-
1.发明授权Integrated circuits comprising resistors having different sheet resistances and methods of fabricating the same 有权包括具有不同薄片电阻的电阻器的集成电路及其制造方法公开(公告)号：US07785979B2
公开(公告)日：2010-08-31
申请号：US12173407
申请日：2008-07-15
IPC分类号： H01L21/324 , H01L21/8238
CPC分类号： H01L27/0629 , H01L28/20
摘要： The fabrication of integrated circuits comprising resistors having the same structure but different sheet resistances is disclosed herein. In one embodiment, a method of fabricating an integrated circuit comprises: concurrently forming a first resistor laterally spaced from a second resistor above or within a semiconductor substrate, the first and second resistors comprising a doped semiconductive material; depositing a dopant receiving material across the first and second resistors and the semiconductor substrate; removing the dopant receiving material from upon the first resistor while retaining the dopant receiving material upon the second resistor; and annealing the first and second resistors to cause a first sheet resistance of the first resistor to be different from a second sheet resistance of the second resistor.
摘要翻译： 本文公开了包括具有相同结构但具有不同薄层电阻的电阻器的集成电路的制造。 在一个实施例中，一种制造集成电路的方法包括：与半导体衬底之上或之内的第二电阻器横向隔开的第一电阻器同时形成，所述第一和第二电阻器包括掺杂的半导体材料; 在第一和第二电阻器和半导体衬底上沉积掺杂剂接收材料; 在所述第一电阻器上移除所述掺杂剂接收材料，同时将所述掺杂剂接收材料保持在所述第二电阻器上; 以及使所述第一和第二电阻器退火以使所述第一电阻器的第一薄层电阻与所述第二电阻器的第二薄层电阻不同。
-
2.发明申请INTEGRATED CIRCUITS COMPRISING RESISTORS HAVING DIFFERENT SHEET RESISTANCES AND METHODS OF FABRICATING THE SAME 有权包含具有不同表面电阻的电阻的集成电路及其制造方法公开(公告)号：US20100013026A1
公开(公告)日：2010-01-21
申请号：US12173407
申请日：2008-07-15
CPC分类号： H01L27/0629 , H01L28/20
摘要： The fabrication of integrated circuits comprising resistors having the same structure but different sheet resistances is disclosed herein. In one embodiment, a method of fabricating an integrated circuit comprises: concurrently forming a first resistor laterally spaced from a second resistor above or within a semiconductor substrate, the first and second resistors comprising a doped semiconductive material; depositing a dopant receiving material across the first and second resistors and the semiconductor substrate; removing the dopant receiving material from upon the first resistor while retaining the dopant receiving material upon the second resistor; and annealing the first and second resistors to cause a first sheet resistance of the first resistor to be different from a second sheet resistance of the second resistor.
摘要翻译： 本文公开了包括具有相同结构但具有不同薄层电阻的电阻器的集成电路的制造。 在一个实施例中，一种制造集成电路的方法包括：与半导体衬底之上或之内的第二电阻器横向隔开的第一电阻器同时形成，所述第一和第二电阻器包括掺杂的半导体材料; 在第一和第二电阻器和半导体衬底上沉积掺杂剂接收材料; 在所述第一电阻器上移除所述掺杂剂接收材料，同时将所述掺杂剂接收材料保持在所述第二电阻器上; 以及使所述第一和第二电阻器退火以使所述第一电阻器的第一薄层电阻与所述第二电阻器的第二薄层电阻不同。
-
3.发明申请METHOD OF MAKING AN MIM CAPACITOR AND MIM CAPACITOR STRUCTURE FORMED THEREBY 有权制造MIM电容器的方法和形成的MIM电容器结构公开(公告)号：US20100207246A1
公开(公告)日：2010-08-19
申请号：US12699601
申请日：2010-02-03
CPC分类号： H01L28/87
摘要： A method of forming an MIM capacitor having interdigitated capacitor plates. Metal and dielectric layers are alternately deposited in an opening in a layer of insulator material. After each deposition of the metal layer, the metal layer is removed at an angle from the side to form the capacitor plate. The side from which the metal layer is removed is alternated with every metal layer that is deposited. When all the capacitor plates have been formed, the remaining opening in the layer of insulator material is filled with dielectric material then planarized, followed by the formation of contacts with the capacitor plates. There is also an MIM capacitor structure having interdigitated capacitor plates.
