Aligner and self-cleaning method for aligner
    1.
    发明授权
    Aligner and self-cleaning method for aligner 失效
    对准器的对准器和自清洁方法

    公开(公告)号:US07733460B2

    公开(公告)日:2010-06-08

    申请号:US11285211

    申请日:2005-11-23

    IPC分类号: G03B27/52 G03B27/42

    CPC分类号: B08B7/0035 G03F7/70925

    摘要: When a self-cleaning method for an aligner is carried out, a reflecting plate having a convex lens portion is set in an original plate holder, and exposure light rays are irradiated from a light source. The surface of the lens portion is coated with a reflective film. The light rays are reflected by the reflecting plate, diffused, and emitted onto the surface of a condenser lens, thereby breaking down and removing contaminants that are adhered to the surface of the condenser lens. The light rays also enter the interior of the condenser lens to clean away contaminants that are adhered to locations other than a normal exposure path. When a concave mirror and/or a reflecting plate having 50% transmittance is used as the reflecting plate, the emission range of the light rays (i.e., the locations that are cleaned) can be changed.

    摘要翻译: 当进行对准器的自清洁方法时,将具有凸透镜部分的反射板设置在原始板保持器中,并且从光源照射曝光光线。 透镜部分的表面涂覆有反射膜。 光线被反射板反射,扩散并发射到聚光透镜的表面上,从而分解并去除附着在聚光透镜表面上的污染物。 光线也进入聚光透镜的内部,以清除粘附到正常曝光路径以外的位置的污染物。 当使用具有50%透射率的凹面镜和/或反射板作为反射板时,可以改变光线的发射范围(即,被清洁的位置)。

    Self-cleaning method for semiconductor exposure apparatus
    2.
    发明授权
    Self-cleaning method for semiconductor exposure apparatus 失效
    半导体曝光装置的自清洁方法

    公开(公告)号:US06980278B2

    公开(公告)日:2005-12-27

    申请号:US10748240

    申请日:2003-12-31

    CPC分类号: G03F7/70075 G03F7/70925

    摘要: To an original plate holder 16 to which an original pattern plate 15 is set in ordinary exposure, a transmittable plate 20 having a concave-shaped concave portion 22 formed at a middle of a quartz glass plate is set in self-cleaning and irradiated with ultraviolet light emitted from a light source 11. The ultraviolet light is diffused through the concave lens of the transmittable plate 20 and an entire surface of a projection lens 17 is irradiated with it. Accordingly, molecular bonds of a contaminant adhering to the surface of the projection lens 17 are cut off with strong energy of the ultraviolet light, so that the contaminant is decomposed, vaporized, and then removed.

    摘要翻译: 在普通曝光中设置有原稿图案板15的原版固定器16上设置有形成在石英玻璃板中间的凹形凹部22的透光板20进行自清洁并照射紫外线 从光源11发射的光。 紫外线通过可透射板20的凹透镜扩散,投影透镜17的整个表面被照射。 因此,附着在投影透镜17的表面的污染物的分子键被紫外线的强烈能量切断,使得污染物被分解,汽化,然后除去。

    Aligner and self-cleaning method for aligner

    公开(公告)号:US20100208220A1

    公开(公告)日:2010-08-19

    申请号:US12662601

    申请日:2010-04-26

    IPC分类号: G03B27/52 G03B27/54

    CPC分类号: B08B7/0035 G03F7/70925

    摘要: When a self-cleaning method for an aligner is carried out, a reflecting plate having a convex lens portion is set in an original plate holder, and exposure light rays are irradiated from a light source. The surface of the lens portion is coated with a reflective film. The light rays are reflected by the reflecting plate, diffused, and emitted onto the surface of a condenser lens, thereby breaking down and removing contaminants that are adhered to the surface of the condenser lens. The light rays also enter the interior of the condenser lens to clean away contaminants that are adhered to locations other than a normal exposure path. When a concave mirror and/or a reflecting plate having 50% transmittance is used as the reflecting plate, the emission range of the light rays (i.e., the locations that are cleaned) can be changed.

    Aligner and self-cleaning method for aligner
    4.
    发明申请
    Aligner and self-cleaning method for aligner 失效
    对准器的对准器和自清洁方法

    公开(公告)号:US20070240735A1

    公开(公告)日:2007-10-18

    申请号:US11285211

    申请日:2005-11-23

    IPC分类号: B08B7/00 G02B6/00

    CPC分类号: B08B7/0035 G03F7/70925

    摘要: When a self-cleaning method for an aligner is carried out, a reflecting plate having a convex lens portion is set in an original plate holder, and exposure light rays are irradiated from a light source. The surface of the lens portion is coated with a reflective film. The light rays are reflected by the reflecting plate, diffused, and emitted onto the surface of a condenser lens, thereby breaking down and removing contaminants that are adhered to the surface of the condenser lens. The light rays also enter the interior of the condenser lens to clean away contaminants that are adhered to locations other than a normal exposure path. When a concave mirror and/or a reflecting plate having 50% transmittance is used as the reflecting plate, the emission range of the light rays (i.e., the locations that are cleaned) can be changed.

