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公开(公告)号：US07078237B1
公开(公告)日：2006-07-18
申请号：US10035537
申请日：2001-10-23
IPC分类号： G01N25/20
CPC分类号： G01N31/12
摘要： A micropyrolyzer has applications to pyrolysis, heated chemistry, and thermal desorption from liquid or solid samples. The micropyrolyzer can be fabricated from semiconductor materials and metals using standard integrated circuit technologies. The micropyrolyzer enables very small volume samples of less than 3 microliters and high sample heating rates of greater than 20° C. per millisecond. A portable analyzer for the field analysis of liquid and solid samples can be realized when the micropyrolyzer is combined with a chemical preconcentrator, chemical separator, and chemical detector. Such a portable analyzer can be used in a variety of government and industrial applications, such as non-proliferation monitoring, chemical and biological warfare detection, industrial process control, water and air quality monitoring, and industrial hygiene.
摘要翻译： 微型搅拌器具有从液体或固体样品中进行热解，加热化学和热解吸的应用。 微型硅胶可以使用标准集成电路技术由半导体材料和金属制成。 微型分选仪可实现小于3微升的非常小体积的样品和大于20℃/毫秒的高样品加热速率。 当微型分解器与化学预浓缩器，化学分离器和化学检测器组合时，可以实现液体和固体样品的现场分析的便携式分析仪。 这种便携式分析仪可用于各种政府和工业应用，如不扩散监测，化学和生物战争检测，工业过程控制，水和空气质量监测以及工业卫生。
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公开(公告)号：US06772513B1
公开(公告)日：2004-08-10
申请号：US10184782
申请日：2002-06-27
申请人： Gregory C. Frye-Mason , David Martinez , Ronald P. Manginell , Edwin J. Heller , Rajen Chanchani
发明人： Gregory C. Frye-Mason , David Martinez , Ronald P. Manginell , Edwin J. Heller , Rajen Chanchani
IPC分类号： H25K334
CPC分类号： B01L3/502715 , B01J2219/0081 , B01L3/502707 , B01L3/565 , B01L2200/027 , B01L2200/028 , B01L2200/10 , B01L2300/044 , B01L2300/0645 , B01L2300/0816 , B01L2300/0867 , B01L2400/0415 , G01N30/6095 , Y10T29/49117 , Y10T29/4913 , Y10T29/49144 , Y10T137/87249
摘要： A method for forming electro-fluidic interconnections in microfluidic devices comprises forming an electrical connection between matching bond pads on a die containing an active electrical element and a microfluidic substrate and forming a fluidic seal ring that circumscribes the active electrical element and a fluidic feedthrough. Preferably, the electrical connection and the seal ring are formed in a single bonding step. The simple method is particularly useful for chemical microanalytical systems wherein a plurality of microanalytical components, such as a chemical preconcentrator, a gas chromatography column, and a surface acoustic wave detector, are fluidically interconnected on a hybrid microfluidic substrate having electrical connection to external support electronics.
摘要翻译： 用于在微流体装置中形成电流互连的方法包括在包含有源电子元件和微流体基底的模具上的匹配接合焊盘之间形成电连接，并形成限定有源电元件和流体馈通的流体密封环。 优选地，电连接和密封环在单个结合步骤中形成。 简单的方法对于化学微量分析系统特别有用，其中多个微量分析组分例如化学预浓缩器，气相色谱柱和表面声波检测器在具有与外部支持电子器件电连接的混合微流体衬底上流体互连 。
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3.发明授权公开(公告)号：US06699392B1
公开(公告)日：2004-03-02
申请号：US10167238
申请日：2002-06-10
IPC分类号： B01D1508
CPC分类号： G01N30/6095
摘要： A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.
摘要翻译： 已经开发了一种用于制造包含贯穿基板流体端口的硅层析柱的新方法。 这种新方法可以制造多层互连的硅层析柱。
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公开(公告)号：US06527835B1
公开(公告)日：2003-03-04
申请号：US10029341
申请日：2001-12-21
IPC分类号： B01D5304
CPC分类号： G01F1/6845 , G01F1/6847 , G01N30/12 , G01N30/6095 , G01N30/88 , G01N2030/121 , G01N2030/623
摘要： A chemical preconcentrator with integral thermal flow sensor can be used to accurately measure fluid flow rate in a microanalytical system. The thermal flow sensor can be operated in either constant temperature or constant power mode and variants thereof. The chemical preconcentrator with integral thermal flow sensor can be fabricated with the same MEMS technology as the rest of the microanlaytical system. Because of its low heat capacity, low-loss, and small size, the chemical preconcentrator with integral thermal flow sensor is fast and efficient enough to be used in battery-powered, portable microanalytical systems.