摘要翻译： 一种形成具有交错电容器板的MIM电容器的方法。 金属和电介质层交替沉积在绝缘体材料层的开口中。 在每次沉积金属层之后，从侧面以一角度去除金属层以形成电容器板。 去除金属层的一侧与沉积的每个金属层交替。 当所有电容器板已经形成时，绝缘体材料层中剩余的开口被电介质材料填充，然后平坦化，随后与电容器板形成接触。 还有一种具有交错电容器板的MIM电容器结构。
-
公开(公告)号：US08384145B2
公开(公告)日：2013-02-26
申请号：US12692923
申请日：2010-01-25
IPC分类号： H01L29/76
CPC分类号： H01L29/7923 , H01L29/66833
摘要： Each of a hot-carrier non-volatile memory device and a method for fabricating the hot carrier non-volatile memory device is predicated upon a semiconductor structure and related method that includes a metal oxide semiconductor field effect transistor structure. The semiconductor structure and related method include at least one of: (1) a spacer that comprises a dielectric material having a dielectric constant greater than 7 (for enhanced hot carrier derived charge capture and retention); and (2) a drain region that comprises a semiconductor material that has a narrower bandgap than a bandgap of a semiconductor material from which is comprised a channel region (for enhanced impact ionization and charged carrier generation).
摘要翻译： 热载体非易失性存储器件和用于制造热载体非易失性存储器件的方法中的每一种都取决于包括金属氧化物半导体场效应晶体管结构的半导体结构和相关方法。 半导体结构和相关方法包括以下中的至少一个：（1）包括介电常数大于7的介电材料的间隔物（用于增强热载体导电的电荷捕获和保留）; 和（2）包括半导体材料的漏极区，该半导体材料具有比半导体材料的带隙窄的带隙，其包括沟道区（用于增强的冲击电离和带电载流子的生成）。
-
公开(公告)号：US20120119310A1
公开(公告)日：2012-05-17
申请号：US12944174
申请日：2010-11-11
申请人： Chengwen Pei , Roger Allen Booth, JR. , Kangguo Cheng , Joseph Ervin , Ravi M. Todi , Geng Wang
发明人： Chengwen Pei , Roger Allen Booth, JR. , Kangguo Cheng , Joseph Ervin , Ravi M. Todi , Geng Wang
IPC分类号： H01L29/49 , H01L21/285
CPC分类号： H01L29/49 , H01L21/743 , H01L21/823475 , H01L21/823871 , H01L21/84 , H01L27/1203 , H01L29/78612
摘要： A structure and method to fabricate a body contact on a transistor is disclosed. The method comprises forming a semiconductor structure with a transistor on a handle wafer. The structure is then inverted, and the handle wafer is removed. A silicided body contact is then formed on the transistor in the inverted position. The body contact may be connected to neighboring vias to connect the body contact to other structures or levels to form an integrated circuit.
摘要翻译： 公开了一种在晶体管上制造体接触的结构和方法。 该方法包括在处理晶片上形成具有晶体管的半导体结构。 然后将结构反转，并移除手柄晶片。 然后在倒置位置的晶体管上形成硅化物体接触。 身体接触可以连接到相邻的通孔，以将身体接触连接到其他结构或水平以形成集成电路。
-
公开(公告)号：US08409989B2
公开(公告)日：2013-04-02
申请号：US12944174
申请日：2010-11-11
申请人： Chengwen Pei , Roger Allen Booth, Jr. , Kangguo Cheng , Joseph Ervin , Ravi M. Todi , Geng Wang
发明人： Chengwen Pei , Roger Allen Booth, Jr. , Kangguo Cheng , Joseph Ervin , Ravi M. Todi , Geng Wang
IPC分类号： H01L29/72
CPC分类号： H01L29/49 , H01L21/743 , H01L21/823475 , H01L21/823871 , H01L21/84 , H01L27/1203 , H01L29/78612
摘要： A structure and method to fabricate a body contact on a transistor is disclosed. The method comprises forming a semiconductor structure with a transistor on a handle wafer. The structure is then inverted, and the handle wafer is removed. A silicided body contact is then formed on the transistor in the inverted position. The body contact may be connected to neighboring vias to connect the body contact to other structures or levels to form an integrated circuit.
