Alignment correction system and method of use
    1.
    发明授权
    Alignment correction system and method of use 失效
    对准校正系统及其使用方法

    公开(公告)号:US07592817B2

    公开(公告)日:2009-09-22

    申请号:US11778679

    申请日:2007-07-17

    IPC分类号: G01R31/08 G01R31/02 G01R31/26

    CPC分类号: G01B7/30 G05B15/02 H01L21/68

    摘要: A system and method for correcting alignment of a product on a tool and, more particularly, to a system and method for correcting alignment of a wafer on a chuck of a tool. The system is a tool comprising at least one contact near a circumference of the tool and a grounded contact proximate to the at least one contact. The method comprises measuring current on each branch of a circuit and calculating an angle of a wafer based on a difference in the current on each branch of the circuit.

    摘要翻译: 一种用于校正工具上的产品对准的系统和方法,更具体地,涉及一种用于校正工具的卡盘上的晶片对准的系统和方法。 该系统是一种工具,其包括在工具的圆周附近的至少一个触点和靠近该至少一个触点的接地触点。 该方法包括测量电路的每个分支上的电流,并且基于电路的每个分支上的电流差来计算晶片的角度。

    Alignment Correction System and Method of Use
    4.
    发明申请
    Alignment Correction System and Method of Use 失效
    对准校正系统及其使用方法

    公开(公告)号:US20090021236A1

    公开(公告)日:2009-01-22

    申请号:US11778679

    申请日:2007-07-17

    IPC分类号: G01R19/00 G01C1/00

    CPC分类号: G01B7/30 G05B15/02 H01L21/68

    摘要: A system and method for correcting alignment of a product on a tool and, more particularly, to a system and method for correcting alignment of a wafer on a chuck of a tool. The system is a tool comprising at least one contact near a circumference of the tool and a grounded contact proximate to the at least one contact. The method comprises measuring current on each branch of a circuit and calculating an angle of a wafer based on a difference in the current on each branch of the circuit.

    摘要翻译: 一种用于校正工具上的产品对准的系统和方法,更具体地,涉及一种用于校正工具的卡盘上的晶片对准的系统和方法。 该系统是一种工具,其包括在工具的圆周附近的至少一个触点和靠近该至少一个触点的接地触点。 该方法包括测量电路的每个分支上的电流,并且基于电路的每个分支上的电流差来计算晶片的角度。

    ALIGNMENT CORRECTION SYSTEM AND METHOD OF USE
    5.
    发明申请
    ALIGNMENT CORRECTION SYSTEM AND METHOD OF USE 失效
    对准校正系统及其使用方法

    公开(公告)号:US20090312982A1

    公开(公告)日:2009-12-17

    申请号:US12499419

    申请日:2009-07-08

    CPC分类号: G01B7/30 G05B15/02 H01L21/68

    摘要: A system and method is provided for correcting alignment of a product on a tool and, more particularly, to a system and method for correcting alignment of a wafer on a chuck of a tool. The system is a tool comprising at least one contact near a circumference of the tool and a grounded contact proximate to the at least one contact. The method comprises measuring current on each branch of a circuit and calculating an angle of a wafer based on a difference in the current on each branch of the circuit.

    摘要翻译: 提供了一种用于校正工具上的产品对准的系统和方法,更具体地,涉及用于校正工具的卡盘上的晶片对准的系统和方法。 该系统是一种工具,其包括在工具的圆周附近的至少一个触点和靠近该至少一个触点的接地触点。 该方法包括测量电路的每个分支上的电流,并且基于电路的每个分支上的电流差来计算晶片的角度。

    Aerial assembly with combination tower-guide
    8.
    发明授权
    Aerial assembly with combination tower-guide 失效
    航空组合与组合塔指南

    公开(公告)号:US3959795A

    公开(公告)日:1976-05-25

    申请号:US278749

    申请日:1972-08-07

    申请人: Robert J. Foster

    发明人: Robert J. Foster

    IPC分类号: H01Q1/10 H01Q1/12

    CPC分类号: H01Q1/1242 H01Q1/10

    摘要: An aerial assembly comprising an upright tower of the type having attached vertical sections and an aerial standard carriage slidably attached to the tower and slidable along the tower, said tower serving the main upholding strength of the entire assembly and yet also serving as a guide-track.