摘要翻译： 具有集成热流量传感器的化学预浓缩器可用于精确测量微量分析系统中的流体流量。 热流量传感器可以在恒定温度或恒定功率模式下工作，也可以变型。 具有集成热流量传感器的化学预浓缩器可以使用与微结构系统的其余部分相同的MEMS技术来制造。 由于其低热容量，低损耗和小尺寸，具有集成热流量传感器的化学预浓缩器快速高效地用于电池供电的便携式微分析系统。
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公开(公告)号：US07399449B1
公开(公告)日：2008-07-15
申请号：US10436595
申请日：2003-05-12
IPC分类号： B01L3/00
CPC分类号： G01N33/0006 , B01L3/5027
摘要： A microfabricated diffusion source to provide for a controlled diffusion rate of a vapor comprises a porous reservoir formed in a substrate that can be filled with a liquid, a headspace cavity for evaporation of the vapor therein, a diffusion channel to provide a controlled diffusion of the vapor, and an outlet to release the vapor into a gas stream. The microfabricated diffusion source can provide a calibration standard for a microanalytical system. The microanalytical system with an integral diffusion source can be fabricated with microelectromechanical systems technologies.
摘要翻译： 提供蒸气受控扩散速率的微细加散扩散源包括形成在可填充有液体的基底中的多孔容器，用于蒸发蒸汽的顶空腔，扩散通道以提供受控的扩散 蒸汽和出口以将蒸气释放到气流中。 微加工扩散源可以为微量分析系统提供校准标准。 具有整体扩散源的微分析系统可以用微机电系统技术制造。
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公开(公告)号：US06224728B1
公开(公告)日：2001-05-01
申请号：US09373872
申请日：1999-08-13
申请人： Michael C. Oborny , Phillip H. Paul , Kenneth R. Hencken , Gregory C. Frye-Mason , Ronald P. Manginell
发明人： Michael C. Oborny , Phillip H. Paul , Kenneth R. Hencken , Gregory C. Frye-Mason , Ronald P. Manginell
IPC分类号： C12Q168
CPC分类号： F04B19/006
摘要： A valve for controlling fluid flows. This valve, which includes both an actuation device and a valve body provides: the ability to incorporate both the actuation device and valve into a unitary structure that can be placed onto a microchip, the ability to generate higher actuation pressures and thus control higher fluid pressures than conventional microvalves, and a device that draws only microwatts of power. An electrokinetic pump that converts electric potential to hydraulic force is used to operate, or actuate, the valve.
摘要翻译： 用于控制流体流动的阀。 该阀包括致动装置和阀体，其提供：将致动装置和阀两者结合成可放置在微芯片上的整体结构的能力，产生更高的致动压力并因此控制较高流体压力的能力 比传统的微型阀，以及只能获得微瓦功率的装置。 将电势转换为液压力的电动泵用于操作或致动阀。
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公开(公告)号：US06171378B2
公开(公告)日：2001-01-09
申请号：US09369664
申请日：1999-08-05
IPC分类号： B01D5304
CPC分类号： G01N30/12 , G01N2030/025 , G01N2030/121 , G01N2030/623 , Y10S55/05
摘要： A chemical preconcentrator is disclosed with applications to chemical sensing and analysis. The preconcentrator can be formed by depositing a resistive heating element (e.g. platinum) over a membrane (e.g. silicon nitride) suspended above a substrate. A coating of a sorptive material (e.g. a microporous hydrophobic sol-gel coating or a polymer coating) is formed on the suspended membrane proximate to the heating element to selective sorb one or more chemical species of interest over a time period, thereby concentrating the chemical species in the sorptive material. Upon heating the sorptive material with the resistive heating element, the sorbed chemical species are released for detection and analysis in a relatively high concentration and over a relatively short time period. The sorptive material can be made to selectively sorb particular chemical species of interest while not substantially sorbing other chemical species not of interest. The present invention has applications for use in forming high-sensitivity, rapid-response miniaturized chemical analysis systems (e.g. a “chem lab on a chip”).
