Microbolometer and method for forming
    1.
    发明授权
    Microbolometer and method for forming 有权
    微电热计及其成型方法

    公开(公告)号:US06690014B1

    公开(公告)日:2004-02-10

    申请号:US09557748

    申请日:2000-04-25

    IPC分类号: H01L310376

    CPC分类号: H01L27/14649 G01J5/20

    摘要: A microbolometer is provided that includes an absorber element having material properties to change temperature in response to absorbing infrared radiation. An amorphous silicon detector is thermally coupled to the absorber element and is suspended above a silicon substrate at a height of one-quarter wavelength of the infrared radiation to be detected. The amorphous silicon detector changes electrical resistance in response to the absorber element changing temperature. The microbolometer also includes electrode arms coupled to the silicon substrate to provide structural support for the amorphous silicon detector above the surface of the silicon substrate. The electrode arms further provide electrical connectivity for the microbolometer.

    摘要翻译: 提供了一种微测热计,其包括具有响应于吸收红外辐射而改变温度的材料性质的吸收体元件。 非晶硅检测器热耦合到吸收体元件,并且在待检测的红外辐射的四分之一波长的高度上悬挂在硅衬底上。 非晶硅检测器响应于吸收体元件的变化温度而改变电阻。 微热辐射计还包括耦合到硅衬底的电极臂,以为硅衬底的表面上的非晶硅检测器提供结构支撑。 电极臂还提供用于微热辐射计的电连接。