BULK FinFET DEVICE
    1.
    发明申请
    BULK FinFET DEVICE 有权
    大容量FinFET器件

    公开(公告)号:US20080233699A1

    公开(公告)日:2008-09-25

    申请号:US12133440

    申请日:2008-06-05

    IPC分类号: H01L21/336

    CPC分类号: H01L29/7851 H01L29/66795

    摘要: A finFET structure and a method of fabricating the finFET structure. The method includes: forming a silicon fin on a top surface of a silicon substrate; forming a gate dielectric on opposite sidewalls of the fin; forming a gate electrode over a channel region of the fin, the gate electrode in direct physical contact with the gate dielectric layer on the opposite sidewalls of the fin; forming a first source/drain in the fin on a first side of the channel region and forming a second source/drain in the fin on a second side of the channel region; removing a portion of the substrate from under at least a portion of the first and second source/drains to create a void; and filling the void with a dielectric material. The structure includes a body contact between the silicon body of the finFET and the substrate.

    摘要翻译: finFET结构和finFET结构的制造方法。 该方法包括:在硅衬底的顶表面上形成硅翅片; 在翅片的相对侧壁上形成栅电介质; 在鳍片的沟道区域上形成栅电极,栅电极与翅片的相对侧壁上的栅介电层直接物理接触; 在所述通道区域的第一侧上在所述翅片中形成第一源极/漏极,并且在所述沟道区域的第二侧上在所述鳍片中形成第二源极/漏极; 从第一和第二源/排水沟的至少一部分下方去除衬底的一部分以产生空隙; 并用介电材料填充空隙。 该结构包括在finFET的硅体和衬底之间的体接触。

    BULK finFET DEVICE
    2.
    发明申请
    BULK finFET DEVICE 有权
    大容量finFET器件

    公开(公告)号:US20080142891A1

    公开(公告)日:2008-06-19

    申请号:US12028916

    申请日:2008-02-11

    IPC分类号: H01L29/78

    CPC分类号: H01L29/7851 H01L29/66795

    摘要: A finFET structure and a method of fabricating the finFET structure. The method includes: forming a silicon fin on a top surface of a silicon substrate; forming a gate dielectric on opposite sidewalls of the fin; forming a gate electrode over a channel region of the fin, the gate electrode in direct physical contact with the gate dielectric layer on the opposite sidewalls of the fin; forming a first source/drain in the fin on a first side of the channel region and forming a second source/drain in the fin on a second side of the channel region; removing a portion of the substrate from under at least a portion of the first and second source/drains to create a void; and filling the void with a dielectric material. The structure includes a body contact between the silicon body of the finFET and the substrate.

    摘要翻译: finFET结构和finFET结构的制造方法。 该方法包括:在硅衬底的顶表面上形成硅翅片; 在翅片的相对侧壁上形成栅电介质; 在鳍片的沟道区域上形成栅电极,栅电极与翅片的相对侧壁上的栅介电层直接物理接触; 在所述通道区域的第一侧上在所述翅片中形成第一源极/漏极,并且在所述沟道区域的第二侧上在所述鳍片中形成第二源极/漏极; 从第一和第二源/排水沟的至少一部分下方去除衬底的一部分以产生空隙; 并用介电材料填充空隙。 该结构包括在finFET的硅体和衬底之间的体接触。

    Bulk FinFET Device
    3.
    发明申请
    Bulk FinFET Device 有权
    散装FinFET器件

    公开(公告)号:US20080001187A1

    公开(公告)日:2008-01-03

    申请号:US11427486

    申请日:2006-06-29

    IPC分类号: H01L29/772 H01L21/336

    CPC分类号: H01L29/7851 H01L29/66795

    摘要: A finFET structure and a method of fabricating the finFET structure. The method includes: forming a silicon fin on a top surface of a silicon substrate; forming a gate dielectric on opposite sidewalls of the fin; forming a gate electrode over a channel region of the fin, the gate electrode in direct physical contact with the gate dielectric layer on the opposite sidewalls of the fin; forming a first source/drain in the fin on a first side of the channel region and forming a second source/drain in the fin on a second side of the channel region; removing a portion of the substrate from under at least a portion of the first and second source/drains to create a void; and filling the void with a dielectric material. The structure includes a body contact between the silicon body of the finFET and the substrate.

    摘要翻译: finFET结构和finFET结构的制造方法。 该方法包括:在硅衬底的顶表面上形成硅翅片; 在翅片的相对侧壁上形成栅电介质; 在鳍片的沟道区域上形成栅电极,栅电极与翅片的相对侧壁上的栅介电层直接物理接触; 在所述通道区域的第一侧上在所述翅片中形成第一源极/漏极,并且在所述沟道区域的第二侧上在所述鳍片中形成第二源极/漏极; 从第一和第二源/排水沟的至少一部分下方去除衬底的一部分以产生空隙; 并用介电材料填充空隙。 该结构包括在finFET的硅体和衬底之间的体接触。

    Method and Structure for Implementing a Reprogrammable ROM
    5.
    发明申请
    Method and Structure for Implementing a Reprogrammable ROM 审中-公开
    实现可重编程ROM的方法和结构

    公开(公告)号:US20080232150A1

    公开(公告)日:2008-09-25

    申请号:US11689559

    申请日:2007-03-22

    IPC分类号: G11C17/00

    CPC分类号: G11C17/16 G11C17/18

    摘要: A method and structure implementing a reprogrammable read only memory (ROM) include a pair of fuse elements having different lengths and selectively arranged to define an initial bit state. A group of a plurality of the pairs of fuse elements defines a predetermined data pattern of ones and zeros, providing initial states stored in the reprogrammable ROM. The reprogrammable ROM is reprogrammed when needed by selectively blowing a selected fuse or selected fuses to change the data pattern stored in the ROM.

    摘要翻译: 实现可再编程只读存储器(ROM)的方法和结构包括具有不同长度的一对熔丝元件,并且选择性地布置以定义初始位状态。 一组多对熔丝元件定义了一个和零的预定数据模式,提供存储在可再编程ROM中的初始状态。 当需要时,通过选择性地吹送所选择的保险丝或选定的保险丝来改变存储在ROM中的数据模式,重编程ROM被重新编程。

    Method and Structure for Implementing a Reprogrammable ROM
    6.
    发明申请
    Method and Structure for Implementing a Reprogrammable ROM 审中-公开
    实现可重编程ROM的方法和结构

    公开(公告)号:US20080232152A1

    公开(公告)日:2008-09-25

    申请号:US11872802

    申请日:2007-10-16

    IPC分类号: G11C17/00

    CPC分类号: G11C17/18 G11C17/16

    摘要: A method and structure for implementing a reprogrammable read only memory (ROM), and a design structure on which the subject circuit resides are provided. A pair of fuse elements having different lengths are selectively arranged to define an initial bit state. A group of a plurality of the pairs of fuse elements defines a predetermined data pattern of ones and zeros, providing initial states stored in the reprogrammable ROM. The reprogrammable ROM is reprogrammed when needed by selectively blowing a selected fuse or selected fuses to change the data pattern stored in the ROM.

    摘要翻译: 一种用于实现可再编程只读存储器(ROM)的方法和结构,以及设置有该对象电路所在的设计结构。 选择性地布置具有不同长度的一对熔丝元件以限定初始位状态。 一组多对熔丝元件定义了一个和零的预定数据模式,提供存储在可再编程ROM中的初始状态。 当需要时,通过选择性地吹送所选择的保险丝或选定的保险丝来改变存储在ROM中的数据模式,重编程ROM被重新编程。