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    Device and method of reducing ESD damage in thin film read heads which enables measurement of gap resistances and method of making
    1.
    发明授权
    Device and method of reducing ESD damage in thin film read heads which enables measurement of gap resistances and method of making 失效
    减薄薄膜读取头中的ESD损伤的装置和方法，能够测量间隙电阻和制作方法

    公开(公告)号：US06678127B2

    公开(公告)日：2004-01-13

    申请号：US09753804

    申请日：2001-01-02

    申请人： Richard Hsiao ,  James D. Jarratt ,  Emo Hilbrand Klaassen ,  Ian Robson McFadyen ,  Timothy J. Moran

    发明人： Richard Hsiao ,  James D. Jarratt ,  Emo Hilbrand Klaassen ,  Ian Robson McFadyen ,  Timothy J. Moran

    IPC分类号： G11B540

    CPC分类号： B82Y10/00 ,  G11B5/33 ,  G11B5/3967 ,  G11B5/40 ,  G11B5/455 ,  G11B33/10 ,  G11B2005/0013 ,  Y10T29/49032 ,  Y10T29/49036 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49071 ,  Y10T29/49073 ,  Y10T29/49078

    摘要： A first read gap layer has a resistance RG1 between a first shield layer and one of the first and second lead layers of a read head and the second read gap layer has a resistance RG2 between a second shield layer and said one of the first and second lead layers of the read head. A connection is provided via a plurality of resistors between a first node and each of the first and second shield layers wherein the plurality of resistors includes at least first and second resistors RS1 and RS2 and the first node is connected to said one of the first and second lead layers. A second node is located between the first and second resistors RS1 and RS2. An operational amplifier has first and second inputs connected to the first and second nodes respectively so as to be across the first resistor RS1 and has an output connected to the first node for maintaining the first and second nodes at a common voltage potential. In a first embodiment the first and second shield layers are shorted together. A test instrument is then employed for determining the combined parallel resistance of the resistors RS1 and RS2 by having a first side of the test instrument connected to the first node and the second side connected to each of the first and second shield layers. In the second embodiment a third resistor RS3 is connected between the second node and one of the shield layers, such as the second shield layer. The test instrument can determine the resistances of the first and second gap layers separately by being connected between the first node and the first shield layer for the resistance of the first gap layer or between the first node and the second shield layer for the resistance of the second gap layer.

    摘要翻译： 第一读取间隙层在第一屏蔽层和读取头的第一和第二引线层中的一个之间具有电阻RG1，并且第二读取间隙层在第二屏蔽层和第一和第二引线之间的电阻RG2 读头的引导层。 通过第一节点和第一和第二屏蔽层中的每一个之间的多个电阻器提供连接，其中多个电阻器至少包括第一和第二电阻器RS1和RS2，并且第一节点连接到第一和第二屏蔽层中的所述第一和第二屏蔽层 第二铅层。 第二节点位于第一和第二电阻器RS1和RS2之间。 运算放大器具有分别连接到第一和第二节点的第一和第二输入，以跨过第一电阻器RS1并且具有连接到第一节点的输出，用于将第一和第二节点维持在共同的电压电位。 在第一实施例中，第一和第二屏蔽层被短路在一起。 然后通过使测试仪器的第一侧连接到第一节点并且第二侧连接到第一和第二屏蔽层中的每一个，然后采用测试仪器来确定电阻器RS1和RS2的组合并联电阻。 在第二实施例中，第三电阻器RS3连接在第二节点和其中一个屏蔽层之间，例如第二屏蔽层。 测试仪器可以通过连接在第一节点和第一屏蔽层之间来分别确定第一和第二间隙层的电阻，用于第一间隙层的电阻或第一节点和第二屏蔽层之间的电阻， 第二间隙层。

    Integrated 3D limiters for microactuators
    4.
    发明授权
    Integrated 3D limiters for microactuators 失效
    用于微型制动器的集成3D限制器

    公开(公告)号：US06195227B1

    公开(公告)日：2001-02-27

    申请号：US09000554

    申请日：1997-12-30

    申请人： Long-Sheng Fan ,  Toshiki Hirano ,  Francis Chee-Shuen Lee ,  Ian Robson McFadyen