摘要翻译： 公开了一种化学预浓缩器，用于化学感测和分析。 预浓缩器可以通过在悬浮在基材上方的膜（例如氮化硅）上沉积电阻加热元件（例如铂）而形成。 在靠近加热元件的悬浮膜上形成吸附材料（例如微孔疏水溶胶 - 凝胶涂层或聚合物涂层）的涂层，以在一段时间内选择性吸附一种或多种感兴趣的化学物质，从而将化学品 物质中的吸附物质。 在利用电阻加热元件加热吸附材料时，吸附的化学物质以相对高的浓度和相对短的时间段被释放用于检测和分析。 可以使吸附材料选择性地吸附感兴趣的特定化学物质，而基本上不吸收不感兴趣的其它化学物质。 本发明具有用于形成高灵敏度，快速响应的小型化学分析系统（例如“芯片上的化学实验室”）的应用。
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公开(公告)号：US06666907B1
公开(公告)日：2003-12-23
申请号：US10061383
申请日：2002-01-31
IPC分类号： B01D1508
CPC分类号： G01N30/6095 , G01N30/6047 , G01N30/6086 , G01N2030/025 , G01N2030/3007 , G01N2030/3053
摘要： A temperature programmable microfabricated gas chromatography column enables more efficient chemical separation of chemical analytes in a gas mixture by the integration of a resistive heating element and temperature sensing on the microfabricated column. Additionally, means are provided to thermally isolate the heated column from their surroundings. The small heat capacity and thermal isolation of the microfabricated column improves the thermal time response and power consumption, both important factors for portable microanalytical systems.
摘要翻译： 温度可编程微生物气相色谱柱通过将电阻加热元件和温度感测集成在微加工柱上，可以更有效地化学分离气体混合物中的化学分析物。 此外，提供了将加热的塔与其周围环境隔离的装置。 微加热柱的小热容量和热隔离提高了热时间响应和功耗，这两个重要因素都是便携式微量分析系统。
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公开(公告)号：US07799280B1
公开(公告)日：2010-09-21
申请号：US11355480
申请日：2006-02-16
申请人： Ronald P. Manginell , Patrick R. Lewis , Douglas R. Adkins , David R. Wheeler , Robert J. Simonson
发明人： Ronald P. Manginell , Patrick R. Lewis , Douglas R. Adkins , David R. Wheeler , Robert J. Simonson
IPC分类号： B01L99/00
CPC分类号： B01L3/502753 , B01L2200/0668 , B01L2300/0883 , B01L2300/16 , B01L2400/086 , G01N1/405 , Y10T436/2575
摘要： A non-planar, tortuous path chemical preconcentrator has a high internal surface area having a heatable sorptive coating that can be used to selectively collect and concentrate one or more chemical species of interest from a fluid stream that can be rapidly released as a concentrated plug into an analytical or microanalytical chain for separation and detection. The non-planar chemical preconcentrator comprises a sorptive support structure having a tortuous flow path. The tortuosity provides repeated twists, turns, and bends to the flow, thereby increasing the interfacial contact between sample fluid stream and the sorptive material. The tortuous path also provides more opportunities for desorption and readsorption of volatile species. Further, the thermal efficiency of the tortuous path chemical preconcentrator is comparable or superior to the prior non-planar chemical preconcentrator. Finally, the tortuosity can be varied in different directions to optimize flow rates during the adsorption and desorption phases of operation of the preconcentrator.
摘要翻译： 非平面曲折路径化学预浓缩器具有高内表面积，其具有可加热吸附涂层，其可用于选择性地收集和浓缩一种或多种感兴趣的化学物质，所述流体物流可作为集中塞快速释放 用于分离和检测的分析或微量分析链。 非平面化学预浓缩器包括具有曲折流动路径的吸附支撑结构。 弯曲度为流动提供了反复的扭转，弯曲和弯曲，从而增加了样品流体流与吸附材料之间的界面接触。 曲折的路径还为挥发物种的解吸和吸收提供了更多的机会。 此外，曲折路径化学预浓缩器的热效率相当于或优于现有的非平面化学预浓缩器。 最后，曲折度可以在不同的方向上变化，以优化预浓缩器的吸附和解吸阶段的流速。
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公开(公告)号：US07727314B1
公开(公告)日：2010-06-01
申请号：US11699904
申请日：2007-01-30
CPC分类号： G01N1/405 , G01N1/4022 , G01N30/08 , G01N30/6095
摘要： The present invention relates generally to chemical analysis (e.g. by gas chromatography), and in particular to a compact chemical preconcentrator formed on a substrate with a heatable sorptive membrane that can be used to accumulate and concentrate one or more chemical species of interest over time and then rapidly release the concentrated chemical species upon demand for chemical analysis.
摘要翻译： 本发明一般涉及化学分析（例如通过气相色谱法），特别涉及形成在具有可加热吸附膜的基底上的紧凑型化学预浓缩器，其可用于在一段时间内积聚和浓缩一种或多种感兴趣的化学物种， 然后根据化学分析的需要快速释放浓缩的化学物质。
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