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1.发明授权公开(公告)号：US06569701B2
公开(公告)日：2003-05-27
申请号：US10002725
申请日：2001-10-25
IPC分类号： H01L2100
CPC分类号： B81C1/00357 , B81C2201/019 , B81C2203/0109
摘要： A method is presented for fabricating an electrically isolated MEMS device having a conductive outer MEMS element, and an inner movable MEMS element spaced apart from the conductive outer MEMS element. The inner element includes a nonconductive base having a plurality of conductive structures extending therefrom. The conductive components are formed by plating a conductive material into a pre-formed mold which defines the shape of the conductor.
摘要翻译： 提出了一种用于制造具有导电外部MEMS元件的电隔离MEMS器件的方法，以及与导电外部MEMS元件间隔开的内部可移动MEMS元件。 内部元件包括具有从其延伸的多个导电结构的非导电基底。 导电部件通过将导电材料镀覆到限定导体形状的预成型模具中而形成。
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2.发明授权Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate 失效使用预图案化衬底制造微机电系统（MEMS）器件的方法公开(公告)号：US06815243B2
公开(公告)日：2004-11-09
申请号：US09843563
申请日：2001-04-26
IPC分类号： H01L2100
CPC分类号： B81C1/00484 , B81B2203/0315 , B81C2201/019 , B81C2203/0109 , H01G5/40
摘要： A method for fabricating MEMS structure includes etching a recess in an upper surface of a substrate that is bonded to a wafer that ultimately forms the MEMS structure. Accordingly, once the etching processes of the wafer are completed, the recess facilitates the release of an internal movable structure within the fabricated MEMS structure without the use of a separate sacrificial material.
摘要翻译： 一种用于制造MEMS结构的方法包括蚀刻衬底的上表面中的凹陷，所述凹陷结合到最终形成MEMS结构的晶片上。 因此，一旦晶片的蚀刻工艺完成，凹陷便于在制造的MEMS结构内释放内部可移动结构，而不使用单独的牺牲材料。
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公开(公告)号：US06761829B2
公开(公告)日：2004-07-13
申请号：US09843545
申请日：2001-04-26
IPC分类号： C23F100
CPC分类号： B81C1/00484 , B81B2201/0235 , B81B2203/0315 , B81C1/00626 , B81C2201/019 , B81C2203/0109 , H01G5/40
摘要： A method for fabricating an electrically isolated MEMS device having an outer stationary MEMS element and an inner movable MEMS element is provided that does not use a sacrificial layer. Rather, a pair of spacers are defined on the outer portions of the upper surface of a conductive wafer, and an insulating material is deposited thereon. The spacers are attached to a substrate to define an internal void therein. The wafer is then patterned to form the outer MEMS element as well as a conductive member for the inner MEMS element, separated from the outer MEMS element by a gap. A portion of the insulating layer that is disposed in the gap is then removed, thereby releasing the inner MEMS element from the stationary MEMS element.
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公开(公告)号：US07262522B2
公开(公告)日：2007-08-28
申请号：US10675537
申请日：2003-09-30
申请人： Richard D. Harris , Patrick C. Herbert , Michael J. Knieser , Robert J. Kretschmann , Mark A. Lucak , Robert J. Pond , Louis F. Szabo , Frederick M. Discenzo
发明人： Richard D. Harris , Patrick C. Herbert , Michael J. Knieser , Robert J. Kretschmann , Mark A. Lucak , Robert J. Pond , Louis F. Szabo , Frederick M. Discenzo
CPC分类号： H02K47/00 , H02K99/10 , Y10T307/826
摘要： A microelectromechanical system (MEMS) device is used to transfer power from a source generator to a power generator that delivers electrical power to a load, while maintaining electrical isolation between the source generator and power generator for size critical applications where transformers or coupling capacitors would not be practical, but where electrical isolation is desired.
摘要翻译： 微机电系统（MEMS）装置用于将功率从源发生器传递到向负载提供电力的发电机，同时在尺寸关键应用中保持源发电机和发电机之间的电隔离，其中变压器或耦合电容器不会 实用，但需要电隔离。
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公开(公告)号：US07018550B2
公开(公告)日：2006-03-28
申请号：US10862593
申请日：2004-06-07
IPC分类号： C23F1/00
CPC分类号： B81C1/00484 , B81B2201/0235 , B81B2203/0315 , B81C1/00626 , B81C2201/019 , B81C2203/0109 , H01G5/40
摘要： A method for fabricating an electrically isolated MEMS device having an outer stationary MEMS element and an inner movable MEMS element is provided that does not use a sacrificial layer. Rather, a pair of spacers are defined on the outer portions of the upper surface of a conductive wafer, and an insulating material is deposited thereon. The spacers are attached to a substrate to define an internal void therein. The wafer is then patterned to form the outer MEMS element as well as a conductive member for the inner MEMS element, separated from the outer MEMS element by a gap. A portion of the insulating layer that is disposed in the gap is then removed, thereby releasing the inner MEMS element from the stationary MEMS element.
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6.发明授权Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap 有权用于制造并入晶片级盖的隔离微机电系统（MEMS）器件的方法公开(公告)号：US06768628B2
公开(公告)日：2004-07-27
申请号：US09842975
申请日：2001-04-26
IPC分类号： H01G500
CPC分类号： B81B7/007 , B81B2207/097 , B81C1/00357 , B81C2201/019 , B81C2203/0109
摘要： A MEMS structure is provided having a cap that encapsulates and protects the fragile components of the device, while having an electrical trace embedded in a nonconductive substrate. The electrical trace includes a first terminal end that is exposed to the peripheral region of the device, and a second end that is connected to the MEMS structure to facilitate operation of the device.
