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公开(公告)号:US06690014B1
公开(公告)日:2004-02-10
申请号:US09557748
申请日:2000-04-25
IPC分类号: H01L310376
CPC分类号: H01L27/14649 , G01J5/20
摘要: A microbolometer is provided that includes an absorber element having material properties to change temperature in response to absorbing infrared radiation. An amorphous silicon detector is thermally coupled to the absorber element and is suspended above a silicon substrate at a height of one-quarter wavelength of the infrared radiation to be detected. The amorphous silicon detector changes electrical resistance in response to the absorber element changing temperature. The microbolometer also includes electrode arms coupled to the silicon substrate to provide structural support for the amorphous silicon detector above the surface of the silicon substrate. The electrode arms further provide electrical connectivity for the microbolometer.
摘要翻译: 提供了一种微测热计,其包括具有响应于吸收红外辐射而改变温度的材料性质的吸收体元件。 非晶硅检测器热耦合到吸收体元件,并且在待检测的红外辐射的四分之一波长的高度上悬挂在硅衬底上。 非晶硅检测器响应于吸收体元件的变化温度而改变电阻。 微热辐射计还包括耦合到硅衬底的电极臂,以为硅衬底的表面上的非晶硅检测器提供结构支撑。 电极臂还提供用于微热辐射计的电连接。
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公开(公告)号:US07262412B2
公开(公告)日:2007-08-28
申请号:US11141356
申请日:2005-05-31
IPC分类号: G01J5/00
CPC分类号: H01L27/1465 , H01L27/14618 , H01L27/14623 , H01L27/1463 , H01L27/14634 , H01L2224/05568 , H01L2224/05644 , H01L2224/05666 , H01L2224/05669 , H01L2224/16 , H01L2924/1461 , H01L2924/00014
摘要: Methods for making optically blind reference pixels and systems employing the same. The reference pixels may be configured to be identical to, or substantially identical to, the active detector elements of a focal plane array assembly. The reference pixels may be configured to use the same relatively longer thermal isolation legs as the active detector pixels of the focal plane, thus eliminating joule heating differences. An optically blocking structure may be placed in close proximity directly over the reference pixels.
摘要翻译: 制造光学盲目参考像素的方法和采用该方法的系统。 参考像素可以被配置为与焦平面阵列组件的有源检测器元件相同或基本相同。 参考像素可以被配置为使用与焦平面的有源检测器像素相同的相对较长的热隔离支腿,从而消除焦耳加热差异。 可以将光学阻挡结构紧邻地放置在参考像素的正上方。
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公开(公告)号:US08153980B1
公开(公告)日:2012-04-10
申请号:US11607122
申请日:2006-11-30
申请人: John F. Brady , Athanasios J. Syllaios , Thomas R. Schimert , William L. McCardel , Roland W. Gooch
发明人: John F. Brady , Athanasios J. Syllaios , Thomas R. Schimert , William L. McCardel , Roland W. Gooch
IPC分类号: G01J5/02
CPC分类号: G01J5/20 , G01J3/0232 , G01J3/36 , G01J5/0834 , G01J2003/1213
摘要: Systems and methods for color correcting radiation by alternately focusing a first radiation spectrum on a first radiation spectrum detector, and then focusing at least one additional radiation spectrum on at least one additional radiation spectrum detector.
摘要翻译: 通过将第一辐射光谱交替聚焦在第一辐射光谱检测器上,然后将至少一个附加辐射光谱聚焦在至少一个附加的辐射光谱检测器上来对色彩校正辐射进行颜色校正的系统和方法。
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公开(公告)号:US07462831B2
公开(公告)日:2008-12-09
申请号:US11607087
申请日:2006-11-30
IPC分类号: G01J5/00
CPC分类号: G01J5/20 , G01J2005/0077 , H01L21/187 , H01L27/14618 , H01L27/14683 , H01L2924/0002 , H01L2924/00
摘要: Systems and methods for bonding semiconductor devices and/or multiple wafers, in the form of a first segmented wafer and a second unsegmented wafer which may have different temperature coefficients of expansion (TCE), and which may be bonded together, with or without the presence of a vacuum.
摘要翻译: 用于接合半导体器件和/或多个晶片的系统和方法,其形式为可以具有不同温度膨胀系数(TCE)的第一分段晶片和第二未分段晶片,并且可以在或不存在 的真空。
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公开(公告)号:US07459686B2
公开(公告)日:2008-12-02
申请号:US11606880
申请日:2006-11-30
申请人: Athanasios J. Syllaios , Thomas R. Schimert , William L. McCardel , Roland W. Gooch , John F. Brady
发明人: Athanasios J. Syllaios , Thomas R. Schimert , William L. McCardel , Roland W. Gooch , John F. Brady
IPC分类号: G01J5/00
CPC分类号: G01J3/2803 , G01J3/02 , G01J3/0232 , G01J3/2823 , G01J3/36 , G01J5/024 , G01J5/20 , H01L27/14621 , H01L27/14647 , H01L27/1467 , H01L27/14685 , H01L27/14687 , H01L2924/381 , H04N5/33 , H04N5/332
摘要: Systems and methods for providing multi-spectral image capability using an integrated multi-band focal plane array that, in one example, may be employed to simultaneously image in the visible spectrum and infrared spectrum using an integrated dual-band focal plane array, e.g., by including visible imaging circuitry within read out integrated circuitry (ROIC) used to readout infrared detector elements within the same pixel element/s.