    发明人： Long-Sheng Fan ,  Toshiki Hirano ,  Francis Chee-Shuen Lee ,  Ian Robson McFadyen

    IPC分类号： G11B548

    CPC分类号： G11B5/5552

    摘要： A rotary microactuator includes a stationary electrode formed on a substrate, a movable electrode in proximity to the stationary electrode, a flexure mechanically connecting the stationary electrode to the movable electrode, and a plurality of limiters anchored to the substrate. Each limiter has an in-plane limiter portion and an out-of-plane limiter portion. The in-plane limiter portion limits movement of the movable electrode to a predetermined in-plane distance in a direction parallel to a surface of the substrate. The out-of-plane limiter portion limits movement of the movement of the movable electrode to a predetermined out-of-plane distance.

    摘要翻译： 旋转微型致动器包括形成在基板上的固定电极，靠近固定电极的可动电极，将固定电极机械地连接到可动电极的挠曲件和锚定到基板的多个限制器。 每个限制器具有面内限制器部分和面外限制器部分。 平面内限制部分将可动电极的移动限制在平行于衬底表面的方向上的预定面内距离。 面外限制部分将可动电极的运动的移动限制在预定的平面外距离。

    Perpendicular magnetic recording head built using an air-bearing surface damascene process
    5.
    发明授权
    Perpendicular magnetic recording head built using an air-bearing surface damascene process 有权
    使用空气轴承表面镶嵌工艺制造的垂直磁记录头

    公开(公告)号：US07271982B2

    公开(公告)日：2007-09-18

    申请号：US10778265

    申请日：2004-02-13

    申请人： Scott Arthur MacDonald ,  Ian Robson McFadyen ,  Neil Leslie Robertson

    发明人： Scott Arthur MacDonald ,  Ian Robson McFadyen ,  Neil Leslie Robertson

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3169

    摘要： A method for forming a perpendicular magnetic recording head using an air-bearing surface damascene process and perpendicular magnetic recording head formed thereby is disclosed. The perpendicular head is formed by depositing a pseudo trailing shield layer over a pole layer and selectively etching the pseudo trailing shield layer to a depth equal to a desired trailing shield throat height. Then, a magnetic material is deposited in the resulting void.

    摘要翻译： 公开了一种使用空气轴承表面镶嵌工艺形成垂直磁记录头的方法和由此形成的垂直磁记录头。 通过在极层上沉积伪尾部屏蔽层并选择性地将伪尾随屏蔽层选择性地蚀刻到等于期望的尾部屏蔽喉部高度的深度来形成垂直头。 然后，在所得到的空隙中沉积磁性材料。

    Method of fabrication for tape medium read head with unitary formation of multiple elements
    6.
    发明授权
    Method of fabrication for tape medium read head with unitary formation of multiple elements 失效
    用于带状介质读取头的制造方法，其具有多个元件的整体形成

    公开(公告)号：US07591064B2

    公开(公告)日：2009-09-22

    申请号：US11186138

    申请日：2005-07-20

    申请人： Ian Robson McFadyen

    发明人： Ian Robson McFadyen

    IPC分类号： G11B5/29

    CPC分类号： G11B5/3163 ,  G11B5/3173 ,  G11B5/3948 ,  Y10T29/49032 ,  Y10T29/49037 ,  Y10T29/49041 ,  Y10T29/49048 ,  Y10T29/49053 ,  Y10T29/49147 ,  Y10T29/49169

    摘要： A method is presented for fabrication of a tape medium read head having a unitary formation of multiple elements for reading multi-track data from a magnetic tape. The method includes providing a continuous substrate layer, and forming a sensor material layer on the continuous substrate layer. Photoresist material is deposited on the sensor material layer, and is patterned to form masks which provide protected areas and exposed areas of the sensor material layer. Exposed areas of the sensor material layer are shaped to form sensors from the protected areas of the sensor material layer. Electrical lead materials are deposited between and adjacent to the sensors, and the masks are removed.