    Sight glass assembly
    9.
    发明授权
    Sight glass assembly 失效
    视镜组件

    公开(公告)号:US5210658A

    公开(公告)日:1993-05-11

    申请号:US836364

    申请日:1992-02-18

    申请人: Robert J. Foster

    发明人: Robert J. Foster

    IPC分类号: G02B7/00

    CPC分类号: G02B7/007

    摘要: A sight glass assembly generally consisting of a first housing section having an opening therethrough mountable on a vessel wall, a second vessel section having an opening therethrough registrable with the first housing section opening when the first housing section is disposed in assembled relation with the second housing section, a pair of lenses disposed in the housing sections across the openings thereof, provided with beveled surfaces along the mating surfaces thereof, a packing member disposed between annular side walls of the lenses and the housing sections, and means for urging the housing sections together to compress the packing material and cause it to expand laterally to place the lenses in radial compression to maintain their structural integrity upon being fractured. The inner wall of the packing engaging the annular side walls of the lenses is provided with an annular recess registrable with the mating surfaces of the lenses which permits material of the packing to flow therein during compression thereof and thus avoid such material from being forced between the beveled edges of the lenses to force the lenses apart by a wedging action.

    摘要翻译: 一种视镜组件,其通常由具有可穿过其安装在容器壁上的开口的第一壳体部分构成;第二容器部分,具有可与第一壳体部分开口对齐的开口,当第一壳体部分与第二壳体 一对透镜,其设置在跨过其开口的壳体部分中,沿其配合表面设置有斜面,设置在透镜的环形侧壁和壳体部分之间的密封构件,以及用于将壳体部分一起推压的装置 以压缩包装材料并使其横向膨胀以使透镜处于径向压缩状态,以在断裂时保持其结构完整性。 与透镜的环形侧壁接合的填料的内壁设置有可与透镜的配合表面配准的环形凹部,其允许填料的材料在其压缩期间流入其中,并且因此避免这种材料被迫在 透镜的斜边缘通过楔入动作迫使镜片分开。

    Sight glass assembly
    10.
    发明授权
    Sight glass assembly 失效
    视镜组件

    公开(公告)号:US4807474A

    公开(公告)日:1989-02-28

    申请号:US132626

    申请日:1987-12-07

    申请人: Robert J. Foster

    发明人: Robert J. Foster

    IPC分类号: B01J3/00 G01F23/02

    CPC分类号: G02B7/007 B01J3/004 G01F23/02

    摘要: A sight glass assembly comprising a housing adapted to be mounted on a wall, the housing having a bore therethrough, the housing bore having an enlarged section providing a shoulder, a lens disposed in the enlarged bore section and seated on the shoulder, at least one deformable O-ring mounted on the lens and disposed between a periphery of the lens and a wall of the enlarged bore section of the housing, a retainer member threadedly mounted on the housing, the retainer member having a bore therethrough disposed in alignment with the housing bore when the retainer member is threadedly munted on the housing, the retainer bore having an enlarged section providing a shoulder and the lens being disposed between the housing and the retainer shoulders, the retainer member having a member receivable within the enlarged housing bore section between the housing and the lens when the retainer member is threadedly mounted on the housing for compressing the O-ring against the housing shoulder and causing the O-ring to expand laterally and place the lens in peripheral compression, and a shoulder provided on the retainer member for restricting the travel of the compression member into the enlarged housing bore section.

    摘要翻译: 一种视镜组件,其包括适于安装在壁上的壳体,所述壳体具有穿过其中的孔,所述壳体孔具有提供肩部的放大部分,设置在所述扩大孔部分中并坐在所述肩部上的至少一个 可变形O形环安装在透镜上并且设置在透镜的周边和壳体的扩大孔部分的壁之间,螺纹地安装在壳体上的保持器构件,保持器构件具有穿过其设置成与壳体对齐的孔 当保持器构件螺纹地缠绕在壳体上时,保持器孔具有提供肩部的放大部分,并且透镜设置在壳体和保持器肩部之间,保持器构件具有可容纳在扩大的壳体孔部分之间的构件 当保持器构件螺纹地安装在壳体上以将O形环压靠在壳体肩部上时,壳体和透镜,c 使O形环横向膨胀并将透镜放置在周边压缩中,以及设置在保持器构件上的肩部,用于限制压缩构件进入扩大的壳体孔部分的行进。