摘要翻译: 使用集成的多频带焦平面阵列来提供多光谱图像能力的系统和方法,在一个示例中,可以使用集成的双频带焦平面阵列在可见光谱和红外光谱中同时成像,例如, 通过在用于读出相同像素元件的红外检测器元件的读出集成电路(ROIC)中包括可见成像电路。
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公开(公告)号:US07375331B2
公开(公告)日:2008-05-20
申请号:US11880554
申请日:2007-07-23
IPC分类号: G01J5/00 , H01L31/0203
CPC分类号: H01L27/1465 , H01L27/14618 , H01L27/14623 , H01L27/1463 , H01L27/14634 , H01L2224/05568 , H01L2224/05644 , H01L2224/05666 , H01L2224/05669 , H01L2224/16 , H01L2924/1461 , H01L2924/00014
摘要: Methods for making optically blind reference pixels and systems employing the same. The reference pixels may be configured to be identical to, or substantially identical to, the active detector elements of a focal plane array assembly. The reference pixels may be configured to use the same relatively longer thermal isolation legs as the active detector pixels of the focal plane, thus eliminating joule heating differences. An optically blocking structure may be placed in close proximity directly over the reference pixels.
摘要翻译: 制造光学盲目参考像素的方法及采用该方法的系统。 参考像素可以被配置为与焦平面阵列组件的有源检测器元件相同或基本相同。 参考像素可以被配置为使用与焦平面的有源检测器像素相同的相对较长的热隔离支腿,从而消除焦耳加热差异。 可以将光学阻挡结构紧邻地放置在参考像素的正上方。
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公开(公告)号:US20070170363A1
公开(公告)日:2007-07-26
申请号:US11606621
申请日:2006-11-30
IPC分类号: G01J5/02
CPC分类号: G01J5/20 , G01J5/02 , G01J5/023 , G01J5/024 , G01J5/08 , G01J5/0834 , G01J5/22 , G01J5/522 , G01J2005/0077
摘要: Infrared detector elements and methods for forming infrared detector elements in which the top metal layer of CMOS circuitry of the detector element is employed as a lead metal reflector for the infrared detector.
摘要翻译: 用于形成红外检测器元件的红外检测器元件和方法,其中检测器元件的CMOS电路的顶部金属层被用作用于红外检测器的引线金属反射器。
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公开(公告)号:US07655909B2
公开(公告)日:2010-02-02
申请号:US11606621
申请日:2006-11-30
IPC分类号: G01J5/00
CPC分类号: G01J5/20 , G01J5/02 , G01J5/023 , G01J5/024 , G01J5/08 , G01J5/0834 , G01J5/22 , G01J5/522 , G01J2005/0077
摘要: Infrared detector elements and methods for forming infrared detector elements in which the top metal layer of CMOS circuitry of the detector element is employed as a lead metal reflector for the infrared detector.
摘要翻译: 用于形成红外检测器元件的红外检测器元件和方法,其中检测器元件的CMOS电路的顶部金属层被用作用于红外检测器的引线金属反射器。
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公开(公告)号:US20070170359A1
公开(公告)日:2007-07-26
申请号:US11606880
申请日:2006-11-30
申请人: Athanasios J. Syllaios , Thomas R. Schimert , William L. McCardel , Roland W. Gooch , John F. Brady
发明人: Athanasios J. Syllaios , Thomas R. Schimert , William L. McCardel , Roland W. Gooch , John F. Brady
IPC分类号: G01J5/00
CPC分类号: G01J3/2803 , G01J3/02 , G01J3/0232 , G01J3/2823 , G01J3/36 , G01J5/024 , G01J5/20 , H01L27/14621 , H01L27/14647 , H01L27/1467 , H01L27/14685 , H01L27/14687 , H01L2924/381 , H04N5/33 , H04N5/332
摘要: Systems and methods for providing multi-spectral image capability using an integrated multi-band focal plane array that, in one example, may be employed to simultaneously image in the visible spectrum and infrared spectrum using an integrated dual-band focal plane array, e.g., by including visible imaging circuitry within read out integrated circuitry (ROIC) used to readout infrared detector elements within the same pixel element/s.
摘要翻译: 使用集成的多频带焦平面阵列来提供多光谱图像能力的系统和方法,在一个示例中,可以使用集成的双频带焦平面阵列在可见光谱和红外光谱中同时成像,例如, 通过在用于读出相同像素元件的红外检测器元件的读出集成电路(ROIC)中包括可见成像电路。
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公开(公告)号:US20070170360A1
公开(公告)日:2007-07-26
申请号:US11607087
申请日:2006-11-30
IPC分类号: G01J5/00
CPC分类号: G01J5/20 , G01J2005/0077 , H01L21/187 , H01L27/14618 , H01L27/14683 , H01L2924/0002 , H01L2924/00
摘要: Systems and methods for bonding semiconductor devices and/or multiple wafers, in the form of a first segmented wafer and a second unsegmented wafer which may have different temperature coefficients of expansion (TCE), and which may be bonded together, with or without the presence of a vacuum.
摘要翻译: 用于接合半导体器件和/或多个晶片的系统和方法,其形式为可以具有不同温度膨胀系数(TCE)的第一分段晶片和第二未分段晶片,并且可以在或不存在 的真空。
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