    摘要翻译: 当进行对准器的自清洁方法时,将具有凸透镜部分的反射板设置在原始板保持器中,并且从光源照射曝光光线。 透镜部分的表面涂覆有反射膜。 光线被反射板反射,扩散并发射到聚光透镜的表面上,从而分解并去除附着在聚光透镜表面上的污染物。 光线也进入聚光透镜的内部,以清除粘附到正常曝光路径以外的位置的污染物。 当使用具有50%透射率的凹面镜和/或反射板作为反射板时,可以改变光线的发射范围(即,被清洁的位置)。

    FLUID DYNAMIC BEARING DEVICE AND MOTOR WITH SAME
    6.
    发明申请
    FLUID DYNAMIC BEARING DEVICE AND MOTOR WITH SAME 有权
    流体动力轴承装置和电动机

    公开(公告)号:US20150233417A1

    公开(公告)日:2015-08-20

    申请号:US14425972

    申请日:2013-08-19

    IPC分类号: F16C17/10 F16C33/10

    摘要: A fluid dynamic bearing device including: a bearing sleeve fixed to an inner periphery of a housing; a shaft member removably inserted along an inner periphery of the bearing sleeve; an annular member having an inner peripheral surface for defining a radial gap together with an outer peripheral surface of the shaft member; and radial bearing portions and a thrust bearing portion for supporting the shaft member. At least the radial bearing gap at each of the radial bearing portions, and a bottom gap having the thrust bearing portion received therein are filled with lubricating oil. A void section is formed in an interior space of the housing. Assuming that d1 represents a gap width of the radial bearing gap and d2 represents a gap width of the radial gap, a relationship of 30d1≦d2≦250d1 is satisfied.

    摘要翻译: 一种流体动力轴承装置,包括:固定到壳体的内周的轴承套筒; 轴构件,其沿着所述轴承套筒的内周可移除地插入; 环形构件,其具有用于与所述轴构件的外周表面一起限定径向间隙的内周表面; 以及用于支撑轴构件的径向轴承部分和止推轴承部分。 至少每个径向轴承部分处的径向轴承间隙和其中容纳有止推轴承部分的底部间隙填充有润滑油。 在壳体的内部空间中形成空隙部。 假设d1表示径向轴承间隙的间隙宽度,d2表示径向间隙的间隙宽度,则满足30d1≦̸ d2≦̸ 250d1的关系。

    Digital camera
    9.
    发明授权
    Digital camera 有权
    数码相机

    公开(公告)号:US08520121B2

    公开(公告)日:2013-08-27

    申请号:US13252486

    申请日:2011-10-04

    申请人: Yasuhiro Yamamoto

    发明人: Yasuhiro Yamamoto

    IPC分类号: H04N5/222 H04N5/228 H04N5/225

    摘要: A digital camera is provided that includes a camera body and a monitor device. The camera body includes an imaging module, an image stabilization module, a first connector half and a first wireless communication module. The monitor device is detachable from the camera body and includes a monitor, a second connector half complemental to the first connector half and a second wireless communication module complemental to the first wireless communication module. An operation of the image stabilization module is suspended when monitor device is detached from the camera body.

    摘要翻译: 提供了一种包括相机主体和监视器装置的数字照相机。 相机主体包括成像模块,图像稳定模块,第一连接器半部和第一无线通信模块。 监视器装置可从照相机主体拆卸并且包括监视器,与第一连接器半部互补的第二连接器和与第一无线通信模块互补的第二无线通信模块。 当监控设备从照相机主体上拆下时,图像稳定模块的操作被暂停。

    Torque tool device
    10.
    发明授权
    Torque tool device 有权
    扭矩工具装置

    公开(公告)号:US08485049B2

    公开(公告)日:2013-07-16

    申请号:US12452082

    申请日:2008-06-05

    IPC分类号: B25B23/14

    CPC分类号: B25B23/14 B25B23/1425

    摘要: The torque tool device includes a torque tool and an information processing terminal. The torque tool is capable of measuring the torque value at which a bolt or the like was tightened and then transmitting the measured torque value via wireless communication unit and the information processing terminal has information processing unit receiving the measured torque value and determining whether the torque value is acceptable.

    摘要翻译: 扭矩工具装置包括扭矩工具和信息处理终端。 扭矩工具能够测量拧紧螺栓等的转矩值,然后通过无线通信单元传输测定的转矩值,信息处理终端具有接收测量的转矩值的信息处理单元,并且确定转矩值 是可以接受的