摘要翻译： 公开了一种在晶体管上制造体接触的结构和方法。 该方法包括在处理晶片上形成具有晶体管的半导体结构。 然后将结构反转，并移除手柄晶片。 然后在倒置位置的晶体管上形成硅化物体接触。 身体接触可以连接到相邻的通孔，以将身体接触连接到其他结构或水平以形成集成电路。
-
7.发明授权Method of making an MIM capacitor and MIM capacitor structure formed thereby 有权制造MIM电容器和由此形成的MIM电容器结构的方法公开(公告)号：US08288240B2
公开(公告)日：2012-10-16
申请号：US12699601
申请日：2010-02-03
IPC分类号： H01L21/02
CPC分类号： H01L28/87
摘要： A method of forming an MIM capacitor having interdigitated capacitor plates. Metal and dielectric layers are alternately deposited in an opening in a layer of insulator material. After each deposition of the metal layer, the metal layer is removed at an angle from the side to form the capacitor plate. The side from which the metal layer is removed is alternated with every metal layer that is deposited. When all the capacitor plates have been formed, the remaining opening in the layer of insulator material is filled with dielectric material then planarized, followed by the formation of contacts with the capacitor plates. There is also an MIM capacitor structure having interdigitated capacitor plates.
摘要翻译： 一种形成具有交错电容器板的MIM电容器的方法。 金属和电介质层交替沉积在绝缘体材料层的开口中。 在每次沉积金属层之后，从侧面以一角度去除金属层以形成电容器板。 去除金属层的一侧与沉积的每个金属层交替。 当所有电容器板已经形成时，绝缘体材料层中剩余的开口被电介质材料填充，然后被平坦化，随后与电容器板形成接触。 还有一种具有交错电容器板的MIM电容器结构。
-
公开(公告)号：US20100193854A1
公开(公告)日：2010-08-05
申请号：US12692923
申请日：2010-01-25
IPC分类号： H01L29/76 , H01L21/335
CPC分类号： H01L29/7923 , H01L29/66833
摘要： Each of a hot-carrier non-volatile memory device and a method for fabricating the hot carrier non-volatile memory device is predicated upon a semiconductor structure and related method that includes a metal oxide semiconductor field effect transistor structure. The semiconductor structure and related method include at least one of: (1) a spacer that comprises a dielectric material having a dielectric constant greater than 7 (for enhanced hot carrier derived charge capture and retention); and (2) a drain region that comprises a semiconductor material that has a narrower bandgap than a bandgap of a semiconductor material from which is comprised a channel region (for enhanced impact ionization and charged carrier generation).