摘要翻译： 提供了一种MEMS结构，其具有封装并保护器件的脆弱部件的帽，同时具有嵌入非导电衬底中的电迹线。 电迹线包括暴露于器件的周边区域的第一端子，以及连接到MEMS结构以便于器件操作的第二端。
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公开(公告)号：US07093498B2
公开(公告)日：2006-08-22
申请号：US10675642
申请日：2003-09-30
申请人： Patrick C. Herbert , Richard D. Harris , Frederick M. Discenzo , Michael J. Knieser , Robert J. Kretschmann , Mark A. Lucak , Robert J. Pond , Louis F. Szabo
发明人： Patrick C. Herbert , Richard D. Harris , Frederick M. Discenzo , Michael J. Knieser , Robert J. Kretschmann , Mark A. Lucak , Robert J. Pond , Louis F. Szabo
IPC分类号： G01B7/16
摘要： A microelectromechanical system (MEMS) strain gauge includes at least one flexible arm that can be caused to oscillate. Transverse strain on the arm changes the resonant frequency of the arm. A detector communicating with the flexible arm may detect the frequency of oscillation to provide, an indication of the transverse strain of the substrate.
摘要翻译： 微机电系统（MEMS）应变仪包括至少一个能够振荡的柔性臂。 臂上的横向应变改变了臂的共振频率。 与柔性臂通信的检测器可以检测振荡的频率，以提供衬底的横向应变的指示。
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公开(公告)号：US06975193B2
公开(公告)日：2005-12-13
申请号：US10397096
申请日：2003-03-25
申请人： Michael J. Knieser , Richard D. Harris , Robert J. Pond , Louis F. Szabo , Frederick M. Discenzo , Patrick C. Herbert , Robert J. Kretschmann , Mark A. Lucak
发明人： Michael J. Knieser , Richard D. Harris , Robert J. Pond , Louis F. Szabo , Frederick M. Discenzo , Patrick C. Herbert , Robert J. Kretschmann , Mark A. Lucak
CPC分类号： H01H59/0009
摘要： Microelectromechanical (MEMS) switches are used to implement a flying capacitor circuit transferring of electrical power while preserving electrical isolation for size critical applications where transformers or coupling capacitors would not be practical. In one embodiment, the invention may be used to provide input circuits that present a programmable input impedance. The circuit may be modified to provide for power regulation.
摘要翻译： 微机电（MEMS）开关用于实现电力传输的飞跨电容器电路，同时保持用于尺寸关键应用的电隔离，其中变压器或耦合电容器不实用。 在一个实施例中，本发明可以用于提供呈现可编程输入阻抗的输入电路。 可以修改电路以提供功率调节。
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9.发明授权Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void 有权使用内部空隙制造隔离的微机电系统（MEMS）装置的方法公开(公告)号：US07387737B2
公开(公告)日：2008-06-17
申请号：US11299151
申请日：2005-12-09
IPC分类号： C23F1/22
CPC分类号： B81C1/00484 , B81B2201/0235 , B81B2203/0315 , B81C1/00626 , B81C2201/019 , B81C2203/0109 , H01G5/40
摘要： A method for fabricating an electrically isolated MEMS device having an outer stationary MEMS element and an inner movable MEMS element is provided that does not use a sacrificial layer. Rather, a pair of spacers are defined on the outer portions of the upper surface of a conductive wafer, and an insulating material is deposited thereon. The spacers are attached to a substrate to define an internal void therein. The wafer is then patterned to form the outer MEMS element as well as a conductive member for the inner MEMS element, separated from the outer MEMS element by a gap. A portion of the insulating layer that is disposed in the gap is then removed, thereby releasing the inner MEMS element from the stationary MEMS element.
摘要翻译： 提供了一种用于制造具有外部固定MEMS元件和内部可移动MEMS元件的电隔离MEMS器件的方法，其不使用牺牲层。 相反，在导电晶片的上表面的外部部分限定一对间隔物，并且在其上沉积绝缘材料。 间隔件附接到基底以在其中限定内部空隙。 然后将晶片图案化以形成外部MEMS元件以及用于内部MEMS元件的导电构件，其通过间隙与外部MEMS元件分离。 然后去除设置在间隙中的绝缘层的一部分，从而将内部MEMS元件从固定MEMS元件释放。
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10.发明授权Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques 有权使用表面制造技术构建隔离微机电系统（MEMS）器件的方法公开(公告)号：US06756310B2
公开(公告)日：2004-06-29
申请号：US09963936
申请日：2001-09-26
IPC分类号： H01L2100
CPC分类号： B81C1/00357 , B81C2201/019 , B81C2203/0109
摘要： A method for fabricating an electrically isolated MEMS device is provided that uses surface fabrication techniques to form a conductive stationary MEMS element, and a movable MEMS element spaced apart from the conductive stationary MEMS element. The movable element includes a nonconductive base which provides for electrical isolation between a plurality of conductive members extending from the base. Modifications to the basic process permit the incorporation of a wafer-level cap which provides mechanical protection to the movable portions of the device.
摘要翻译： 提供了一种用于制造电隔离的MEMS器件的方法，其使用表面制造技术来形成导电固定MEMS元件，以及与导电固定MEMS元件间隔开的可移动MEMS元件。 可移动元件包括非导电基底，其提供从基部延伸的多个导电构件之间的电绝缘。 对基本工艺的修改允许结合提供机械保护的晶片级盖，以使该装置的可移动部分。
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