公开(公告)号：US20070024998A1

公开(公告)日：2007-02-01

申请号：US11311919

申请日：2005-12-17

申请人： Richard Bills ,  Neil Judell ,  Klaus Freischland ,  James McNiven

发明人： Richard Bills ,  Neil Judell ,  Klaus Freischland ,  James McNiven

IPC分类号： G02B5/08

CPC分类号： G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.

摘要翻译： 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统在前四分之一区域中具有用于收集从工件表面反射的光的光通道组件，以及用于收集从表面散射的光的前收集器和翼收集器，以大大提高测量能力 系统。 光通道组件具有可切换的边缘排除掩模和用于改进反射光检测的反射光检测系统。

公开(公告)号：US20060256326A1

公开(公告)日：2006-11-16

申请号：US11311943

申请日：2005-12-17

申请人： Richard Bills ,  Neil Judell ,  Timothy Tiemeyer ,  James McNiven

发明人： Richard Bills ,  Neil Judell ,  Timothy Tiemeyer ,  James McNiven

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. Certain of these components, most notably the beam source subsystem, the beam scanning subsystem and the optical collection and detection subsystem are modular for ready field replacement and/or maintenance. The optical collection and detection system features wing collectors in the front quartersphere and back collectors in the back quartersphere for collected light scattered from the surface of the workpiece. This can greatly improve the measurement capabilities of the system. Also included is a method for detecting asymmetric defects using the wing collectors and back collectors.

公开(公告)号：US20060186362A1

公开(公告)日：2006-08-24

申请号：US11311904

申请日：2005-12-17

申请人： Richard Bills ,  James McNiven

发明人： Richard Bills ,  James McNiven

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features masking positioned in the collection and detection subsystem arranged to selectively prevent a portion of scattered light from passing through. Also included is a scatter absorbing system having a series of scatter absorbing elements for minimizing unrelated to the scatter associated with a desired location on the surface.

摘要翻译： 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有位于收集和检测子系统中的掩蔽，该收集和检测子系统布置成选择性地防止一部分散射光通过。 还包括具有一系列散射吸收元件的散射吸收系统，用于最小化与与表面上的期望位置相关联的散射无关。

公开(公告)号：US20060020826A1

公开(公告)日：2006-01-26

申请号：US11141689

申请日：2005-06-01

申请人： Donald Felton ,  James McNiven

发明人： Donald Felton ,  James McNiven

IPC分类号： G06F12/14

CPC分类号： G06F21/84 ,  G06F2221/2105

摘要： A data processing apparatus and a method of indicating operation of a data processor within a secure domain. The apparatus comprising a display for displaying data; a processor operable in a secure domain, said processor when operating in said secure domain having access to a user specific image; wherein said processor is operable to indicate operation within said secure domain by displaying said user specific image on at least a portion of said display when operating within said secure domain.

摘要翻译： 一种数据处理装置和指示安全域内的数据处理器的操作的方法。 该装置包括用于显示数据的显示器; 处理器，其可操作在安全域中，所述处理器在所述安全域中操作时可访问用户特定图像; 其中所述处理器可操作以通过在所述安全域内操作时在所述显示器的至少一部分上显示所述用户特定图像来指示所述安全域内的操作。