摘要翻译： 热载体非易失性存储器件和用于制造热载体非易失性存储器件的方法中的每一种都取决于包括金属氧化物半导体场效应晶体管结构的半导体结构和相关方法。 半导体结构和相关方法包括以下中的至少一个：（1）包括介电常数大于7的介电材料的间隔物（用于增强热载体导电的电荷捕获和保留）; 和（2）包括半导体材料的漏极区，该半导体材料具有比半导体材料的带隙窄的带隙，其包括沟道区（用于增强的冲击电离和带电载流子的生成）。
-
公开(公告)号：US08994085B2
公开(公告)日：2015-03-31
申请号：US13551714
申请日：2012-07-18
申请人： Veeraraghavan S. Basker , Kangguo Cheng , Bruce B. Doris , Terence B. Hook , Ali Khakifirooz , Pranita Kulkarni , Tenko Yamashita , Chun-Chen Yeh
发明人： Veeraraghavan S. Basker , Kangguo Cheng , Bruce B. Doris , Terence B. Hook , Ali Khakifirooz , Pranita Kulkarni , Tenko Yamashita , Chun-Chen Yeh
IPC分类号： H01L27/108 , H01L29/76 , H01L29/94 , H01L31/119 , H01L21/84 , H01L27/11 , H01L27/12
CPC分类号： H01L21/84 , H01L27/10861 , H01L27/1087 , H01L27/10873 , H01L27/10894 , H01L27/10897 , H01L27/1108 , H01L27/1116 , H01L27/1203 , H01L29/945
摘要： An integrated circuit comprising an N+ type layer, a buffer layer arranged on the N+ type layer; a P type region formed on with the buffer layer; an insulator layer overlying the N+ type layer, a silicon layer overlying the insulator layer, an embedded RAM FET formed in the silicon layer and connected with a conductive node of a trench capacitor that extends into the N+ type layer, the N+ type layer forming a plate electrode of the trench capacitor, a first contact through the silicon layer and the insulating layer and electrically connecting to the N+ type layer, a first logic RAM FET formed in the silicon layer above the P type region, the P type region functional as a P-type back gate of the first logic RAM FET, and a second contact through the silicon layer and the insulating layer and electrically connecting to the P type region.
摘要翻译： 一种集成电路，包括N +型层，设置在N +型层上的缓冲层; 形成在缓冲层上的P型区域; 覆盖N +型层的绝缘体层，覆盖绝缘体层的硅层，形成在硅层中并与延伸到N +型层的沟槽电容器的导电节点连接的嵌入式RAM FET，N +型层形成 沟槽电容器的平板电极，通过硅层和绝缘层的第一接触并且电连接到N +型层，形成在P型区域上方的硅层中的第一逻辑RAM FET，P型区域用作 第一逻辑RAM FET的P型背栅，以及通过硅层和绝缘层的第二接触，并且电连接到P型区域。
-
公开(公告)号：US08653596B2
公开(公告)日：2014-02-18
申请号：US13344885
申请日：2012-01-06
IPC分类号： H01L21/70 , H01L27/12 , H01L21/762 , H01L21/84
CPC分类号： H01L29/945 , H01L21/84 , H01L27/1052 , H01L27/1087 , H01L27/10873 , H01L27/10894 , H01L27/1116 , H01L27/1203 , H01L27/1207
摘要： An integrated circuit includes an SOI substrate with a unitary N+ layer below the BOX, a P region in the N+ layer, an eDRAM with an N+ plate, and logic/SRAM devices above the P region. The P region functions as a back gate of the logic/SRAM devices. An optional intrinsic (undoped) layer can be formed between the P back gate layer and the N+ layer to reduce the junction field and lower the junction leakage between the P back gate and the N+ layer. In another embodiment an N or N+ back gate can be formed in the P region. The N+ back gate functions as a second back gate of the logic/SRAM devices. The N+ plate of the SOI eDRAM, the P back gate, and the N+ back gate can be electrically biased at the same or different voltage potentials. Methods to fabricate the integrated circuits are also disclosed.
摘要翻译： 集成电路包括在BOX下方具有单一N +层的SOI衬底，N +层中的P区，N +板的eDRAM和P区上方的逻辑/ SRAM器件。 P区域用作逻辑/ SRAM器件的后门。 可以在P背栅层和N +层之间形成可选的本征（未掺杂）层，以减少结场并降低P背栅与N +层之间的结泄漏。 在另一个实施例中，可以在P区中形成N或N +背栅。 N +后门作为逻辑/ SRAM器件的第二个后门。 SOI eDRAM的N +板，P背栅极和N +背栅极可以在相同或不同的电压电位下被电偏置。 还公开了制造集成电路的方法。
-
-
-
-
-
-
-
-
-
搜索结果
847 条记录 (耗时 0.025 秒)