    摘要翻译： 提出了一种用于制造具有用于从磁带读取多轨迹数据的多个元件的整体形成的带式介质读取头的方法。 该方法包括提供连续的基底层，并在连续的基底层上形成传感器材料层。 光刻胶材料沉积在传感器材料层上，并被图案化以形成提供传感器材料层的保护区域和暴露区域的掩模。 传感器材料层的暴露区域成形为从传感器材料层的保护区域形成传感器。 电导线材料沉积在传感器之间并与传感器相邻，并且去除掩模。

    Notched trailing shield for perpendicular write head
    7.
    发明授权
    Notched trailing shield for perpendicular write head 有权
    用于垂直写头的缺口拖尾屏蔽

    公开(公告)号：US07296337B2

    公开(公告)日：2007-11-20

    申请号：US10853805

    申请日：2004-05-25

    申请人： Ian Robson McFadyen

    发明人： Ian Robson McFadyen

    IPC分类号： G11B5/127 ,  H04R31/00

    CPC分类号： G11B5/1278 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： During fabrication of a perpendicular write head in a wafer, at least two sides of a write pole are defined (e.g. by ion milling) while a third side of the write pole is protected by a masking material. At this stage, a material that is to be located in the write gap is already present between the write pole and the masking material. After definition of the write pole surfaces, a layer of dielectric material is deposited. During this deposition, the masking material is still present. Thereafter, the masking material (and any dielectric material thereon) is removed, to form a hole in the dielectric material. Next, a trailing shield is formed in the structure, so that at least one portion of the trailing shield is located in the hole, and another portion of the trailing shield is located over the dielectric material, in an area adjacent to the hole. Note that the gap material is now sandwiched between the portion of the trailing shield in the hole, and the write pole.

    摘要翻译： 在制造晶片中的垂直写头时，写极的至少两侧被限定（例如通过离子铣削），而写极的第三侧由掩模材料保护。 在该阶段，位于写入间隙中的材料已经存在于写入极和掩模材料之间。 在写入磁极表面的定义之后，沉积介电材料层。 在该沉积期间，掩模材料仍然存在。 此后，去除掩模材料（及其上的任何介电材料），以在电介质材料中形成孔。 接下来，在该结构中形成尾部屏蔽，使得后屏蔽件的至少一部分位于孔中，并且后屏蔽件的另一部分位于电介质材料上方，邻近该孔。 注意，间隙材料现在夹在孔中的后屏蔽的部分和写极之间。

    Flat E-yoke for cusp write head
    8.
    发明授权
    Flat E-yoke for cusp write head 有权
    平头E形磁轭用于尖头写头

    公开(公告)号：US08514518B2

    公开(公告)日：2013-08-20

    申请号：US12114694

    申请日：2008-05-02

    申请人： Ian Robson McFadyen ,  Petrus Antonius Van Der Heijden

    发明人： Ian Robson McFadyen ,  Petrus Antonius Van Der Heijden

    IPC分类号： G11B5/10 ,  G11B5/31

    CPC分类号： G11B5/3163 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/313 ,  G11B5/3146 ,  G11B5/315

    摘要： A magnetic write pole structure that is configured to greatly simplify the manufacture of a perpendicular magnetic write head. The write head has a magnetic yoke that is oriented along a plane that is perpendicular to the direction of the data track. This allows the entire yoke to be formed in a single electroplating step, rather than being built up in several plated layers. The yoke can also be formed with magnetic side shields, or with a trailing or wrap around shield, which can be integral with the rest of the yoke and can be advantageously formed in the same, single electroplating step.

    摘要翻译： 一种磁性写入磁极结构，其被配置为极大地简化垂直磁性写入头的制造。 写头具有沿着垂直于数据轨道的方向的平面定向的磁轭。 这允许整个磁轭在单个电镀步骤中形成，而不是在几个电镀层中形成。 磁轭还可以形成有磁性侧屏蔽件，或者具有尾部或环绕屏蔽件，其可以与磁轭的其余部分成一体，并且可以有利地形成在相同的单个电镀步骤中。

    Method of forming a read sensor using a lift-off mask having a hardmask layer and a release layer
    9.
    发明授权
    Method of forming a read sensor using a lift-off mask having a hardmask layer and a release layer 失效
    使用具有硬掩模层和剥离层的剥离掩模形成读取传感器的方法

    公开(公告)号：US06861177B2

    公开(公告)日：2005-03-01

    申请号：US10080303

    申请日：2002-02-21

    申请人： Mustafa Pinarbasi ,  Ian Robson McFadyen ,  Alfred Floyd Renaldo ,  Randall George Simmons ,  Douglas Johnson Werner

