Integrated circuits comprising resistors having different sheet resistances and methods of fabricating the same
    2.
    发明授权
    Integrated circuits comprising resistors having different sheet resistances and methods of fabricating the same 有权
    包括具有不同薄片电阻的电阻器的集成电路及其制造方法

    公开(公告)号:US07785979B2

    公开(公告)日:2010-08-31

    申请号:US12173407

    申请日:2008-07-15

    IPC分类号: H01L21/324 H01L21/8238

    CPC分类号: H01L27/0629 H01L28/20

    摘要: The fabrication of integrated circuits comprising resistors having the same structure but different sheet resistances is disclosed herein. In one embodiment, a method of fabricating an integrated circuit comprises: concurrently forming a first resistor laterally spaced from a second resistor above or within a semiconductor substrate, the first and second resistors comprising a doped semiconductive material; depositing a dopant receiving material across the first and second resistors and the semiconductor substrate; removing the dopant receiving material from upon the first resistor while retaining the dopant receiving material upon the second resistor; and annealing the first and second resistors to cause a first sheet resistance of the first resistor to be different from a second sheet resistance of the second resistor.

    摘要翻译: 本文公开了包括具有相同结构但具有不同薄层电阻的电阻器的集成电路的制造。 在一个实施例中,一种制造集成电路的方法包括:与半导体衬底之上或之内的第二电阻器横向隔开的第一电阻器同时形成,所述第一和第二电阻器包括掺杂的半导体材料; 在第一和第二电阻器和半导体衬底上沉积掺杂剂接收材料; 在所述第一电阻器上移除所述掺杂剂接收材料,同时将所述掺杂剂接收材料保持在所述第二电阻器上; 以及使所述第一和第二电阻器退火以使所述第一电阻器的第一薄层电阻与所述第二电阻器的第二薄层电阻不同。

    Patterned silicon-on-insulator layers and methods for forming the same
    3.
    发明授权
    Patterned silicon-on-insulator layers and methods for forming the same 失效
    图案化的绝缘体上硅层及其形成方法

    公开(公告)号:US07566629B2

    公开(公告)日:2009-07-28

    申请号:US11155029

    申请日:2005-06-16

    IPC分类号: H01L21/76

    CPC分类号: H01L21/76243

    摘要: In an aspect, a method is provided for forming a silicon-on-insulator (SOI) layer. The method includes the steps of (1) providing a silicon substrate; (2) selectively implanting the silicon substrate with oxygen using a low implant energy to form an ultra-thin patterned seed layer; and (3) employing the ultra-thin patterned seed layer to form a patterned SOI layer on the silicon substrate. Numerous other aspects are provided.

    摘要翻译: 在一方面,提供了一种用于形成绝缘体上硅(SOI)层的方法。 该方法包括以下步骤:(1)提供硅衬底; (2)使用低注入能量用氧选择性地注入硅衬底以形成超薄图案种子层; 和(3)使用超薄图案种子层在硅衬底上形成图案化SOI层。 提供了许多其他方面。

    Patterned silicon-on-insulator layers and methods for forming the same
    7.
    发明授权
    Patterned silicon-on-insulator layers and methods for forming the same 有权
    图案化的绝缘体上硅层及其形成方法

    公开(公告)号:US07659599B2

    公开(公告)日:2010-02-09

    申请号:US12049258

    申请日:2008-03-14

    IPC分类号: H01L29/00

    CPC分类号: H01L21/76243

    摘要: In an aspect, a method is provided for forming a silicon-on-insulator (SOI) layer. The method includes the steps of (1) providing a silicon substrate; (2) selectively implanting the silicon substrate with oxygen using a low implant energy to form an ultra-thin patterned seed layer; and (3) employing the ultra-thin patterned seed layer to form a patterned SOI layer on the silicon substrate. Numerous other aspects are provided.

    摘要翻译: 在一方面,提供了一种用于形成绝缘体上硅(SOI)层的方法。 该方法包括以下步骤:(1)提供硅衬底; (2)使用低注入能量用氧选择性地注入硅衬底以形成超薄图案种子层; 和(3)使用超薄图案种子层在硅衬底上形成图案化SOI层。 提供了许多其他方面。

    Bulk FinFET device
    9.
    发明授权
    Bulk FinFET device 有权
    散装FinFET器件

    公开(公告)号:US07517764B2

    公开(公告)日:2009-04-14

    申请号:US11427486

    申请日:2006-06-29

    IPC分类号: H01L21/336

    CPC分类号: H01L29/7851 H01L29/66795

    摘要: A finFET structure and a method of fabricating the finFET structure. The method includes: forming a silicon fin on a top surface of a silicon substrate; forming a gate dielectric on opposite sidewalls of the fin; forming a gate electrode over a channel region of the fin, the gate electrode in direct physical contact with the gate dielectric layer on the opposite sidewalls of the fin; forming a first source/drain in the fin on a first side of the channel region and forming a second source/drain in the fin on a second side of the channel region; removing a portion of the substrate from under at least a portion of the first and second source/drains to create a void; and filling the void with a dielectric material. The structure includes a body contact between the silicon body of the finFET and the substrate.

    摘要翻译: finFET结构和finFET结构的制造方法。 该方法包括:在硅衬底的顶表面上形成硅翅片; 在翅片的相对侧壁上形成栅电介质; 在鳍片的沟道区域上形成栅电极,栅电极与翅片的相对侧壁上的栅介电层直接物理接触; 在所述通道区域的第一侧上在所述翅片中形成第一源极/漏极,并且在所述沟道区域的第二侧上在所述鳍片中形成第二源极/漏极; 从第一和第二源/排水沟的至少一部分下方去除衬底的一部分以产生空隙; 并用介电材料填充空隙。 该结构包括在finFET的硅体和衬底之间的体接触。

    BULK FinFET DEVICE
    10.
    发明申请
    BULK FinFET DEVICE 有权
    大容量FinFET器件

    公开(公告)号:US20080233699A1

    公开(公告)日:2008-09-25

    申请号:US12133440

    申请日:2008-06-05

    IPC分类号: H01L21/336

    CPC分类号: H01L29/7851 H01L29/66795

    摘要: A finFET structure and a method of fabricating the finFET structure. The method includes: forming a silicon fin on a top surface of a silicon substrate; forming a gate dielectric on opposite sidewalls of the fin; forming a gate electrode over a channel region of the fin, the gate electrode in direct physical contact with the gate dielectric layer on the opposite sidewalls of the fin; forming a first source/drain in the fin on a first side of the channel region and forming a second source/drain in the fin on a second side of the channel region; removing a portion of the substrate from under at least a portion of the first and second source/drains to create a void; and filling the void with a dielectric material. The structure includes a body contact between the silicon body of the finFET and the substrate.

    摘要翻译: finFET结构和finFET结构的制造方法。 该方法包括:在硅衬底的顶表面上形成硅翅片; 在翅片的相对侧壁上形成栅电介质; 在鳍片的沟道区域上形成栅电极,栅电极与翅片的相对侧壁上的栅介电层直接物理接触; 在所述通道区域的第一侧上在所述翅片中形成第一源极/漏极,并且在所述沟道区域的第二侧上在所述鳍片中形成第二源极/漏极; 从第一和第二源/排水沟的至少一部分下方去除衬底的一部分以产生空隙; 并用介电材料填充空隙。 该结构包括在finFET的硅体和衬底之间的体接触。