴注入方法。 其次，由于所选择的空穴注入降解方法，在NBTI劣化和器件移位之间建立了相关性。 第三，基于空穴注入方法开发了一种在线程序，使用第二步将测量的移位与NBTI相关联。 最后，基于使用第二步骤的空穴注入方法来定义NBTI规范。 MOSFET器件优选为p型MOSFET器件，并且空穴注入法优选为沟道热载流子应力法。
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公开(公告)号：US20080112458A1
公开(公告)日：2008-05-15
申请号：US11559120
申请日：2006-11-13
IPC分类号： G01N25/20
CPC分类号： G01N25/18
摘要： A method comprises determining a poly-gate temperature for a given device and determining channel temperatures of monitor devices. The method further includes extrapolating channel temperatures of the monitor devices to obtain a channel temperature for the given device. The difference in temperature (ΔT value) is determined for the given device based on the poly-gate temperature and the channel temperature. A device comprises a heating device having a poly gate with at least one contact at each end thereof and a plurality of monitor device spaced at known distances from the heating device
摘要翻译： 一种方法包括确定给定装置的多栅极温度并确定监测装置的通道温度。 该方法还包括外推监测装置的通道温度以获得给定装置的通道温度。 基于多栅极温度和通道温度，为给定器件确定温度差（DeltaT值）。 一种装置包括加热装置，该加热装置具有在其两端具有至少一个触点的多晶硅栅极以及与加热装置隔开已知距离的多个监测装置
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7.发明申请STRUCTURE AND METHOD FOR THERMALLY STRESSING OR TESTING A SEMICONDUCTOR DEVICE 有权用于热应力或测试半导体器件的结构和方法公开(公告)号：US20070235769A1
公开(公告)日：2007-10-11
申请号：US11307324
申请日：2006-02-01
申请人： Giuseppe La Rosa , Kevin Kolvenbach , John Massey , Ping-Chuan Wang , Kai Xiu
发明人： Giuseppe La Rosa , Kevin Kolvenbach , John Massey , Ping-Chuan Wang , Kai Xiu
IPC分类号： H01L29/76
CPC分类号： G01R31/2856
摘要： A structure is provided which includes at least one semiconductor device and a diffusion heater in a continuous active semiconductor area of a substrate. One or more semiconductor devices are provided in a first region of the active semiconductor area and a diffusion heater is disposed adjacent thereto which consists essentially of a semiconductor material included in the active semiconductor area. Conductive isolation between the first region and the diffusion heater is achieved through use of a separating gate. The separating gate overlies an intermediate region of the active semiconductor area between the first region and the diffusion heater and the separating gate is biasable to conductively isolate the first region from the diffusion heater.
摘要翻译： 提供了一种在衬底的连续有源半导体区域中包括至少一个半导体器件和扩散加热器的结构。 一个或多个半导体器件设置在有源半导体区域的第一区域中，并且扩散加热器邻近设置，其主要由包含在有源半导体区域中的半导体材料组成。 通过使用分离栅极实现第一区域和扩散加热器之间的导电隔离。 分离栅极覆盖在第一区域和扩散加热器之间的有源半导体区域的中间区域，并且分离栅极可偏置以将第一区域与扩散加热器导电隔离。
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公开(公告)号：US07023041B2
公开(公告)日：2006-04-04
申请号：US10341187
申请日：2003-01-13
申请人： Giuseppe La Rosa , Thomas W. Dyer , Oleg Gluschenkov , Jack A. Mandelman , Carl J. Radens , Alvin W. Strong
发明人： Giuseppe La Rosa , Thomas W. Dyer , Oleg Gluschenkov , Jack A. Mandelman , Carl J. Radens , Alvin W. Strong
IPC分类号： H01L27/108 , H01L29/76
CPC分类号： H01L29/945 , H01L27/10861 , H01L27/10894 , H01L29/66181
摘要： A versatile structure is formed, based on a deep trench, vertical transistor DRAM cell, that forms a conductive extension of the trench electrode in an elongated trench that contacts the lower electrode of the vertical transistor. The structure can be used as a capacitor, as a discrete transistor as a single-transistor amplifier or as a building block for more complex circuits.
摘要翻译： 基于深沟槽垂直晶体管DRAM单元形成通用结构，其在与垂直晶体管的下电极接触的细长沟槽中形成沟槽电极的导电延伸。 该结构可以用作电容器，作为单晶体管放大器的分立晶体管或作为更复杂电路的构建块。
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公开(公告)号：US07805274B2
公开(公告)日：2010-09-28
申请号：US11559120
申请日：2006-11-13
IPC分类号： G01N25/20
CPC分类号： G01N25/18
摘要： A method comprises determining a poly-gate temperature for a given device and determining channel temperatures of monitor devices. The method further includes extrapolating channel temperatures of the monitor devices to obtain a channel temperature for the given device. The difference in temperature (ΔT value) is determined for the given device based on the poly-gate temperature and the channel temperature. A device comprises a heating device having a poly gate with at least one contact at each end thereof and a plurality of monitor device spaced at known distances from the heating device
摘要翻译： 一种方法包括确定给定装置的多栅极温度并确定监测装置的通道温度。 该方法还包括外推监视器装置的通道温度以获得给定装置的通道温度。 基于多栅极温度和通道温度，为给定器件确定温度差（＆Dgr; T值）。 一种装置包括加热装置，该加热装置具有在其两端具有至少一个触点的多晶硅栅极以及与加热装置隔开已知距离的多个监测装置
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10.发明授权Method and apparatus for dynamic characterization of reliability wearout mechanisms 失效用于动态表征可靠性损耗机制的方法和装置公开(公告)号：US07710141B2
公开(公告)日：2010-05-04
申请号：US11968444
申请日：2008-01-02
IPC分类号： G01R31/26
CPC分类号： G01R31/2858 , G01R31/2856
摘要： A method and apparatus for dynamic characterization of reliability wearout mechanisms is disclosed. The system comprises an integrated circuit incorporating a device under test to be measured, structure for inputting a waveform to the device under test for a first predetermined time interval, structure for disabling the inputting of the waveform to the device under test, structure for measuring one or more fundamental parameters of the device under test after a second predetermined time interval, and structure for calculating an aging estimate of the device under test without the influence of recovery effect based on the one or more measured fundamental parameters. The time between stressing and measurement is precisely controlled, providing for repeatable experiments, and serves to minimize measurement error caused by recovery effects.
摘要翻译： 公开了用于动态表征可靠性损耗机制的方法和装置。 该系统包括结合被测器件的集成电路，用于以第一预定时间间隔向待测器件输入波形的结构，用于禁止将波形输入到被测器件的结构，用于测量一个 或更多的基本参数，以及在不受基于一个或多个测量的基本参数的恢复效果的影响下计算被测设备的老化估计的结构。 压力和测量之间的时间被精确控制，提供可重复的实验，并且用于最小化由恢复效果引起的测量误差。
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