    发明人： Mustafa Pinarbasi ,  Ian Robson McFadyen ,  Alfred Floyd Renaldo ,  Randall George Simmons ,  Douglas Johnson Werner

    IPC分类号： G11B5/31 ,  G03F9/00 ,  H01L21/302 ,  H01L21/461

    CPC分类号： B82Y10/00 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  G11B2005/3996

    摘要： A method of forming a read sensor that has a very narrow track width is disclosed. The method involves forming a thin lift-off mask over a central region of a sensor layer, which is subsequently ion-milled and deposited with hard bias and lead layers. The thin lift-off mask is made by forming a release layer over the sensor layer; forming a hardmask layer over the release layer; forming a photoresist layer over the hardmask layer; imaging and developing the photoresist layer such that end portions of the photoresist layer are removed and a central portion of the photoresist layer remains; reactive ion etching (RIE) the hardmask layer such that end portions of the hardmask layer are removed and a central portion of the hardmask layer remains; stripping the central portion of the photoresist layer; and etching the release layer such that end portions of the release layer are removed and a central portion of the release layer remains. The hardmask layer may be made from a highly-etch-resistant material, such as silicon, titanium, or tantalum. The release layer may be made from, e.g., polydimethylglutarimide (PMGI) which may be RIE'd, or a metal (such as AlCu) which may be wet-etched. Using this method, shadowing can be minimized and undercut size can be sufficiently controlled for defining narrow track widths.

    摘要翻译： 公开了一种形成具有非常窄的轨道宽度的读取传感器的方法。 该方法包括在传感器层的中心区域上形成薄的剥离掩模，其随后被离子研磨并用硬偏压和引线层沉积。 薄剥离掩模通过在传感器层上形成释放层而制成; 在释放层上形成硬掩模层; 在所述硬掩模层上形成光致抗蚀剂层; 成像和显影光致抗蚀剂层，使得光致抗蚀剂层的端部被去除并且光致抗蚀剂层的中心部分保留; 反射离子蚀刻（RIE）硬掩模层，使得硬掩模层的端部被去除并且硬掩模层的中心部分保留; 剥离光致抗蚀剂层的中心部分; 并且去除脱模层，使得脱模层的端部被去除并且脱模层的中心部分残留。 硬掩模层可以由高耐蚀刻材料制成，例如硅，钛或钽。 剥离层可以由例如可以被RIE'd的聚二甲基戊二酰亚胺（PMGI）或可以被湿蚀刻的金属（例如AlCu）制成。 使用这种方法，阴影可以被最小化，并且可以充分地控制底切尺寸来定义窄轨道宽度。

    FLAT E-YOKE FOR CUSP WRITE HEAD
    10.
    发明申请
    FLAT E-YOKE FOR CUSP WRITE HEAD 有权
    用于CUSP写头的平板电子琴

    公开(公告)号：US20090273862A1

    公开(公告)日：2009-11-05

    申请号：US12114694

    申请日：2008-05-02

    申请人： Ian Robson McFadyen ,  Petrus Antonius Van Der Heijden

    发明人： Ian Robson McFadyen ,  Petrus Antonius Van Der Heijden

    IPC分类号： G11B5/33

    CPC分类号： G11B5/3163 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/313 ,  G11B5/3146 ,  G11B5/315

    摘要： A magnetic write pole structure that is configured to greatly simplify the manufacture of a perpendicular magnetic write head. The write head has a magnetic yoke that is oriented along a plane that is perpendicular to the direction of the data track. This allows the entire yoke to be formed in a single electroplating step, rather than being built up in several plated layers. The yoke can also be formed with magnetic side shields, or with a trailing or wrap around shield, which can be integral with the rest of the yoke and can be advantageously formed in the same, single electroplating step.

    摘要翻译： 一种磁性写入磁极结构，其被配置为极大地简化垂直磁性写入头的制造。 写头具有沿着垂直于数据轨道的方向的平面定向的磁轭。 这允许整个磁轭在单个电镀步骤中形成，而不是在几个电镀层中形成。 磁轭还可以形成有磁性侧屏蔽件，或者具有尾部或环绕屏蔽件，其可以与磁轭的其余部分成一体，并且可以有利地形成在相同的单个电镀步骤中。